Tave tichimhanya fekitori kuChina iyo inoenderana nekugadzira magasi maindasitiri. Kubva pane yangu nzvimbo yekutandarira, ndakapupurira kushanduka-shanduka kwekushanduka-shanduka kwehunyanzvi, zvese zvinopihwa nechimwe chinhu vanhu vazhinji havamboone: Ultra-yakanyanya kuchena magasi. Mishonga madiki mufoni yako, komputa, uye mota iri mashandisirwo einjiniya yemazuva ano, asi chisikwa chavo hazvigoneke pasina chaicho uye chisina kupfekedzwa kweiyi magasi ane hunyanzvi.

Iwe unonzwisisa kukosha kwemhando uye yakavimbika yekugovera keteni, asi iwe unogona kushamisika sei zviyero zveMicononductor magasi akakwira kwazvo. Nei kutumirwa kweArgon kuchida kuve 99.9999% yakachena? Iyi nhungamiro ichadzosera chidzitiro chiri pasi pepasi pemiconondductor. Isu tichaongorora iwo ma gasi chairo anoshandiswa, izvo zvavanoita, uye kuchena kwavo ndicho chiitiko chakanyanya kutsoropodza. Pakupera, iwe uchave nekunzwisisa kwakajeka kwezvigadzirwa iwe unobva uye kuve wakashongedzerwa zviri nani kutaura kukosha kwavo kune vatengi vako.

Nei magasi akakosha akanyanya kudengenyeka kweMiconondUctor Fibraction?

Fungidzira kuvaka skyscraper uko imwe chete yezviyo zvisizvo yejecha inogona kukonzera iyo yakazara chimiro kupuruzira. Ndiyo mwero wekusarudza zvinodiwa mu Semiconductor Exeruring indasitiri. Iyo "Kuvakwa maburi" endonzi iyi haisi zvidhinha uye mongwe, asi maatomu, uye "zvishandiso" zvinowanzove magasi ane hunyanzvi. Izvo zvese Kugadzira ye Yakabatanidzwa Circuit zvinoitika pane microscopic chiyero, uko matanda emidziyo, kazhinji maatomu mashoma chete, anoiswa mukati kana kuiswa kure kubva a Silicon Wafer.

Izvi Semiconductor maitiro vanomisikidza. Chero chisingadiwe chidimbu kana chemakemikari Kusachena inogona kukanganisa iyo yakaomesesa yekuvaka yeMicrochi, ichishandura haina basa. Apa ndipo magasi anoshandiswa. Ivo vanogadzira nzvimbo dzekupedzisira-dzakachenesa, dzinopa zvigadzirwa zvemidziyo mitsva, uye ita semakemikari "massaira" ayo anovhara nzira dzakaomesesa emagetsi. The the Semiconductor yekugadzira maitiro kutamba kwakaoma kwe makemikari maitiro, uye magasi ndiwo mutambi anotungamira. Pasina nguva dzose, yakavimbika, uye yakasarudzika yakachena yeaya magasi, zvemagetsi zvemagetsi hazvingaripo.

The the magasi anoshandiswa muSemiconductor Kugadzira hausi zvigadzirwa zvako zveindasitiri. Ivo vane mainjinwi kuti vasangane nekuchena mazinga ayo akaoma kunzwisisa, anowanzo kuyerwa muzvikamu pamabhiriyoni kana kunyange zvikamu pane trillion. Izvi zvinodaro nekuti kuita kwe Semiconductor Matombo inosungirwa zvakananga kune kukwana kwechimiro chavo cheatomu. Iyo inoshanda moleky yeokisijeni kana mvura yemvura mune izvo zvinofanirwa kunge zviri inert gasi inogona kukonzera oxidation, kuchinja iyo zvivakwa zvemagetsi wedunhu uye zvichitungamira kuremara. Ndokusaka Specialty Gasi Maindasitiri Zvakakosha kune nyika ye tekinoroji.

Ndeapi mapoka makuru emagasi anoshandiswa muSemiconductor Guicturing?

Patinotaura nezvazvo magasi muMicononductor Kugadzira, vanowanzowira mumhando shoma dzekiyi dzinoenderana nebasa ravo. Kunzwisisa aya mapoka anobatsira kujekesa basa rimwe nerimwe gasi anotamba mune yakaoma maitiro ekugadzira. Haisi imwe chete kana maviri magasi; chazvino semiconductor machira inoda kupfuura makumi matatu akasiyana magasi uye musanganiswa kuti ushande.

Kutanga ndivo Magasi mazhinji. Aya ndiwo mabasa ekushanda, anoshandiswa muhuwandu hwakawanda hwese munzvimbo yacho. Funga nezvavo seyekutanga mamiriro emabhawa. Iyo yakajairika ndeye:

• Nitrogen (n₂): Inoshandiswa kumakamuri uye michina yekubvisa zvinongedzo uye gadzira inert inert.
• Oxygen (O₂): Yaishandiswa kukura yakakwirira-mhando silicon diiicon dioxide (Sio₂) mataundi, ayo anoita seanosimbisa.
• Hydrogen (H₂): Inoshandiswa kuchenesa nzvimbo uye mune zvakananga kuiswa maitiro.
• Argon (ar): An Inerer Gasi yaishandiswa kugadzira nzvimbo yakasimba yemashandisirwo ekutsvedza.

Inotevera ndivo Specialty magasi, zvakare anozivikanwa se Electronic Specialty Gasi. Izvi ndizvo zvakanyanyisa, kazhinji unoshanda kana njodzi, magasi anoita mabasa akaoma ekutora uye kuiswa. Ivo vanoshandiswa muhuwandu hushoma asi vane mutengo wakanyanya wepamusoro uye unoda kurwadza kwakanyanya. Izvi zvinogona kupatsanurwazve mumapoka senge:

• Gadzira magasi: Aya magasi, seSilane (Sih₄), ndiwo tsime rezvinyorwa zvinoshandiswa kuvaka zviga zvechip. Ivo vanozvidza uye kuisa a firimu rakatetepa yezvinyorwa pane Silicon Wafer.
• Etchant magasi: Izvi ndizvo Gasi Regedza yaishandiswa kusarudza zvinyorwa. Mienzaniso inosanganisira fluorine makomputa kunge kabhoni tetrafluoride (cf₄) uye hydrogen chloride (HCL). Vanoshandiswa mu Etching Process Kuveza maitiro ematunhu.
• Magasi egasi: Aya magasi anoshandiswa "dope" the silicon, izvo zvinoreva kusvitsa pasina chinangwa Kusachena (a Dopant) kuchinja kwayo zvivakwa zvemagetsi. Izvi zvakakosha kusika vatengesi. Zvakajairika magasi egasi Sanganisira arsine (ash₃) uye phosphine (Ph₃).

Nitrogen gasi inoita sei sebasa rekushanda muSemiconductor macheti?

Dai iwe waizofamba kuburikidza ne Semiconductor Fibraction nzvimbo, iyo yakawanda ubiquitous gasi waizosangana nawo Nitrogen. Nepo isingawanzo kutora chikamu mune huru makemikari maitiro Izvi zvinovaka chip, basa rayo rinokosha kwazvo rekugadzira mamiriro ezvinhu kune idzo maitiro ekubudirira. Nitrogen inoshandiswa kunyanya nekuda kwekuita kwayo; Hazvireve kuita zvimwe zvinhu, zvichiita kuti ive yakakwana "filler" gasi.

Iko kwekutanga kushandiswa kwe Nitrogen iri mukuchenesa uye kugadzira iyo inert inert. Pamberi penyasha Semiconductor maitiro Unogona kutanga, kamuri inofanirwa kunge isina zvachose kusvibiswa senge okisijeni, mupfu wemvura, uye guruva. Yakakwirira-Kuchena Nitrogen inobhururuka nepakati pekamuri kuti isundire izvi zvisingadiwe zvinhu. Izvi zvinodzivirira netsaona oxidation kana zvimwewo zvinokanganisa izvo wafer. Iyi nheyo imwechete inoiswa kune zvishandiso uye mativi ekutakura (anozivikanwa sehupamhi) anotakura Silicon Wafers pakati pezvikamu zvakasiyana zve Kugadzira maitiro.

Uyezve, Nitrogen anoita basa rakaoma mukati Photoclithography, maitiro ekudhinda danho redunhu pane wafer. Mune zvazvino zvakadzama Ultraviolet (duv) Lithography, iyo nzvimbo pakati pe lens uye wafer izere ne Ultra-yakachena Nitrogen (kana Argon) kubvumira iyo pfupi-wave line kuti ipfuure kuburikidza pasina kunyudzwa nemhepo. Pasina iyi inert internet, maitiro angave asingagoneke. Mune ruzivo rwangu rwekupa kune machira, kudiwa kweanopfuurira, yepamusoro-yakawanda, uye yakanyanya-yekuchena Nitrogen kupihwa kusiri-kutaurwe.

Argon inoita basa rei mukugadzira nzvimbo yakakwana?

SaNitrogen, Argon iri zvakanaka gasi, zvichireva kuti zvarinoreva zvemakemikari inert. Nekudaro, Argon inoshandiswa Zvekushandisa zvakanyatso uko kurema kwayo kweatomiki kunopa mukana. Imwe yeanonyanya kukosha pane izvi zvekushandisa ndeye sputter dhisiki, kana kuputika. Iyi ndiyo mupfu wemuviri maitiro ekuisa yaishandiswa kuisa pasi yakaonda simbi mafirimu, ayo anoumba wiring ye Yakabatanidzwa Circuit.

Mukupuruzira, iyo yakakwira voltage inoshandiswa mune yekuvhara imba yekuvhara yakazadzwa ne Argon gasi. Izvi zvinoumba plasma yechokwadi chakapihwa Argon ion. Aya ions ari kukwidziridzwa uye kupwanya mu "chinangwa" chakagadzirwa nesimbi yatinoda kuisa (kunge mhangura kana aluminium). Simba rekurovera rinogogodza maatomu esimbi kubva pachinangwa, izvo zvinobva zvabhururuka nekamuri uye jasi Silicon Wafer mune mutete, yunifomu. Argon Yakanakira izvi nekuti inorema zvakakwana kuti isanyatsobvarura maatomu ekutarisa asi nemakemikari inert zvakakwana kuti hazviite neiyo simbi yefirimu iri kubatsira kugadzira. Inopa yakakwana nharaunda yekuparadza nzvimbo yesimbi.

Kumwe kushandiswa kiyi ye Argon iri mu plasma etching. Mune izvi Etching Process, Argon inowanzo kusanganiswa ne unoshanda Etchant gasi. The the Argon inobatsira kudzikisira plasma uye kubhururuka kwemukati, kubatsira makemikari etch uye kugadzira zvakanyatsojeka, zvimedu zvinotemwa mune izvo zvinyorwa. Yakavimbika yekugovera ye Argon gasi cylinders inokosha kune chero nzvimbo inoitwa simbi kana yepamhepo.

Iwe unogona kutsanangura kuti hydrogen inoshandiswa sei kuiswa uye kuchenesa?

Nepo nitrogen neArgon vanokosheswa nekuda kwekusaita basa, Hydrogen inokosheswa nekuva kwazvo unoshanda, asi nenzira yakachena kwazvo uye yakadzorwa. Hydrogen inoshandiswa zvakanyanya mukati Semiconductor Exeruring yekuchenesa nzvimbo uye mune chaiyo mhando ye kuiswa inodaidzwa kukura kwepiita. Hukuru hwayo chidiki chidiki chinotendera kuti zvibvise uye kuita nenzira dzimwe magasi hadzigone.

Pamberi pesimba ritsva risati rave kurimwa pane a wafer, iyo pamusoro inofanira kuve yakachena zvakakwana, pasi kune iyo atomic level. Hydrogen gasi inoshandiswa mune yakakwirira-tembiricha yekushambadzira inonzi "hydrogen bide" kuti ubvise chero nzombe dzenzou (mutete, zvakasikwa silicon pamusoro. The the hydrogen inobata neokisijeni, kugadzira mvura vapor (H₂O) iyo inozungurwa kubva mukamuri, ichisiya pristine silicon kugadzirira nzvimbo inotevera nhanho.

Hydrogen zvakare chikamu chakakosha mukati epitaxial kukura (kana "Epi"), maitiro anokura imwe-crystal layer ye silicon pamusoro pe Silicon Wafer. Iyi idzva idzva ine chaiyo crystal cruntal chimiro uye chaiyo inodzorwa Dopant mazinga. Hydrogen Zviito seKutakura gasi for the silicon Kunobva gasi (Sokunge Silane kana Trichlosorosilosi). Izvo zvakare zvinosimbisa nzvimbo yakachena yekukura nekukasira chero maatomu akatsamwa eokisijeni. Mhando yeiyi epitaxial colyer ine kukosha kwekuita kwevakanyanya-magumo processors, kugadzira kuchena kwe Hydrogen cylinder kugovera zvakakwana.

Ndeapi mafuti etashu uye anofamba sei microscopic matunhu?

Kana kuiswa kuri pamusoro pekuvakira matombo, maTetching ndezvekusarudza kuve nekuzvitakura kuti ugadzire maitiro ematunhu. Funga nezvazvo seMicroscopic sculpting. Mushure mekunge maitiro anotsanangurwa uchishandisa Photoclithography, Etchant magasi anoshandiswa kupa Iyo yemakemikari inoreva kubvisa zvinhu kubva kunzvimbo dzisina dziviriro dze wafer. Iyi ndeimwe yematanho akaoma uye akaoma mukati chip kugadzira.

The the magasi anoshandiswa mune etching Maitiro anowanzove eFluorine, chlorine, kana bromine-based componeunds. Sarudzo ye gasi zvinoenderana nezvinoitika zviri kuiswa.

• Fluorine-based magasi (e.co, cf₄, sf₆, nf₃) yakanaka kwazvo yekuita silicon uye silicon dioxide.
• Chlorine-based magasi .

Izvi Gasi Regedza vanoziviswa mumakamuri eplasma. Iyo plasma inoputsa iyo gasi mamorekuru ari kure unoshanda ion uye radicals. Aya ma radicals anozoita nezvikamu zve wafer. Kugadziriswa kwaidiwa kwakakura; Chinangwa ndechekuti Etch zvakananga pasi (anisotropics) pasina kusvitsa iyo yakatarwa yakatarwa layer. Zvazvino Semiconductor machira Shandisa kuoma Misanganiswa yegesi uye nekunyatsotongwa plasma mamiriro ezvinhu kuti uwane izvi.

Chii chinonzi makemikari vapor deposition (CVD) uye magasi ndeapi anobatanidzwa?

Chemical Vapor Deposition (CVD) idombo rekona maitiro ekuisa mukati Semiconductor Exeruring. Ndiyo nzira yekutanga inoshandiswa kugadzira akasiyana siyana ekushandisa uye kuitisa mafirimu akaonda anogadzira a Semiconductor mudziyo. Pfungwa yekutanga ndeye kuyerera a gasi (kana musanganiswa wemagasi) pamusoro pekupisa wafer. Kupisa kunoita kuti gasi Kuita kana kuora pane wafer's nzvimbo, ichisiya kuseri kwefirimu rakasimba rezvinhu zvaunoda.

Imwe neimwe yezviitiko izvi inoda mamiriro ezvinhu akagadzikana uye zvakanyanya yakakwirira-yakachena magasi. Semuenzaniso, kana uchiisa polyslicon layer uchishandisa silane, chero oxygen Kusachena mu gasi Rukova rwaizokonzeresa silicon dioxide ku fomu pachinzvimbo, kuparadza zvinhu zvinogadzirisa zvechigadziko. Ndokusaka isu, semutengesi, anotarisisa zvakanyanya pane kucheneswa uye kuongororwa kweizvi ma gasi rekupfekedzwa. Raibhurari yese ye Bulk Yakanyanya Kuchenesa Specialty Gasi Isu tinopa inokonzerwa nekumisidzana izvi zvinodikanwa zvinodiwa.

Sei Ultra-yakanyanya kuchena inonyanya kukosha chinhu cheMicononductor magasi?

Ini handigoni kuwandisa izvi: mu Semiconductor Indasitiri, kuchena ndizvo zvinhu. Izwi iri Yakakwirira-Kuchena hazvireve 99% kana kunyange 99.9%. For semicononductor magasi, tiri kutaura nezvazvo Ultra-yakanyanya kuchena (UHP), inowanzoitika 99.999% (inowanzodaidzwa kuti "mashanu nini") kana kupfuura. Kune vamwe vakatsoropodza maitiro magasi, Iyo inodikanwa inogona kuve 99.9999% ("nhanhatu gumi nematanhatu") kana kunyange kupfuura. Icho chikonzero chiri nyore: zvinosvibisa zvinouraya kuita.

Zvimiro zvechirongwa chemazuva ano zvinoyerwa muNanometers (mabhiriyoni emamita). Pakakura ichi, imwe chete yekune imwe nyika kana iyo isingadiwe molecule yakafanana nedombo pakati nepakati pepamusoro. An Kusachena Unogona:

• Alter Magetsi Zvivakwa: A STUHY SODIUM ION inogona kuchinja chikumbaridzo chivharo cheshanduko, zvichikonzera kuti ishandure kana kubviswa panguva isiriyo.
• Gadzira hurema hwekugadzira: Iyo okisijeni moleky inogona kukanganisa iyo yakakwana kristice panguva yekukura kwe epitaxal: Kugadzira "dislocation" izvo zvinokanganisa emagetsi kuyerera.
• Kukonzera zvipfupi zvapera: Chimiro chesimbi chinogona kuyambuka mbiri mbiri iri kuitisa mitsara, vachigadzira pfupi pfupi.
• Deredza goho: Izvo zvinosvibisa zvinowanikwa, iyo yakakwira huwandu hwemachira ane hurema pane imwe neimwe wafer, izvo zvinokanganisa zvakananga.

Ndokusaka, semugadziri, yedu huru investment iri mukunatswa uye yekuongorora michina. Batch yega yega ye gasi rinofanira Kuedzwa kuti uve nechokwadi chekuti inosangana nezvikamu-pamabhiriyoni (ppb) kana zvikamu-pt-trillion (PPT) zvakatemwa zvinodikanwa nevatengi vedu. The the Kuda Kwemagasi Akanyanya Kuchenesa Gasi ndizvo zvinotyaira zvese Specialty Gasi Musika for magetsi.

Tinoona sei mhando uye yakavimbika kuwanikwa kwemagasi akanyanya-yakachena?

Kuti uwane mukuru wekutakura saMark, uyu ndiwo mubvunzo unonyanya kukosha. Mutengo mukuru hauna basa kana gasi Hunhu huri kusawirirana kana kutumirwa kunonoka. Ndanzwa nyaya dzinotyisa: Vanopa vanopa zvitupa zvekunyepa zvekuongorora, kana kutumira kwe Specialty magasi Kubatwa mutsika kwemavhiki, zvichikonzera mutsara wekugadzira kuti ubve. Kutaura izvi mapepa ekurwadziwa ari pairi yebhizimusi redu bhizinesi.

Kuona hunhu hunotanga ne kucheneswa maitiro. Isu tinoshandisa magadzirirwo epamberi seClyogenic distillation uye nyanzvi yekuzvinyararira zvinhu kuti ubvise kuteedzera kusvibiswa. Asi maitiro haaperi ipapo. Nhanho yakaoma kwazvo ndeye kuongororwa. Isu tinoshandisa nzira-ye-iyo-iyo-iyo-art nhumbu zviridzwa seGasi Chromatograph-misa Spectrometer (GC-ms) kuyedza imwe yezororo imwe chete isati yatumirwa. Isu tinopa vatengi vedu neiyo yakadzama uye yechokwadi gwaro rekuongorora (coa) kune yega batch, inovimbisa iyo Kuchena kwegesi.

A Kuvimbika Kugovera Chain ndiro imwe hafu ye equation. Izvi zvinosanganisira:

• Robust Cylinder Kugadzirira: Cylinders for Ultra-yakakwirira yekuchenesa magasi pasi pekunyepedzera kuchenesa uye kupatsanurwa maitiro kuti uve nechokwadi chekuti mudziyo pachayo haasvibise iyo gasi.
• Akangwara Logistics: Isu tinoshanda nevanoziva zvinhu zvisina ruzivo vanonzwisisa mitemo yekutumira yakakwirira-kudzvinyirira uye dzimwe nguva ine njodzi zvinhu zvine njodzi pasi rese. Isu tinopa zvinyorwa zvese zvinodiwa kuti zvive nechokwadi chekunyorova tsika.
• Kukurukurirana Zvakajeka: Kutengesa kwedu uye zvikwata zvekutsigira zvinodzidziswa kupa nguva dzose kudzokorora. Iwe uchagara uchiziva chimiro cheyako odhi, kubva kugadzirwa kwekutakura kwekupedzisira. Isu tinonzwisisa kuti kufungidzira kugovera kwemagasi ekuchenesa Izvo zvakakosha kuti vatengi vedu vatore varwi vavo vekugadzira. Isu tinotopa zvakasiyana musanganiswa wegesi Sarudzo dzekusangana zvakananga maitiro.

Ramangwana rinobata sei magasi mumiconondductor Indasitiri?

The the Semiconductor Indasitiri Usambofa wakamira. Sezvakafanotaurwa nemutemo waMoore, chipummakeri anogara achisundira kuti agadzire zvidiki, nekukurumidza, uye zvimwe zvine simba. Uku kusingaperi kusingaperi kunokanganisa zvakananga magasi uye musanganiswa inoshandiswa mukukora kwavo. Patinosimuka kuenda ku Chizvarwa chinotevera cheSemiconductor Tekinoroji, ine chimiro cheshuhwirira kuderera kune vanonamira vashoma, izvo zvinodiwa zvegesi kuchena kwegasi kuchave kwakanyanya zvakanyanya.

Tiri kuona maitiro akananga kune zvitsva zvinhu kunze silicon, senge gallium nitride (gan) uye silicon carbide (sic), inoda itsva uye dzakasiyana maitiro magasi yekuita uye kuiswa. Kune zvakare kufamba kwakananga kune kuomarara kuiswa uye Etch nhanho. Izvi zvinoreva kuti Specialty gasi indasitiri inogara ichivandudza kuvandudza mamorekuru matsva uye kuzadzisa kunyange yakakwirira mazinga e kucheneswa.

Kubva pamaonero angu semutengesi, ramangwana riri pamusoro pekudyidzana. Izvo hazvisisiri kukwana kungotengesa cylinder ye gasi. Tinofanira kushanda padhuze nevatengi vedu mu zvigadzirwa zvemagetsi zvinogadzirwa Sector kuti unzwisise ramangwana ravo tekinoroji nzira. Izvi zvinotibvumira kutarisira kudiwa kweiyo nyowani yakakwirira-yakachena magasi uye mari yekudyara mukugadzirwa uye yekuongorora kugona kugovera. Magamba asingaonekwi e semicononductor Nyika - Magasi - Acharamba ari pamberi pekufunga nezvehunyanzvi.

Key Deaaroways

Sezvo iwe unobva sosi magasi maindasitiri emusika wekuda Semiconductor, heino zvinhu zvinonyanya kukosha kuti urangarira:

• Kuchena kuri kuteedzera: Chinhu chimwe chete chakanyanya kutsoropodza Ultra-yakanyanya kuchena. Zvinosvibisa, kunyange pamativi-pane-mabhiriyoni emabhiriyoni, anogona kukonzeresa njodzi yekutadza uye kuderedza gooction inobereka.
• Magasi ane mamwe mabasa: Magasi haachinjiki. Iwo mashandiro akanyanya nyanzvi anoshandiswa kune akasiyana maitiro sekugadzira inert emagetsi (nitrogen, Argon), kuvaka zvigaro (ma gasi rekupfekedzwa SaSilane), uye Dunhu Dzidziso (Etchant magasi kunge cf₄).
• Cheni yekupa inotsoropodza: Mutengesi akavimbika anoita zvinopfuura kungotengesa chigadzirwa. Vanoona kuti mhando yekuyedza kuongororwa, ipa certifitic crefication, maneja akaenzana emigodhi, uye chengetedza kutaurirana kwakajeka kuti udzivise kunonoka kugadzirwa kunodhura.
• Ruzivo rwehunyanzvi runowedzera kukosha: Kunzwisisa sei imwe gasi inoshandiswa uye sei Kucheneswa kwayo kwakakosha kunoita kuti iwe uve munhu anobudirira kune vatengi vako, kururamisa kunaka uye kuvaka kuvimba kwenguva refu.
• Iyo indasitiri ndeyekushandukai: Iyo push yeiyo diki uye ine simba machipisi inoreva zvinodiwa neNew, kunyange purer Specialty magasi ichangoramba ichikura. Partning neyekutarisa-inotaridzika mutengesi ndiyo kiyi yekugara kumberi.