Panel industry

With the development of flat panel display technology, customers need more special gases and related professional knowledge and experience. Huazhong Gas provides flat panel display customers with a wide variety of special gas materials, including doping, film deposition, etching and chamber cleaning processes Applications.

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Silane

Electronic grade silane gas is mainly used in the production of TFT (Thin Film Transistor)/LCD (Liquid Crystal Display) in the display panel industry, and the deposition of TFT or LTPS substrates for LCDs.

Ammonia

Combined with silane, it forms the silicon nitride layer of a-Si transistors.

Gasmixture

The production of LTPS and MOS transistors has increased the use of nitrous oxide. From the perspective of consumption and use in MO production, N2O has surpassed NF3 to become the most used electronic material in MO production.

nitrogen trifluoride

NF3 is the most commonly used electronic material in a-Si and LTPS display production and is mainly used for cleaning PECVD chambers.