Kuzarura Simba reFluorine Chemistry muSemiconductor Manufacturing: A Critical Gas Analysis.
Nyika yanhasi inomhanya nemachipisi. Kubva pa smartphone muhomwe yako kusvika kune ekutungamira masisitimu mune aerospace engineering, idiki Semiconductor mudziyo ndiro gamba risingaimbidzwe rezera redhijitari. Asi chii chinonzi hero shure kwegamba? Ndiyo nyika isingaonekwe, inowanzosanduruka yemagasi akasarudzika. Zvakananga, fluorine chemistry inoita basa rakakosha mu Semiconductor Exeruring nzira isingagone kutsiviwa.
Kana iwe uri kutonga cheni yekugovera kana kutarisa mhando yechigadzirwa mu semicononductor foundry, unoziva kuti muganho wekukanganisa i zero. Imwe spike muhunyoro kana diki diki inogona kukanganisa mamirioni emadhora kugadzirwa. Ichi chinyorwa chinonyura mukati mebasa re fluorine-containing magasi - nei tichiashandisa, iyo chaiyo chemistry inoita kuti ishande, uye kukosha kwakakosha kwekugadzikana kweketani yekugovera uye kuchena. Tichaongorora kuti izvi sei yakakwirira-yakachena magasi dzinoshandiswa mu Etch uye nhanho dzekuisa, uye nei kuzvitsvaga kubva kune akavimbika mudiwa ndiyo sarudzo yakakosha yaungaite gore rino.
Nei indasitiri yesemiconductor ichitsamira pamagasi ane fluorine?
Kuti tinzwisise Semiconductor Indasitiri, unofanira kutarisa periodic table. Silicon ndiyo canvas, asi Fluorine ndiye bhurasho. The Semiconductor Fibraction maitiro anosanganisira kuvaka akaturikidzana ezvishandiso uye wozozvibvisa nekusarudza kugadzira maseketi. Iyi nzira yekubvisa inonzi etching.
Fluorine ndicho chinhu chikuru chemagetsi. Mumashoko akapfava, ine nzara inoshamisa yemaerekitironi. Patinosuma fluorine gasi kana fluorinated compounds mukamuri yeplasma, maatomu efluorine anoita zvehasha nesilicon uye silicon dioxide. Iyi kemikari inoshandura inoshandura silicon yakasimba kuita magasi anoputika (sesilicon tetrafluoride) anogona kupomba zviri nyore. Pasina iyi kemikari reactivity, hatina kukwanisa kugadzira mikorokopu migero uye maburi ekubata anodiwa azvino zvigadzirwa zvemagetsi.
Mukati kugadzirwa kwepamusoro-soro, kumhanya uye kurongeka ndizvo zvese. Fluorine-ine magasi ipa iyo yakakwira etch mareti anodiwa kuchengetedza throughput kumusoro, ukuwo uchipa iyo selectivity yekucheka nepakati chinhu pasina kukuvadza layer pasi payo. Icho chiito chakapfava chekuenzanisa che chemistry uye physics.
Chii chinoita kuti fluorine chemistry yakasarudzika kune yakakwirira-chaiyo etching?
Iwe unogona kubvunza, wadii kushandisa chlorine kana bromine? Isu tinoita, kune mamwe maseru. Zvisinei, fluorine chemistry inopa yakasarudzika mukana kana uchiisa silicon-yakavakirwa zvinhu. Chisungo pakati pesilicon nefluorine chakasimba zvinoshamisa. Rini fluorine-containing plasma inorova wafer, maitiro acho ari exothermic uye anongoerekana aitika.
Mashiripiti anoitika mu plasma. Mune a Semiconductor maitiro Chamber, tinoshandisa simba guru kune gasi rakagadzikana seCarbon Tetrafluoride (CF4) kana Sulfur Hexafluoride (SF6). Izvi zvinotsemura gasi, zvichiburitsa reactive Fluorine radicals. Aya radicals anorwisa pamusoro pe wafer.
"Kurongeka kwe Etch inotsanangura kushanda kwechip. Kana gasi rako rakachena richichinja, chiyero chako chinoshanduka, uye goho rako rinoputsika. "
Izvi zvinotungamira kune pfungwa ye anisotropic etching-kucheka zvakananga pasi pasina kudya nedivi. Nekusanganisa Fluorine nevamwe maitiro magasi, mainjiniya anogona kudzora chimiro chegoronga zvakakwana. Kugona uku kwakakosha sezvatinoenda kumanodhi madiki (7nm, 5nm, uye pazasi), uko kunyangwe nanometer yekutsauka iri kutadza.
Magasi mukugadzira semiconductor anotyaira sei advanced etch process?
Etch process ndiwo maturusi ekuveza fabs. Kune marudzi maviri makuru: wet etch (uchishandisa makemikari emvura akafanana hydrogen fluoride) uye yakaoma etch (uchishandisa plasma). Mazuvano Advanced semicononductor node dzinotsamira panenge pakaoma plasma etching nekuti inonyatso kujeka.
Muchimiro kupisa kweplasma kutevedzana, a fluorinated gasi inosumwa. Ngatitarisei zvakasiyana-siyana zvakashandiswa:
- Carbon Tetrafluoride (CF4): Iyo workhorse ye oxide etching.
- Octafluorocyclobutane (C4F8): Inoshandiswa kuisa polymer layer pamadziro emugero, ichivadzivirira apo pasi pakaiswa zvakadzika.
- Sulfur Hexafluoride (SF6): Inozivikanwa nekunyanya kukurumidza silicon etching mitengo.
Kudyidzana pakati pe plasma uye substrate zvakaoma. Zvinosanganisira kubhomba kwemuviri nemaion uye kuita kwemakemikari nema radicals. The semiconductor kugadzira michina inofanira kunyatsodzora kuyerera, kumanikidza, uye musanganiswa wemagasi aya. Kana iyo Specialty gasi ine tsvina yakaita sehunyoro, inogona kuumba hydrofluoric acid mukati memitsara yekutumira kana mukamuri, zvichikonzera ngura uye kukanganisa.
Sei Nitrogen Trifluoride ari mambo wekamuri yekuchenesa maapplication?
Nepo etching uye kuchenesa fambai makabatana, kuchenesa michina yekugadzira kwakakosha sekugadzirisa wafer. Panguva Chemical Vapor Deposition (CVD), zvinhu zvakaita sesilicon kana tungsten zvinoiswa pawafer. Zvisinei, zvinhu izvi zvinoputirawo madziro ekamuri. Kana zvakasara izvi zvikavaka, zvinoputika uye zvinowira pazvimedu, zvichikonzera kukanganisa.
Enter Nitrogen Trifluoride (NF3).
Makore apfuura, indasitiri yakashandisa fluorinated greenhouse magasi akaita seC2F6 yekuchenesa kamuri. Nekudaro, NF3 yave chiyero che Chamber cleaning process nekuda kwekushanda kwayo kwepamusoro. Kana yakaputswa mune iri kure plasma sosi, NF3 inogadzira huwandu hukuru hwe maatomu efluorine. Aya maatomu anokwesha madziro ekamuri akachena, achishandura zvisaririra zvakasimba kuita gasi rinopomba.
Nitrogen trifluoride inofarirwa nekuti ine mwero wekushandisa wepamusoro (yakawanda yegasi iri kunyatso shandiswa) uye yakaderera kubuda kana ichienzaniswa neyekare. kuchenesa vamiririri. Kune maneja wezvivakwa, izvi zvinoreva kushomeka nguva yekugadziridza uye nekukurumidza kuburitsa.
Ndeapi makomisheni efluorinated akakosha pakugadzirwa kwepamusoro-vhoriyamu?
The the semiconductor supply chain inovimba netswanda yezvakananga fluorine-ine magasi. Imwe neimwe ine chaiyo "recipe" kana application. At Jiangsu Huazhong Gas, tinoona kudiwa kukuru kwezvinotevera:
| Zita reGasi | Formula | Primary Application | Key Feature |
|---|---|---|---|
| Carbon Tetrafluoride | CF4 | Oxide Etch | Yakasiyana-siyana, indasitiri chiyero. |
| Sarufa hexfluoride | SF6 | Silicon Etch | High etch rate, high density. |
| Nitrogen trifluoride | NF3 | Chamber Cleaning | Kubudirira kwepamusoro, kuburitsa kwakaderera. |
| Octafluorocyclobutane | C4F8 | Dielectric Etch | Polymerizing gasi rekudzivirira kwepadivi. |
| Hexafluoroethane | C2F6 | Oxide Etch / Yakachena | Legacy gasi, richiri kushandiswa zvakanyanya. |
Izvi fluorinated compounds iropa rehupenyu kugadzirwa kwepamusoro-soro. Pasina kutevedzana kwakadzikama kweizvi gasi mu semiconductor kugadzirwa, mitsetse inomira. Zviri nyore kudaro. Ichi ndicho chikonzero vatariri vekutenga vakaita saEric Miller vachigara vachitarisa mangetani ekupa zvekuvhiringidza.
Sei yakakwirira-kuchena magasi ari musana we semiconductor goho?
Handikwanise kusimbisa izvi zvakakwana: Kuchena ndicho chinhu chose.
Patinotaura nezvazvo yakakwirira-yakachena magasi, hatisi kutaura nezve "industrial giredhi" rinoshandiswa pakunama. Tiri kutaura nezve 5N (99.999%) kana 6N (99.9999%) kuchena.
Nei? Nokuti a Semiconductor mudziyo ine zvinhu zvakayerwa nemananometer. Morekuru imwe chete yekusachena kwesimbi kana kuwanda kwehunyoro (H2O) inogona kukonzera dunhu pfupi kana kudzivirira dhiri kubva pakunamatira.
- Unyoro: Reacts with Fluorine kugadzira HF, iyo inoparadza gasi rekutumira system.
- Oxygen: Oxidize iyo silicon isingadzoreki.
- Heavy Metals: Kuparadza zvinhu zvemagetsi zve transistor.
Semutengesi, basa redu nderekuona kuti yakakwirira-kuchena Xenon kana Electronic Giredhi Nitrous Oxide unogamuchira unosangana wakaomarara Maindasitiri. Isu tinoshandisa advanced gasi chromatography kuona tsvaga kusvibiswa pasi kusvika kuzvikamu pabhirioni (ppb). Kune mutengi, kuona Chitupa cheOngororo (COA) harisi mapepa chete; ndiyo vimbiso yekuti wavo Semiconductor Fibraction haizotarisana nenjodzi yekuparara kwegoho.
Iyo indasitiri iri kutonga sei greenhouse gasi emissions uye GWP?
Pane nzou mumba: nharaunda. Vazhinji fluorinated magasi vane yakakwirira Global Warming Potential (GWP). Somuenzaniso, Sarufa hexfluoride (SF6) ndeimwe yeakanyanya ane simba greenhouse magasi inozivikanwa kumunhu, ine GWP zviuru zvenguva yakakwirira kupfuura CO2.
The the semiconductor kugadzira indasitiri iri pasi pekumanikidzwa kukuru kuderedza kabhoni tsoka. Izvi zvakakonzera shanduko huru mbiri:
- Abatement: Fabs vari kuisa "mabhokisi ekupisa" makuru kana mascrubber pamitsetse yavo yekupisa. Aya masisitimu anoputsa izvo zvisingaite Greenhouse gasi isati yaburitswa mumhepo.
- Kutsiva Vatsvakurudzi vari kutsvaga imwe nzira Etch magasi ane yakaderera GWP. Nekudaro, kutsvaga molekuru inoshanda pamwe neC4F8 kana SF6 isina kukanganisa kwezvakatipoteredza kwakaoma kemikari.
Nitrogen trifluoride yaive nhanho munzira kwayo yekuchenesa nekuti inoputsika zviri nyore kupfuura maPFC ekare, zvichikonzera kushomeka kwese emission kana masisitimu ekudzikisa ari kushanda nemazvo. Kuderedza Greenhouse Gasi Emissions haisisiri kungofamba kwePR; chinhu chinodiwa chekutonga muEU neUS.
Iyo semiconductor yekugovera cheni iri panjodzi yekushaikwa kwegasi?
Kana makore mashoma apfuura akatidzidzisa chero chinhu, ndezvekuti mangetani ekupa haina kusimba. Semiconductor vagadziri vakatarisana nekushomeka kwezvinhu zvese kubva neon kusvika fluoropolymers.
Kupihwa kwe fluorine gasi uye zvibereko zvayo zvinoenderana nekucherwa kwefluorspar (calcium fluoride). China ndiyo yakakura pasi rose sosi yeiyi mbishi zvinhu. Kana geopolitical kusawirirana kukakwira kana nzira dzekutakura dzinovharika, kuwanikwa kweizvi zvakakosha maitiro magasi madonhwe, uye mitengo inokwira mudenga.
Kune mutengi saEric, kutya kwe "Force Majeure" ndeyechokwadi. Kudzikamisa izvi, makambani ane ruzivo ari kusiyanisa vatengesi vawo. Vari kutsvaga vadyidzani vane yavo iso-tanks uye vakagadzira logistics network. Kuvimbika mu Logistics yakakosha sekuchena kwegasi. Unogona kuwana zvakachena C4F8 gasi munyika, asi kana yakanamatira pachiteshi, haibatsiri kune fab.
Ndeapi maprotocol ekuchengetedza ekubata Hydrogen Fluoride uye zvimwe zvinhu zvine muchetura?
Chengetedzo ndiyo musimboti weindasitiri yedu. Vazhinji fluorine-containing magasi angave ane chepfu, asphyxiants, kana akanyanya kuita. Hydrogen Fluoride (HF), inowanzo shandiswa mukunyorova kana kugadzirwa sechigadzirwa, ine njodzi zvakanyanya. Inopinda mukati meganda uye inorwisa maitiro emapfupa.
Kubata zvinhu izvi kunoda kudzidziswa kwakasimba uye hunyanzvi hwekushandisa.
- Cylinders: Inofanirwa kuve DOT/ISO certified uye kugara ichiongororwa kuti mukati corrosion.
- Mavharuvhu: Diaphragm mavharuvhu anoshandiswa kudzivirira kubuda.
- Sensors: Semiconductor machira akafukidzwa nemasensa ekuonekwa kwegasi ayo anotanga maaramu pakudonha kudiki.
Patinozadza silinda ne Electronic Giredhi Nitrous Oxide kana muchetura, tinochibata sechombo chakatakurwa. Isu tinovimbisa kuti cylinder yakakwenenzverwa mukati kudzivirira ma particulates uye kuti valve yakavharwa uye yakavharwa. Kune vatengi vedu, tichiziva kuti iyo kutakura gasi kana kuti etchant inosvika yakachengeteka, inopindirana yekurongedza irerudzo huru.
Chii chiri kumberi kune zvigadzirwa zvinoshandiswa mune semiconductor yekugadzira maitiro?
The the semiconductor kugadzirwa roadmap ine hasha. Sezvo machipisi achienda kune 3D zvimiro senge Gate-All-Around (GAA) transistors, kuoma kwe etching uye kuchenesa inowedzera. Tiri kuona kudiwa kwezvimwe zvekunze fluorinated gasi misanganiswa inogona kupinza maburi akadzika, akamanikana neatomu chaiyo.
Atomic Layer Etching (ALE) inzira iri kubuda inobvisa zvinhu imwe atomic layer panguva. Izvi zvinoda zvinoshamisa chaizvo dosing ye Gasi Regedza. Uyezve, kushinha kwekugadzira "girinhi" kungangofambisa kutorwa kwetsva fluorine chemistry iyo inopa kuita kwakafanana nekuderera GWP.
Ramangwana ndereavo vanogona kuvandudza mune zvese gasi synthesis uye kucheneswa. As semiconductor zvinhu kushanduka, magasi anoshandiswa kuvaumba anofanira kushandukawo.
Key Deaaroways
- Fluorine inokosha: Fluorine chemistry ndiyo kiyi inogonesa Etch uye yakachena pinda mukati Semiconductor Exeruring.
- Kuchena ndiMambo: High-kuchena (6N) haigone kutaurirana kudzivirira kukanganisa uye kuve nechokwadi process kugadzikana.
- Kusiyana kweGasi: Akasiyana magasi akaita seCF4, SF6, uye Nitrogen trifluoride shanda mabasa chaiwo mu Kugadzira.
- Environmental Impact: Managing Greenhouse Gasi Emissions uye abatement idambudziko rakakosha reindasitiri.
- Supply Security: A robust mangetani ekupa uye vadyidzani vanovimbika vanodiwa kudzivirira kumira kwekugadzira.
PaJiangsu Huazhong Gas, tinonzwisisa matambudziko aya nekuti tinoararama mazuva ese. Kana uchida High Purity Xenon kune yako nyowani etch process kana yakavimbika kuendesa yakajairwa maindasitiri magasi, isu tiripano kutsigira tekinoroji inovaka ramangwana.
