I-Ammonia (NH₃), njengeenkqubo zekhemikhali ezibalulekileyo zekhemikhali, zinoluhlu oluxhaphakileyo kwimimandla eyahlukeneyo kumabala emizi-mveliso, kunye nendima yayo ebaluleke kakhulu kwimveliso ye-semicondcuction. I-Amonia idlala indima ebalulekileyo kumanqanaba aliqela kwimveliso ye-semicondcuctor, kubandakanya nokubekwa kwe-nitrides, i-ion yokufakelwa kunye nokudlala, ukucoca, kunye neenkqubo zokuphucula. Eli nqaku liza kuqhuba kwisicelo se-Ammonia kwishishini le-semicondcuctor, ihlalutya indima yayo ekwandiseni ukusebenza, ukunciphisa iindleko, kunye nokuqhuba izinto ezinobungqiwayo kunye nezexesha elizayo.

1. Iipropathi ezisisiseko kunye nokuziphatha kwamachiza ze-ammonia

I-Ammonia yindawo eyenziwe nge-nitrogen kunye ne-hydrogen, eyaziwa ngokuba yi-alkalinity ye-alkality yayo kwaye ihlala ifumaneka kwimveliso ye-nitrogen ye-netrogen. I-Ammonia ikhona njengegesi kubushushu begumbi kodwa inokuthi icoceke kumaqondo obushushu asezantsi, enze umthombo wegesi osebenzayo. In the semiconductor industry, the chemical properties of ammonia make it a core component of several critical processes, especially in chemical vapor deposition (CVD), ion implantation, and cleaning/etching operations.

Iimolekyuli ze-Ammonia zinokuphendula ngeentsimbi ezahlukeneyo, isilicon, kunye nezinye izinto zokwenza i-nitrides okanye ukuzibamba. Ezi zinto zingasasebenzi kuphela ekwenzeni izixhobo ezinqwenelekayo zefilimu kodwa zikwaphucula iipropathi zombane, i-thermal, kunye nezobugcisa zezinto ezibonakalayo, ngaloo ndlela zihambela phambili kwi-SemicoNDuct.

2. Ukusetyenziswa kwe-ammonia kwimveliso ye-semicondcuction

I-Ammonia idlala indima ebalulekileyo kwimveliso ye-semicondcuction, ngakumbi kwezi ndawo zilandelayo:

I-2.1 i-PIITER YOKUGQIBELA Iifilimu ezincinci

Kwimveliso ye-semiconductor yale midlalo, i-fielmus encinci, efana neSilicon Nitride (i-Sitrium Nitride (i-Aln), i-tinn), isetyenziswa kakhulu njengezintshukumo, okanye izinto ezisebenza zombane, okanye izinto ezisebenza zombane, okanye izinto ezisebenzayo. Ngexesha lokumiselwa kwezi filimu ze-nitride, i-Ammonia isebenza njengeyona mithombo ibalulekileyo ye-nitrogen.

I-Vapor Vapor Vapor Placial (CVD) yenye yeendlela eziqhelekileyo zokunikezelwa kwefilimu. I-Ammonia I-gestis ngeegesi ezinje ngeSilane (iSih₄) kumaqondo obushushu aphezulu ukubola kwaye enze iFomuni yesilika nitrive. Indlela yokusabela yile ilandelayo:

I-3sih4 + 4nh3 → uSi3h4 + 12h2

Le nkqubo iphumela ekuqulunqweni kwe-iyunifoni ye-silicon yesilika kwi-selicon ye-safer. I-Amonia ibonelela ngomthombo ozinzileyo we-nitrogen kwaye yenza ulawulo oluchanekileyo lwempendulo kunye neminye imithombo yegesi phantsi kweemeko ezithile, ngaloo ndlela ilawula umgangatho, ubukhulu, kunye nokufana kwefilimu.

Iifilimu ze-nitride zinozinzo olugqibeleleyo, ukufakelwa kombane, kunye nokuchasana kwe-oxidation, kubenza babaluleke kakhulu kwimveliso ye-semicondcuction. Basetyenziswa ngokubanzi kwimijikelezo emiselweyo (i-ICs) njengamacandelo e-inshurensi, ii-elektrode zamanye amazwe, kunye neefestile zamehlo kwizixhobo ze-Optoelecki.

2.2 i-ion yokubeka kunye nokudlala

I-Ammonia idlala indima ebalulekileyo kwinkqubo yokudlela kwe-semicondcuctor. Ukudlala yindlela ebalulekileyo esetyenziselwa ukulawula ukuqhubela kombane kwezixhobo kwi-subrionducture izixhobo ze-semicondcuctor. I-Amonia, njengomthombo we-nitrogen osebenzayo, ihlala isetyenziswa ngokudibeneyo nezinye iigesi (njenge-phosphine Ph₃ kunye neDiborane B₂hur) kwi-Silicon Arvenanthide.

Umzekelo, i-nitrogen isebenzisa iipropathi zombane ze-silicon ukuba zenze i-N-Chwether okanye i-P-Cemicontuntundla. Kwiinkqubo zokusebenzisa i-nitrogen ezifanelekileyo, i-ammonia ibonelela ngomthombo we-nitrogen ococekileyo, ekuqinisekiseni ulawulo oluchanekileyo malunga nokugxila. Oku kubaluleke kakhulu kwi-mineatherition kunye nemveliso yezixhobo zokusebenza eziphezulu kwindawo enkulu yokudibanisa (i-vlsi).

2.3 Ukucoca kunye ne-etching

Ukucocwa kunye neenkqubo ze-elchting ziphambili ekuqinisekiseni umgangatho wezixhobo kwimveliso ye-semicondcuction. I-Ammonia isetyenziswa ngokubanzi kwezi nkqubo, ngakumbi kwi-plasma etching kunye nokucoca iikhemikhali.

Kwi-plasma etking, i-amonia inokudityaniswa nezinye iigesi (ezinje nge-chlorine, cl₂) ukunceda ukususa i-organunts engcolisekileyo, ii-oxidees, kunye nokungcola kwentsimbi kumphezulu wesandla. Umzekelo, i-ammonia inza ngeoksijini yokuvelisa i-OXYGENT ye-OXYGENT esebenzayo (njenge-O₃ kunye ne-O₃), isusa ngokufanelekileyo i-oxide ye-ox kwaye iqinisekise uzinzo kwiinkqubo ezilandelayo.

Ukongeza, iAmmonia inokusebenza njengeSolvent kwiinkqubo zokucoca, ukunceda ukususa i-trace yentsalela eyenziwe ngenxa yokuphendula kweekhemikhali okanye inkqubo, ngenxa yoko, ukugcina ubunyulu obuphezulu be-wafer.

3. Izibonelelo zeAmmonia kwiShishini le-Semiconductor

I-Amonia ibonelela ngeenzuzo ezininzi kwimveliso ye-semiconductor, ngakumbi kwezi ndawo zilandelayo:

3.1 Umthombo ofanelekileyo we-nitrogen

I-Ammonia ngumthombo ofanelekileyo no-nitrogen obonelela ngokuzinzileyo kunye nokunikezelwa kweeathom ze-nitrogen ze-fihlo ngefihlo lokusebenza kunye neenkqubo zokusebenzisa. Oku kubalulekile ekusetyenzisweni kwezixhobo ezincinci ze-nano kunye ne-nano kwimveliso ye-semicondcucto. Kwiimeko ezininzi, i-Ammonia isebenza ngakumbi kwaye ivulekile kunezinye iigesi ze-nitrogen

3.2 Ulawulo lwenkqubo oluhle

Ukuphinda kwenziwe i-ammonia kuyivumela ukuba ilawule ngokuthe ngqo kumanqanaba okuphendula kunye nobunzima beefilimu kwiinkqubo ezahlukeneyo. Ngokuhlengahlengiswa kwenqanaba lokuhamba kwe-ammonia, ubushushu, kunye nokuphendula, kunokwenzeka ukuba ulawule ngokuchanekileyo ubungqindilili, ukulinganiswa, kunye nezakhiwo zeefilimu, ngaloo ndlela zixhasa ukusebenza kwezixhobo.

3.3 Ukusebenza kweendleko kunye nobuhlobo bokusingqongileyo

Xa kuthelekiswa nezinye iigesi ze-nitrogen, iAmmonia iphantsi ngeendleko kwaye inomsebenzi wokusetyenziswa kwe-nitrogen ephezulu, iyenza iluncedo kakhulu kwimveliso enkulu ye-semicondyctor. Ngaphaya koko, i-ammonia ukuphinda isebenze kwaye isebenzise itekhnoloji ye-Tectugoes iya kusiba ngcono, igalelo kubuntu babo obusingqongileyo.

4. UKhuseleko kunye nemiceli mngeni yendalo

Ngaphandle kwendima yayo ebaluleke kakhulu kwimveliso ye-semiconductor, iAmonIa inikezela ngeengozi ezinokubakho. Kubushushu begumbi, i-ammonia yirhasi, kwaye kwifomu yalo yolwelo, yingozi kwaye inetyhefu, efuna izinto ezingqongqo ngexesha lokusetyenziswa.

1. Ukugcina kunye nokuhamba: I-Ammonia kufuneka igcinwe kumaqondo obushushu asezantsi kunye noxinzelelo oluphezulu, esebenzisa izikhongozelo ezikhethekileyo kunye nemibhobho yokuthintela ukuvuza.
2. Ukhuseleko lokusebenza: Abaqhubi kwimveliso ye-semiconductor imveliso kufuneka banxibe izixhobo zokhuselo, ezinjengama-goggles, iigloves, iimaski zegesi, ukuthintela ukuvezwa komzimba womntu.
3. Unyango lwegesiUkusetyenziswa kwe-Ammonia kunokuvelisa iigesi eziyingozi, kunamandla okunyanga inkunkuma kufuneka kubekhona ukuqinisekisa ukuba ukuphuma kwendalo ifezekisa imigangatho yokusingqongileyo.

Iinkqubo ze-semicondcuction iinkqubo ziyaqhubeka nokuqhubela phambili kwaye ibango lokuphumelela kwesixhobo esiphezulu sokunyuka, indima ye-Ammonia kwishishini iya kuqhubeka ikhula. Oku kuyinyani ngakumbi kwiisekethe ezihlanganisiweyo ze-NAAno ezihlanganisiweyo, izixhobo zokwenza i-computer, kunye netekhnoloji yokufakelwa kwedatha. Ukongeza, njengoko imigaqo yokusingqongileyo iba nesidima, ukuphuculwa kwemveliso yeGreyiti kunye neTekhnoloji yokurisayikilisha ye-Ammonia kuya kuba yinto ebalulekileyo kwikamva lemveliso.

Izicelo zika-Ammonia kumzi-mveliso we-semiconductor zibonelela ngesiseko esomeleleyo sokuqulunqwa kwe-elektroniki yanamhlanje. Indima yayo ekuphuculeni ukusebenza kwemveliso, ukunciphisa iindleko zokwenza imveliso, kunye nokuqhuba ubugcisa betekhnoloji kubalulekile. Njengokuqhubela phambili kwetekhnoloji, isicelo sika-Ammonia siza kuqhubeka nokwandisa, ukunceda iZiko le-semicondcuctor iguqukele ekusebenzeni ngokufezekileyo kunye nokuzinza kwendalo esingqongileyo.

I-Ammonia, Njengekhemikhali ebalulekileyo yokuqalisa imichiza, idlala indima ebaluleke kakhulu kwimveliso ye-semicondcuction. Kubaluleke kakhulu ukulungiselela ukugcinwa kweefilimu ze-nitride, ukucoca, kunye neenkqubo zokucoca / zokuphuma. Ngenkqubela phambili eqhubekayo yeTekhnoloji ye-semicondcuctor, izicelo zika-Ammonia zisetwe ukukhula, zenza igalelo elibalulekileyo kwinkqubela phambili kwezobuchwephesha kunye nokunceda umzi mveliso we-semicondcuctor uguquka ngakumbi kwaye unobuhlobo obufanelekileyo.