I-smartphone kwipokotho yakho, ikhompyuter kwidesika yakho, iinkqubo eziphambili kwimoto yakho - akukho nanye apho kuya kuba nakho ngaphandle komsebenzi othuleyo wegesi. Njengomnini womzi-mveliso wegesi wegesi, i-Allen, abone ngandlela zonke ezi zinto zibalulekileyo zenza itekhnoloji yeTekhnoloji yale mihla. Iinkokheli zeshishini ezinjengoMark Shen, ohamba i-chain yonikezo lwelizwe lonke, ukuqonda ezi gesi sisitshixo sokuvula amathuba amatsha. Eli nqaku sisikhokelo sakho esibanzi komnye wabadlali ababaluleke kakhulu kule ntsimi: I-Nitrogen Trifluoride (NF₃). Siyakudinisa le nto irhasi, hlola indima yayo ebalulekileyo kwi Inkqubo yokuFumanisa iSemiconductor, kwaye uchaze ukuba kutheni umgangatho wawo kunye nonikezo zibalulekile kuyo yonke Ukuvelisa i-elektroniki ishishini.

Yintoni kanye kanye i-nitrogen trifluoride (NF₃) igesi?

Ekuqaleni, I-nitrogen trifluoride, idla ngokubhekiswa kwifomyuli yayo yekhemicali Nf₃, inokubonakala ngathi ifana nelinye intlangano irhasi. Yinto engenamibala, engafakwanga, kunye nevumba elincinci ikhonkco. Nangona kunjalo, kwihlabathi le Uvelwano oluphambili, le irhasi sisixhobo esisebenzayo esiphezulu. Yivelise ivelisiwe ikhonkco yenziwe nge-nitrogen ye-nitrogen kwaye ezintathu i-fluorine iiathom. Eyona nto iphambili kumandla ayo ixhomekeke kolu sakhiwo. Kubushushu begumbi, Nf₃ izinzile kwaye I-InErt, iyenza ikhuselekile ukuthutha kwaye ithole xa ithelekiswa neegesi ezininzi eziguquguqukayo.

Umlingo uyenzeka xa kusetyenziswa amandla. Phantsi kweemeko eziphezulu zamandla ngaphakathi I-Semiconductor Isixhobo seMveliso, njenge iplasma igumbi, i Nf₃ iimolekyuli ukubola. Bahlukane kwaye bakhulule kakhulu nikezela i-fluorine I-radicals. Cinga ngayo njenge-uqhus elawulwayo kwisikali se microscopic. Ezi zasimahla i-fluorine Iiatom zisebenza ngendlela engasasebenziyo xa zisusa izixhobo ezingafunekiyo, ngakumbi isilicon kunye nemithombo yayo. Obu buchule bokuzinza xa uyifuna kwaye kakhulu nikezela Xa ufuna ukwenza I-nitrogen trifluoride igesi Ixabiso lexabiso kwiLizwe eliPhantsi Imveliso ye-chip.

Olu hlobo lobhalo olukhethekileyo yiyo loo nto Nf₃ Iba lilitye lendawo yale mihla I-Semiconduct Food. Uzilolo lwayo luqinisekisa ukhuseleko kunye nokuthembeka kwi-chain yonikezo, ngelixa ukubuya kwendawo kubonelela ngezakhono zokusebenza komsebenzi okuphezulu kunye nokusebenza kwe-etchking abadingayo. Njengoko sisenza nzulu, uyakubona ukuba ilula kangakanani irhasi Yenza ukuba kubekho ukudalwa kwezixhobo ezinzima emhlabeni.

Kutheni le nto igesi ekhethekileyo ibalulekile kumzi-mveliso we-semicondcuctor?

Ukuqonda ukubaluleka kwe Nf₃, kufuneka siyixabise indima ebanzi ukuba Iigesi zibalulekile kuba Umzi mveliso we-semicondcuctor. Ukwenza i isekethe elihlanganisiweyo ifana nokwakha i-skyscraper kwi-canvas ubungakanani be-thumbnail yakho. Yinkqubo yokongeza kunye nokususa i-caltra-thes-times ye-ortra encinci kwi isilicon i-wafer. Lonke inyathelo, ukusuka ekwenzeni intsholongwane i-wafer Kwi-chip yokugqibela, ixhomekeke kwimozulu elawulwa ngononophelo Iigesi ze-elektroniki.

Ezi gesi zenza imisebenzi emininzi ebalulekileyo. Ezinye, njenge Argon kwaye helium, zisetyenziswa njenge-Irier Carrier Gases ukwenza indawo ezinzileyo, engasebenziyo kunye nokutyibilika iigesi ezisebenzayo. Ezinye zisetyenziselwa ifayile, apho a irhasi isetyenziselwa idipozithi ifilimu emnyama yempahla kwi i-wafer. Umzekelo, kwikhemikhali Umphunga Ifayile (Cvd), Iigesi zisabela ukwenza ifilimu eqinileyo ebaba yinxalenye yokujikeleza kukaChip. Ke kukho igesi ye-etching, njenge Nf₃, esetyenziselwa ukukhohlisa ngokuchanekileyo iipateni kwezi zingqengqelo, zenza iindlela zendlela entsundu yombane ukuba ihambe.

Ngaphandle kwento eqhubekayo, i-ultra-Ukucoceka okuphezulu ukubonelelwa kwezi gesi ezahlukeneyo, iyonke Inkqubo yokwenziwa kwemveliso iya kubaleka i-tit. Nditsho ne-nuscule ukungcola kwi irhasi Ungawonakalisa i-batch yonke ye-wafrs, ixabisa inkampani yezigidi zeedola. Kungenxa yoko le nto Abavelisi be-semicondontctors zibuthathaka kakhulu kumgangatho kunye nokuthembeka kwabathengisi bayo begesi. Ubunyulu be irhasi ngokuthe ngqo kwiinguqu kumgangatho kwaye ukuvelisa isivuno yemveliso yokugqibela.

Injani i-NF₃ igesi esetyenziswa kwiinkqubo ze-semiconductor?

I-nitrogen trifluoride Unezicelo ezibini eziphambili, ezibalulekileyo kwi Iinkqubo zeMveliso ze-Semiconductor: I-Plasma Etching kunye neQurhasendla. Zombini zibalulekile ekwenzeni i-microchips ephezulu yokusebenza, ukusuka kwiiprosesa ukuya Inkumbulo ye-nand flash.

Okokuqala, masithethe malunga ne-etching. Emva komaleko wezinto ezifana isilicon dioxide ifakwe kwi i-wafer, iphethini iqinisekisiwe kuyo usebenzisa ukukhanya. I i-etch Inkqubo emva koko isusa izinto ezivela kwiindawo ezingakhuselekanga. Nf₃ ingeniswe kwigumbi elikhulayo ukuze wenze i iplasma-Ilifu le-catied ion amasuntswana kunye nokusebenza i-fluorine I-radicals. Ezi radicals ze-brafdicly blise i-wafer umphezulu, uphendula nge isilicon kwaye uyiguqula ibe igesi ikhonkco (isilicon I-Tetrafluoride) enokupheliswa ngokulula kwigumbi. Ukuchaneka kwale nkqubo yingqondo yengqondo, ivumela iinjineli zibe ziimpawu ze-Proves ezinamawaka amawaka amawaka amancinci kuneenwele zomntu.

Okwesibini, kwaye uqhelekile, Ukusetyenziswa kwe-nitrogen trifluoride injenge Ukucoca igesi. Ngexesha le I-Vapor Vapor Vapor (Cvd) Inkqubo, apho iifilimu ezinqabileyo zikhulile kwi i-wafer, impahla engafunekiyo ikwakhela kwiindonga zangaphakathi zegumbi lenkqubo. Le intsalela, ihlala yenziwe isilicon okanye i-siticon nitride, kufuneka isuswe ngokupheleleyo phakathi kokulungiswa nganye i-wafer okanye i-batch ye-wafs. Ukuba akukhange kubenjalo, lolwakhiwo lunokufikelela kwaye umhlaba olandelayo i-wafer, ebangela isiphene. Apha, Nf₃ ifakwe kwigumbi elingenanto kunye ne iplasma iphumile. Inamandla i-fluorine I-radicals iqhekeza iindonga zegumbi zicocekile, ziguqula isiseko intsalela kwi igesi i-byproduct isuswe ngokulula. Lo mjikelo wokucoca Igreyiti yokugcina Ukucoceka kwendalo kunye nokuqinisekisa phezulu ukuvelisa isivuno.

Yintoni eyenza i-NF₃ irhasi ecocekileyo ebalaseleyo xa kuthelekiswa nezinye iindlela?

Kwiminyaka emininzi, i Umzi mveliso we-semicondcuctor ixhomekeke kwi-perfluorocarbons (PFCs) njengekhabhoni ye-carbon titrafluoride (CF₄) kwaye hexfafluoroethane (C₂f₆) yokucoca kunye nokuhlanjwa. Ngelixa zisebenza, ezi zinto zenziwe ngeyona mitha iphambili Umzekelo, i-C₂F₆ ine Ubume obuphezulu behlabathi (GWP) kwaye unokuqhubeka emoyeni iminyaka eli-10,000. Njengoko imigaqo yokusingqongileyo yaqiniswa, ishishini lifuna isisombululo esingcono.

Kulapho Nf₃ ivele njengomntu ophumeleleyo ocacileyo. Ngelixa I-nitrogen trifluoride ikwangu igesi ye-greenhouse, inexesha elifutshane kakhulu lemodeli yobomi (malunga neminyaka engama-500). Okubaluleke ngakumbi, kufanelekile ngakumbi kwinkqubo yokucoca. Ngaphakathi kwi iplasma igumbi, ipesenti ephezulu kakhulu ye Nf₃ Iimolekyuli ziqhekezwe ukukhulula indawo yazo i-fluorine xa kuthelekiswa nee-PFCs. Oku kuthetha ukuba ngaphantsi ayisebenzi irhasi idiniwe egumbini. Yanamhlanje I-semicondorctor fabs Faka iinkqubo zokuxhela (iikribe) ezitshabalalisa phantse zonke ayisebenzi Nf₃ kwaye iyingozi i-byproduct Iigesi ngaphambi kokuba zikhutshwe.

Ukudityaniswa kokusebenza kakuhle kunye nokuhlutha okungakumbi kufakwe inyani Uluhlu lwegesi yeGreenhouse Ukusetyenziswa usebenzisa Nf₃ iphantsi kakhulu kunaleyo evela kwiigesi zePFC ezindala. Esi sixhobo siphezulu sisizathu esiphambili sokwamkelwa komntwana abengowomnye umntu okanye abantu ngokusemthethweni.

Iqala njani i-nitrogen gerogen witrogerage defluoride?

Njengomvelisi, ndingakuxelela ukuba ukuvelisa Nf₃ yintsomi kwaye ilawulwa kakhulu Inkqubo yemveliso. Injongo kukwenza imveliso yokugqibela ecocekileyo engaqhelekanga - ihlala i-99.999% icocekile okanye ngaphezulu-kuba neyona incinci ukungcola inokuba yintlekele Imveliso ye-semicondcuct. Inkqubo ifuna ubungcali ekuphatheni imichiza esebenzayo esebenzayo, ngakumbi i-fluorine.

I Imveliso ye-NF₃ Ngokwesiqhelo kubandakanya ukuphendula I-Ammonia (a ikhonkco iqulethe initrogen) okanye i-amonium i-fluoride I-complated kunye nelifa i-fluorine irhasi kwi-rector kwi amaqondo obushushu aphezulu. Le ndlela yokuphendula ivelisa umxube weegesi, kubandakanya Nf₃, izixhobo ezingekho ngqiqweni, kunye nee-Bypproves ezahlukeneyo. Umceli mngeni wokwenene, kwaye apho ubungcali bomthengisi bubonisa khona, ukwi ukucocwa Inqanaba elilandelayo.

Uluhlaza igesi umxube uhamba ngeqela ukucocwa amanyathelo okususa nayiphi na imichiza engafunekiyo. Oku kuhlala kubandakanya uthotho lokuqubha, i-adsorption, kunye neenkqubo zokuphazamiseka. I Inkqubo yokuTyala, ngakumbi, isebenzisa amaqondo obushushu asezantsi kakhulu ahlukanise iigesi ezahlukeneyo ngokusekwe kwiindawo zabo zokubila, ukwahlula i Nf₃ kuyo nayiphi na into engcolileyo eseleyo. Inyathelo ngalinye lijongwa ngezixhobo eziphambili zohlalutyo ukuze kuqinisekiswe imveliso yokugqibela ihlangabezana neenkcazo zexabiso le I-Semiconductor ishishini. Oku kuzinikela kulawulo oluphambili yinto eyahlula umthengisi othembekileyo kwabanye.

Zeziphi izinto zokhuseleko kunye nokuphatha igesi ye-NF₃?

Ukhuseleko yeyona nto iphambili kulo mzi mveliso irhasi ishishini. Ngelixa Nf₃ ayinakutsha kwaye azinzanga kubushushu begumbi, yiarhente eqinileyo ye-oxidifiqing, ngakumbi kumaqondo obushushu aphezulu. Oku kuthetha ukuba inokuphendula ngobundlobongela ngezixhobo ezinokutsha kwaye zifuna ukuphatha ngononophelo. Umngcipheko ophambili kukuqina kwayo; Ukuphefumla irhasi inokuba yingozi, ngokunjalo ngokuchanekileyo kunye nezixhobo ezikhuselayo kubalulekile nakweyiphi na Indawo yeMveliso.

Yonke into ethengiswayo, kumzi-mveliso wethu wabathengi I-Semiconductor I-Fab, yakhiwe ngokukhuselekileyo ukhuseleko. Nf₃ ihanjiswa kwiisilinda zensimbi elungiselelwe ngokukodwa phantsi koxinzelelo oluphezulu. Ezi zi-sylinders zisebenza ngokungqongqo kunye nesiqinisekiso sokuqinisekisa ukuba zinokuqulazwa ngokukhuselekileyo irhasi. Njengomthengisi, sibonelela ngamaphepha edatha eneenkcukacha zoKhuseleko (i-SDS) kunye noqeqesho kubathengi bethu ekugcinweni ngokufanelekileyo, uqhagamshelo, kunye neenkqubo zokuphatha. Oku kubandakanya izikhokelo kwi umgangatho wohambo Ukulawulwa kunye nokuvumisa okuvunyiweyo.

Ngobunini beshishini elinjengoMarko, olona xabiso luphambili olusezantsi noluthembekileyo lokuhambisa, ukusebenzisana nomthengisi onolondolozo oluqinisekisiweyo oluqinisekisiweyo. Unxibelelwano olungalunganga okanye ukunqongophala kweeprothokholi ezicacileyo ukusuka kumthengisi yiflegi ebomvu enkulu. Siyazingca ngokubonelela ngemveliso nje, kodwa inkonzo epheleleyo ebandakanya inkxaso kunye nobungcali bokhuseleko, qinisekisa irhasi ifika kwaye iphathwe ngokukhuselekileyo kuwo onke amanyathelo endlela.

Ngaba i-nitrogen trifluoraide igesi yeGreenhouse? Ukuqonda impembelelo yokusingqongileyo.

Kubalulekile ukuba sibonakale kwimiba yokusingqongileyo Nf₃. Ewe, I-nitrogen trifluoride inamandla igesi yeGreenhouse. Iphaneli yoorhulumente malunga nokutshintsha kwemozulu (i-IPCC) ibale ukuba inamandla okusindisa i-jikelele (i-GWP) amawaka amatye amatye amawaka amawaka ngaphezu kwekhabhoni dioxide ngaphezulu kweminyaka eyi-100. Esi sisibakala sokuba ishishini lithatha kakhulu.

Nangona kunjalo, ibali alipheli apho. I Impembelelo kwindalo esingqongileyo Kuxhomekeka ekubeni kungenxa yokuba kunokwenzeka kwigesi, kodwa kungakanani okhutshiweyo enyanisweni. Njengoko bekutshiwo ngaphambili, Nf₃ isebenza kakhulu. Kwindawo yanamhlanje I-Semiconductor indawo yokuhlala, uninzi lwe igesi isetyenzisiwe igqityiwe okanye itshatyalalisiwe ngexesha lenkqubo yokuphucula. I iplasma yiphule phantsi, kwaye nayiphi na ayisebenzi irhasi edinwe iphelelwe yinkqubo yokuthatha inxaxheba. Ezi nkqubo ziyasebenza kakhulu, zihlala zitshabalalisa ngaphezulu kwe-99% yesele Nf₃.

Utshintsho lweshishini ukusuka kwi-PFCs ukuya Nf₃, zidityaniswe nokusetyenziswa ngokubanzi kwetekhnoloji yokuxakeka, eneneni ikhokelele ekunciphiseni nasekunciphiseni Uluhlu lwegesi yeGreenhouse kwicandelo ngalinye lemveliso. Unoxanduva Abavelisi be-semicondontctors Kwaye abathengisi begesi basebenza kunye ukuqinisekisa ukuba ukukhutshwa okuncitshisiweyo. Oku kubandakanya ukwenza inkqubo yokucoca ukusebenzisa ubuncinci be irhasi Imfuneko kwaye ugcine iinkqubo zokuxhelelwa kwenqanaba lokusebenza. Ke, ngelixa Nf₃ inamandla igesi yeGreenhouse Kwindawo ye-lab, i-deal-vol-World Firepriment ye Ukuvelisa i-semicondcuction ilawulwa ngononophelo kwaye iphantsi kakhulu kunezinye iindlela.

Ithini indima yegesi yegesi ye-segeOndcuctor ye-semiconductor ye-semicondcuctor?

Ubungakanani bexesha langoku Ukuvelisa i-semicondcuction nyamalala. Ezona ndawo zinkulu, zaziwa njengee-mega-fabs, zisebenzisa inani leegesi. Kwezinye iigesi, njenge-nitrogen, kuyasebenza ngakumbi ukubavelise ngokuthe ngqo kwindawo kunokuba ilori kumawakawaka eesilinda. Oku kwaziwa ngokuba emhlabeni isizukulwana. Yenzelwe kakhulu kwaye isebenze irhasi njenge Nf₃, imodeli eyahlukileyo kancinane iyavela: emhlabeni Ukucocwa kunye nohlalutyo.

Ngelixa izele Imveliso ye-NF₃ kwi-fab ayiqhelekanga ngenxa yobunzima bayo, abasebenzisi abaninzi bahlala benengxaki emhlabeni Iinkqubo zolawulo lwerhasi. Ukubonelelwa kakhulu Nf₃ Ihanjiswa kwi-Fab, kwaye le nkqubo yenza inqanaba lokugqibela ukucocwa kunye nohlalutyo lomgangatho oqhubekayo kanye phambi kwe irhasi Ngena izixhobo zokwenza izinto ezinqabileyo. Oku kubonelela ngomaleko wokugqibela woLawulo loMgangatho, ukuqinisekisa ukuba naluphi na ungcoliseko olunokubakho kwilayini zoncedo. Le ndlela idibanisa izibonelelo zoqoqosho zokuthenga ngokuthengwa komgangatho kunye nokuqinisekiswa komgangatho emhlabeni Ulawulo.

Ukuqonda ezi modeli zoncedo zokubonelela zibalulekile. Njengomthengisi, sandisile iinkonzo zethu ngaphaya nje kokugcwalisa i-cylinds. Ngoku sisebenza naye Abavelisi be-semiconductor yehlabathi Ukuyila kunye nokuphumeza ukuhanjiswa kwegesi kunye nezisombululo zolawulo. Oku kunokubandakanya ukuzahlulela umgca wokuvelisa Umthamo womthengi omkhulu, izinto ezizodwa, okanye ukudityaniswa kunye emhlabeni iinkqubo. Imalunga nokubonelela nge-chain eguqukayo kwaye ithembekileyo yokuhambisa ihlangabezana neemfuno ezifunwayo ze Imveliso yenkulungwane yama-21. Le yinxalenye ephambili yesicwangciso-qhinga sethu, ngakumbi xa kukhonza abathengi ezibalulekileyo ukuvelisa amandla.

I-NF₃ ichaphazela njani isibonelelo semveliso kwimveliso ye-chiip?

Kwi I-Semiconductor Umhlaba, "Yibani" yiyo yonke into. Yipesenti ye-chips elungileyo, esebenzayo eveliswe kwinye isilicon i-wafer. Isivuno esiphakamileyo sithetha inzuzo ephezulu; Isivuno esisezantsi sinokubambisa ngemali. Ukucoceka kwenkqubo ye-Gases, ngakumbi indawo yokusebenza irhasi njenge Nf₃, inefuthe ngqo necramatic kwi ukuvelisa isivuno.

Khawufane ucinge ukungcola Njengomntu otywiniweyo wokufuma (i-H₂O) okanye enye igesi ikhonkco ixutywe ne Nf₃. Ngexesha lenkqubo ebuthathaka ye-etch, loo nto ukungcola inokuphazamisa indlela yokuphendula yekhemikhali, ibangela isiphene se microscopic kwisekelo kaChip. Ingathintela i i-etch. Nokuba yeyiphi, iziphumo isekethe elihlanganisiweyo iyasilela kuvavanyo lwayo lokugqibela. Xa usenza izigidi zoqeqesho kwi-chip enye, nokuba "isiphene se-diller" esibangelwa yi ukungcola Ungayifaka yonke i-chip yonke.

Kungenxa yoko le nto sityale imali kakhulu kulawulo lomgangatho. Ngokubonelela ngeqinisekisiweyo, i-ultra-Ukucoceka okuphezulu Nf₃, sinika abathengi bethu bayazithemba ukuba irhasi ayizukuba ngumthombo weziphene. Ukulawula uxinzelelo Kwicandelo ngalinye ukuya kuthi ga kwicandelo lezigidi ngezigidi iqinisekisa ukuba Inkqubo yokwenziwa kwemveliso iyazinza kwaye iphinde iphinde. Inkqubo emiselweyo ikhokelela ekuqinisekiseni kwaye iphezulu ukuvelisa isivuno, Yeyiphi eyona njongo iphambili kuyo yonke into I-Semiconductor umvelisi. Indima yethu njengomthengisi I-gesity ephezulu yegesi kukuphelisa izinto eziguquguqukayo kwaye ubonelele ngemveliso yomgangatho ongacacanga.

Yintoni omele uyijonge kumthengisi we-nitrogeragesige?

Igosa lokuthenga ngokuthenga njengeMark, ukukhetha umthengisi ofanelekileyo wezinto ezibonakalayo ezifana Nf₃ kude kube ngaphaya nje kuthelekisa amaxabiso. Imingcipheko yentsebenzo yokuhambisa intsasa, imiba esemgangathweni, unxibelelwano olugwenxa-luphezulu kakhulu. Ngokusekwe kumava am, nantsi izinto eziphambili ekufuneka ziqwalaselwe:

Umgangatho wokuqala, oqinisekileyo kwaye ungqinisiso. Umthengisi othembekileyo uya kubonelela ngesatifikethi sohlalutyo (i-COA) kunye nempahla nganye, echaza amanqanaba ococeko kunye nokudweliswa nakuphi na ukungcola okufunyenwe. Bafanele bathobelele kwimigangatho yehlabathi efana ne-ISO 9001. Buza malunga nezakhono zabo zohlalutyo. Ngaba banazo izixhobo zokufumanisa ukungcola kumanqanaba afunekayo I-Semiconductor Izicelo?

Okwesibini, ukuthembeka koncedo kunye nokungafihli. Ngaba umthengisi unokubonisa inethiwekhi ye-gogost logistics ukuthintela ukulibaziseka? Ngaba bayayifumana ukuvelisa amandla Ukuqinisekisa ukubonelela ngokuqinileyo? Unxibelelwano luphawu apha. Umthengisi wakho kufuneka abe nenxaxheba, enikezela uhlaziyo malunga nokuthunyelwa kwaye afumaneke ngokulula ukuphendula imibuzo. Oku kuthetha ngokuthe ngqo indlela yentlungu yonxibelelwano olungalunganga.

Okokugqibela, khangela ubuchule obugcisa. Umthengisi olungileyo akathengi nje ngemveliso; Banika isisombululo. Kuya kufuneka baqonde izicelo zakho kwaye bakwazi ukubonelela ngenkxaso yobugcisa. Bafanele ukuba babe nolwazi malunga nokhuseleko, ukuphatha, kwaye nemigaqo yokusingqongileyo ejikeleze i Izicelo zegesi. Umthengisi onokwenza iqabane elineqabane elifanelekileyo lixabiseke ngaphezu komthengisi nje. Obu buchule sisiseko solwalamano lwexesha elide, olunenzuzo. Sizabalazela ukuba liqabane labo bonke abathengi bethu, abanika nje i irhasi Kodwa uxolo lwengqondo oluza nalo.

Iqhosha lezitshixo

• Isixhobo esibalulekileyo: I-Nitrogen Trifluoride (NF₃) yinto ebaluleke kakhulu irhasi isetyenziselwa i-plasma etching kunye negumbi lokucoca kwi Inkqubo yokuFumanisa iSemiconductor.
• Ukusebenza okuphezulu: Nf₃ isebenza ngakumbi kwaye inefuthe eliphantsi lokusingqongileyo ngakumbi kunegesi ye-PFC endala ethathe indawo, ngenxa yamazinga okusebenzisa aphezulu kunye neenkqubo zethafa zangoku.
• Ukucoceka yinzuzo: I-Ultra-icocekile enkulu ye Nf₃ ayinakuphikiswa. Nditsho nokungcola kunokubangela iziphene kwi isilicon i-wafer, ukunciphisa kakhulu i ukuvelisa isivuno kunye nenzuzo ye Imveliso ye-chip.
• Ukhuseleko kunye nokuphatha liqhosha: Ngelixa uzinzile, Nf₃ yityhefu kunye ne-oxiding irhasi Oko kufuna ukuphathwa ngokukodwa, iisilinda eziqinisekisiweyo, kunye nokuqonda okunzulu kweeprotokholi zokhuseleko.
• Ukhetho lwababoneleli lubalulekile: Xa ukhetha i Nf₃ Umboneleli, ukuba ubeke phambili umgangatho oqinisekileyo, ukuthembeka koncedo, unxibelelwano olucacileyo, kunye nobuchule obunzulu bobuchwephesha ngaphezulu kwexabiso lodwa.