Isi igezweho ikora kuri chip. Kuva kuri terefone mu mufuka wawe kugeza kuri sisitemu yo kuyobora mu kirere cyo mu kirere, gito igikoresho cya semiconductor ni intwari itavuzwe mugihe cya digitale. Ariko intwari iri inyuma yintwari niyihe? Nisi itagaragara, akenshi ihindagurika ya gaze yihariye. By'umwihariko, chimie ifite uruhare runini muri Gukora Semiconductor inzira idashobora gusimburwa gusa.

Niba ucunga urwego rutanga cyangwa ukagenzura ubuziranenge bwibicuruzwa muri a semiconductor gushinga, uzi ko margin yikosa ari zeru. Umuvuduko umwe mubushuhe cyangwa microscopique urashobora kwangiza umusaruro wa miriyoni y'amadorari. Iyi ngingo yibira cyane muruhare rwa irimo fluor imyuka - impamvu tuyikoresha, chimie yihariye ituma ikora neza, nakamaro kingenzi ko gutanga amasoko hamwe no kwera. Tuzareba uburyo ibyo imyuka yo hejuru Byakoreshejwe in etch n'intambwe zo kubitsa, n'impamvu kubashakira umufatanyabikorwa wizewe nicyemezo cyingenzi ushobora gufata uyumwaka.

Kuki inganda za semiconductor zishingiye cyane kuri gaze irimo fluor?

Gusobanukirwa inganda za semiconductor, ugomba kureba kumeza yigihe. Silicon ni canvas, ariko Fluorine ni brush. Uwiteka ibihimbano bya semiconductor inzira ikubiyemo kubaka ibice byibikoresho hanyuma ugahitamo kubikuramo kugirango ukore imirongo. Ubu buryo bwo gukuraho bwitwa etching.

Fluorine ni ikintu cya electronegative element. Mumagambo yoroshye, irashonje bidasanzwe kuri electron. Iyo tumenyekanisha gaze ya fluor cyangwa ibimera bya fluor mu cyumba cya plasma, atome ya fluor yitwara nabi hamwe na silicon na dioxyde de silicon. Iyi miti yimiti ihindura silikoni ikomeye mumyuka ihindagurika (nka silicon tetrafluoride) ishobora kuvomwa byoroshye. Hatariho reaction ya chimique, ntidushobora gukora imiyoboro ya microscopique hamwe nu mwobo wo guhuza ukenewe kubigezweho Ibikoresho bya elegitoroniki.

In gukora cyane, umuvuduko nibisobanuro nibintu byose. Imyuka irimo florine tanga igipimo cyinshi cya etch gikenewe kugirango ibicuruzwa bishoboke, mugihe unatanga uburyo bwo guhitamo guca mubintu bimwe bitangiza ibyangiritse munsi yacyo. Nigikorwa cyiza cyo kuringaniza cya chimie na fiziki.

Niki gituma chimie ya fluor idasanzwe mugutondeka neza?

Urashobora kubaza, kuki utakoresha chlorine cyangwa bromine? Turabikora, kubice bimwe. Ariko, chimie itanga inyungu idasanzwe mugihe yogukora ibikoresho bishingiye kuri silicon. Isano iri hagati ya silicon na fluor irakomeye bidasanzwe. Igihe irimo fluor plasma ikubita wafer, reaction ni exothermic kandi ubwayo.

Amarozi abera muri plasma. Muri a Inzira ya Semiconductor cyumba, dukoresha ingufu nyinshi kuri gaze ihamye nka Carbone Tetrafluoride (CF4) cyangwa Sulfuru Hexafluoride (SF6). Ibi bisenya gaze, irekura reaction Fluorine radicals. Aba radicals bateye hejuru y wafer.

"Ibisobanuro bya etch asobanura imikorere ya chip. Niba gazi yawe ihindagurika, igipimo cya etch kirahinduka, kandi umusaruro wawe ugwa. "

Ibi biganisha ku gitekerezo cya anisotropic kurigata-gukata neza utiriwe urya kuruhande. Mu kuvanga Fluorine hamwe n'ibindi inzira, injeniyeri zirashobora kugenzura imiterere yumwobo neza. Ubu bushobozi ni ngombwa mugihe twimukiye kuri node nto (7nm, 5nm, na hepfo), aho na nanometero yo gutandukana birananirana.

Nigute imyuka yo gukora semiconductor itwara inzira ya etch igezweho?

Inzira ni ibikoresho byo gushushanya bya fabs. Hariho ubwoko bubiri bwingenzi: etch itose (ukoresheje imiti yamazi nka hydrogen fluoride) hamwe na etch yumye (ukoresheje plasma). Ibigezweho Semiconductor imitwe yishingikiriza hafi ya plasma yumye kuko irasobanutse neza.

Mubisanzwe plasma Urukurikirane, a gaze ya fluor ni. Reka turebe ubwoko bwakoreshejwe:

• Carbone Tetrafluoride (CF4): Ifarashi yo gukoreramo ya okide.
• Octafluorocyclobutane (C4F8): Byakoreshejwe kubitsa polymer kumurongo wuruhande rwumwobo, kubarinda mugihe epfo yimbitse.
• Amazi ya Hexafluoride (SF6): Azwiho umuvuduko mwinshi wa silicon.

Imikoranire hagati ya plasma na substrate ni Biragoye. Harimo gutera ibisasu kumubiri na ion hamwe na reaction ya radicals. Uwiteka ibikoresho bya semiconductor ibikoresho igomba kugenzura neza umuvuduko, umuvuduko, hamwe nuruvange rwimyuka. Niba gaze idasanzwe irimo umwanda nkubushuhe, irashobora gukora aside hydrofluoric mumurongo wo kugemura cyangwa icyumba, igatera ruswa hamwe nuduce duto.

Kuki Nitrogen Trifluoride umwami wibyumba bisukura?

Mugihe kuroba no gukora isuku genda mu ntoki, gusukura ibikoresho byo gukora ningirakamaro kimwe no gutunganya wafer. Mugihe Kuvugurura imiti (CVD), ibikoresho nka silicon cyangwa tungsten bishyirwa kuri wafer. Ariko, ibyo bikoresho kandi bitwikiriye inkuta za chambre. Niba iki gisigara cyubatswe, kirahaguruka kigwa kuri wafer, gitera inenge.

Injira Azote Trifluoride (NF3).

Imyaka yashize, inganda zakoresheje parike ya fluor imyuka nka C2F6 yo gusukura ibyumba. Ariko, NF3 yabaye ihame rya uburyo bwo gusukura ibyumba kubera imikorere yayo myiza. Iyo ucitse mumasoko ya plasma ya kure, NF3 itanga umubare munini wa atome ya fluor. Izi atome zisukuye inkuta za chambre zisukuye, zihindura ibisigazwa bikomeye muri gaze isohoka.

Azote trifluoride ihitamo kuko ifite igipimo cyo gukoresha cyane (gaze ikoreshwa cyane) hamwe n’ibyuka bihumanya ugereranije nibishaje ibikoresho byo gukora isuku. Kubuyobozi bwikigo, ibi bivuze igihe gito cyo kubungabunga no kwinjiza byihuse.

Nibihe bivangwa na fluor ningirakamaro mubikorwa byinshi?

The urunigi rutanga urunigi yishingikiriza ku gitebo cyihariye imyuka irimo fluor. Buriwese afite "resept" yihariye cyangwa porogaramu. Kuri Jiangsu Huazhong Gas, tubona icyifuzo kinini kuri ibi bikurikira:

Ibi ibimera bya fluor ni amaraso y'ubuzima bwa gukora cyane. Hatariho urujya n'uruza rw'ibi imyuka muri semiconductor umusaruro, imirongo irahagarara. Nibyoroshye. Niyo mpamvu abaguzi bagura nka Eric Miller bahora bakurikirana Urunigi kubangamira.

Ni ukubera iki imyuka ihumanya cyane ari umugongo wumusaruro wa semiconductor?

Ntabwo nshobora gushimangira bihagije: Isuku ni byose.

Iyo tuvuze imyuka yo hejuru, ntabwo tuvuga "urwego rwinganda" rukoreshwa mu gusudira. Turimo kuvuga kuri 5N (99,999%) cyangwa 6N (99.9999%).

Kubera iki? Kubera ko a igikoresho cya semiconductor ifite ibimenyetso byapimwe muri nanometero. Molekile imwe yumwanda wicyuma cyangwa urugero rwinshi rwubushuhe (H2O) irashobora gutera uruziga rugufi cyangwa ikabuza urwego gukomera.

• Ubushuhe: Igisubizo hamwe Fluorine gukora HF, ikosora sisitemu yo gutanga gaze.
• Ogisijeni: Oxidize silicon idacungerewe.
• Ibyuma biremereye: Senya ibintu byamashanyarazi ya transistor.

Nkumutanga, akazi kacu nukureba ko Xenon cyangwa Icyuma cya elegitoroniki Nitrous Oxide wakiriye byujuje ubuziranenge Ibipimo ngenderwaho. Dukoresha gazi ya chromatografiya kugirango tumenye shakisha umwanda kugeza ku bice kuri miliyari (ppb). Ku muguzi, kubona Icyemezo cyo Gusesengura (COA) ntabwo ari impapuro gusa; ni garanti yuko yabo ibihimbano bya semiconductor ntazahura nimpanuka yumusaruro.

Nigute inganda zicunga ibyuka bihumanya ikirere na GWP?

Hano mucyumba hari inzovu: ibidukikije. Benshi imyuka ya fluor Kugira hejuru Ubushyuhe bwo Kwiyongera Kwisi (GWP). Kurugero, Sulfur hexafluoride (SF6) nimwe muribyinshi imyuka ya parike ikomeye bizwi numuntu, hamwe na GWP inshuro ibihumbi kurenza CO2.

The inganda zikora inganda ni igitutu kinini cyo kugabanya ikirere cyacyo. Ibi byatumye habaho impinduka ebyiri zikomeye:

1. Abatement: Fabs barimo gushiraho "ibisanduku byo gutwika" binini cyangwa scrubbers kumurongo wabo wuzuye. Izi sisitemu zisenya abadakorewe gaze ya parike mbere yuko irekurwa mu kirere.
2. Gusimburwa: Abashakashatsi barimo gushaka ubundi buryo etch imyuka hamwe na GWP yo hepfo. Ariko, kubona molekile ikora neza nka C4F8 cyangwa SF6 idafite ingaruka kubidukikije biragoye mubushakashatsi.

Azote trifluoride yari intambwe mu cyerekezo cyiza cyo gukora isuku kuko isenyuka byoroshye kuruta PFC ishaje, bikavamo bike muri rusange imyuka ihumanya ikirere niba sisitemu yo kugabanya ikora neza. Kugabanya Ibihuha bya Greenhouse ntibikiri PR kwimuka gusa; nibisabwa kugenzurwa muri EU na Amerika.

Ese urunigi rutanga semiconductor rushobora kwibasirwa na gaze idasanzwe?

Niba imyaka mike ishize yaratwigishije ikintu, ni uko Urunigi ni byoroshye. Abakora Semiconductor bahuye nubuke bwibintu byose kuva neon kugeza fluoropolymers.

Isoko rya gaze ya fluor n'ibiyikomokaho biterwa n'ubucukuzi bwa fluorspar (calcium fluoride). Ubushinwa nisoko nkuru yisi yose yibikoresho fatizo. Iyo amakimbirane ya geopolitike yiyongereye cyangwa inzira y'ibikoresho ifunze, kuboneka kwibi bikomeye inzira ibitonyanga, n'ibiciro byiyongera.

Ku muguzi nka Eric, ubwoba bwa "Force Majeure" nukuri. Kugira ngo ibyo bigabanuke, ibigo bifite ubumenyi bitandukanye kubitanga. Bashakisha abafatanyabikorwa bafite ababo iso-tanks kandi bashizeho imiyoboro ya logistique. Kwizerwa muri ibikoresho ni ngombwa kimwe nubuziranenge bwa gaze. Urashobora kugira isuku C4F8 gaze mwisi, ariko niba ifashe ku cyambu, ntacyo bimaze kuri fab.

Ni ubuhe buryo bukoreshwa mu gucunga umutekano wa Hydrogen Fluoride n'ibindi bikoresho by'uburozi?

Umutekano nigitanda cyinganda zacu. Benshi irimo fluor imyuka ni uburozi, asphyxiants, cyangwa reaction cyane. Hydrogen Fluoride (HF), akenshi ikoreshwa mubutaka butose cyangwa ikabyara umusaruro, ni bibi cyane. Yinjira mu ruhu kandi yibasira imiterere yamagufwa.

Gukoresha ibyo bikoresho bisaba amahugurwa akomeye nibikoresho byihariye.

• Silinders: Ugomba kuba DOT / ISO yemewe kandi igenzurwa buri gihe kugirango yangirwe imbere.
• Indangagaciro: Indangantego ya Diaphragm ikoreshwa mukurinda kumeneka.
• Sensors: Semiconductor fabs bitwikiriye ibyuma byerekana gaze bitera impagarara kumeneka gato.

Iyo twujuje silinderi hamwe Icyuma cya elegitoroniki Nitrous Oxide cyangwa uburozi bwuburozi, tubifata nkintwaro ipakiye. Turemeza ko silinderi isukuye imbere kugirango irinde ibice kandi ko valve ifunzwe kandi igafungwa. Kubakiriya bacu, tuzi ko gaze cyangwa etchant igera mumutekano, yujuje ibipfunyika nubutabazi bukomeye.

Niki kiri imbere kubikoresho bikoreshwa muguhimba semiconductor?

The Umusaruro wa Semiconductor igishushanyo mbonera kirakaze. Mugihe chip yimuka muburyo bwa 3D nka Gate-Byose-Hafi (GAA) tristoriste, bigoye bya kuroba no gukora isuku yiyongera. Turimo kubona icyifuzo cya exotic nyinshi gaze ya fluor imvange zishobora gutobora imyobo yimbitse, ifunganye hamwe na atome neza.

Kurasa kwa Atome (ALE) ni tekinike igaragara ikuraho ibintu kimwe cya atome icyarimwe. Ibi bisaba gukuramo neza bidasanzwe imyuka itoroshye. Byongeye kandi, gusunika "icyatsi" gukora bizashoboka ko hajyaho ibishya chimie itanga imikorere imwe hamwe hepfo GWP.

Igihe kizaza ni icy'abashobora guhanga udushya haba muri synthesis hamwe no kwezwa. Nk Ibikoresho bya Semiconductor ihindagurika, imyuka ikoreshwa mu kuyikora igomba no guhinduka.

ABAFATANYIJE

• Fluorine ni ngombwa: Ubuhanga bwa florine ni urufunguzo rushoboza etch na isuku intambwe in Gukora Semiconductor.
• Isuku ni Umwami: Isuku ryinshi (6N) ntabwo biganirwaho kugirango wirinde inenge kandi urebe inzira ihamye.
• Imyuka itandukanye: Imyuka itandukanye nka CF4, SF6, na Azote trifluoride kora inshingano zihariye muri ibihimbano.
• Ingaruka ku bidukikije: Gucunga Ibihuha bya Greenhouse na kugabanuka ni ikibazo gikomeye mu nganda.
• Gutanga Umutekano: Ikomeye Urunigi nabafatanyabikorwa bizewe birakenewe kugirango birinde guhagarika umusaruro.

Kuri Jiangsu Huazhong Gas, twumva izi mbogamizi kuko tubaho buri munsi. Niba ukeneye Xenon Yera kubikorwa byawe bishya bya etch cyangwa gutanga byizewe bya gaze yinganda zisanzwe, turi hano kugirango dushyigikire ikoranabuhanga ryubaka ejo hazaza.