Other specifications of packaging can be provided according to customer requirements

Ultra-High Purity Disilane Si2H6 100.00% Electronic Gas

Disilane (Si2H6) is a highly specialized, next-generation electronic specialty gas. We are exceptionally proud to offer this product at an absolute 100.00% purity level, completely eliminating trace impurities for the most advanced semiconductor nodes. With an exclusive capacity of 100 tons/year, we are one of the few global suppliers capable of consistently providing this ultra-pure precursor, supporting cutting-edge atomic layer deposition (ALD) and low-temperature epitaxial processes.

Ultra-High Purity Disilane Si2H6 100.00% Electronic Gas

Technical Specifications

 

 

1. Basic Information

 

Item Specification
Product Name Disilane
Formula Si2H6
CAS NO 1590-87-0
Purity 100.00%
Capacity 100 T/Y
Package 47L Cylinder, DISS632 Valve

2. Physical and Chemical Properties

 

Property Value
Appearance and properties Colorless, extremely flammable gas
Melting point (°C) -132.5
Boiling point (°C) -14.3
Vapor density (air = 1) ~2.15
Flash point (°C) Pyrophoric (Ignites spontaneously in air)
Flammability Extremely Flammable / Pyrophoric
Solubility Insoluble in water (reacts slowly); slightly soluble in organic solvents

Packaging & Delivery

 

Due to its pyrophoric nature, Disilane requires the highest level of packaging integrity:

  • Cylinders: Premium 47L seamless cylinders, internally treated to prevent surface reactions and maintain 100% purity.
  • Valve Technology: Specifically equipped with ultra-high integrity DISS632 valves. The DISS (Diameter Index Safety System) connection guarantees exceptional leak integrity, crucial for highly reactive and pyrophoric semiconductor gases.
  • Shipping: Handled strictly by specialized hazardous materials logistics experts with rigorous safety protocols.

Why Choose Us?

 

  • Absolute 100.00% Purity: We achieve the pinnacle of gas purification. Our Disilane allows chipmakers to deposit flawless silicon layers at much lower temperatures compared to traditional silane (SiH4), preventing thermal damage to advanced microchips.
  • Advanced DISS Valve Standard: Utilizing DISS632 connections ensures that your facility can integrate our cylinders with maximum safety and zero contamination risk.
  • Rare Manufacturing Capability: A 100 T/Y capacity for 100% pure Disilane demonstrates our advanced R&D and chemical engineering prowess, making us a strategic partner for top-tier fabs.

Applications

 

Disilane is indispensable for manufacturing the newest generation of microprocessors and memory chips:

  • Low-Temperature Epitaxy: Enables faster deposition rates of silicon and silicon-germanium layers at significantly lower temperatures than monosilane.
  • Atomic Layer Deposition (ALD): Ideal for highly conformal deposition of silicon dioxide and silicon nitride in complex 3D chip architectures (like 3D NAND).
  • Photovoltaics: Used to create highly efficient amorphous silicon layers in advanced solar cell technologies.

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