2. Sei Semiconductor Indasitiri Inoda Kuchena Kwakazara

Kuti unzwisise kukosha kwekuchena kwepamusoro-soro, munhu anofanira kunzwisisa chiyero chemazuva ano semiconductor kugadzira. Mazuva ano machipisi epamusoro anoratidza transistors ayo angori mashoma nanometer akafara. Kuisa izvi mumaonero, tambo imwe chete yebvudzi remunhu ingangoita 80,000 kusvika 100,000 nanometers gobvu.

Paunenge uchivaka zvimiro pamwero weatomu, molekuru imwechete yeokisijeni kana kadonhwe kadiki kemvura kanogona kukonzera kutadza kukuru.

• Oxidation: Okisijeni isingadikanwi inogona kuita neyakapfava silicon zvimiro, ichichinja iwo magetsi emagetsi.

• Particulate Contamination: Kunyangwe chidimbu chimwechete chakarasika chinogona kupfupika-sekita nanoscale transistor, ichipa chikamu chose chemicrochip chisingabatsiri.

• Kuderedza goho: Muchigadzirwa chekugadzira zviuru zvemawafer pasvondo, kudonha kushoma kwegoho nekuda kwekusvibiswa kwegasi kunogona kududzira kumakumi emamiriyoni emadhora mumari yakarasika.

Saka, the semiconductor liquid argon inounzwa munzvimbo dzakachena dzinofanirwa kunge dzisina chero zvinosvibisa zvinokonzeresa.

3. Core Applications yeSemiconductor Liquid Argon

Rwendo rwesilicon wafer kubva kune yakabikwa kusvika kune yakapedzwa microprocessor inotora mazana ematanho akaomarara. Ultra-yakakwirira kuchena mvura argon yakanyatsobatanidzwa mune akati wandei ezvikamu zvakakosha zverwendo urwu.

3.1. Silicon Crystal Kudhonza (Iyo Czochralski Maitiro)

Hwaro hwechero microchip ndiyo silicon wafer. Aya mawafer anochekwa kubva kune hombe, imwe-crystal silicon ingots inokura uchishandisa iyo Czochralski (CZ) nzira. Mukuita uku, polycrystalline silicon yakacheneswa kwazvo inonyungudutswa mu quartz crucible patembiricha inopfuura 1,400 ° C. Mbeu yekristaro inounzwa uye zvishoma nezvishoma inodhonzwa kumusoro, ichidhirowa yakakwana cylindrical crystal kubva mukunyunguduka.

Munguva iyi yakanyanyisa kupisa maitiro, iyo silicon yakanyungudutswa inoshanda zvakanyanya. Kana ikasangana neokisijeni kana nitrogen, inoumba silicon dioxide kana silicon nitride, ichiparadza iyo yakachena crystalline chimiro. Pano, argon inoshanda semudziviriri wekupedzisira. Choto chinoramba chichicheneswa ne vaporized Ultra-yakakwirira kuchena mvura argon kugadzira mhepo inert zvachose. Nekuti argon inorema kupfuura mweya, inoumba gumbeze rekudzivirira pamusoro pesilicon yakanyungudutswa, ichiva nechokwadi chekuti ingot inoguma yakarongeka uye haina hurema hudiki.

3.2. Plasma Etching uye Deposition

Machipisi emazuva ano akavakwa muzvikamu zve 3D. Izvi zvinosanganisira kuisa ma microscopic layers e conductive kana insulating zvinhu pawafer uye wobva wabvisa mativi chaiwo kugadzira maseketi.

• Sputtering (Physical Vapor Deposition - PVD): Argon ndiyo gasi rekutanga rinoshandiswa mukupopota. Mukamuri yekutsvaira, argon gasi inoiswa muplasma. Aya argon ion anochajiswa zvakanaka anobva akwidziridzwa kuita chinhu chinonangwa (semhangura kana titanium). Iyo sheer kinetic simba reiyo inorema argon ion inogogodza maatomu kubva pachinangwa, iyo inozoisa zvakaenzana pasilicon wafer. Argon inosarudzwa nekuti huremu hwayo hweatomiki hwakanyatsokodzera kubvisa maatomu esimbi zvakanaka pasina kuita zvemakemikari nawo.

• Deep Reactive Ion Etching (DRIE): Kana vagadziri vachida kudzika yakadzika, yakanyatsojeka migero musilicon-yakakosha kundangariro machipisi uye kurongedza kwepamberi-argon inowanzosanganiswa nemagasi anogadzika kudzikamisa plasma uye kubatsira kubhomba pamusoro pewafer, kutsvaira zvakamisikidzwa.

3.3. DUV uye EUV Lithography (Excimer Lasers)

Lithography maitiro ekushandisa mwenje kudhinda mapatani edunhu pawafer. Sezvo masekete adzikira, vagadziri vakatofanira kushandisa mwenje nekuwedzera mapfupi marefu. Apa ndipo liquid argon zvemagetsi pindirana nefizikisi yemaziso.

Deep Ultraviolet (DUV) lithography inovimba zvakanyanya neArF (Argon Fluoride) excimer lasers. Aya ma lasers anoshandisa musanganiswa wakanyatsodzorwa weargon, fluorine, uye neon magasi kugadzira mwenje wakanyanya kutariswa nehurefu hwe193 nanometers. Kuchena kweargon inoshandiswa mune idzi laser cavities yakaoma kwazvo. Chero tsvina inogona kushatisa laser optics, kuderedza kusimba kwechiedza, uye kukonzera kuti lithography process idhinde mafirita kana akaremara maseketi.

Kunyangwe mumasisitimu matsva eExtreme Ultraviolet (EUV) lithography, argon inoita basa rakakosha segasi rekuchenesa kuchengetedza magirazi masisitimu akapfava, akaomarara asina zvachose kusvibiswa kwema molecular.

3.4. Annealing uye Thermal Processing

Mushure mekunge madopants (se boron kana phosphorus) akaiswa musilicon kuti achinje magetsi ayo, chidimbu chinofanirwa kupiswa kusvika pakupisa kwakanyanya kugadzirisa kukuvadzwa kwecrystal lattice uye kumisa madopants. Kuita uku, kunozivikanwa sekuti annealing, kunofanirwa kuitika munzvimbo inodzorwa, isina oxygen kudzivirira nzvimbo yewafer kubva mukuokisisa. Kuenderera mberi kuyerera kwe-ultra-pure argon kunopa iyi yakachengeteka nzvimbo yekupisa.

4. Liquid Argon Electronics: Kusimbisa Inotevera Generation yeTech

Izwi iri liquid argon zvemagetsi inopindirana zvakanyanya ne ecosystem yezvigadzirwa zvepamusoro-soro uye maitiro ekugadzira anoenderana neiyi cryogenic material. Sezvo isu tichipinda munguva inotongwa neArtificial Intelligence (AI), iyo Internet yezvinhu (IoT), uye mota dzinozvimiririra, kudiwa kwemachipi ane simba, anochengetedza simba ari kukwira mudenga.

1. AI Accelerators uye GPUs: Iwo mahombe graphical processing units (GPUs) anodiwa kudzidzisa maAI mamodheru semhando dzemitauro mikuru inoda zvakakura zvisingaite, isina hurema-silicon inofa. Iyo yakakura kufa, inowedzera mukana wekuti kusachena kumwe chete kunogona kukanganisa chip yese. Nzvimbo isina mhosva yakapihwa neUHP argon haigone kutaurirana pano.

2. Quantum Computing: Sezvo vaongorori vachigadzira quantum makomputa, iyo superconducting zvinhu zvinoshandiswa kugadzira qubits zvinoda nzvimbo dzekugadzira dzine pedyo-zero kusvibiswa. Kuchenesa kweArgon kwakakosha mukugadzirira kwecryogenic uye kugadzirwa kweaya anotevera-chizvarwa processors.

3. Power Electronics: Motokari dzemagetsi dzinovimba neSilicon Carbide (SiC) uye Gallium Nitride (GaN) magetsi machipisi. Kukura aya emusanganiswa semiconductor makristasi kunoda kunyangwe tembiricha yakakwira kupfuura yakajairwa silicon, zvichiita kuti inert yekudzivirira zvimiro zveargon zvakanyanya kukosha.

5. Kukoshera kweiyo Supply Chain uye Sourcing

Kugadzira yekupedzisira-yakanyanya kuchena mvura argon kunoshamisa kweazvino makemikari engineering. Inowanzo kutorwa kubva kumhepo uchishandisa cryogenic fractional distillation mumhepo huru yekuparadzanisa zvikamu (ASUs). Zvisinei, kugadzira gasi inongova hafu yehondo; kuendesa kune semiconductor chishandiso pasina kurasikirwa nekuchena kwakaoma zvakaenzana.

Kudzora Kusvibiswa Panguva Yekufambisa

Yese vharafu, pombi, uye tangi yekuchengetedza inobata iyo Ultra-yakakwirira kuchena mvura argon inofanira kunge yakanyatsogadzirwa nemagetsi uye pre-yakacheneswa. Kana tangi yekutakura iine kunyange microscopic inodonha, mhepo yemuchadenga haingobvumiri argon kubuda; tembiricha ye cryogenic inogona kunyatso kudhirowa tsvina yemuchadenga mukati, kuparadza boka rose.

Padanho rejira, iyo argon yemvura inochengetwa mumatangi makuru evacuum-insulated akawanda. Inobva yapfuudzwa kuburikidza neakanyanya hunyanzvi vaporizer uye poindi-ye-kushandisa gasi kuchenesa isati yapinda mukamuri yekuchenesa.

Kuchengetedza kuenderera mberi, kusingakanganiswe kugadzirwa, vagadziri ve semiconductor vanofanirwa kudyidzana nevepamusoro-tier gasi vatengesi vakaziva iyi yakaoma yekugovera ketani. Kune zvivakwa zvechizvino-zvino zvinotarisa kuchengetedza inoenderera, yakavimbika kupihwa kweiyi yakakosha zvinhu ine yakavimbiswa kuchena metrics, kuongorora yakasarudzika maindasitiri gasi mhinduro kubva kune vanovimbika vanopa senge. Huazhong gasi inovimbisa kuti miitiro chaiyo inosangana uye nguva yekugadzira inobviswa.

6. Mafungiro Ehupfumi uye Ezvakatipoteredza

Iyo sheer volume yeargon inopedzwa negigafab yemazuva ano inoshamisa. Imwe hombe hombe semiconductor yekugadzira nzvimbo inogona kushandisa makumi ezviuru emacubic metres e-ultra-pure gasi zuva rega rega.

Sustainability uye Recycling

Nekuti argon igasi rakanaka uye haipedzwe kemikari mune dzakawanda semiconductor maitiro (inoshanda zvakanyanya senhoo yemuviri kana plasma yepakati), kune kukura kuri kuwedzera mukati meindasitiri ye argon kudzoreredza uye kudzokorodza masisitimu. Machira epamberi ari kuwedzera kuisa onsite kudzoreredza mayunitsi anotora argon exhaust kubva kukristaro kudhonza mavira uye makamuri ekupfirira. Gasi iri rinobva racheneswa zvakare munharaunda. Izvi hazvisi izvo chete zvinoderedza zvakanyanya mari yekushanda kwefab, asi zvakare inodzikisa kabhoni tsoka ine chekuita nekunyungudutsa uye kutakura nyowani argon mhiri kureba.

7. Ramangwana reArgon muAdvanced Node Manufacturing

Sezvo iyo semiconductor indasitiri inosundidzira yakananga 2nm, 14A (angstrom), uye kupfuura, dhizaini ye transistors iri kuchinja. Tiri kutama kubva kuFinFET kuenda kuGedhi-All-Around (GAA) uye pakupedzisira kuenda kumakwikwi eFET (CFET).

Aya ma 3D maumbirwo anoda atomic layer deposition (ALD) uye atomic layer etching (ALE) -maitiro anoshandisa silicon chaiko atomu imwe panguva. MuALD neALE, mapurusi akanyatsodzorwa eargon anoshandiswa kuchenesa kamuri yekupindura pakati pemakemikari madhizi, kuve nechokwadi chekuti maitiro anongoitika chaizvo paanotarisirwa pamusoro peatomu.

Sezvo kunyatsowedzera kunowedzera, kuvimba nayo semiconductor liquid argon zvichawedzera chete. Izvo zvinodikanwa zvekuchena zvinogona kutopfuura izvo zvazvino 6N zviyero, zvichisundira munzvimbo ye7N (99.99999%) kana kupfuura, zvichifambisa humwe hunyanzvi mukucheneswa kwegasi uye matekinoroji emetrology.

Mhedziso

Zviri nyore kushamiswa nemicroprocessor yakapedzwa—chidimbu chesilicon chine mabhiriyoni emachinjo asingaoneki anogona kuita matiriyoni ekuverenga pasekondi. Asi, uku kukuru kweinjiniya yevanhu kunotsamira chose chose pazvinhu zvisingaoneki zvinoigadzira.

Ultra-yakakwirira kuchena mvura argon hachisi chinhu chinongodiwa; ndiyo mbiru yekutanga yeindasitiri yesemiconductor. Kubva pakudzivirira kuzvarwa kwakanyungudutswa kwesilicon crystals kugonesa plasma inoveza nanometer-scale maseketi, argon inovimbisa pristine nharaunda inodiwa kuchengetedza Mutemo waMoore uri mupenyu. Semiganhu ye liquid argon zvemagetsi kuwedzera kutsigira AI, quantum computing, uye advanced power management, kudiwa kweiyi yakachena, inert fluid icharamba iri simba rekufambisa kumberi kwepasirese tekinoroji.

FAQs

Q1: Sei mvura argon inosarudzwa pane mamwe magasi anert se nitrogen kana helium mune mamwe semiconductor maitiro?

A: Nepo nitrogen yakachipa uye ichishandiswa zvakanyanya segasi rekuchenesa, haina kunyatso inert pakupisa kwakanyanya; inogona kuita nesilicon yakanyungudutswa kuita silicon nitride defects. Helium inert asi yakareruka uye inodhura. Argon inorova "nzvimbo inotapira" -inonyura zvachose kunyangwe pakupisa kwakanyanya, inorema zvakakwana kuvharidzira silicon yakanyungudutswa, uye ine huremu hweatomu hwakakwana hwekubvisa maatomu panguva yekupwanya kweplasma pasina kukonzera kusarudzika kwemakemikari.

Q2: Ko iyo yekupedzisira-yakanyanya kuchena mvura argon inotakurwa kune semiconductor yekugadzira zvidyarwa (machira) pasina kusvibiswa?

A: Kuchengetedza kuchena panguva yekufambisa idambudziko guru rekushandisa. UHP liquid argon inotakurwa mune yakasarudzika, yakanyanya insulated cryogenic tanker marori. Nzvimbo dzemukati dzematangi aya, pamwe nemavharuvhu ese uye mahosi ekutamisa, anokwenenzverwa nemagetsi kusvika pagirazi kupera kudzivirira kubuda uye kubuda kwechidimbu. Isati yarodha, sisitimu yese inopinda nekunatswa kwevacuum. Pakusvika pamucheka, gasi rinopfuura nepanzvimbo-yekushandisa-kuchenesa inoshandisa makemikari getter tekinoroji kubvisa chero yakarasika ppt-level (zvikamu patrillion) tsvina isati yasvika argon.

Q3: Ndeipi chaiyo yekuchena nhanho inodiwa kune "semiconductor liquid argon," uye inoyerwa sei?

A: Pakugadzira semiconductor yepamusoro, argon kuchena kunofanirwa kunge kuri "6N" (99.9999% yakachena), kunyangwe mamwe maitiro ekucheka-kumucheto anoda 7N. Izvi zvinoreva kuti tsvina yakaita seokisijeni, unyoro, uye mahydrocarbons anoganhurirwa kuchikamu chimwe pamiriyoni (ppm) kana kunyange zvikamu pabhirioni (ppb). Aya minuscule kusachena mazinga anoyerwa munguva chaiyo-chaiyo pamucheka uchishandisa yakanyanya kutarisisa michina yekuongorora, yakadai seCavity Ring-Down Spectroscopy (CRDS) uye Gasi Chromatography ine mass spectrometry (GC-MS), kuve nechokwadi chekuenderera kwekutonga kwemhando.