Iyo smartphone muhomwe yako, kombiyuta padhesiki rako, masisitimu epamberi mumotokari yako-hapana kana chinhu chingave chinyararire pasina basa rakanyarara remagasi. Semuridzi wefekitori yemaindasitiri gasi, ini, Allen, ndazvionera ndoga kuti izvi zvinoshoropodza zvinomuita seikombi chehunyanzvi hwemazuva ano. Kune vateveri vebhizinesi vakaita saMark Shoni, uyo anofamba-famba pasi rose rekupa take, kunzwisisa magasi aya kiyi yekuvhenekera mikana mitsva. Ichi chinyorwa ndechekuti yako yakazara kutungamira kune mumwe wevatambi vanonyanya kukosha mundima iyi: Nitrogen Trifluoride (NF₃). Tichakurisa izvi zvine simba gasi, ongorora basa rayo rakakosha mu Semiconductor yekugadzira maitiro, uye tsanangura kuti nei hunhu hwayo uye hwakaipa huri kutsoropodzwa zvigadzirwa zvemagetsi zvinogadzirwa indasitiri.

Chii chaizvo chinonzi nitrogen trifluoride (NF₃) gasi?

Pakutanga kutarisa, Nitrogen trifluoride, kazhinji inotaurwa nezvake nemakemikari emakemikari NF₃, ingaita senge imwe chete maindasitiri gasi. Iyo isina ruvara, isina-inopisa, uye zvishoma mbichana-inonhuwira compound. Nekudaro, munyika ye Advanced Kugadzira, izvi gasi chishandiso chakakwirira-chekuita. Icho chinogadzirwa synthetically compound yakagadzirwa neyimwe nitrogen atom uye matatu Fluorine maatomu. Kiyi yesimba rayo iri muchimiro ichi. Pamhepo tembiricha, NF₃ yakagadzikana uye inert, zvichiita kuti ive yakachengeteka kutakura uye mubato zvichienzaniswa nemagasi akaomesesa.

Mashiripiti anoitika kana simba rashandiswa. Pasi pemamiriro ezvinhu epamusoro-simba mukati me semicononductor kugadzira chishandiso, senge a plasma the chamber, the NF₃ mamorekuru kuora. Ivo vanoputsa uye vanosunungura zvakanyanya unoshanda Fluorine radicals. Funga nezvazvo kunge kuputika kwakadzorwa pane microscopic chiyero. Izvi zvakasununguka Fluorine maatomu anoshanda zvakanyanya pakuita nekubvisa zvinhu zvisina kufanira, kunyanya silicon uye makomendi ayo. Uku kugona kuve kwakagadzikana paunenge uchida uye zvakanyanya unoshanda Paunoda kuti iite Nitrogen trifluoride gasi Chinhu chakakosha munyika chaiyo ye chip kugadzira.

Iyi yakasarudzika nzira yakasarudzika chikonzero nei NF₃ rave dombo rebwe razvino Semiconductor Fibraction. Kugadzikana kwayo kunovimbisa kuchengetedzeka uye kuvimbika muketani yekupa, apo chiitiko chavo chinopa yakakwirira-yekuchenesa yekuchenesa uye etching mazano anodiwa anodiwa. Patinosvira zvakadzika, iwe uchaona kuti izvi zvinoratidzika sei zvinonzwika gasi Inogonesa kusikwa kwemidziyo yakaoma kwazvo pasi pano.

Nei magasi akakosha akakosha kune Semiconductor Indasitiri?

Kunzwisisa kukosha kwe NF₃, isu tinotanga tichifanira kukoshesa basa rakakura iro magasi akakosha nekuti mu Semiconductor Indasitiri. Kugadzira an Yakabatanidzwa Circuit Zvakafanana nekuvaka skyscraper pane canvas saizi yeyako thumbnail. Iyo nzira yekuwedzera uye kubvisa manhamba ehupfu-dzakaonda zvikamu zvezvinhu zvakasiyana pane a silicon wafer. Nhanho imwe neimwe, kubva pakugadzira isina chinhu wafer kune chipenga chekupedzisira, chengetedza pamhepo yakanyatsotongwa yehunyanzvi Magetsi emagetsi.

Aya magasi anoita mabasa akati wandei. Vamwe, kunge Argon uye Helium. Vamwe vanoshandiswa kuiswa, pane a gasi inoshandiswa dhipoziti firimu rakatetepa rezvinyorwa pane wafer. Semuenzaniso, mumakemikari Vapor Kuiswa (CVD), magasi anoita kuti aumbe firimu rakasimba rinova chikamu cheChip yeChip. Ipapo kune ma gasi etachiona, senge NF₃, iyo inoshandiswa kuve nekunyatso kuvezwa pamatanho ari mune izvi zviyero, kugadzira nzira dzakaomesesa dzeMagetsi kuyerera.

Pasina nguva dzose, Ultra-Yakakwirira-Kuchena kuwanikwa kwemagasi akasiyana siyana, zvese Kugadzira maitiro ndaigona kugeda. Kunyangwe iyo minuscule Kusachena mu gasi inogona kukanganisa batch yakazara yeawa, inodhura kambani mamirioni emadhora. Ndokusaka Semiconductor Vagadziri vanonzwisisika nehunhu hwehunhu uye kuvimbika kwevatengesi vavo gasi. Kuchena kwe gasi kududzira zvakananga kumhando uye Production goho yechigadzirwa chekupedzisira.

NF₃ gasi rakashandiswa sei mumicononductor yekugadzira maitiro?

Nitrogen trifluoride ine maviri ekutanga, ekutsoropodza zvikumbiro mukati semiconductor yekugadzira maitiro: plasma etching uye chamber kuchenesa. Zvese zviri zviviri zvakakosha kuti ugadzire micropl-mashandiro ezvekuita, kubva pamateki kuenda Nand Linas ndangariro.

Kutanga, ngatitaurei nezve maTching. Mushure mechikamu chezvinhu zvakadai silicon dioxide yakaiswa pane a wafer, maitiro anofungidzirwa pairi uchishandisa mwenje. The the Etch maitiro anobva abvisa zvinhu kubva kunzvimbo dzisina dziviriro. NF₃ inoburitswa mukamuri uye nesimba kuti vagadzire a plasma-Gore rekubhadharwa ion zvimedu uye unoshanda Fluorine radicals. Aya maRadicals elcisely Bombard the wafer pamusoro, kuita ne silicon uye ichishandura kuva a gaseous compound (silicon tetrafluoriorides) iyo inogona kupomedzerwa zviri nyore kubva mukamuri. Kunyatsoita kweichi chiitiko kufunga, kusimudzira, kubvumira mainjiniya kuti kuve neyekukurumidzira maficha ayo zviuru zvenguva zvakaonda pane bvudzi revanhu.

Yechipiri, uye yakawedzera, Kushandisa kweNitrogen Trifluoride akaita se kuchenesa gasi. Munguva ye Chemical Vapor Deposition (CVD) maitiro, apo mafirimu akaonda ari kukura pane wafer, zvisingadiwe zvinhu zvinovakawo pamadziro emukati ekamuri yekuita. Izvi zvakasara, kazhinji yakagadzirwa ne silicon kana silicon nitride, inofanira kubviswa zvachose pakati pekugadzirisa mumwe nemumwe wafer kana batch ye wafers. Kana zvisiri, iyi kuvaka inogona kuputika uye nyika pane inotevera wafer, zvichikonzera hurema. Pano, NF₃ inoputirwa mukamuri isina chinhu uye a plasma inochengetedzwa. Ane simba Fluorine radicals inokwenenzvera iyo chamber madziro akachena, inoshandura iyo yakasimba zvakasara a gaseous byproduct izvo zvinobviswa zviri nyore. Kutenderera uku kuchenesa kuri kutsoropodza kuchengetedza kuchena kwenzvimbo yekugadzira uye inovimbisa kukwirira Production goho.

Chii chinoita kuti nf₃ iyo Gasi Rakanakisa Kuchenesa Kuchenesa Kuenzaniswa nedzimwe nzira?

Kwemakore mazhinji, Semiconductor Indasitiri akavimba paPerfluoroRacbons (PFCS) seCarbon Tetrafluoride (CF₄) uye hexafluorooroThane (Căf₆) yekuchenesa uye kugumbuka. Kunyange zvichishandiswa, aya makomputa akauya neakakura dhijeti: ivo vane simba girini greenhouse magasi neine refu nzvimbo yehupenyu hwese hwemhepo. Semuenzaniso, căf₆ ine a Yakakwira Global Ringing Inogona (GWP) uye inogona kupfuurira mumamiriro ekunze kwemakore zviuru gumi. Sezvo mitemo yezvakatipoteredza yakasimbiswa, iyo indasitiri yaida mhinduro iri nani.

Apa ndipo NF₃ yakabuda semukundi akajeka. Nepo Nitrogen trifluoride zvakare a Anotyisa Greenhouse Gasi, ine hupenyu hwakapfupika hwedenga (makore mazana mashanu). Zvinotonyanya kukosha, zvinoshanda zvakanyanya mukuchenesa maitiro. Mukati plasma Chamber, yakakura kwazvo muzana ye NF₃ mamorekuru kupwanya kuburitsa yavo inoshanda Fluorine tichienzanisa nemaPFC. Izvi zvinoreva zvishoma kusagadziriswa gasi aneta kubva mukamuri. Zvazvino Semiconductor machira zvakare isa idzo dzesystems (scrubber) dzinoparadza dzinenge dzese kusagadziriswa NF₃ uye zvinokuvadza byproduct magasi vasati vasunungurwa.

Iko kusanganiswa kwekunyanyisa kugona uye nekubudirira kwakanyanya kunoreva kuti chaicho Greenhouse Gasi Emissions kubva pakushandisa NF₃ zvakadzikira zvakanyanya pane izvo kubva kune yekare PFC gasi. Uku kuita kwakakwirira chiratidzo chikonzero chakakosha pakugamuchirwa kwayo kwakapararira.

Kuchenesa kwakanyanya sei nitrogen trifluoriori?

Semugadziri, ndinogona kukuudza kuti kugadzira NF₃ yakaomarara uye yakadzorwa zvakanyanya maitiro ekugadzira. Chinangwa ndechekugadzira chigadzirwa chekupedzisira icho chakachena-kakawanda 99.999% kuchena kana kukwirira-nekuti kunyange zvishoma Kusachena inogona kuve njodzi ye semiconductor kugadzirwa. Maitiro acho anoda hunyanzvi mukubata zvakanyanya makemikari, kunyanya Fluorine.

The the NF₃ Production kazhinji zvinosanganisira kuita Ammonia (a compound ine nitrogen) kana ambomonium Froride compound ine elemental Fluorine gasi mune anoongorora kupisa kwakanyanya. Kuita uku kunoburitsa musanganiswa wemagasi, kusanganisira NF₃, zvishandiso zvisina kufanira, uye zvakasiyana-siyana nekudhura kwakasiyana-siyana. Dambudziko chairo, uye uko nyanzvi yemutengesi inoratidza zvechokwadi, iri mu kucheneswa nhanho inotevera.

Mbichana gaseous musanganiswa unopfuura kupfuura akati wandei kucheneswa nhanho dzekubvisa chero zvisingadiwe makomendi. Izvi zvinowanzosanganisira kutevedzana kwekuputika, Adsorption, uye cryogenic distillation maitiro. The the Kuita Distillation. NF₃ kubva kune chero kusvibiswa kwakasara. Nhanho yega yega inotariswa nemidziyo yeudiki yekuongorora kuti ive nechokwadi chekuti chigadzirwa chekupedzisira chinosangana neyakagadziriswa zvirevo zve semicononductor indasitiri. Uku kuzvipira kune mhando yekudzora ndiko kunoparadzanisa akavimbika mutengesi kubva kune vamwe vese.

Ndezvipi zvakachengeteka uye kubata kufunga kweNF₃ gasi?

Kuchengetedzwa ndiko kukoshesa kwekutanga muindasitiri gasi bhizinesi. Nepo NF₃ haina-isina-inopisa uye yakagadzikana pamhepo tembiricha, iyo yakasimba oxidizing mumiririri, kunyanya pakupisa kwakanyanya. Izvi zvinoreva kuti zvinogona kuita nechisimba nezvinhu zvinopisa uye zvinoda kubata nekuchenjerera. Njodzi huru ndeyekutakura kwayo; inhaling the gasi inogona kuve inokuvadza, saka yakakwana yekuvira uye yekudzivirira yemunhu midziyo yakakosha pane chero Kugadzira saiti.

Ketani yese yekupa, kubva pane yedu fekitori kune yevatengi semicononductor machira, anovakwa kutenderedza kwakachengeteka. NF₃ inotakurwa mune yakanyanya kugadzirwa simbi masitepisi pasi pekumanikidzwa kwakanyanya. Iyi cylinders inoedza kuongororwa uye certification kuti ive nechokwadi chekuti vanogona kuve neyakagwinya gasi. Semutengesi, isu tinopa yakadzama yekuchengetedza mashitsi mashitsi (SDS) uye kudzidziswa kune vatengi vedu pakuchengetedza kwakakodzera, kubatana, uye maitiro ekubata. Izvi zvinosanganisira nhungamiro pane chiyero chinoyerera kudzora uye kusvetuka masisitimu.

Kune varidzi vebhizinesi vakaita saMark, ane hanya neyechani chinonhuwirira uye akavimbika ekugovera take, achibatana nemutengesi ane nhoroondo yekuchengetedza yakakosha. Kukurukurirana kwekutaurirana kana kushayikwa kweiyo yakajeka yekuchengetedza protocol kubva kune mutengesi mutsvuku matsvuku matsvuku. Isu tinozvirumbidza pamusoro pekupa kwete chigadzirwa chete, asi basa rakazara rinosanganisira rutsigiro rwekutsigira uye nhungamiro yekuchengetedza, ichiva gasi Anosvika uye anobatwa zvakachengeteka danho rega rega renzira.

IN Nitrogen Trifluoriide gasi regere regesi? Kunzwisisa maitiro emamiriro ekunze.

Izvo zvakakosha kuve pachena nezvezvinhu zvezvakatipoteredza zve NF₃. Ehe, Nitrogen trifluoride isimba Greenhouse gasi. Iyo InterGovernmental Panel Panzvimbo yekuchinja Kwemamiriro ekunze (IPCC) yakaverengera kuti ine nzira yekudziya yenyika dioxide pamusoro pegore remakore zana. Ichi ichokwadi kuti indasitiri inoda zvakanyanya.

Nekudaro, iyo nyaya haina magumo imomo. The the kukanganisa pane zvakatipoteredza Zvinotsiga zvisingaiti chete pane kugona kwegesi, asi pane yakawanda sei yayo inoburitswa mumhepo. Sezvambotaurwa, NF₃ inoshanda zvakanyanya. Mune zvazvino semicononductor nzvimbo, iyo yakakura kwazvo ye gasi rinoshandiswa inodyiwa kana kuparadzwa panguva yekugadzira maitiro. The the plasma ichiputsa, uye chero kusagadziriswa gasi iyo yaneta inotumirwa kune system yebhisheya. Aya masisitimu anoshanda zvakanyanya, anowanzoparadza anopfuura 99% yeasara NF₃.

Iyo indasitiri inoshanduka kubva kuPFCS kuenda NF₃. Greenhouse Gasi Emissions pachikamu chekugadzira. Zvine mutoro Semiconductor Vagadziri uye vatengesi vegasi vanoshanda pamwe chete kuti vave nechokwadi chekuti mabvumirano adzoreredzwa. Izvi zvinosanganisira gadzirisa maitiro ekuchenesa kuti ushandise huwandu hushoma hwe gasi inodiwa uye kuchengetedza masisitimu ezvekuita kwekuita kwepamusoro. Saka, nepo NF₃ isimba Greenhouse gasi mumarata ekuisa, yayo chaiyo-yenyika nzvimbo yenzvimbo mukati Semiconductor Exeruring inonyatsotarisirwa uye yakadzikira zvakanyanya kupfuura dzimwe nzira dzakatsiviwa.

Ndeipi basa reari-saiti gasi chizvarwa chemakemictor macabs?

Chiyero chazvino Semiconductor Exeruring Kufema. Zvivakwa zvikuru zvikuru, zvinozivikanwa seMega-machira, zvinopedza huwandu hwakawanda hwemagasi. Kune mamwe magasi, seNitrogen, zvinonyanya kubuditsa zvakananga panzvimbo pazvo pane kurima mune zviuru zvemadhora. Izvi zvinozivikanwa se pane-saiti chizvarwa. Kune yakakosha uye inoshanda gasi kunge NF₃, mhando diki diki iri kubuda: pane-saiti kucheneswa uye kuongororwa.

Uchizere NF₃ Production Pane maFab haina kujairika nekuda kwekunetseka kwayo, vashandisi vehondo vakakura kazhinji vakaremerwa pane-saiti Gasi Management Systems. Kuwanikwa kwe NF₃ inoendeswa kune iyo fab, uye ipapo tsika iyi inoita yekupedzisira-nhanho kucheneswa uye kuenderera mberi kwehunhu kuongororwa pamberi pe gasi inopinda zvishandiso zvinodhura. Izvi zvinopa yekupedzisira denderedzwa rekutonga kwemhando, kuona kuti chero kungasvibiswa kubva mumitsetse yekupa yabatwa. Iyi nzira inosanganisa zvibodzwa zvehupfumi zvekutenga kwehukuru nekuvimbiswa kwemhando ye pane-saiti manejimendi.

Kunzwisisa aya anovhuvhuta emhando dzekupa mhando dzakakosha. Semutengesi, isu takawedzera masevhisi edu kupfuura kungozadza maCylinda. Isu tinoshanda nazvo Global Semiconductor Vagadziri Kugadzira uye kuitisa zvakazara gasi kuburitsa gasi uye mhinduro dzekutonga. Izvi zvinogona kusanganisira kuzvitsaurira mutsara wekugadzira kugona kwemutengi mukuru, zvinhu zvakakosha, kana kuwirirana nekwavo pane-saiti masisitimu. Ndezvekupa chetteni inochinja uye yakavimbika yekupa chiratidzo chinosangana nezvinodiwa zvinodiwa zve 21st-yezana remakore rekugadzira. Ichi chikamu chakakosha chehurongwa hwedu, kunyanya pavanoshandira vatengi vane kukosha zvigadzirwa zvekugadzira.

NF₃ kuchena kweNF₃ kunokanganisa sei kugadzirwa kwechibereko muChip kugadzira?

Mu semicononductor Nyika, "goho" ndizvo zvese. Iyo inhengo yezvakanaka, inoshanda Chips inogadzirwa kubva kune imwe chete silicon wafer. Goho rakanaka rinoreva kubatsirwa kwakanyanya; gohwo rakaderera rinogona kuve mune zvemari zvinoparadza. Kuchena kwemagasi emagasi, kunyanya chiitiko gasi kunge NF₃, ine zvakananga uye zvinoshamisa zvinokanganisa Production goho.

Fungidzira a Kusachena kunge chidiki chidiki chehunyoro (h₂o) kana imwe gaseous compound yakasanganiswa mukati NF₃. Panguva yekunaka etch maitiro, izvo Kusachena inogona kukanganisa maitiro emakemikari, zvichikonzera hurongwa hwemicroscopic hurema muChip's Curcuritry. Inogona kuvhara iyo Etch, kusiya zvinhu painofanira kunge kusiri, kana kukonzera-kusimbisa, kubvisa zvinhu zvakawandisa. Chero nzira, iyo inokonzerwa Yakabatanidzwa Circuit inokundikana bvunzo dzayo yekupedzisira. Paunenge uchiita mamirioni evatengesi pane imwe chip Kusachena inogona kupa iyo chip zvese zvisina basa.

Ichi chikonzero nei tichiisa mari zvakanyanya mukutonga kwemhando yepamusoro. Nekupa Certified, Ultra-Yakakwirira-Kuchena NF₃, tinopa vatengi vedu chivimbo chekuti gasi haizove sosi yekuremara. Kudzora kusungwa yezvinhu zvese zviri pasi kusvika kune zvikamu-pa-bhiriyoni chikamu chinovimbisa kuti Kugadzira maitiro yakagadzikana uye inodzokororwa. Maitiro akagadzikana anotungamira kune anofungidzira uye akakwira Production goho, iyo ndiyo chinangwa chekupedzisira kune yega yega semicononductor Mugadziri. Basa redu semutengesi we Yakanyanya Kuchenesa Specialty Gasi ndeye kubvisa misiyano uye upe chigadzirwa chehunhu husinga tsiniki.

Chii chaunofanira kutarisa muNitrogen Trifluoride mutengesi?

Kuti uwane mukuru wekutakura saMark, kusarudza mutengesi wezvekutsigira kwezvinhu zvakaoma senge NF₃ Inoenda kure kupfuura kungoenzanisa mitengo. Njodzi dzevhu dzakaipa dzakaparadzana-kutakura kunonoka, nyaya dzemhando, kutaurirana zvisina kunaka - zvakanyanyisa. Zvichienderana nezvangu zvakaitika, heino zvinhu zvakakosha kuti ufunge nezve:

Chekutanga, chokwadi chemhando uye zvitupa. Mutengesi akavimbika anopa chitupa chekuongorora (coa) neese kutumira, kutsanangura zvakacheneswa zviyero uye kunyora chero kuchena kwakaonekwa. Ivo vanofanirwa kuve vanowirirana nemitemo yepasi rose senge iso 9001. Bvunza nezve kugona kwavo kwekuongorora. Vane midziyo yekuona kusvibiswa pamazinga anodikanwa here semicononductor Zvikumbiro?

Chechipiri, tenga ketani kuvimbika uye kujeka. Ko iyo mutengesi anogona kuratidza ongororo yezvinhu zvekudzivirira network kudzivirira kunonoka? Ivo vane restundant zvigadzirwa zvekugadzira Kuve nechokwadi chakasimba kuwanikwa? Kukurukurirana kukoshesa pano. Wako mutengesi anofanirwa kuve anogonesa, kupa zvigadziriso pane zvekutakura uye kuve nyore kuwanikwa kuti upindure mibvunzo. Izvi zvinogadzirisa zvakananga zvinorwadza pfungwa yekukurukurirana.

Pakupedzisira, tarisa hunyanzvi hwehunyanzvi. Mutengesi akanaka haangatengere chigadzirwa; Ivo vanopa mhinduro. Ivo vanofanirwa kunzwisisa mafomu ako uye kukwanisa kupa rutsigiro rwehunyanzvi. Vanofanirwa kuve vanoziva nezve kuchengeteka, kubata, uye kunyange mitemo yezvakatipoteredza yakatenderedza Zvikumbiro zvegesi. Anotsigira anogona kuita semumwe wako anoziva anokosha akakosha kupfuura iye anongova mutengesi. Iyi nyanzvi ndeye hwaro hwehukama hwakareba, hunobatsira hukama. Isu tinoedza kuva mumwe wake kune vatengi vedu vese, kupa kwete chete gasi asi rugare rwepfungwa runouya nazvo.

Key Deaaroways

• Chishandiso Chakakosha: Nitrogen Trifluoride (NF₃) inyanzvi yakakosha gasi inoshandiswa plasma etching uye chamber kuchenesa mukati Semiconductor yekugadzira maitiro.
• Kuita kwakakwirira: NF₃ inoshanda zvakanyanya uye ine yakaderera yakashanda mamiriro ekunze pane iyo yekare PFC geses yaitsiviwa, nekuda kwekukwirisa kwakakwirira siyana uye masisitimu emazuva ano.
• Kuchena ndiko kubatsira kubatsira: Iyo Ultra-yakanyanya kuchena kwe NF₃ haina kutaurwa. Kunyangwe kuteedzera kusvibiswa kunogona kukonzera kuremara pane silicon wafer, kudzikisira zvakanyanya Production goho uye purofiti ye chip kugadzira.
• Kuchengetedza uye kubata zvakakosha: Ndichigadzikana, NF₃ ipfuto uye oxidizing gasi Izvi zvinoda kubata kwakaringana, Clelines Cylinders, uye Kunzwisisa Kwakadzama Kwepurasikoro Ekuchengetedza.
• Sarudzo yekutengesa yakakosha: Kana uchisarudza NF₃ Supporter, akatungamira mhando yemhando yepamusoro, kupa ketani yekuvimbika, kutaurirana pachena, uye hunyanzvi hwehunyanzvi hwehunyanzvi pamusoro pemutengo wega.