I-Giaring engabonakaliyo: Kutheni igesi yokucoceka kakhulu lilitye lezinto ze-semicondcuction
Kwihlabathi leTekhnoloji yale mihla, I-Semiconductor ngukumkani. Ezi chiza ezincinci, zintsonkothileyo zinamandla yonke into evela kwiimoto zethu kunye namaziko edatha aqhuba kwi-Intanethi. Kodwa yintoni egunyazisa ukudalwa kwezi chip? Impendulo, ngokumangalisayo, yile irhasi. Ayisiyiyo nayiphi na irhasi, kodwa Iigesi eziPhezulu-eziPhezulu Ucoceko olungafanelekanga. Njengakwi-allen, umninimzi womzi-mveliso enemigca yesixhenxe yemveliso ejolise kwizindlu zokusebenza, ndizibonile ngokwakho indlela imfuneko yokucoceka. Eli nqaku leli nqaku leenkokheli zeshishini elinjengoMark Shen, ophambili kwi irhasi itsheyini yonikezo. Uyaqonda umgangatho kunye nexabiso, kodwa ukubakhokela ngokwenyani kule ntengiso, kufuneka uqonde i ngoba. Siza kudanisa ilizwe elinobunzima be Yenza i-Semiconductor, echaza ngemibandela elula ukuba kutheni umntu ophazamisayo isuntswana kwi irhasi Umjelo unokubiza imali yezigidi zabantu. Esi sisikhokelo sakho sokuthetha ulwimi lwe Umzi mveliso we-semicondcuctor kwaye ube liqabane elingathethekiyo.
Idlala yiphi indima ekwenzeni i-semiconductorctor chip?
Kwinkalo yayo, Yenza i-Semiconductor yinkqubo yokwakha i-microscopic, imilinganiselo yombane enamanqanaba amane kwi-disc encinci isilicon, eyaziwa njenge i-wafer. Khawufane ucinge ngokuzama ukwakha i-skyscraper ubungakanani besitampu seposi, kunye neebhiliyoni zamagumbi kunye neeholo. Sisikali esithetha ngaso. Ukufezekisa oku, awukwazi ukusebenzisa izixhobo zomzimba. Endaweni yoko, iyonke Inkqubo yokwenziwa kwemveliso ixhomekeke kuthotho lwezinto ezichanekileyo zekhemikhali, kunye nemoto ephambili kwezi zinto zingaphambili irhasi.
Igesi isebenza njengezandla ezingabonakaliyo ezakha ezi sekethe. Benza imisebenzi emininzi. Ezinye, njenge initrogen, yenza imeko ecocekileyo nenozinzileyo, ukuthintela ukuphendula okungafunekiyo. Abanye, abaziwa njengenkqubo yegesi, zezona zibhloko zokwakha okanye izixhobo zokuhambisa. Umzekelo, okhethekileyo Uhlobo lwegesi inokusetyenziselwa ukufaka umaleko we microscopic yezinto ezisebenzayo, ngelixa enye irhasi isetyenziselwa ngokuchanekileyo i-etch Izinto ezikhoyo zokwenza indlela yesekethe. Lonke inyathelo elinye, ukusuka ekucoceni i i-wafer Ukwakha uhambo lokugqibela, kubandakanya okuthile irhasi okanye umxube weegesi. Ukuchaneka kwe Ukuhamba kwegesi kunye nokuqulunqwa kwekhemikhali kwekhemikhali ngokuthe ngqo kwimpumelelo ye Imveliso ye-chip inkqubo.
Kutheni ubunyulu bubaluleke kangaka kwimveliso ye-semiconductor?
Kubomi bethu bemihla ngemihla, uthuli oluncinci okanye ukumoshwa komoya ayikho into enkulu. Kodwa ngaphakathi kwi I-Semiconductor Isityalo se-FUNDA, okanye "Fab," yintlekele. Izinto ezakhiwe kwi isilicon i-wafer zihlala zilinganiswa kwii-nanometer - i-bhiliyonionts yemitha. Ukubeka oko ngokwembono, iinwele ezingenanto zabantu zimalunga nama-75,000 ee-nanometers ububanzi. Uthuli oluncinci isuntswana Awunakho nokubona lixhoba elikhulu kwihlabathi le I-Semiconductor I-FOBREALY.
Kungenxa yoko le nto ubunyulu Ngaba lolona phawu lubaluleke kakhulu lweegesi isetyenziswe kwi-semiconductor imveliso. Nayiphi na imolekyuli engafunekiyo-nokuba yimolekyuli yamanzi elahlekileyo, intsimbi encinci isuntswana, okanye eyahlukileyo irhasi Imolekyuli-ithathwa njenge ukungcola. Le ungcoliseko inokuphazamisa ngokupheleleyo Impendulo yemichiza ukwenzeka kwi i-waferumphezulu. Enye ukungcola inokuvimba isekethe ekwenzeni, yenza isekethe emfutshane, okanye ukutshintsha i Iipropathi zombane ze-semicondcuctor isixhobo. Kuba enye i-wafer Inokuqulatha amakhulu okanye amawaka eetshipsi zomntu, impazamo encinci inokukhokelela kwilahleko enkulu yezemali. Yonke inkqubo ifuna i Amanqanaba aphezulu acocekileyo ukusebenza kwaphela.
Ngaba ukungcola kwiigesi
Xa i ukungcola ikhona kwinkqubo irhasi, inokubangela "ukubulala isiphene. "Esi ayisosiphoso nje esincinci; yi isiphene inika yonke i-microchip iphela eli candelo le i-wafer ayinamsebenzi. Makhe sijonge ukuba kwenzeka njani oku. Ngexesha le ifayile Isigaba, apho iifilimu ezinqabileyo zenziwa ngokwakhiwa ngomaleko, engafunekiyo isuntswana unokuhlala emhlabeni. Xa umaleko olandelayo ufakwe ngaphezulu, kudala i-microscopic gump okanye i-vaid. Esi siphoso sinokwaphula uqhagamshelo lombane okanye lenze umntu ongafakwanga, etshabalalisa ngokufanelekileyo i-willistor eyakhiwe.
Iziphumo zokwenzakala kumgca ongezantsi we-fab. I-metric eziphambili kwimpumelelo kwi I-Semiconductor I-FAB yi "Veeld" -ipesenti yee-chips zomsebenzi eziveliswe kwinye i-wafer. Nokuba ihla kancinci Yima kancinci, ukusuka kwi-95% ukuya kwi-90%, inokumela izigidi zeedola kwingeniso elahlekileyo. Ukungcola kwegesi Ngaba unobangela ngqo wokuncitshiswa Yima kancinci. Kungenxa yoko le nto Abavelisi be-semicondontctors zixakekile Ucoceko lwegesi. Kufuneka baqiniseke ukuba irhasi Ukungena kwizixhobo zazo zeedola ezingamawaka ezigidi zeedola ezingamawaka ezigidi zeedola zikhululekile kakhulu kuzo naziphi na ungcoliseko Ingancipha i Inkqubo ye-Semiconductor. Ngumdlalo wokuchaneka kwe-microscopic apho kukho igumbi le-zero ngempazamo.

Zeziphi iigesi eziphambili ezisetyenziswa kwi-semicondcution?
Uluhlu lweegesi ezisetyenziswa kwi Umzi mveliso we-semicondcuctor Inkulu, kodwa ngokubanzi bawela kumacandelo amabini: igesi ezininzi kunye neegesi ezikhethekileyo.
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I-Bulk Gases: Ezi zisetyenziswa kubungakanani obukhulu kwaye zenze isiseko sendalo.
- I-nitrogen (n₂): Le yindawo yomsebenzi. I-Ultra-High ubunyulu Initrogen isetyenziselwa ukwenza i-InErt "Imozulu" ngaphakathi kwezixhobo zexabiso. Oku kucoca ioksijini, ukufuma, kunye namanye amasuntswana, ukuthintela i-oxidation engafunekiyo okanye ungcoliseko ye i-wafer.
- I-hydrogen (h₂): Ihlala isetyenziswa ngokudibeneyo nezinye iigesi, hydrogen ibalulekile ngokuqinisekileyo ifayile Iinkqubo kunye nokwenza iimeko ezithile zekhemikhali ezifunekayo ukwakha izakhiwo zenkonzo.
- Argon (i-AR): Njenge-Intert irhasi, I-argon isetyenziswa kwinkqubo ebizwa ngokuba yi-Sputterng, apho isetyenziselwa ukubhukuqa imiba ekujoliswe kuyo, i-atom enkqonkqozayo ikhululekile emva koko ifakelwe kwi i-wafer. Ikwasetyenziselwa ukwenza i iplasma Ngokona i-etch iinkqubo.
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Iigesi ezikhethekileyo: Ezi zintsonkothileyo, zihlala zinobungozi, kwaye iigesi ze-gasers ezisetyenziselwa amanyathelo athile kwinkqubo. Zizinto "ezisebenzayo".
- Iitswathu: I-Gases njenge chlorine (cl₂) kunye ne-hydrogen bromide (Hbr) isetyenziselwa ukuthabatha ngokuchanekileyo okanye i-etch iipateni kwimigca ye i-wafer.
- I-Dopants: Iigesi ezinje nge-Arsine (Ash₃) kunye ne-phosphine (PH₃) zisetyenziselwa ukwazisa ngokukodwa ukungcola kwi isilicon Ukutshintsha iipropathi zayo zombane, yindlela yokuzisela.
- Iigesi: ISilane (Sih₄) ngumzekelo ongumzekelo, osetyenziswa njengomthombo we isilicon ukufaka iifilimu ezincinci.
Igosa lokuthengwa kwempahla efana noMark, kubalulekile ukwazi ukuba ngelixa zonke ezi gesi zahlukile, zabelana ngenye imfuneko: ubunyulu.
Ngaba ungayichaza i-facesution kunye ne-etching ngamagama alula?
Imveliso ye-semicondcuct Kubandakanya amakhulu amanqanaba, kodwa uninzi lwazo lungahluka kwiinkqubo ezimbini ezisisiseko: ifayile kwaye i-etch. Ukuqonda ezi gama elilula kubalulekile ekuqondeni indima ye irhasi.
1. I-premiplace: Ukwakha iiLayini
Cinga nge ifayile njengokupeyinta ukutshiza ngeemolekyuli. Injongo kukongeza i-Ultra-tim ye-ultra encinci, ngokugqibeleleyo i-suber yempahla kwi I-Silicon wafer.
- Inkqubo: Inkqubo irhasi (njenge-silane) ixutywe ne Irhasi yothutho (njenge initrogen okanye hydrogen). Le irhasi umxube emva koko waziswa kwigumbi elinegumbi eline i-wafer. A Impendulo yemichiza Ibangelwa, ihlala ishushu okanye a iplasma, ebangela iimolekyuli ukuba "zichanekile" kwi irhasi kwaye wenze isiseko ifilimu emnyama kwi i-waferumphezulu.
- Isizathu Subizeni Ntoni Name: Ukuba kukho ungcoliseko isuntswana kwi irhasi I-hism, ifana ne-peck yothuli olungena kwipende yakho yokutshiza. Iya kungeniswa kwi-famite entsha, yenza ulwakhiwo isiphene. Ukuba kukho ukungafuneki irhasi Imolekyuli, inokusabela ngokungachanekanga, ukutshintsha iindlela zokwenza iikhemikhali kunye neepropathi zombane zomaleko.
I-2. I-etching: ithwala imijikelezo
Emva kokwakha ungqimba, kufuneka uluthande iipatheni zesiphaluka kuyo. I-etch yinkqubo yokukhetha izinto ezisusa izinto.
- Inkqubo: I i-wafer idityaniswe nezinto ezibuthathaka zokukhanya ezibizwa ngokuba yifoto. Ipateni iqikelelwe kuLo (njenge-stenci). Iindawo ezicacileyo ziyaqina. I i-wafer emva koko ibekwe kwigumbi elizaliswe nge-etch irhasi (njenge-fluorine esekwe). Le irhasi ikhuliswe kwi iplasma meko, yenze ukuba isebenze kakhulu. I iplasma I-Bhabords i-wafer, ngokutya ngamachiza kuphela Kwiindawo ezingakhuselwa yi-steril.
- Isizathu Subizeni Ntoni Name: Ukungcola kwiigesi isetyenziselwa i-etching inokutshintsha i-Reance. Oku kunokubangela ukuba imijikeleziselo iqatywe kakhulu, inqabile, okanye ayikho kwaphela. Isinyithi isuntswana ukungcola inokuthi ithintele i i-etch Inkqubo kwibala elincinci elincinci, lishiya "isithuba" sezinto ezingafunekiyo ezinqumlayo isiphaluka.

Ilingane njani i-Ultra-ephezulu kwaye igcinwe?
Kwi Umzi mveliso we-semicondcuctor yehlabathi, imilinganiselo ephantsi yokucoceka injengoku "pesenti" ayinamsebenzi. Siyajongana ungcoliseko kwisikali ekunzima ukuqondakali. Ukucoceka kulinganiswa iinxalenye zetriliyoni (PPT). Oku kuthetha ukuba yonke trillion irhasi Iimolekyuli, zinokubakho kuphela iimolekyuli enye okanye ezimbini zokuthetha.
Ukufezekisa kunye nokuqinisekisa eli nqanaba le Ucoceko lwegesi, inkqubo enobunkunkqele Ukucocwa kwegesi kunye nohlalutyo luyafuneka.
| Inqanaba lokucoceka | Intsingiselo | I-analogy |
|---|---|---|
| Icandelo ngezigidi ngezigidi (i-PPM) | Ukungcola kwi-1 000 000 yeemolekyuli ezili-1 000 000 | Iapile enye embi kwiibhanti ezingama-2 000. |
| Icandelo kwiBhili kwiBhiliyoni (PPB) | Ukungcola kwi-1,000 000 000 000,000,000 | Umzuzwana omnye phantse iminyaka engama-32. |
| Amalungu kwitriliyoni yetriliyoni (i-PPT) | Ukungcola kwi-1 000 000 000 000 000 000,000,000,000 | Inye yesibini iminyaka engama-32,000. |
Kumzi-mveliso wethu, asiveli nje irhasi; siphila kwaye siphefumle ulawulo lwemeko. I Ubonelelo ngegesi I-chain ye I-Semiconductor I-Fab ibandakanya ii-nqunuis ezikhethekileyo ezifakwe kanye kwinqanaba lokusetyenziswa. Ngapha koko, phambili Uhlalutyo lwegesi izixhobo zisetyenziselwa Ukubeka iliso okwexeshana. Iindlela ezifana I-Iyossic Cressis I-Spectrometry (Apims) inokwenza Ukucenwa kokungena ezantsi kwinqanaba le-trillion ye-pellion, uqinisekisa i Irhasi ye-Uhp (I-Ultra-Unyulo oluPhezulu) Ukungena kwisixhobo senkqubo sigqibelele.
Yintoni eyenza umthengisi wegesi ecocekileyo ephezulu?
Intloko yenuMthendeleko njengoMarko, oye wafumana iintlungu zokulibaziseka kwenqanawa kunye nezatifikethi zobuqhetseba, ukuthembeka yiyo yonke into. Kwihlabathi le icocekile ephezulu ye-semiconductor Iigesi, ukuthembeka kuphumla kwiintsika ezintathu: Ukungqinelana kwemveliso, ukuqinisekiswa komgangatho, kunye nobuchule bokuphumelela.
- Ukungqinelana kwemveliso: Umthengisi onokuthenjwa kufuneka abe nezakhono zokuvelisa eziqinileyo nezingafunekiyo. Imigca yethu yesixhenxe lemveliso, umzekelo, iqinisekise ukuba sinako dibana nemfuno ephezulu Kwaye ukuba ingxaki emgceni ayikhethisi konke iziphumo zethu. Oku kuncitshiswa umngcipheko wokuphazamiseka kwezakhono ezinokuvala i-perpe-billion yedola I-Semiconductor I-Fab.
- ISIQINISEKISO SOKUGQIBELA EZIQHELEKILEYO: Akwanelanga ukubanga ukuba unayo Igesi ePly. Kuya kufuneka ukwazi ukuyingqina. Oku kuthetha ukuba utyala imali kwizixhobo zohlalutyo lohlaluko Ukucenwa kokungena. Ikwathetha ukubanika izatifikethi ezibonakalayo, zokulandelela kohlalutyo (i-COA) kunye nokuhanjiswa nganye. Ukudibanisa ubuqhetseba besiqinisekiso simalunga nokwakha ubudlelwane bexesha elide esekwe kwitrasti kunye nedatha eqinisekileyo.
- Ingcali yendlela: Ukufumana i irhasi yotywala okanye ulwelo lwe-crygenic ukusuka eChina ukuya e-USA ayilula. Ifuna izikhongozeli ezikhethekileyo, ulwazi lweMigaqo yokuHambisa yamanye amazwe, kunye nokuCwangciswa kweMeticaus ukunqanda ukulibaziseka. Umthengisi othembekileyo uyayiqonda le nto ayisiyo ibhokisi; Ilawula icandelo elibalulekileyo lehlabathi I-Semiconductor itsheyini yonikezo.

Nguwuphi umahluko phakathi kwegesi enkulu kunye negesi ekhethekileyo?
Ukuqonda umahluko phakathi irhasi enkulu kwaye Irhasi ekhethekileyo Isitshixo somntu obandakanyekayo ekufumaneni i Umzi mveliso we-semicondcuctor. Ngelixa zombini zifuna kakhulu ubunyulu, isikali sabo, ukuphatha, kunye nesicelo sahluke kakhulu.
I-Bulk Gases, njenge I-bulk sulty ephezulu yegesi, ibhekisele ku Iigesi ezinje nge-nitrogen, ioksijini, iArgon, kwaye hydrogen. Sisiseko sendawo yokusingqongileyo ye-fab. Ibinzana elithi "isininzi" libhekisa kwizixa ezikhulu ezisetyenzisiweyo. Ezi gesi zihlala ziveliswa kwindawo okanye kufutshane kwaye zinikezelwe ngokusebenzisa imibhobho enikezelweyo ngqo kwinkqubo yokusasaza yangaphakathi ye-fabh. Imiceli mngeni ephambili apha igcinwe ubunyulu Ngaphezulu kweenethiwekhi zothungelwano olunzulu kunye nokuqinisekisa ukuba ubonelelo olungapheliyo, oluninzi.
Irhasi ekhethekileyo (okanye igesi ye-elektroniki) Ibhekisa kudidi olubanzi lwezinto ezixhaphakileyo, ezisebenzayo, okanye iigesi ezinobungozi ezisetyenziswa kwinani elincinci lenkqubo yenkqubo ye-etching kunye ifayile. Imizekelo iquka iSilane, i-amonia, i-boron ye-boron ye-boron, kunye ne-nitrogen trifluoride. Ezi zihanjiswa kwizikhephe eziphezulu zokucinezelwa. Imiceli mngeni kunye Irhasi ekhethekileyo Ngaba ukhuseleko olugqithisileyo ekuphatheni, ukuqinisekisa ukungqinelana okugqibeleleyo kwimixube yegesi, kunye nokuthintela nayiphi na impendulo yekhemikhali ngaphakathi kwesilinda esinokulalanisa Umgangatho weGesi.
Ithini imfuneko yerhasi ephezulu kakhulu ye-semiconduccocy?
I Umzi mveliso we-semicondcuctor Ungaze ume ngxi. Umthetho ka-Moore, ukujonga ukuba inani labahambi kwi-chip liphindwe kabini malunga neminyaka emibini, liyaqhubeka nokutyhala imida yefiziksi. Njengokuhamba nokuncipha, baya kuba nempikiswano kakhulu ungcoliseko. A Ubungakanani bentsundu Oko kwamkelekileyo kwiminyaka emihlanu eyadlulayo ngu "kubulali isiphene"Namhlanje.
Idrip yokuqhuba engapheliyo yee-chips ezinamancinane kwaye ezingakumbi zithetha imfuno yamanqanaba aphezulu Ucoceko lwegesi iyakhula. Sihamba ukusuka kwilizwe apho iinxalenye ze-Previel yayiyeyona golide ibikwindawo enye apho iipesenti ze-pellion zezona mfuno ziyimfuneko I-Semiconductor iindawo. Ukongeza, izinto ezintsha kunye noyilo lwe-chip, njenge-3D nand nund kunye nesango-yonke le-REAT (GAA), funa iphothifoliyo entsha Irhasi elandelayo umxube kunye ne-priors. Njenge Abavelisi begesi, sikwimeko eqhubekayo yobuchule, ukuphuhlisa ubuchwepheshe obutsha bokucoca kunye neendlela zokuhlalutya ukuze ugcine isantya kunye Umzi mveliso we-semicondcuctor yehlabathi.
Njengomthengi, zeziphi izinto eziphantsi ekufuneka ndizijonge?
Ukuhambahamba kwihlabathi labaxhasi kunokuba nzima, ngakumbi xa ujongene neemveliso zobugcisa. Ukuqinisekiswa ukubonelela ngokuqinisekiswa okubalulekileyo, okwesithathu kombutho wobuchule bomxhasi kunye nokuzibophelela kumgangatho. Xa ukhunjulwa Iigesi eziPhezulu-eziPhezulu ukwenzela i Umzi mveliso we-semicondcuctorNazi izinto ezimbalwa ekufuneka uzijonge:
- ISO 9001: Esi sisiqinisekiso esisisiseko seenkqubo zolawulo lomgangatho. Ibonisa ukuba umthengisi unenkqubo echazwe kakuhle kwaye ephindaphindiweyo yemveliso, uhlolo, kunye nokuhanjiswa.
- I-ISO / IEC 17025: Le yinto ebaluleke kakhulu. Ngumgangatho wobuchule bokuvavanywa kunye neelebhu zokulinganisa. Umthengisi onesiqinisekiso uveze ukuba ilebhu yabo yasekhaya - lowo uvelisa isitifiketi sakho sohlalutyo-ichanekile kwaye ithembekile.
- Uhlalutyo olugqibeleleyo: Soloko ufuna isatifikethi sohlalutyo (coa) kwi-cylinder nganye okanye i-batch. Esi satifikethi kufuneka sichaze inqanaba elichanekileyo ukungcola kwigesi, ilinganiswe ngeendlela zohlalutyo ezifana I-chromatography yegesi okanye i-spectrometry.
Njengenkokeli ethatha isigqibo njengamanqaku, isixhobo sakho esifanelekileyo kukubuza imibuzo efuna. Sukubuza nje "yile irhasi Ngaba unyulu? "Buza" Ubonisa njani ukuba nyulu? Ndibonise isatifikethi sakho selebhu. Cacisa inkqubo yakho yokuqinisekisa ukungqinelana okuninzi ukuya kuthi ga ngoku.
Iqhosha lezitshixo
- Irhasi sisixhobo: Ngaphakathi Ukuvelisa i-semicondcuction, iigesi asizizo zixhobo; Zizixhobo ezichanileyo ezisetyenziselwa ukwakha kunye ne-carve microscopic isekethe kwi I-Silicon wafer.
- Ucoceko yinto yonke: Ubungakanani be Imveliso ye-chip incinci kangako ukuba enye engafunekiyo isuntswana okanye ukungcola Imolekyuli inokutshabalalisa i-chip, ukwenza I-Ultra-subight ephezulu imfuneko engaphendulekanga.
- Isivuno yinjongo: Impembelelo eziphambili ye Ungcoliseko lwegesi kukuncitshiswa kwemveliso Yima kancinci, ehambelana ngqo nezigidi zeedola kwiRhafu elahlekileyo ye I-semicondorctor fabs.
- Iinkqubo ezimbini eziphambili: Uninzi lwamanyathelo ekwenzeni i-chip ibandakanya nokuba ifayile (ii-shiers zesakhiwo) okanye i-etch .
- Ukuthenjwa sisitshixo: Umthengisi othembekileyo kwi Igesi ye-semiconductor Imakethi kufuneka ibonise ukungangqinelani, isiqinisekiso esiqinisekileyo semigangatho eqinisekisiweyo yeLebhu eqinisekisiweyo, kunye nolawulo lweengcali zempahla.
- Ikamva lingacocekanga: Njengoko i-semicondors iqhubela phambili, imfuno yamanqanaba aphezulu Ucoceko lwegesi (ezantsi ukuya kwi-perillion nganye) iya kuqhubeka nokukhula.
