Inganda ya Semiconductor ishingiye ku myuka itandukanye, ishobora gushyirwa mu bwoko butatu bw'ingenzi: imyuka nini, imyuka yihariye, na ering gase. Iyi myuka igomba kuba isuku cyane kugirango irinde kwanduza, ishobora kwangiza inzira nziza kandi igoye.

Imyuka myinshi

Azote (n₂):

Uruhare: N₂ akora intego nyinshi, harimo gusukura imitwe hamwe no gutanga ikirere kivanze mugihe cyimibare itandukanye ya semiconductor.
Inyandiko z'inyongera: azote akenshi ikoreshwa mubwikorezi nububiko bwa Silicon wacer kugirango igabanye okiside. Ibidukikije bya ITERT biremeza ko bidatwara nibindi bikoresho, bigatuma ari byiza kubungabunga ibidukikije bisukuye.

Argon (ar):
Uruhare: Usibye kugira uruhare mu bikorwa bya Plasma, Argon ari igikoresho mu nzira aho ibihimbano byagenzuwe ari ngombwa.
Inyandiko zinyongera: Kuberako ntacyo zitwara kubikoresho byinshi, argon nayo ikoreshwa mukwanga, ifasha mugutanga ibyuma cyangwa indyo iyoboye aho hagomba kubungabungwa nta kwanduza.

HELIM (we):
Uruhare: Imiterere yubushyuhe bwa Helium ituma itagereranywa yo gukonja no kubungabunga ubushyuhe bwimikorere mugihe cya reactique.
Inyandiko z'inyongera: Bikoreshwa kenshi muri sisitemu yo hejuru ya laser ya laser ya lithography kubera imiterere n'ubushobozi bwo kumvikana n'ubushobozi bwo gukomeza inzira nziza itanduye.

Hydrogen (h₂):
Uruhare: Kurenga ibyifuzo byayo mu mahirwe, hydrogène kandi ifasha kandi gusukura hejuru ya wafer kandi irashobora kugira uruhare mubikorwa bya shimi mugihe cya tepitaxy.
Inyandiko yinyongera: Gukoresha hydrogène mugutanga firime zoroheje zemerera kugenzura cyane kwibanda kuri semirituction yibikoresho bya semiconductor, guhindura imitungo yabo yikintu cyinshi.

Imyuka yihariye na dopants

Silane (Sih₄):
Uruhare: usibye kuba intangiriro yo kubitsa muri Silicon, Silane arashobora gushikama muri firime ishimishije atezimbere ibintu bya elegitoroniki.
Inyandiko z'inyongera: Reactivity yatorotse bisaba gukemura neza kubera impungenge z'umutekano, cyane cyane iyo uvanze n'umwuka cyangwa ogisijeni.

Ammonia (NH₃):
Uruhare: Usibye gukora firime za niride, Ammonia afite akamaro mugutanga ibice byihariye byongera ubwirinzi bwibikoresho bya semiconductor.
Inyandiko z'inyongera: Irashobora kugira uruhare mu nzira zisaba inyokozi za azote muri Silicon, kunoza imitungo ya elegitoroniki.

Yamazaki (PH₃), Arsine (Ash₃), na diborane (b₂h₆):
URUHARE: Izi myuka ntabwo ari ngombwa gusa ku gaciro gusa ahubwo zirakenewe kandi ku kugera ku mitungo yifuzwa mu bikoresho byateye imbere.
Inyandiko z'inyongera: Uburozi bwabo bukeneye gahunda zikomeye zumutekano na sisitemu yo gukurikirana muguhimba ibidukikije kugirango bagabanye ingaruka.

ETCHING na CASE

Fluocarbone (cf₄, sf₆):
Uruhare: Izi myuka zikoreshwa mubikorwa byumye, bitanga ibisobanuro byinshi ugereranije nuburyo butoroshye.
Inyandiko z'inyongera: CF₄ na SF₆ ni ngombwa kubera ubushobozi bwabo bwo etch ibikoresho bishingiye kuri silicon neza, bituma habaho gukemura neza kunegura muri microelectronics.

Chlorine (cl₂) na hydrosode fluoride (HF):
Uruhare: Chlorine itanga ubushobozi bwo gukaza ubukana, cyane cyane kubyuma, mugihe HF ari ngombwa kuri dioxyde delicon dioxyde.
Inoti yinyongera: Guhuza iyi myuga bituma havamo ibice bifatika mugihe cyimpande zitandukanye za Fabricination, humura amaso yintambwe zitunganijwe.

Azote trifluoride (nf₃):
Uruhare: NF₃ ni ngombwa ko isuku y'ibidukikije muri sisitemu ya CVD, gusubiza hamwe n'abanduye kugira ngo bakomeze imikorere myiza.
Inyandiko z'inyongera: Nubwo havutse impungenge z'ubushobozi bwa Greenhouse, imikorere ya NF₃ mu isuku ituma amahitamo ahitamo mu nganda nyinshi, nubwo imikoreshereze isaba ibitekerezo bishingiye ku bidukikije.

Ogisijeni (O₂):
Uruhare: Inzira ya okiside yoroherezwa na ogisijeni irashobora gukora ibice byingenzi bihindura mumiterere ya semiconductor.
Inyandiko z'inyongera: Uruhare rwa Oxygereni mu rwego rwo kwemeza imbogamizi ya Silicon gukora Sio₂ ibice birakomeye byo kwigunga no kurengera ibice by'umuzunguruko.

Imyuka igaragara muri semiconductor inganda

Usibye imyuka gakondo yavuzwe haruguru, izindi myuka yitondera mubikorwa bya semiconductor, harimo:

Dioxyde de carbone (co₂): Ikoreshwa mubisobanuro bimwe byo gukora isuku no kwerekana porogaramu, cyane cyane ibirimo ibikoresho byagezweho.

Dioxyde delicon (Sio₂): Nubwo atari gaze mubihe bisanzwe, uburyo bwuzuye bwa dioxyde delicon bukoreshwa muburyo bumwe bwo kubitsa.

Ibidukikije

Inganda za Semiconductor zigenda zibanda cyane mugukagabanya ingaruka zishingiye ku bidukikije zijyanye no gukoresha imyuka itandukanye, cyane cyane iy'imishinga ikomeye. Ibi byatumye gahunda zo gucunga gaze zagaragaye no gushakisha indi myuka ishobora gutanga inyungu zisa nigice gito cyibidukikije.

Umwanzuro

Imyuka ikoreshwa mukora ingwate ya semiconductor igira uruhare runini mu kwemeza neza ibikorwa bya Fabiricial. Mugihe inganda zikoranabuhanga, inganda za Semiconductor zidakomeza gutera imbere kugirango ziteze imbere isuku nubuyobozi, mugihe nanone gukemura ibibazo byumutekano nibidukikije bifitanye isano no gukoresha.