Other specifications of packaging can be provided according to customer requirements

High-Purity Trichlorosilane TCS 99.99% Electronic Grade

We supply premium Trichlorosilane (SiHCl3), an essential chemical compound serving as the cornerstone for the polysilicon and semiconductor industries. Boasting a rigorous 99.99% purity level, our TCS effectively eliminates critical impurities. With a robust production capacity of 1,000 tons/year, we are strategically positioned to supply both the photovoltaic (solar) and semiconductor manufacturing sectors with unwavering consistency.

High-Purity Trichlorosilane TCS 99.99% Electronic Grade

Technical Specifications

 

 

1. Basic Information

 

Item Specification
Product Name Trichlorosilane
Formula SiHCl3
CAS NO 10025-78-2
Purity 99.99%
Capacity 1,000 T/Y
Package 38L / 200L, 1/2" VCR & 1/4" VCR

2. Physical and Chemical Properties

 

Property Value
Appearance and properties Colorless, fuming liquid with a highly pungent odor
Melting point (°C) -126.6
Boiling point (°C) 31.8
Relative density (water = 1) 1.34 g/cm³
Flash point (°C) -27.8 (Highly Flammable)
Explosion limits (% V/V) 1.2 - 90.5
Solubility Reacts violently with water; soluble in benzene, ether, and carbon tetrachloride

Packaging & Delivery

 

We provide versatile and highly secure packaging options to suit different consumption rates:

  • Package Volume: Available in 38L cylinders for smaller scale operations and 200L drums for bulk industrial use.
  • Fittings: All containers are equipped with precision 1/2" VCR and 1/4" VCR connections. These metal-gasket face seal fittings ensure absolute high-purity, leak-free transfer, critical for handling highly reactive TCS.
  • Compliance: Fully certified for safe domestic and international chemical logistics.

 

Why Choose Us?

 

  • Ultra-High Purity (99.99%): Our rigorous distillation ensures minimal carbon, boron, and phosphorus impurities, crucial for producing N-type and P-type semiconductor silicon.
  • Premium VCR Technology: The use of VCR connections on our 38L and 200L packaging protects the liquid from atmospheric moisture, preventing hydrolysis and maintaining purity until the point of use.
  • Stable Supply Chain: A 1,000 T/Y capacity guarantees that we can easily support the rapid scaling needs of the solar and electronics industries.

Applications

 

Trichlorosilane is the primary precursor in the silicon value chain:

  • Polysilicon Production: The main raw material used in the Siemens process to produce ultra-pure polycrystalline silicon for solar panels and microchips.
  • Silicon Epitaxy: Used for epitaxial silicon deposition on wafers in semiconductor device fabrication.
  • Silane Coupling Agents: A vital chemical intermediate for manufacturing various specialized silane coupling agents.

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