Indasitiri yeSemiconductor, seyakavandudzwa kwemazuva ano tekinoroji, inosanganisira yakawanda yakakwirira-yakakwirira-yakachena magasi mukugadzira maitiro ayo ekugadzira. Magasi akakosha e semiconductors anoreva magasi anotamba basa rinokosha muSemiconductor Sums Production, Chip Aya magasi anofanirwa kusangana nezvinodiwa zvekuchena, kugadzikana, uye chaiko kutonga pamusoro penzira yekuita. Chinyorwa ichi chinosvitsa magasi anoverengeka chaiwo anoshandiswa mune semiconducanyika uye kurukurai mabasa avo mumifananidzo yeMicononductor yekugadzira.

1. Hydrogen (h₂)

Hydrogen inoshandiswa zvakanyanya mumacompondust MuCVD, hydrogen kazhinji inowanzo kusanganiswa nemamwe magasi kuti ikurire mafirimu akaonda, akadai sefilic mafirimu. Hydrogen zvakare inoita seyekudzora mumiririri muSimbi Deposition uye oxide kubvisa maitiro. Pamusoro pezvo, hydrogen inoshandiswa mukuchenesa uye kurapa semiconductor anofamba zvakanaka kubvisa zvinyaradzi zvinokatyamadza uye kuvandudza kunaka kwemachipisi.

2. Nitrogen (n₂)

Nitrogen. Izvo zvinowanzoshandiswa mumidziyo kuchenesa, maitiro ekutonhora, uye sediki mune maitiro ekuita. Mumapepa ekupfekedzwa uye maitiro ekutora, nitrogen inowanzo kusanganiswa nevamwe magasi kuti isimbise maitiro ekugadzirisa uye kudzora maitiro ekuita. Nitrogen inoshandiswawo kudzvinyirira oxidation, inodzivirira yakadzivirirwa zvigadzirwa kubva kune oxidation kukuvara.

3. Oxygen (O₂)

Oxygen inotamba chikamu chakakosha muindasitiri yeSemiconductor, kunyanya mune oxidation maitiro. Mukuumbwa kweiyo silicon dioxide layer pamusoro peiyo silicon Wafers, oksijeni yakakosha. Nekusvitsa okisijeni, yunifomu yehusiku denderedzwa mafomu pane iyo silicon pamusoro, iyo yakakosha pakubata kwemagetsi uye kushanduka kwemidziyo. Oksijeni inoshandiswawo mukuchenesa uye maitiro ekuchenesa, kuita nemamwe ma gasi emakemikari kuumba oxides kana kubvisa mamwe mafirimu esimbi.

4. Carbon tetrafluoride (cf₄)

Kabhoni tetrafluoriori inoshandiswa zvakanyanya mumabasa etching. MuSemiconductor etching, CF₄ inosanganiswa nevamwe magasi kuti ubvise zvinobudirira mafirimu akaonda eSilicon, Silicon nitride, simbi, uye zvimwe zvinhu. Kana CF₄ inosanganisa neFluorine, inogadzira fluorine, iyo ine chekuita zvakanyanya uye inogona kushanda zvakanaka etch yezvinyorwa zvinangwa. Iyi gasi yakakosha kune yakakwirira-chaiyo maitiro ekutambisa mukubatanidzwa wedunhu.

5. Hydrogen chloride (HCL)

Hydrogen chloride gasi inonyanya kushandiswa segomba rekutora, kunyanya mukugadzirisa kwezvinhu zvesimbi. Inobata nemafirimu esimbi kuti aumbe chlorides, ichibvumira iyo simbi matanho kuti abviswe. Maitiro aya anoshandiswa zvakanyanya mukutakura kwemafirimu esimbi akaonda, anoverengera chaiyo yeiyo chip zvivakwa.

6. Nitrogen Trifluoride (NF₃)

Nitrogen trifluide inonyanya kushandiswa kuchenesa nzvimbo dzakasarudzika mune plasma etching michina. MuPlasma etching maitiro, NF₃ inoshandisa nezvinhu zvakaiswa pasi (senge silicon fluorides) kuti iite fluvable inobvisa furuori. Gasi iri rinobudirira zvakanyanya mukuchenesa, kubatsira kuchengetedza kuchena kwemidziyo yekugadzira uye kugadzirisa chokwadi uye kushanda kwemaitiro ekugadzira.

7. Silane (Sih₄)

Silane igasi rinowanzoshandiswa mumakemikari apor position (CVD), kunyanya yekuisa silicon yakaonda mafirimu. Silane inodaidza kupisa kwakakwirira kuti ugadzire mafirimu eSilicon pane substrate pamusoro, iyo yakakosha kuMemiconductor yekugadzira. Nekugadzirisa kuyerera kweSilane uye maitiro emamiriro ezvinhu, chiyero chefirimu uye chimiro chefirimu chinogona kuve chakanyatsotongwa.

8. Boron Trifluoride (BF₃)

Boron Trifluori ndeye yakakosha doping gasi, kazhinji inoshandiswa muBoron Disping maitiro muSemiconductor kugadzira. Izvo zvinoshandiswa kugadzirisa zvivakwa zvemagetsi zvekristaro nekuita neiyo silicon substrate kuumba iyo yaunoda doping layer. Maitiro eBoron Docing akakosha pakugadzira P-Type Semiconductor zvinhu, uye BF₃ gasi rinoita basa rakaoma mune izvi maitiro.

9. Sarufa Hexfluoride (SF₆)

Sarufa hexfluoride inonyanya kushandiswa muMicemonductor etching maitiro, kunyanya mukunyatsojeka kwetching. Nekuda kweiyo yakakwira magetsi ekusimbisa zvivakwa uye makemikari kugadzikana, SF₆ inogona kusanganiswa nevamwe magasi kuti ubvise zvakanyatso bvisa mafirimu emidziyo uye anovimbisa maitiro echokwadi. Iyo zvakare inoshandiswa zvakanyanya muIon etching, zvinobudirira kubvisa zvakanaka mafirimu asingadiwe.

Mhedziso

Specialty magasi e semiconductutors anotamba nzvimbo isiriyo mukugadzirwa kwezvinhu zvakabatanidzwa. Sezvo tekinoroji inoramba ichisvika, kudiwa kwekuchena kwakanyanya uye kuita kweaya magasi aya anowedzera, kukurudzira vatengesi kuti vagare vachigara nemhando yemagasi. Mune ramangwana, indasitiri yeSemiconductor icharamba ichivimba nemagasi aya akakosha kuti atsigire kugadzirwa kwemachipisi anotevera-chizvarwa uye hunyanzvi. Naizvozvo, kunzwisisa uye kushandisa Semiconductor Specialty magasi anozove akaoma mukutyaira kuenderera mberi kweiyo Semiconductor Indasitiri.