Inganda z'inama

Hamwe niterambere ryikoranabuhanga ryiza ryerekana ikoranabuhanga, abakiriya bakeneye imyuka idasanzwe hamwe nubumenyi bwumwuga nubunararibonye. Gazi ya HUAZHON iratanga umwanya muremure yerekana abakiriya bafite ibikoresho bitandukanye byihariye bya gaze, harimo n'intege nke, kubitsa muri firime, ETCHING N'IMIKORESHEREZO YO GUKORA PACESS.

Ibicuruzwa byasabwe kunganda zawe

Silane

Inganda za elegitoronike zakoreshejwe cyane cyane mu musaruro wa TFT (Transistor yoroheje) mu nganda zerekana, no kubitsa TFT cyangwa LTPS isohoka kuri LCDs.

Ammonia

Ihujwe na Silane, ikora igice cya Silicon kitride ya A-Si.

Gaze

Umusaruro wa LTP na The POS wongereye ikoreshwa rya NITRER. Ukurikije uko kunywa no gukoresha mu musaruro wa MO, N2O yarenze NF3 kugirango ibe ibikoresho byakoreshejwe cyane muri Moles.

azote trifluoride

NF3 nicyo gikunze gukoreshwa cyane ibikoresho bya elegitoronike muri A-SI na LTPS byerekana umusaruro kandi bigakoreshwa cyane mugusukura ibyumba byinteko.