Huazhong gasi rakazvitsaurira isu kuwanazve hunyanzvi uye sainzi yekudhinda uye Specialty gasi kugadzirwa. Munyika yanhasi yepamusoro-tech, kunyanya mukati me semicononductor indasitiri, kudiwa kwe Ultra-yakanyanya kuchena magasi haasi kungoda chete; Icho chakakwana chinodiwa. Ichi chinyorwa chinodzikira munyika yakaoma ye Kuongororwa Kwekuwachira for Electronic Specialty Gasi. Isu tichaongorora kuti nei kunyange iyo inlinest Kusachena inogona kuve nemhedzisiro yakakura, matinoita izvi zvisina kunaka tsvaga kusvibiswa, uye zvazvinoreva kune mabhizinesi. Kunzwisisa kusvibiswa kwegasi uye nzira dzadzo kucheneswa uye kuwanikwa, senge Icp-ms, kiyi yekuita kuti iverengerwe nekuvimbika uye kuita kweazvino Electronics. Ichi chidimbu chakakodzera nguva yako nekuti chinopa mafungiro-emukati-mhenyu pane kuchengetedza iyo sturdent Kuchena kweMagetsi Specialty magasi, korona yekona semicononductor uye Electronics zvikamu.

Ndezvipi chaizvo zviratidzo zvehunyanzvi zvemagetsi uye nei kuchena kwavo kwakakosha kwazvo muSemiconductor Kugadzira?

Electronic Specialty Gasi, kazhinji inotaurwa nezvayo Magetsi emagetsi kana semicononductor magasi, chikamu chakasarudzika che yakakwirira-yakachena magasi uye Misanganiswa yegesi zvakananga mainjinwi ezvekuita magadzirirwo akaomesesa anobatanidzwa mukugadzira zvemagetsi zvikamu. Funga nezvavo sechigadzirwa chisingaoneki chezera redhijitari. Izvi magasi anoshandiswa muSemiconductor Fabrialation inosanganisira yakasiyana-siyana, senge silane (Sih₄) yekuisa silicon materers, nitrogen trifluoride (nf₃) yekuchenesa chumba, Argon (Ar) senhovo inert, uye vakasiyana-siyana Gwara Gasi kunge phosphine (ph₃) kana arsine (ash₃) kushandura zvimiro zvemagetsi zve semicononductor zvishandiso. Izwi rekuti "Electronic Specialty"Icho chaicho chinosimbisa chishandiso chavo uye chakanyanyisa chinodiwa mukuumbwa kwavo. Izvi hazvisi zvako zvezuva nezuva magashama endama; zvavaifunga zvakanyanyisa kutarisisa.

Kukosha kwakanyanya kweavo kuchena haigone kuve yakadzikiswa, kunyanya mukati Semiconductor gadzira. Dunhu razvino rakabatanidzwa (ICS) dzinotsaukira uye kuitisa nzira dzekutungamira dzine zvidiki zvidiki, dzinowanzo kuyerwa muNanometers (bhiriyoni dzebumbi). Panguva ino microscopic chiyero, kunyangwe imwe chete isingadiwe atomu-an Kusachena-Kuita senge mwero mune rwizi rwechidiki, uchivhiringidza kuyerera kwemagetsi kana kukonzeresa kuremara. Izvi zvinogona kutungamira chipfeko chisina kunaka, uye mune indasitiri uko mamirioni emachipisi anogadzirwa pane imwe chete wafer, iyo yemari uye inokuvara kwemari kubva pakupararira kusvibiswa inogona kuva yakakura. Saka, the Kuchena kweMagetsi Specialty magasi isimbe yehurumende iri pane iyo yose magetsi uye semiconductor indasitiri yakamira. Chero Kusachena inogona kukanganisa basa rekushandisa, goho, uye kuvimbika, kuita runhare Kuchena kwegesi Dzora zvakakosha.

KuHuazhong gasi, tinonzwisisa kuti vatengi vedu mu Semiconductor Maindasitiri Vimba nesu kuti tipe magasi asangana kana kupfuura "mashanu nines" (99.999%) kana kunyange "nine" nine nines "(99.9999%) Izvi zvinoreva kuti chero Kusachena Inofanirwa kuve iripo pakukoshesesa yakaderera pane zvikamu pamamiriyoni (PPM) kana kunyange zvikamu pamabhiriyoni (PPB). Kuita uye kuratidza kwakadaro Kuchena kwakanyanya mazinga anoda zvakaringana kucheneswa nzira uye, criny, advanced Kuongororwa Kwekuwachira nzira. Kuvapo kwechinhu chisingatarisirwi Kusachena inogona kuratidzawo nyaya ne gasi cylinders kana ketani yekupa, kugadzira zvinhu zvisingachinjiki zvakakosha. Isu tine chokwadi chedu Nitrogen cylinder Zvipiriso, semuenzaniso, sangana izvi zviyero zvekuita, sezvo nitrogen gasi rinoshanda mumhando yakawanda semiconductor maitiro maitiro.

Kunyangwe kunyange microscopic inoteedzera kusvibiswa deerail semiconductor yekugadzira mitsara?

Dzimwe nguva zvakaoma kufungidzira kuti chimwe chinhu chidiki sei, a kutevedzera kusachena kuyerwa muzvikamu pamabhiriyoni (PPB) kana kunyange zvikamu pane trillion (PPT), inogona kukonzera matambudziko akakosha akadaro. Asi munyika ye semicononductor Kugadzira, izvi microscopic zvinangwa varidzi vakuru. Ngationgororei semiconductor Fabration Production Nhanho imwe neimwe inovandudza pane chaiyo yakadzora mamiriro emakemikari, kazhinji yakagadzirwa kana kuchengetwa na Electronic Specialty Gasi. Kana a gasi rinoshandiswa Mune imwe yenhanho idzi inotakura chisingadiwe Kusachena, izvo Kusachena inogona kubatanidzwa mune yakaomesesa matanda e semicononductor mudziyo.

Semuyenzaniso, simbi kusvibiswa Senge sodium, iron, kana mhangura, kunyangwe kuimba yekupedzisira-yakaderera, inogona kuchinja zvivakwa zvemagetsi zveSilicon. Vanogona kugadzira nzira dzisingadiwe dzisingadiwe, zvichitungamira kumatunhu mapfupi, kana kuita se "misungo" iyo inokanganisa kuyerera kwemagetsi, ichidzora chishandiso kana kuti ichikundikana zvachose. An Kusachena Inogona zvakare kukanganisa nemakemikari maitiro akagadzirirwa mune imwe nhanho nhanho. Semuenzaniso, a zvinosvibisa Mugasi etching gasi rinogona kukonzera pasi-etching kana pamusoro-etching, kuparadza maitiro chaiwo pane wafer. Iko kukanganiswa hakusi kungova machipisi ega; chisinganzwisisike Kusachena Chinyorwa chinogona kutungamira kumabhati ese emabhawa ari kutapurwa, zvichikonzera mamirioni emadhora pakurasikirwa, kunonoka kwekugadzira, uye kutemwa nemusoro wevashandi vehondo Izvi zvinoratidzira kukosha kwakasimba kwekugara trai kuongororwa kusachena.

Dambudziko nderekuti "inogamuchirwa" mwero chero Kusachena inoramba ichipenya se semicononductor Chishandiso chimiro chave chidiki. Izvo zvaionekwa seinogamuchirwa Kusachena level makore gumi apfuura inogona kunge iri dambudziko kusvibiswa Nhasi. Uku kutyaira kusunungurwa kwe miniaturization kunoisa kudzvanywa kwakakura pane gasi vagadziri uye kuongorora maLabs kunatsiridza kuongororwa muganho kugona. Kunyange zivisa Kusvibiswa, madiki eguruva anoregedza neziso rakashama, rinogona kuvhara mwenje mumatanho epikicha kana gadzira hurema hwepanyama pane wafeta. Saka, kudzora zvese zvinogona kuitika Kusachena - kunyangwe gaseous, metalic, kana zivisa - yakakosha. The the huwandu hwekusvibiswa izvo zvinogona kukonzera nyaya dzakakura, dzichisimbisa kukosha kwekunyepedzera kuongorora kwegesi.

Ndedzipi zvinonyanya kujairika? Kuratidza kusachena mumagasi kune zvemagetsi.

Patinotaura nezvazvo Kusvibiswa mumagasi yakagadzirirwa iyo magetsi uye semiconductor Sector, tiri kutarisa kusiyana-siyana kuraswa mavara, mumwe nemumwe anogona kukonzera kukuvara kukuru. Izvi Kusvibiswa kunoonekwa inogona kupatsanurwa kwazvo kuita gaseous, messacic, uye inowedzera mafomu. Kunzwisisa aya anowanzoitika anotambudza ndiyo yekutanga nhanho mukubudirira Kuongororwa Kwekuwachira uye kutonga. Zvakananga Kusvibiswa kwazvino Unogona kusiyana zvichienderana negesi pacharo, nzira yayo yekugadzira, kuchengetedza, uye kubata.

Gaseous Kusvibiswa ndedzimwe magasi aripo mune huru Specialty gasi. Semuenzaniso, mukati Kuchena kwakanyanya nitrogen, yakajairika gaseous Kusvibiswa inogona kusanganisira oxygen (o₂), moisture (h₂o), kabhoni dioxide (co₂), kabhoni monoxide (co), uye hydrocarbons (chō). Oksijeni uye kunyorova zvinonyanya kunetsa sezvavanetsana zvakanyanya uye zvinogona kutungamira kune isingadiwe oxidation ye semicononductor zvishandiso kana maitiro ekushandisa. Kunyangwe mu Inerer Gasi kunge Argon, izvi zvinogona kuvapo pamazinga ekutsvaga. Sekambani, tinowanzoona zvikumbiro zvekuongorora a dzakasiyana siyana dzekusvibiswa, kusanganisira idzi dzinoshanda mhando. Semuenzaniso, kugona kwedu kunosanganisira kuburitsa kuoma Gasi Zvigadzirwa, uko kudzora chimwe chikamu chimwe nechimwe, kusanganisira zvingangoita gaseous Kusvibiswa, isiriyo.

Simbi kusvibiswa chimwezve chinhu chikuru. Aya maatomu esimbi sodium (na), potassium (k) Vanogona kubva pane zvekushandisa, zvigadzirwa zvekugadzira (semapipi uye ma plopelines uye expeles), kana kunyange iyo gasi cylinders ivo pachavo kana vasina kurapwa zvakanaka. Sezvataurwa, izvi kusviba kwesimbi inogona kukanganisa zvakanyanya kuita kwemagetsi kwe semicononductor zvishandiso. Kuona izvi kuPPT mazivha anoda zvakanyanya kuongorora maitiro akafanana neinductively pamwero weplasma misa spectrometry (Icp-ms). Tinofanirawo kufunga nezve zivisa nyaya. Izvi zvidiki zvakasimba kana zvemvura zvimedu zvakamiswa mukati kuyerera kwegesi. Vanogona kukonzeresa kuremara kwemuviri pane wafters, vharira midziyo mumidziyo, kana kuunza zvimwe zvinangwa. Filtration ndeyekuti kubvisa kuendesa zvinyorwa, asi kutarisa mazinga avo zvakare chikamu chehunhu hwakazara mhando yegesi Chirongwa. Vamwe Electronic Specialty Gasi zvakare gasi rinokanganisa kana magasi ane chepfu, iyo inowedzera imwe denderedzwa yekunyanyisa kukwira kwavo uye kuongororwa, kuona kuti Kusachena mbiri haiwedzeredze njodzi idzi.

ICP-MS: Iyo yegoridhe yakaenzana nekuona simbi kusvibiswa muSemiconductor magasi?

Kana zvasvika kune Kuongororwa kwesimbi kusvibiswa mukati Ultra-yakakwirira yekuchenesa magasi, Inductively Colled Plasma Massma SpectRocrometry, kana Icp-ms, inoonekwa zvakanyanya se tekinoroji inotungamira. Iyo ine simba imbudzi yekuongorora iyo inogona kuona uye inokonzeresa huwandu hwakawanda hwe Kusvibiswa kwelemental. Uku kunzwa kwakanyatsojeka nei Icp-ms ave akakosha kwazvo semicononductor indasitiri, kupi, sezvatakakurukura, kunyangwe mitezo yeminiti ye simbi kusvibiswa inogona kukuvadza mhando yechigadzirwa.

Zvinodaro sei Icp-ms shanda mashiripiti ayo? Mumitemo yakapusa, iyo Sampula gasi (kana mhinduro inotorwa kubva kugesi) inounzwa mune inopisa kwazvo plasma, kazhinji yakagadzirwa ne Argon. Plasma iyi, inosvika pakushambadza zviuru mazana matanhatu kusvika zviuru gumi, ndezvekuva 1,000 cu, is simba rakaringana kuputsa mamorekuru mamaira uye ionizai maatomu aripo, kusanganisira chero simbi kusvibiswa. Aya eoni anobva abviswa kubva plasma uye anotungamirirwa kuita misa misa misa. Iyo masendimita misa inoita kunge faira chairo, kupatsanura ion kunoenderana nekwavo-ku-ku-ku-kurira. A Detector Wobva waita kuti ion yeiyo imwe neimwe yakatarwa, ichibvumira kuziva kuti ndeipi zvinhu zviripo uye muhuwandu. Kugona kwe Icp-ms kutarisisa kune yakafara spectrum ye Simbi isina kuchena mumagasi ane hunyanzvi panguva imwe chete inoita kuti ive inoshanda zvakanyanya.

Nepo Icp-ms ine simba rakasimba, harisi nematambudziko, kunyanya kana achibata na magasi anoshandiswa muSemiconductor Kubira. Maitiro akajairika ndewekuteedzera Kusvibiswa kubva pane yakakura vhoriyamu yegesi pane iyo yekuunganidza yepakati kana mumvura, iyo inozoongororwa ne Icp-ms. Nekudaro, zvakananga gasi zvakananga jekiseni mu Icp-ms Sisitimu iri kuitawo zvakawandisa kune zvimwe zvekushandisa, kunyangwe zvinoda nzvimbo dzakasarudzika. Sarudzo yenzira inoenderana nezvakananga kusvibiswa kwegasi yekufarira, iyo matrix gasi, uye inodiwa kuongororwa muganho. KuHuazhong gasi, isu tinoisa zvakanyanya mumamiriro ezvinhu-e-iyo-iyo-art imbiso michina, kusanganisira Icp-ms Kugona, nekuti tinoziva kuti kupa yakavimbika Kuongororwa Kwekuwachira Dhata inokosha kune kuvimba kwedu vatengi vatengi mune edu Yakanyanya Kuchenesa Magetsi magasi. Kunyatsojeka kwe Icp-ms inobatsira kuona kuti kuchena kwemagasi inosangana nezvinodiwa zve Electronic giredhi zvishandiso.

Nei kusunungurwa kwegesi

Kudikanwa kwekusunungura Kuchena kwegesi mu Magetsi uye Semiconductor Maindasitiri Haisi kungoda chete; Chinhu chakakosha chinodiwa neye fizikisi nehupfumi hwekugadzira mudziyo wechigadzirwa. Se semicononductor Chishandiso Chekushandisa Kuderera kweNanometer Chiyero, Kunzwa kwavo kune chero fomu ye kusvibiswa matenga. An Kusachena Izvo zvinogona kunge zvakave zvisina basa mumatanho ekurera, madhiza makuru anogona ikozvino kukonzeresa kutadza kwekutadza mukucheka-mugumo machipisi. Izvi zvakananga zvinopa- perenti yemapepa akanaka pered semicononductor Mugadziri.

Funga nezve iyo yakaomarara yekuvaka yeiyo yemazuva ano microprocessor kana memory chip. Iyo ine mabhiriyoni evatengesi, imwe neimwe inoshamisa yeinjini yeiini. Iko kuita kwevatengesi ava kunoenderana neyechokwadi yemagetsi zvivakwa zve semicononductor zvinhu zvinoshandiswa, izvo zviri, zvichitangira Kusvibiswa. Semuenzaniso, zvimwe simbi kusvibiswa Inogona kuunza isina kuvharwa simba mazinga mukati meiyo silicon band Gap, inotungamira kuwedzera llage yazvino kana yakaderedzwa inotakura yekutakura. Izvi zvinoreva zvishoma, zvishoma zvinoshanda, kana zvisinganyatsoita zvishandiso zvinoshanda. Gaseous Kusvibiswa Saokisijeni kana kunyoreswa kunogona kutungamira kuumbwa kweasina kutongwa oxide lideers, inoshandura mativi efirimu kana interface fungidziro yekugadzirisa mudziyo. Iyo yakazara mhando yegesi Shandura zvakananga ku mhando yechigadzirwa uye kuvimbika.

Uyezve, iyo Magetsi uye Semiconductor Maindasitiri inoonekwa neakanyanya uye inodhura yekugadzira maitiro. Imwe chete semicononductor Fabration Dylation ("Fab") inogona kudhura mabhiriyoni emadhora kuvaka uye kushongedza. The the magasi anoshandiswa inokatyamadza kune akawanda eaya anodhura maitiro matanho. Kana a Specialty gasi yakasvibiswa ne Kusachena, Izvo hazvingori zvinokanganisa mawere parizvino kuitwa; Izvo zvinogona zvakare kusvibisa iyo inodhura yekugadzirisa michina pachayo. Izvi zvinogona kutungamira kune yakawedzerwa nguva yekuchenesa uye nekuwedzera kuwedzera mari uye kukanganisa marongero ekugadzira - nzvimbo huru yemumwe munhu yakaita semako Naizvozvo, simbisai Jehovha Kuchena kweMagetsi Specialty magasi kuburikidza nekunetseka Kuongororwa Kwekuwachira inzvimbo yakaoma yekutadza maitiro ejira rose rekupa. Iyo inotarisa pane Magasi akanyanya ekuchenesa haina kusimba nekuti matanda akakwirira kwazvo.

Matambudziko api makuru atinosangana naro mukuongororwa kwesimbi kusvibiswa kwemagasi akakosha?

Kuongorora simbi kusvibiswa mukati magasi akakosha, kunyanya avo vanoshandiswa mune semicononductor Indasitiri, inopa imwe yakasarudzika matambudziko. Iyo yekutanga yakaoma inobvarura kubva pane yakaderera kwazvo kutarisisa kwairi Kusvibiswa Inogona kuve dambudziko - kazhinji muzvikamu-pamabhiriyoni (ppb) kana kunyange zvikamu-pa-trillion (ptpt) renji. Kuona uye kunyatso kuderedza mari yakadaro miniti inoda kwete chete yakanyanya kuongorora ongororo yekuongorora senge Icp-ms Asi zvakare zvakachena zvakachena nzvimbo -altical nharaunda uye meticulous sampula inobata protocol kuti udzivise zvekunze kusvibiswa.

Imwe dambudziko rakakosha ndeye sumo yekuenzanisira. Vazhinji Specialty magasi anoshandiswa mukati Electronics vane tsika dzakanaka, vanokanganisa, kana kunyange pyrophic (ignite zvinongoerekana mumhepo). Zvakachengeteka uye zvinobudirira kuendesa izvi magasi mune chimbo chekuongorora senge Icp-ms pasina kushandura Sampula gasi kana kusvibisa chiridzwa kunoda zviridzwa zvine hunyanzvi uye maitiro ekubata. Semuenzaniso, zvakananga kujekesa a kupora gasi Sa hydrogen chloride (HCL) kuita chiyero Icp-ms system inogona kukuvadza zvakanyanya. Naizvozvo, nzira dzakasarudzika, dzakadai seyakaverengeka trapping (bubbling gasi kuburikidza nemvura yekubatwa Kusvibiswa) kana cryogenic traipping, inowanzo shanda. Nekudaro, idzi nzira dzinogona kuunza dzadzo dzavanogona kuitika kusvibiswa kana aumbure kurasikirwa kana isina kuitwa zvakakwana. Sarudzo ye kutakura gasi kurumidza, kana zvichidikanwa, ngazvivewo nezvokuita zvisina kujairika kuchena.

Rimwe dambudziko ndiro "matrix maitiro." Iyo bullk gasi pachayo (i.e., Argon, nitrogen, hydrogen) inogona kukanganisa nekuonekwa kwe tsvaga kusvibiswa. Semuenzaniso, mukati Icp-ms, iyo plasma yakaumbwa kubva kuhuwandu gasi inogona kugadzira polyatomic ion ayo ane akafanana-kune-kubhadharisa ratio sechimwe chinangwa simbi kusvibiswa, inotungamira kune yenhema positives kana isingabvumirwe. Zviongorori zvinofanirwa kushandisa maitiro kunge collision / reaction masero mu Icp-ms kana yakakwirira-resolution misa misa spectRometry kukurira idzi dzinopindirana. Uyezve, miganho yekuenderana inoshandiswa kujekesa kusviba kwesimbi inofanirwa kuve yakarurama kwazvo uye inotaridzika, uye maitiro ese imbiso anofanirwa kuvezwa kuti ave nechokwadi chekuvimbika kwe Kuongororwa Kwekuwachira mhinduro. Isu, semutengesi, zvakare kunetseka nezvekuvimbika kwe gasi cylinders uye mukana wavo wekupa simbi kusvibiswa Nekufamba kwenguva, izvo zvinoda kuenderera mberi kudzora kwemhando yepamusoro.

Unogona kushandisa chishandiso chegasi chinosimudzira kusimbisa kweiyo nzira yekutsvagisa kuyerwa kuyerwa?

Ehe, Uchishandisa mudziyo wegasi kuchinjana zvirokwazvo anogona kutamba basa rakakosha mukuwedzera chokwadi che trai kuongororwa kusachena, kunyanya kana uchiita zvinonetsa gasi Matrices kana painenge uchivavarira Ultra-yakaderera Kuona miganhu. A gasi kuchinjana mudziyo, dzimwe nguva zvinonzi matrix ecimination system, kunyanya inoshanda nekusarudza kubvisa huwandu gasi (chinhu chikuru che Sampula gasi) Paunenge uchiisa pfungwa tsvaga kusvibiswa zvekufarira. Iyi pre-ongororo nhanho inogona kuvandudza zvinyadzo zvekunzwa kweanotevera imbeque maitiro akafanana Icp-ms kana gasi chromatograph masisitimu.

Nheyo iri kumashure kwakawanda gasi kuchinjana zvishandiso Inosanganisira hafu-inobvumirwa membrane kana yekusarudza adsorption / desorption mechani. Semuenzaniso, iyo palladium membrane inogona kushandiswa kusarudza inobvisa hydrogen kubva a musanganiswa wegesi, kubvumira zvimwe Kusvibiswa mumagasi kuvezwa uye uendeswa kune a Detector. Saizvozvo, chaiwo adsorbent zvinhu zvinogona kutevedzera zvimwe Kusvibiswa kubva kuyerera gasi rwizi, rinogona kunge rave rakanyoreswa rakanyoreswa mune diki vhoriyamu yeakachena kutakura gasi yekuongorora. Nekuderedza huwandu hwehuwandu hwehuwandu gasi kusvika ku Detector. tsvaga kusvibiswa. Izvi zvinogona kutungamira kune yakaderera muganho wekuonekwa.

Zvakanakira zve Uchishandisa mudziyo wegasi kuchinjana vanonyanya kuoneka kana vachiongorora Kusvibiswa mumagetsi magasi idzo dzakaoma kubata zvakananga kana izvo zvinokonzeresa zvakakanganiswa mukushandisa zviridzwa. Semuenzaniso, kana uchiedza kuyera kutevera okisijeni kana kunyorova mune inobata zvakanyanya Specialty gasi, a gasi kuchinjana mudziyo zvinogona kukanganisa izvi Kusvibiswa mune imwe benji kutakura gasi kunge Argon kana herium vasati vasvika Detector. Izvi hazvinganyatsovandudza kurongeka asi zvinogona zvakare kudzivirira zvinyoro nyoro ongororo. Semugadziri we 99.999% Chain 50l Cylinder Xenon Gasi, isu tinonzwisisa kukosha kwehunyanzvi hwepamberi hwekutanga mukuratidzira kusarudzika kuchena of rare uye magasi akakosha. Iyi tekinoroji inobatsira mune yakaoma Kucheneswa kwegesi uye matanho ekuzivisa.

Iyo Inoshongedza Link: Kuongororwa kwakakwana mumagasi kunoshandiswa zvakananga kuMemiconductor gadzira.

The the magasi anoshandiswa zvakananga muMicononductor gadzira ndivo hupenyu hwehupenyu hwekugadzira maitiro. Izvi zvinosanganisira kwete chete Magasi mazhinji kunge nitrogen uye Argon, asi zvakare urongwa hwakawanda hwe Electronic Specialty Gasi zvakaita se Epitaxial gasi . etching magasi (i.gore, nf₃, sf₆, cl₂ yekutambudza), Ion Firnation magasi . Kune chimwe nechimwe cheizvi magasi anodikanwa, iyo nhanho uye rudzi rwekugamuchirika Kusachena anotsanangurwa nenzira ine tsvina nekuti chero kutsauka kunogona kududzira zvakananga mune urema pane semicononductor wafer. Izvi zvinogadzira Kuongororwa Kwekuwachira nekuda kweizvi maitiro magasi anonyanyisa kudzora nzira dzekudzora nhanho.

Funga nezve kuiswa kweiyo yakaonda silicon Dioxide layer, insulator yakajairika muTransistors. Kana iyo oksijeni gasi rinoshandiswa Zvekuita uku kune hydrocarbon Kusvibiswa. Zvakafanana, kana etching gasi ine zvisingatarisirwi Kusachena. Kunyange an Kusachena mune Inerer Gasi kunge Argon gasi cylinder Inoshandiswa pakupuruzira inogona kuendeswa kune iyo wafer kumusoro, inobata mhando yefirimu. Kukanganisa kwe Kusachena inowanzo process-yakatarwa, ichireva Kusachena yakashivirira mune imwe nhanho inogona kunge iri yakaoma zvinosvibisa mune imwe.

Ichi chinongedzo chakakomba chinoita kuti ive yekunyepedzera kusvika Kuongororwa Kwekuwachira. Hazvisi zvekutarisa chigadzirwa chekupedzisira; Izvo zvinosanganisira kuongorora zvigadzirwa, mu-maitiro hova, uye yekupedzisira gasi kuchenesa matanho. For Semiconductor Specialty magasi, zvirevo zve Kusvibiswa muSemiconductor Zvishandiso zvinowanzove zvakanyanyisa kusimba, zvichisundira miganhu yekuongororwa kwekuongororwa. Isu tinoshanda padhuze nevatengi vedu mu semicononductor uye magetsi munda kuti unzwisise yavo chaiyo Kusachena Sensitivitions dzakasiyana magasi uye gasi musanganiswa. Iyi nzira yekubatana inobatsira kuona kuti Kuchiva kwakakosha magasi Isu tinopa nguva nenguva kusangana nezvinodiwa zvinodiwa zvemaitiro avo epamberi ekugadzira. Dambudziko Rirene Mukuona A dzakasiyana siyana dzekusvibiswa panguva dzose dzinoderera.

Pamusoro peiyo lab: Zvakanakisa maitiro ekubata zvakanyanya-zvakanyanyisa semiconductor magasi ekudzivirira kusvibiswa.

Kuverengera Kuchena kweMagetsi Specialty magasi haaperi kana iyo gasi Inosiya yedu yekugadzira nzvimbo. Kuchengetedza izvo kuchena nzira yese kusvika padanho rekushandisa mu semicononductor Fab inoda kutarisisa kutarisisa kwekubata, kuchengetedza, uye kugovera. Kunyange zvakakwirira kwazvo Kuchenesa gasi inogona kusvibiswa kana isina kubatwa nemazvo. KuHuazhong gasi, isu hatingo tarisisa pakugadzira yakakwirira-yakachena magasi asi zvakare kuraira vatengi vedu pane zvakanakisa maitiro ekudzivirira kutsikisa kusvibiswa.

ZVINOKOSHA ZVINOKOSHA ZVINOGONESA ZVINOGONESA:

• Chikamu chekusarudzwa: Zvese zvikamu mune gasi rekutumira system - kusanganisira gasi cylinders, vanozvironga, macurs, kurongedza, uye kukodzera - vanofanirwa kugadzirwa kubva pazvinhu zvakakodzera (i.e., electropolists simbi) uye kuve yakanatswa uye yakasimbiswa Ultra-yakanyanya kuchena (UHP) sevhisi. Uchishandisa zvisiri izvo zvinhu zvinogona kutungamira mukuputika kwe Kusvibiswa kana a Simbi yekusachena kusimuka mu kuyerera kwegesi.
• Kuendeka kweSystem: Iyo gasi yekuendesa system inofanira kunge iri kusvetuka-yakasimba. Kunyangwe zvidiki zvidiki zvinogona kubvumira kudenga zvinangwa kunge oxygen, kunyorova, uye zivisa nyaya yekupinda iyo system, kukanganisa Kuchena kwegesi. Kugara uchiongorora kucherechedzwa kwakakosha.
• Zvinatsiririsa Maitiro: Maitiro akakodzera ekuchenesa akakosha nguva dzose nguva yekubatana kunoitwa kana silinda inoshandurwa. Izvi zvinosanganisira kupwanya mitsara ne Yakanyanya Kuchena Inerer Gasi (sa Argon kana nitrogen) kubvisa chero mhepo yakashandurwa kana Kusvibiswa. Isina kukwana chinatsa chinhu chakajairika kusvibiswa. Isu tinowanzo kurudzira otomatiki purge mapaneru kuti ive nechokwadi chekuenderana.
• Zvishandiso Zvakazvitsaurira: Uchishandisa marudzi akazvitsaurira nemitsetse yeiyo chaiyo magasi kana mhuri dze magasi inogona kudzivirira kuyambuka-kusvibiswa. Izvi zvinonyanya kukosha kana uchinja pakati pe Inerer Gasi uye inoshanda kana kupora gasi.
• Silinda Kubata: Gasi cylinders inofanira kubatwa nekutarisirwa kuti udzivise kukuvara. Vanofanira kuchengetwa munzvimbo dzakasarudzwa, dzakagwinya, uye "kutanga-mukati, yekutanga-kunze" manejimendi "anofanirwa kuitwa. Uchishandisa yakazvitsaurira nyoro uye oksijeni Zviongorori pazvinhu zvakakomba zvinogona zvakare kubatsira kutarisa chero ingress yeiyi yakajairika Kusvibiswa.

Kune vatengi vakaita saMark Shen, avo vane magasi emagasi ekushandiswa kana kushandiswa mukugadzira, vanonzwisisa aya maitiro ekubata kwakakosha kuti achengete mhando yechigadzirwa vanovimbisa kune avo vatengi. Ibasa rakagoverwa. Isu tine chokwadi chedu Hydrogen cylinder Zvigadzirwa, semuenzaniso, zvizere uye zvinochengetwa kudzivirira Kusachena Ingress, asi iyo yekupedzisira-yemushandisi system inoita basa rakakosha zvakafanana. Kurwa Kusachena Kuedza kusingaperi kubva pakugadzirwa kwekushandisa.

Kutarisa muBallstal Bhora: Inzvimbo ipi yemangwana yatingatarisira kuwanikwa kwekusachena kwemagirazi giredhi remagetsi?

Kutsvaga kwekusingaperi-kumusoro kuchena mukati Magetsi egiredhi magasi uye unonzwisisika Kuwanikwa Kwekuwona Nzira dzerwendo rwekuenderera mberi, rwunofambiswa neyakawisirwa nhanho yekuvandudza mu semicononductor indasitiri. Sechishandiso chimiro chinopera mukati mechikamu-chegumi nanometer realm uye zvigadzirwa zvitsva uye muzvivakwa zvinobuda (senge 3d nand ne gate-kutenderedza transists), kukanganisa kwekutenderera tsvaga kusvibiswa ichataurwa zvakanyanya. Izvi zvichaita kumwe kufambira mberi mune zvese zviri zviviri Kucheneswa kwegesi Tekinoroji uye Kuongororwa Kwekuwachira kugona.

Tinogona kutarisira maitiro akati wandei:

• Yakaderera kuongororwa miganhu: Nyanzvi dzekuongorora senge Icp-ms. Kuona miganhu kune yakafara huwandu hwekusvibiswa pasi kune imwe-manhamba manhamba PPT mazinga kana kunyange muPPQ domain. Izvi zvinoda kugadzirwa mune ION zvinyorwa, zviongorori zvevakawanda, uye Detector Tekinoroji.
• In-sit uye chaiyo-nguva yekutarisa: Pane kudiwa kwekuwedzera kweiyo ongororo yekuongorora iyo inogona kuongorora Kuchena kwegesi mune chaiyo-nguva, zvakananga panguva yekushandisa mukati me semicononductor machira. Izvi zvinobvumidza kukwezva chero kupi zvako kusvibiswa zviitiko kana kufambisa mukati Kusachena mazinga, anogonesa kukurumidza kugadzirisa chiito uye kuderedza kurasikirwa kwechigadzirwa. Miniaturized sensors uye advanced emometric algorithms ichatamba yakakosha pano pano.
• Kuongororwa kweiyo yakaoma gasi musanganiswa: Remangwana semicononductor Maitiro anogona kusanganisira zvakanyanya kuoma Misanganiswa yegesi nezvikamu zvakawanda zvinoitika. Kuongorora Kusvibiswa Mune zvakadai zvinonetsa matrices anozoda matsva ekuongorora mazano uye akaomesesa data kududzira zvishandiso zvekushandisa. Kugona kuyera Kusachena mune chimwe chinhu kunze kwekukanganisa kubva kune vamwe zvichave zvakakosha.
• Tarisa pane "mhondi" Kusvibiswa: Tsvagiridzo icharamba ichinyatsoratidza zvakananga Kusvibiswa muSemiconductor Kugadzirisa izvo zvine zvisingaiti zvakarongeka zvinokanganisa pane zvekuita kana goho, kunyangwe pamatanho akaderera. Nzira dzekuongorora dzichava dzakanyanyovanzika kune idzi "mhondi" idzi Kusvibiswa.
• Anaye analytics uye ai: Iyo yakakura yakawanda data inogadzirwa neyakafambira mberi Kuongororwa Kwekuwachira Systems ichave yakaderedzwa uchishandisa AI uye muchina wokudzidza kuratidza maitiro, kufanotaura zvinogona kuitika kusvibiswa nyaya, uye funga Kucheneswa kwegesi maitiro. Izvi zvinogona kubatsira mumhando yekugadzirisa maitiro pane kuita dambudziko rekugadzirisa dambudziko.

PaHuazhong gasi, isu takazvipira kugara pamberi pezviitiko izvi. Isu tinoramba mari yekutsvaga nekuvandudza, kubatana neindasitiri neindasitiri uye edzidzo dzedzidzo kuti ufambire mberi sainzi ye Yakanyanya Kuchenesa Gasi kugadzirwa uye Kuongororwa Kwekuwachira. Kune vatengi vedu, kusanganisira izvo sehunhu-hunoziva saMark Shen, izvi zvinoreva kuvimbika kwe Electronic Specialty Gasi izvo zvinosangana nezvinodiwa zvinovandudza zve Magetsi uye Semiconductor Maindasitiri. Mhando yedu ye Helium, inozivikanwa nekuda kwekushandiswa kwayo uye shandisa mukunyorwa kwenyama, zvakare kubatsirwa kubva kune izvi zvinofambira mberi kuongorora kuongororwa kuti uone mashoma Kusachena mazinga.

Key Dealoways kuyeuka:

• Electronic Specialty Gasi zvakakosha kuna Semiconductor Exeruring, uye yavo kuchena haina kutaurwa.
• Kunyange tsvaga kusvibiswa, yakayerwa muPPT, inogona kukonzeresa kuremara kwakakura uye kubereka kurasikirwa mukati semicononductor zvishandiso.
• Zvakajairika Kusvibiswa mumagasi Sanganisira mamwe magasi (seO₂, H₂O), simbi kusvibiswa, uye zivisa nyaya.
• Icp-ms inyanzvi yekonazenti yekuona a dzakasiyana siyana dzekusvibiswa, kunyanya simbi kusvibiswa, kuIltra-yakaderera mazinga.
• Kuchengetedza Kuchena kwegesi inoda meticuusous kubata uye kurongeka kwekuvimbika kubva ku gasi cylinder kusvika padanho rekushandisa kudzivirira kusvibiswa.
• Ramangwana richaona kunyange kuderera Kuona miganhu, chaiyo-nguva yekutarisa, uye AI-inotyairwa Kuongororwa Kwekuwachira for Electronic giredhi magasi.
• Kudzora zvese zvinogona kuitika Kusachena zvakakosha kuti uve nechokwadi mhando yechigadzirwa uye kuvimbika kweazvino Electronics.