Ihlabathi lanamhlanje lisebenza kwiitshiphusi. Ukusuka kwi-smartphone epokothweni yakho ukuya kwiinkqubo zesikhokelo kubunjineli be-aerospace, encinci Isixhobo se-semiconductor ligorha elingadumanga lexesha ledijithali. Kodwa yintoni iqhawe emva kweqhawe? Lihlabathi elingabonakaliyo, elihlala liguquguquka leegesi ezikhethekileyo. Ngokukodwa, ikhemistri yefluorine idlala indima ebalulekileyo kwi Ukuvelisa i-semicondcuction inkqubo engenakususwa ngokulula.

Ukuba ulawula ikhonkco lokubonelela okanye ukongamela umgangatho wemveliso kwi I-Semiconductor isiseko, uyazi ukuba umda wemposiso ngunothi. I-spike enye kumswakama okanye i-microscopic particle inokonakalisa imveliso yokuvelisa i-multimillion-dollar. Eli nqaku lintywila nzulu kwindima ye ezinefluorine iigesi-kutheni sizisebenzise, i-chemistry ethile eyenza ukuba isebenze, kunye nokubaluleka okubalulekileyo kozinzo lwe-supply chain kunye nokucoceka. Siza kuhlolisisa indlela ezi zinto Iigesi eziPhezulu-eziPhezulu zisetyenziswa kwi i-etch kunye namanyathelo okubeka, kwaye kutheni ukuwafumana kwiqabane elithembekileyo sesona sigqibo sibalulekileyo onokuthi usenze kulo nyaka.

Kutheni le nto ishishini le-semiconductor lixhomekeke kwiigesi ezinefluorine?

Ukuqonda i Umzi mveliso we-semicondcuctor, kufuneka ujonge itafile ye periodic. I-silicon yilaphu, kodwa i-fluorine yibrashi. I I-Semiconduct Food Inkqubo ibandakanya iileya zokwakha zemathiriyeli kwaye ngokukhetha ukuyisusa ukwenza iisekethe. Le nkqubo yokususa ibizwa ngokuba yi-etching.

I-fluorine yeyona nto inamandla ombane. Ngamagama alula, ikulambele kakhulu ii-electron. Xa sazisa igesi yefluorine okanye iikhompawundi fluorinated kwigumbi leplasma, iiathom ze-fluorine zisabela ngokukrakra nge-silicon kunye i-silicon dioxide. Le ntshukumo yekhemikhali ijika isilicon eyomeleleyo ibe ziigesi eziguquguqukayo (njengesilicon tetrafluoride) ezinokumpontshwa ngokulula. Ngaphandle koku kuphinda kusebenze imichiza, asikwazanga ukwenza imingxuma emikroskopu kunye nemingxuma yoqhagamshelwano efunekayo kule mihla Izixhobo ze-elektroniki.

Ngaphakathi ukwenziwa komthamo ophezulu, isantya kunye nokuchaneka zizinto zonke. Iigesi ezine-fluorine ukubonelela ngamaqondo aphezulu e-etch afunekayo ukugcina i-throughput, ngelixa unikezela ngokukhetha ukusika into enye ngaphandle kokonakalisa umaleko ongaphantsi kwayo. Sisenzo esibuthathaka sokulungelelanisa ikhemistri kunye nefiziksi.

Yintoni eyenza i-fluorine chemistry yahluke kakhulu kwi-high-precision etching?

Unokubuza, kutheni ungasebenzisi iklorine okanye ibromine? Senza, kwiileya ezithile. Nangona kunjalo, ikhemistri yefluorine inikeza inzuzo ekhethekileyo xa ufaka izinto ezisekelwe kwi-silicon. Ubudlelwane phakathi kwesilicon kunye nefluorine bomelele ngendlela emangalisayo. Nini ezinefluorine iplasma ibetha iwafer, ukusabela kuyingozi kwaye kuyazenzekela.

Umlingo kwenzeka kwi iplasma. Kwi-a Inkqubo ye-semicondcuctor kwigumbi, sisebenzisa amandla aphezulu kwigesi ezinzileyo njengeCarbon Tetrafluoride (CF4) okanye iSulfur Hexafluoride (SF6). Oku kwaphula irhasi, ikhuphe ireactive i-fluorine radicals. Ezi radicals zihlasela umphezulu we i-wafer.

"Ukuchaneka kwe i-etch ichaza ukusebenza kwetshiphu. Ukuba ucoceko lwakho lwegesi luyaguquguquka, izinga lakho le-etch liyaguquguquka, kwaye isivuno sakho siyawa.

Oku kukhokelela kumbono we anisotropic etching-ukusika ngqo phantsi ngaphandle kokutya ecaleni. Ngokuxuba i-fluorine nabanye Inkqubo yegesi, iinjineli zinokulawula iprofayili yomsele ngokugqibeleleyo. Esi sikhundla sibalulekile njengoko sisiya kwiindawo ezincinci (7nm, 5nm, nangaphantsi), apho i-nanometer yokutenxa ingaphumeleli.

Ziziqhuba njani iigesi kwimveliso ye-semiconductor?

Iinkqubo ze-Etch zizixhobo zokukrola ze iifabs. Kukho iindidi ezimbini eziphambili: i-etch emanzi (usebenzisa imichiza engamanzi njenge ihydrogen fluoride) kunye ne-etch eyomileyo (usebenzisa i-plasma). Yangoku I-Semiconductor iindawo zokuhlala zixhomekeke ngokukodwa kwi-plasma etching eyomileyo kuba ichaneke ngakumbi.

Kwisiqhelo ukufakwa kweplasma ulandelelwano, a igesi fluorinated yaziswa. Makhe sijonge kwiindidi ezisetyenzisiweyo:

• ICarbon Tetrafluoride (CF4): Ihashe lomsebenzi lokuhombisa ioksidi.
• I-Octafluorocyclobutane (C4F8): Isetyenziselwa ukufaka umaleko wepolymer emacaleni omsele, ukuwakhusela ngelixa umzantsi ugxilwe nzulu.
• I-Sulfur Hexafluoride (SF6): Yaziwa ngamazinga e-silicon etching ngokukhawuleza kakhulu.

Intsebenziswano phakathi kwe iplasma kwaye i isubstrate inzima. Ibandakanya ukuqhushumba komzimba ngee-ion kunye nokusabela kweekhemikhali ngama-radicals. I izixhobo zokuvelisa i-semiconductor imele ilawule ngokungqongqo ukuhamba, uxinzelelo nomxube wezi gesi. Ukuba i Irhasi ekhethekileyo iqulethe ukungcola okufana nokufuma, inokwenza i-hydrofluoric acid ngaphakathi kwemigca yokuhambisa okanye igumbi, ebangela ukubola kunye neziphene zamasuntswana.

Kutheni iNitrogen Trifluoride iyinkosi yezicelo zokucoca igumbi?

Ngelixa etching kunye nokucoca hamba kunye, ukucoca izixhobo zokuvelisa kubaluleke kakhulu njengokusetyenzwa kwewafa. Ngexesha I-Vapor Vapor Vapor (CVD), izinto ezifana ne-silicon okanye i-tungsten zifakwe kwi-wafer. Nangona kunjalo, ezi zixhobo zikwambesa iindonga zegumbi. Ukuba le ntsalela iyakhula, iyavuthuluka kwaye iwele kwi-wafers, ibangele iziphene.

Ngena I-Nitrogen Trifluoride (NF3).

Kwiminyaka eyadlulayo, ishishini lalisetyenziswa i-fluorinated greenhouse iigesi ezifana neC2F6 yokucoca igumbi. Nangona kunjalo, i-NF3 ibe ngumgangatho we iinkqubo zokucoca igumbi ngenxa yokusebenza kwayo okuphezulu. Xa idiliziwe kwindawo ekude yeplasma, i-NF3 ivelisa isixa esikhulu iiathom zefluorine. Ezi athom zikhuhla iindonga zegumbi zicocekile, zijika iintsalela eziqinileyo zibe yigesi ekhutshwayo.

I-nitrogen trifluoride ikhethwa ngenxa yokuba inezinga eliphezulu lokusetyenziswa (igesi eninzi isetyenziswa ngokwenene) kunye nokukhutshwa okuphantsi xa kuthelekiswa nomdala. iiarhente zokucoca. Kumphathi weziko, oku kuthetha ukuba ixesha eliphantsi logcino kunye nokusebenza ngokukhawuleza.

Zeziphi iikhompawundi ezinefluorinated eziyimfuneko kwimveliso yomthamo ophezulu?

I ikhonkco lokubonelela nge-semiconductor ithembele kwingobozi ethile iigesi ezinefluorine. Ngamnye une "iresiphi" ethile okanye isicelo. Nge Igesi yeJiangsu Huazhong, sibona imfuno enkulu yoku kulandelayo:

Ezi iikhompawundi fluorinated zigazi lobomi ukwenziwa komthamo ophezulu. Ngaphandle kokulandelelana kwezi zinto iigesi kwi-semiconductor imveliso, imigca iyayeka. Ilula ngolo hlobo. Kungenxa yoko le nto abaphathi bokuthenga abafana no-Eric Miller behlala bebeka iliso kwi itsheyini yonikezo ukwenzela ukuphazamiseka.

Kutheni iigesi ezicocekileyo zingumqolo wesivuno se-semiconductor?

Andinakugxininisa oku ngokwaneleyo: Ubunyulu yinto yonke.

Xa sithetha malunga Iigesi eziPhezulu-eziPhezulu, asithethi nge "industrial grade" esetyenziselwa ukuwelda. Sithetha nge-5N (99.999%) okanye i-6N (99.9999%) ubunyulu.

Kutheni? Ngenxa yokuba a Isixhobo se-semiconductor ineempawu ezilinganiswa ngeenanometers. Imolekyuli enye yokungcola kwesinyithi okanye umkhondo wokufuma (H2O) unokubangela isiphaluka esifutshane okanye uthintele umaleko ukuba ungabambeleli.

• Ukufuma: Iyaphendula nge i-fluorine ukudala i-HF, eyonakalisa inkqubo yokuhanjiswa kwegesi.
• Ioksijini: I-oxidize i-silicon ngokungalawulekiyo.
• Iintsimbi ezinzima: Ukutshabalalisa iimpawu zombane ze-transistor.

Njengomthengisi, umsebenzi wethu kukuqinisekisa ukuba ucoceko oluphezulu lweXenon okanye I-Electronic Grade Nitrous oxide ufumana udibana ngqongqo Imigangatho yeShishini. Sisebenzisa i-chromatography yerhasi ephucukileyo ukuze sibhaqe trace Ukungcola phantsi ukuya kwiindawo ngebhiliyoni nganye (ppb). Kumthengi, ukubona iSatifikethi soHlahlelo (COA) asingomaphepha nje; sisiqinisekiso sokuba I-Semiconduct Food ayizukujongana nentlekele yesivuno.

Ishishini lilawula njani ukukhutshwa kwegesi ye-greenhouse kunye ne-GWP?

Kukho indlovu egumbini: indalo. Abaninzi iigesi ezinefluorinated ube phezulu Amandla okufudumala kweHlabathi (GWP). Umzekelo, I-Sulfuur Hexusluoride (SF6) yenye yezona zinto zininzi iigesi ezinamandla zegreenhouse eyaziwa ngumntu, nge-GWP ngamawaka amaxesha aphezulu kune-CO2.

I ishishini lokuvelisa isemiconductor iphantsi koxinzelelo olukhulu lokunciphisa i-carbon footprint yayo. Oku kukhokelele kwiinguqu ezimbini ezinkulu:

1. Ukunciphisa: Iifabs bafaka "iibhokisi zokutshisa" ezinkulu okanye izikhuhla kwimigca yazo yokuphuma. Ezi nkqubo ziqhekeza ezingaphendulwanga igesi yeGreenhouse ngaphambi kokuba ikhutshelwe emoyeni.
2. Ukutshintshwa: Abaphandi bafuna enye indlela i-etch iigesi ezine-GWP ephantsi. Nangona kunjalo, ukufumana i-molecule esebenza kunye ne-C4F8 okanye i-SF6 ngaphandle kwempembelelo yokusingqongileyo kunzima ngokwekhemikhali.

I-nitrogen trifluoride yayilinyathelo eliya kwicala elifanelekileyo lokucoca kuba liqhekeka ngokulula kunePFC ezindala, okukhokelela kuncinci ngokubanzi ukukhutshwa ukuba iinkqubo zokunciphisa zisebenza ngokuchanekileyo. Ukunciphisa Uluhlu lwegesi yeGreenhouse ayiseyiyo nje intshukumo yePR; yimfuneko yolawulo kwi-EU nase-US.

Ngaba ikhonkco lokubonelela nge-semiconductor lisengozini yokunqongophala kwegesi ekhethekileyo?

Ukuba iminyaka embalwa edlulileyo isifundise nantoni na, kukuba itsheyini yonikezo ubuthathaka. Abavelisi beSemiconductor baye bajongana nokunqongophala kwayo yonke into ukusuka kwi-neon ukuya iifluoropolymers.

Unikezelo lwe igesi yefluorine kunye nezinto eziphuma kuyo zixhomekeke ekumbiweni kwe-fluorspar (calcium fluoride). I-China ngowona mthombo uphambili wehlabathi wolu lwazi lukrwada. Xa unxunguphalo lwemo yezopolitiko lunyuka okanye iindlela zolungiselelo zivaleleka, ukufumaneka kwezi zinto zibalulekileyo Inkqubo yegesi ehla, kwaye amaxabiso enyuka.

Kumthengi onjengo-Eric, uloyiko lwe "Force Majeure" luyinyani. Ukunciphisa oku, iinkampani ze-savvy zixuba ababoneleli bazo. Bakhangela amaqabane abangababo iso-itanki kwaye baseke uthungelwano lolungiselelo. Ukuthembeka kwi izinto kubaluleke kakhulu njengokucoceka kwerhasi. Ungafumana eyona inyulu C4F8 igesi ehlabathini, kodwa ukuba ithe yaxinga echwebeni, ayinamsebenzi kuyo ifab.

Zeziphi iiprothokholi zokhuseleko lokuphatha iHydrogen Fluoride kunye nezinye izinto eziyityhefu?

Ukhuseleko sisiseko soshishino lwethu. Abaninzi ezinefluorine Iigesi zinokuba yityhefu, ii-asphyxiants, okanye zisebenza kakhulu. I-Hydrogen Fluoride (HF), edla ngokusetyenziswa kwi-etch emanzi okanye eveliswa njenge-byproduct, iyingozi kakhulu. Ingena esikhumbeni kwaye ihlasele isakhiwo samathambo.

Ukuphatha ezi mathiriyeli kufuna uqeqesho olungqongqo kunye nezixhobo ezikhethekileyo.

• Iisilinda: Kufuneka iqinisekiswe nge-DOT / ISO kwaye ihlolwe rhoqo kwi-corrosion yangaphakathi.
• Iivalvu: Izivalo ze-diaphragm zisetyenziselwa ukuthintela ukuvuza.
• Iinzwa: Iifabhi zeSemiconductor zigqunyelelwe kwizivavanyi zokubona irhasi ezibangela ii-alam nakuphi na ukuvuza okuncinci.

Xa sigcwalisa isilinda nge I-Electronic Grade Nitrous oxide okanye i-etchant eyityhefu, siyiphatha njengesixhobo esilayishiweyo. Siqinisekisa ukuba i-cylinder ipholishelwe ngaphakathi ukukhusela i-particle kwaye i-valve ivaliwe kwaye itywinwe. Kubathengi bethu, ukwazi ukuba Irhasi yothutho okanye i-etchant ifika ikhuselekile, ukupakishwa okuthobelayo sisiqabu esikhulu.

Yintoni eza ngaphambili kwizinto ezisetyenziswa kwinkqubo yokwenziwa kwe-semiconductor?

I Imveliso ye-semicondcuct Imephu yendlela inobundlobongela. Njengoko iitshiphusi zifudukela kwizakhiwo ze-3D ezifana neSango-All-Around (GAA) transistors, ubunzima be etching kunye nokucoca ukwanda. Sibona imfuno yezinto ezingaqhelekanga igesi fluorinated imixube enokufaka imingxunya enzulu, emxinwa ngokuchaneka kweathom.

Ukufakelwa koMaleko weAtom (ALE) bubuchule obuvelayo obususa imathiriyeli umaleko omnye weathom ngexesha. Oku kufuna idosi echanekileyo ngendlela emangalisayo Iigesi ezisebenzayo. Ngaphaya koko, ukutyhala ukwenziwa kwemveliso "eluhlaza" kuya kuqhuba ukwamkelwa kwezinto ezintsha ikhemistri yefluorine enika ukusebenza okufanayo kunye nezantsi GWP.

Ikamva lelabo banako ukwenza izinto ezintsha kuzo zombini iigesi kunye nokucoca. Njengoko Izixhobo ze-semicondcuct ziyavela, iigesi ezisetyenziselwa ukuyibumba kufuneka zivele nazo.

Iqhosha lezitshixo

• I-Fluorine ibalulekile: Ikhemistri yeFluorine sisitshixo sesixhobo se i-etch kwaye icocekile ngena Ukuvelisa i-semicondcuction.
• Ubunyulu nguKumkani: Ubunyulu obuphezulu (6N) ayinakuxoxisana ukukhusela iziphene kunye nokuqinisekisa uzinzo lwenkqubo.
• Iintlobo ngeentlobo zeegesi: Iigesi ezahlukeneyo ezifana CF4, SF6, kunye I-nitrogen trifluoride sebenza iindima ezithile kwi ukufunyanwa.
• Impembelelo yokusingqongileyo: Ukulawula Uluhlu lwegesi yeGreenhouse kwaye ukunciphisa ngumngeni obalulekileyo kushishino.
• Ukubonelela ngoKhuseleko: A robust itsheyini yonikezo kunye namaqabane athembekileyo ayimfuneko ukuphepha ukumiswa kwemveliso.

EJiangsu Huazhong Gas, siyayiqonda le mingeni kuba siphila ngayo yonke imihla. Nokuba ufuna Ucoceko oluPhezulu lweXenon ngenkqubo yakho entsha ye-etch okanye ukuhanjiswa okuthembekileyo kweegesi zemizi-mveliso, silapha ukuxhasa itekhnoloji eyakha ikamva.