Ukutsalwa kwe-semiconductor kuxhomekeke kwiintlobo ezahlukeneyo zegesi, ezinokuthi zihlelwe zibe ziindidi ezintathu eziphambili: I-Bulk Gases, Iigesi ezikhethekileyo, kunye negesi echazayo. Ezi gesi kufuneka zicoceke kakhulu kakhulu ukuthintela ungcoliseko, olunokuwonakalisa inkqubo yokuthambisa nenobunzima.

I-Bulk Gases

I-nitrogen (n₂):

Indima: N₂ inceda iinjongo ezininzi, kubandakanya igumbi lokucoca lemigangatho kunye nokubonelela nge-InErt tulmosfere ngexesha lemveliso yee-semicondcuction.
Amanqaku ongezelelweyo: I-Nitrogen ihlala isebenza kwizothutho kunye nokugcinwa kwe-silicon ye-siffers ukunciphisa i-oxidation. Indalo yayo ye-Inter iqinisekisa ukuba ayisabelanga ngezinto ezinye izinto, zenza ilungele ukugcina iindawo zokulungisa ezicocekileyo.

Argon (i-AR):
Indima: Ukongeza ekuzibandakanyeni kwazo kwiinkqubo zePlasma, i-argon iluncedo kwiinkqubo apho iirakhi zegesi ziyinto ebaluleke kakhulu.
Amanqaku ongezelelweyo: Kuba ayisabelanga ngezinto ezininzi, i-argon ikwasetyenziselwa ukwenziwa, nto leyo enceda ekubekeni ifilimu yentsimbi okanye i-Deector apho imigangatho kufuneka igcinwe ngaphandle kongcoliseko.

(Yena):
Indima: Iipropathi ze-helium ze-helium zenza ukuba zibe yinto efanelekileyo yokupholisa kunye nokugcina inguqu yobushushu kwiinkqubo ezisebenzayo.
Amanqaku ongezelelweyo: Ihlala isetyenziswa kwiinkqubo ze-leser enamandla aphezulu kwililigrafi ngenxa yendalo kunye nokukwazi ukugcina indlela yokuphuma engenamagama ayinamdibaniso.

I-hydrogen (h₂):
Umsebenzi
Amanqaku ongezelelweyo: Ukusetyenziswa kwe-hydrogen ekufundisweni kweefilimu ezinqabileyo kuvumela ulawulo olukhulu kwi-Carrier Gerication kwizixhobo ze-semicondctor, zilungisa kakhulu iipropathi zabo zombane.

Iigesi ezikhethekileyo kunye ne-dopants

Silane (Sih₄):
Umsebenzi
Amanqaku ongezelelweyo: Ukugqitywa kwayo kufuna ukuphatha ngononophelo ngenxa yeenkxalabo zokhuseleko, ngakumbi xa uxutywe nomoya okanye ioksijini.

I-Ammonia (NH₃):
Indima: Ukongeza ekuveliseni iifilimu ze-nitride, i-ammonia ibalulekile ekuveliseni iindawo zokuphucula ukuthembeka kwezixhobo ze-semicondcuctor.
Amanqaku ongezelelweyo: angabandakanyeka kwiinkqubo ezifuna i-nitrogen yamabandakanye kwisilika, ukuphucula iipropathi ze-elektroniki.

I-phosphine (PH₃), i-Arne (Ash₃), kunye neDiborane (B₂h₆):
Indima: Ezi geses azibalulekanga kuphela xa zibalulekile kodwa zibalulekile ekufezekiseni iipropathi zombane ezinqwenelekayo kwizixhobo eziphambili ze-semiconductor.
Amanqaku ongezelelweyo: Ityhefu yabo inyanzelisa iiprothokholi zokhuseleko ezingqongqo kunye nokubeka iliso kwiinkqubo zokufakelwa kweendawo zokunciphisa iingozi.

I-etching kunye nokucoca iigesi

I-Fluoorocarbons (CF₄, SF₆):
Indima: Ezi geses ziqeshwa kwiinkqubo ezomileyo ze-etching, ezibonelela ngendlela ephambili ethelekiswa neendlela ze-etching ezimanzi.
Amanqaku ongezelelweyo: I-CF₄ kunye ne-SF₆ ibalulekile ngenxa yokwazi kwabo kwizinto ezisezantsi ze-ETK SILCON ngokufanelekileyo, ukuvumela ukusonjululwa kwephethini emnandi kunene kwii-microelectiactions.

I-chlorine (cl₂) kunye ne-hydrogen fluoride (HF):
Indima: I-Chlorine ibonelela ngobuchule bokuphuma kwe-etkives, ngakumbi kwizinyithi, ngelixa i-HF ibalulekile kwi-Silicon Dioxide.
Amanqaku ongezelelweyo: Ukudityaniswa kwezi gesi kuvumela ukususwa okusebenzayo kwamanqanaba ahlukeneyo, aqinisekisa iindawo ezicocekileyo zamanyathelo alandelayo asebenzayo.

I-Nitrogen Trifluoride (NF₃):
Indima: I-NF₃ ibaluleke kakhulu ekucoceni kokusingqongileyo kwiinkqubo ze-CVD, iphendula i-complounts ukugcina intsebenzo efanelekileyo.
Amanqaku ongezelelweyo: Ngaphandle kweenkxalabo malunga ne-Greenhouse yegesi, ukusebenza kwe-NF₃ ekucoceni kwenza ukuba kukhetho olukhethwayo kwiifektri ezininzi, nangona ukusetyenziswa kwayo kuqwalaselwa ngononophelo.

Ioksijini (O₂):
Indima: Iinkqubo ze-oxidotion ziququzelelwe yioksijini zinokwenza iindawo ezifanelekileyo zokubhabha kwii-semicondtor.
Amanqaku ongezelelweyo: Indima ka-OXYHGNGNGgen ekwandiseni i-oxicon ye-silicon ukuba ibe yi-SIOOOT ibalulekile ekwenzeniyo kunye nokukhusela amacandelo asekethe.

Igesi ezivelayo kwimveliso ye-semicondcuction

Ukongeza kwiigesi zemveli ezidweliswe apha ngasentla, ezinye iigesi zifumana ingqalelo kwinkqubo yokwenza i-semicondctor, kubandakanya:

I-carbon diokside (což): Isetyenziswe kwezinye iinkqubo zokucoca nezithothelayo, ngakumbi ezo zibandakanya izinto eziphambili.

I-Silicon Dioxide (Sio₂): Nangona ingeyiyo irhasi phantsi kweemeko ezisemgangathweni, iifom ze-vapording ze-silicon dioksi zisetyenziswa kwiinkqubo ezithile zokufaka.

Ukuqwalaselwa kokusingqongileyo

Umzi mveliso we-semicondcuctor uyagxila ekunciphiseni ifuthe lokusingqongileyo elinxulumene nokusetyenziswa kweegesi ezahlukeneyo, ngakumbi ezo zigesi ezinoluhlaza eziluhlaza. Oku kukhokelele ekuphuhlisweni kweenkqubo zolawulo lwerhasi eziphucukileyo kunye nokuhlolwa kweegesi ezinokubonelela ngezibonelelo ezifanayo kunye nendawo esezantsi yendawo yokusingqongileyo.

Ukuqukumbela

Iigesi ezisetyenziswa kwimveliso ye-semiconductor idlala indima ebalulekileyo ekuqinisekiseni ukuchaneka kunye nokusebenza kakuhle kweenkqubo zokusetyenziswa. Njengokuqhubela phambili kwetekhnoloji, ishishini le-semicondcuctor liyaqhubeka ngokuqhubekayo ukuze kuphuculwe ukucoceka kwegesi nolawulo, ngelixa ikwajongana nokhuseleko kunye neenkxalabo zokusingqongileyo ezinxulunyaniswa nokusetyenziswa kwazo.