Other specifications of packaging can be provided according to customer requirements
High-Purity Trichlorosilane TCS 99.99% Electronic Grade
High-Purity Trichlorosilane TCS 99.99% Electronic Grade
Technical Specifications
1. Basic Information
| Item | Specification |
|---|---|
| Product Name | Trichlorosilane |
| Formula | SiHCl3 |
| CAS NO | 10025-78-2 |
| Purity | 99.99% |
| Capacity | 1,000 T/Y |
| Package | 38L / 200L, 1/2" VCR & 1/4" VCR |
2. Physical and Chemical Properties
| Property | Value |
|---|---|
| Appearance and properties | Colorless, fuming liquid with a highly pungent odor |
| Melting point (°C) | -126.6 |
| Boiling point (°C) | 31.8 |
| Relative density (water = 1) | 1.34 g/cm³ |
| Flash point (°C) | -27.8 (Highly Flammable) |
| Explosion limits (% V/V) | 1.2 - 90.5 |
| Solubility | Reacts violently with water; soluble in benzene, ether, and carbon tetrachloride |
Packaging & Delivery
We provide versatile and highly secure packaging options to suit different consumption rates:
- Package Volume: Available in 38L cylinders for smaller scale operations and 200L drums for bulk industrial use.
- Fittings: All containers are equipped with precision 1/2" VCR and 1/4" VCR connections. These metal-gasket face seal fittings ensure absolute high-purity, leak-free transfer, critical for handling highly reactive TCS.
- Compliance: Fully certified for safe domestic and international chemical logistics.
Why Choose Us?
- Ultra-High Purity (99.99%): Our rigorous distillation ensures minimal carbon, boron, and phosphorus impurities, crucial for producing N-type and P-type semiconductor silicon.
- Premium VCR Technology: The use of VCR connections on our 38L and 200L packaging protects the liquid from atmospheric moisture, preventing hydrolysis and maintaining purity until the point of use.
- Stable Supply Chain: A 1,000 T/Y capacity guarantees that we can easily support the rapid scaling needs of the solar and electronics industries.
Applications
Trichlorosilane is the primary precursor in the silicon value chain:
- Polysilicon Production: The main raw material used in the Siemens process to produce ultra-pure polycrystalline silicon for solar panels and microchips.
- Silicon Epitaxy: Used for epitaxial silicon deposition on wafers in semiconductor device fabrication.
- Silane Coupling Agents: A vital chemical intermediate for manufacturing various specialized silane coupling agents.





