Gaze ya Huazhong yitangiye kumenya ibihangano nubumenyi bwinganda na gaze idasanzwe umusaruro. Muri iki gihe isi ndende, cyane cyane muri semiconductor inganda, icyifuzo Ultra-Isuku Imyuka ntabwo ari uguhitamo gusa; ni ngombwa rwose. Iyi ngingo isize mu isi ikomeye ya Isesengura ryanduye kuri imyuka yihariye ya elegitoroniki. Tuzareba impamvu niyo na tumwe umwanda irashobora kugira ingaruka zikomeye, uko tubimenya exsive shakisha umwanda, n'icyo risobanura kubucuruzi. Gusobanukirwa Amahirwe ya gaze nuburyo bwabo kwezwa no kumenya, nka ICP-MS, ni urufunguzo rwo kwemeza kwizerwa no gukora bigezweho ibikoresho bya elegitoroniki. Iki gice gikwiye umwanya wawe kuko gitanga ibitekerezo-byimbere mugukomeza imivugo Isuku ya elegitoroniki yihariye, imfuruka ya semiconductor na ibikoresho bya elegitoroniki Imirenge.

Ni ubuhe buryo bwihariye bwa elegitoronike kandi ni ukubera iki ubuziranenge bwabo ari ngombwa cyane mukora Semiconductor?

Imyuka yihariye ya elegitoronike, akenshi bivugwa nka imyuka ya elegitoroniki cyangwa Indwara ya Semiconductor, ni icyiciro cyihariye cya imyuka yo hejuru na Uruvange rwa gaze Byumwihariko inzira zifatika zigira uruhare mugukora ibice bya elegitoroniki. Bitekerezeho nkububatsi butagaragara bwimyaka ya digitale. Ibi gaze ikoreshwa muri semiconductor ibihimbano birimo intera itandukanye, nka Silane (Sih₄) yo kubitsa ibice bya silicon, azote trifluoride (NF₃) yo gukora isuku, argon (Ar) nk'ingabo iner, kandi bitandukanye doping gaze nka fosphine (ph₃) cyangwa arsine (ash₃) guhindura imitungo y'amashanyarazi ya semiconductor ibikoresho. Ijambo "umwihariko wa elegitoroniki"ubwayo yerekana porogaramu isobanutse kandi igaragara neza mu bigize. Ibi ntabwo ari buri munsi imyuka y'inganda; Ibisobanuro byabo birakomeye cyane.

Akamaro kanini kwabo ubuziranenge ntishobora gukandamizwa, cyane cyane muri Inganda ya Semiconductor. Imirongo ihuriweho na kijyambere (ics) iranga imyambarire hamwe ninzira zinyuranye zitoroshye, akenshi zipimirwa muri Nanometero (miliyari ya metero). Kuri ubu bunini bwa microscopic, ndetse na atom imwe idashaka-an umwanda-Abakora nka boulder mu mugezi muto, guhungabanya amashanyarazi yagenewe cyangwa bigatera inenge. Ibi birashobora kuganisha kuri chip itari yo, no mu nganda aho imikiririzo ya chip yakorewe kuri wafer imwe, ibyangiritse byimari kandi byishyurwa biturutse ku bwinshi kwanduza birashobora kuba byinshi. Kubwibyo, Uwiteka Isuku ya elegitoroniki yihariye ni inkingi yibanze kuri byose elegitoroniki na semiconductor inganda zihagaze. Icyaricyo cyose umwanda irashobora guhuza ibikoresho, umusaruro, no kwizerwa, gukora imbaraga Isuku kugenzura ngombwa.

Muri gaze ya Huazhong, twumva ko abakiriya bacu muri Inganda za Semiconductor Twishingikirize kugirango dutange imyuka ihuriro cyangwa irenga "nin nnes eshanu" (99.999%) cyangwa na "Nine esheshatu" (99,9999% urwego rwuzuye. Ibi bivuze ko icyaricyo cyose umwanda Ugomba kuba uhari muburyo bwo munsi yibice kuri miliyoni (ppm) cyangwa ibice kuri miliyari (ppb). Kugera no kugenzura ibyo isuku Urwego rusaba cyane kwezwa tekinike na, byumwihariko, iterambere Isesengura ryanduye Uburyo. Kubaho kw'ibitunguranye umwanda irashobora kandi kwerekana ibibazo hamwe na silinders cyangwa urunigi rutanga isoko, gufata cheque yubuzima buhoraho. Turemeza ibyacu Nitrogen Amaturo, kurugero, yujuje ibipimo ngenderwaho, nka azote ni gaze yakazi mubice byinshi bya semiconductor.

Nigute na microscopic yavukiyemo imirongo yumusaruro wa Derail?

Rimwe na rimwe biragoye kwiyumvisha uburyo ikintu gito, a umwanda wanduye gupimwa mubice kuri miliyari (ppb) cyangwa ibice kuri tillion (ppt), birashobora gutera ibibazo bikomeye. Ariko mwisi ya semiconductor Gukora, iyi microscopique Abanduye ni abagome bakomeye. Reka dusuzume inzira isanzwe ya semiconductor isanzwe: Harimo amajana, rimwe na rimwe, intambwe zoroshye nko kubitsa), kugaburira (gukuramo ibikoresho) (shyiramo atome yihariye). Buri ntambwe ishingiye ku bidukikije bigenzurwa neza, akenshi byashizweho cyangwa kubungabungwa na imyuka yihariye ya elegitoroniki. Niba a gaze ikoreshwa Muri imwe muri izi ntambwe zitwara umuntu udashaka umwanda, ibyo umwanda irashobora kwinjizwa mubice byoroshye bya semiconductor igikoresho.

Kurugero, Induru Kimwe na sodium, icyuma, cyangwa umuringa, ndetse na ultra-ubushyuhe buke, birashobora guhindura cyane imitungo ya silicon. Bashobora kurema inzira zibishaka, biganisha ku muzunguruko bigufi, cyangwa gukora nk '"imitego" bibangamira gutembera kwa electron, gahoro gahoro cyangwa kunanirwa rwose. An umwanda irashobora kandi kwivanga hamwe nibisubizo byimiti bigenewe munzira. Kurugero, a umwanda Muri gaze ya ETCHING ishobora gutera munsi ya ETCHING cyangwa hejuru-esching, kwangiza imiterere nyayo kuri wafer. Ingaruka ntabwo ari kumpanuka kugiti cye; itamenyekanye umwanda Ikibazo gishobora gutuma ibice byose byarakuwe, bikaviramo amamiriyoni yamadorari mu gihombo, umusaruro w'abaturage, no kubabara umutwe kubashinzwe gutanga amasoko nka Mark Shen, bakeneye kwemeza ibikoresho bihamye. Ibi birerekana gukenewe cyane gukurikira gupima.

Ikibazo nuko "byemewe" kuri buri wese umwanda Komeza kugabanuka nka semiconductor Ibiranga ibikoresho biba bito. Ibyafashwe byemewe umwanda Urwego Mu myaka icumi hashobora kuba ibiza kwanduza Uyu munsi. Iyi disiki idahwema kuri miniaturire ishyira igitutu kinini kubakora gaze hamwe nabataliyani basesengura kugirango bateze imbere imipaka ntarengwa ubushobozi. Ndetse kwishyiriraho Imyandikire, umukungugu muto utagaragara kumaso, urashobora guhagarika urumuri mumirongo ya Photolithography cyangwa gukora inenge z'umubiri ku buso bwa Wafer. Kubwibyo, kugenzura ibishoboka byose umwanda - yaba gaze, ibyuma, cyangwa kwishyiriraho - ni ngombwa. The Urwego rw'akarengane ibyo birashobora gutuma ibibazo ari byinshi, bishimangira ko ari ngombwa Isesengura rya gaze.

Ni abahe bateza ibibazo bikomeye? Kumenya umwanda muri gaze ya elegitoroniki.

Iyo tuvuze umwanda muri gaze yagenewe elegitoroniki na semiconductor Umurenge, turimo kureba abapakirwa bitandukanye, buriwese afite ubushobozi bwo gutera ingaruka zikomeye. Ibi umwanda kugirango umenyekane Birashobora gutondekanya cyane muri gaze, ibyuma, no gushiramo. Gusobanukirwa abo bahangayikishije ibibazo nintambwe yambere mubikorwa Isesengura ryanduye no kugenzura. Umwihariko umwanda uhari irashobora gutandukana bitewe na gaze ubwayo, uburyo bwo gutanga umusaruro, kubika, no gutunganya.

Gase umwanda ni izindi myuka zihari muri rusange gaze idasanzwe. Kurugero, muri isuku azote, gaze isanzwe umwanda Hashobora kubamo ogisijeni (O₂), ubuhehere (H₂o), Dioxyde de Carbone (Co₂), monoxyde ya karubone (CO), na Hydrocarbone (CHₓ). Ogisijeni nubushuhe birafitanye isano cyane kuko bigenda neza kandi birashobora kuganisha kumyanda idashaka semiconductor ibikoresho cyangwa ibikoresho byo gutunganya. No muri an gaze ya inert nka argon, ibyo birashobora kuboneka murwego rwo kuri trace. Nk'isosiyete, akenshi tubona ibyifuzo byo gusesengura a Urwego runini rwanduye, harimo n'aya bwoko bukora. Kurugero, ubushobozi bwacu burimo gutanga umusaruro Gaze Ibicuruzwa, aho kugenzura buri gice, harimo na gaze ishobora umwanda, ni igihe kinini.

Induru Ese hari ikindi kibazo gihangayikishije. Ibi ni atome yicyuma nka sodium (na), potasiyumu (k), calcium (ca), icyuma (CU), Chroprium (al). Birashobora guturuka kubikoresho fatizo, ibikoresho bifatika (nkibikoresho hamwe na reactors), cyangwa na silinders ubwabo niba bidavuwe neza. Nkuko byavuzwe, ibi Icyuma Irashobora kugira ingaruka zikomeye kumikorere y'amashanyarazi ya semiconductor ibikoresho. Kubimenya kuri PPB cyangwa PPT bisaba ubuhanga bwo gusesengura cyane nka plasma yangiza misa ya plactrometry (ICP-MS). Tugomba kandi gutekereza kwishyiriraho ikibazo. Ibi nibice bito cyangwa amazi yahagaritswe muri gutemba. Bashobora gutera inenge z'umubiri ku wazunguse, guhagarika amajwi mubikoresho, cyangwa kumenyekanisha izindi Abanduye. Gukangurura urufunguzo rwo gukuraho ibintu, ariko gukurikirana urwego rwabo nabyo ni igice cyuzuye Ubwiza bwa gaze gahunda. Bimwe imyuka yihariye ya elegitoroniki nabyo imyuka ikaze cyangwa imyuka y'ubumara, ikingura ikindi kintu kitoroshye cyo gufata no gusesengura, kureba niba umwanda umwirondoro ntuzamura ibyo byago.

ICP-MS: GARING ya zahabu yo kumenya umwanda wicyuma muri gaze ya semiconductor?

Iyo bigeze kuri Isesengura ryumucyo wa Metallic in Ultra-Isura Yuzuye, Kwinjiza plasma rusange ya plactrometry, cyangwa ICP-MS, abantu benshi bafatwa nkikoranabuhanga rikomeye. Nubuhanga bukomeye bwo gusesengura bushobora kumenya no kugereranya intera nini ya umwanda mwiza, akenshi hasi kugirango ugabanye urwego rwo hasi - tekereza ibice-kuri tiriyari (ppt) cyangwa ibice-quadlillion (ppq) kubintu bimwe. Iyi sentivite ni ukubera iki ICP-MS yabaye ingenzi cyane kuri semiconductor inganda, aho, nkuko twaganiriye, ndetse niminota Induru irashobora kubangamira ubuziranenge bwibicuruzwa.

Nigute ICP-MS kora amarozi yayo? Mu magambo yoroshye, the gaze ya gaze (cyangwa igisubizo gikomoka kuri gaze) cyatangijwe mubice bishyushye cyane, mubisanzwe byakozwe argon. Iyi plasma, igera ku bushyuhe bwa 6.000 kugeza 10,000 ° C, ifite imbaraga zihagije zo gusenya molekile ya gaze na ionize atome ihari, harimo Induru. Iyi onte irasohoka muri plasma kandi iyobowe mumwanya munini. Ikigereranyo rusange gikora nkayungurura neza, utandukane ion ukurikije ibipimo byikigereranyo. A detector Noneho ibara ion kuri buri misa yihariye, itumere ko tumenya ibintu bihari kandi nibyinshi. Ubushobozi bwa ICP-MS gusikana kubintu byinshi bya Imyanda ya Metallic muri gaze yihariye icyarimwe biratuma bikora neza.

Mugihe ICP-MS ni imbaraga zikomeye, ntabwo ari ibibazo byayo, cyane cyane iyo uhuye gaze ikoreshwa muri semiconductor guhimba. Uburyo bumwe busanzwe nugukanda umwanda kuva mubunini bunini bwa gaze kumugaragaro cyangwa mumazi, hanyuma asesengurwa na ICP-MS. Ariko, mu buryo butaziguye inshinge zinyuranye muri ICP-MS Sisitemu nayo iramenyerewe kubisabwa, nubwo bisaba interineti yihariye. Guhitamo uburyo biterwa nuburyo bwihariye Amahirwe ya gaze y'inyungu, gaze ya matrix, n'ibisabwa imipaka ntarengwa. Muri gaze ya Huazhong, dushora cyane mubikoresho byo gusesengura leta zubuhanzi, harimo ICP-MS Ubushobozi, kuko tuzi ko gutanga byizewe Isesengura ryanduye Amakuru nibyingenzi kubizera abakiriya bacu bashyira muri twe Gusukura Hafi ya elegitoroniki imyuka. Ibisobanuro ICP-MS ifasha kwemeza ko ubuziranenge bwa gaze yujuje ibyangombwa amanota ya elegitoroniki ibikoresho.

Kuki gaze itajegajega itajegajega kutaganirwaho kuri elegitoroniki n'inganda za semiconductor?

Gukenera kutagaragara Isuku muri Inganda za elegitoroniki n'inganda za semiconductor ntabwo ari uguhitamo gusa; Nibisabwa byibanze na fiziki nubukungu bwibikoresho bigezweho. Nk semiconductor Ibiranga ibikoresho bigabanuka kuri Nanometer igipimo, sennitivite kuburyo ubwo aribwo bwose bwa kwanduza SkyReket. An umwanda Ibyo bishobora kuba byari byimazeyo ibikoresho bishaje, binini birashobora gutuma kunanirwa guhobera mugukata imitwe. Ibi bitera imbaraga semiconductor Uruganda.

Tekereza kubwubatsi bugoye bwa microprocestor cyangwa chip yo kwibuka. Irimo imiliyari miriyari, buri gitangaza cya miniature yubuhanga. Imikorere yabantu barimo biterwa numutungo usobanutse wamashanyarazi wa semiconductor Ibikoresho Byakoreshejwe, aribyo, nabyo, byoroshye cyane umwanda. Kurugero, runaka Induru Urashobora kumenyekanisha urwego rwingufu udashaka mu cyuho cya Silicon Gap, biganisha ku kwiyongera kwiyongera kw'ibintu cyangwa byagabanijwe kugenda. Ibi bivuze buhoro, bidashoboka, cyangwa ibikoresho bidakora. Gase umwanda Kimwe na ogisijeni cyangwa ubushuhe bushobora gutuma hashyizweho ibice bya okiside bidateganijwe, bihindura film filckses cyangwa imitungo ya interineti ingenzi kubikorwa byibikoresho. Muri rusange Ubwiza bwa gaze bisobanurwa neza ubuziranenge bwibicuruzwa no kwizerwa.

Byongeye kandi, the Inganda za elegitoroniki n'inganda za semiconductor zirangwa no gukora ibintu bitoroshye kandi bihenze. Ingaragu semiconductor Uruganda rwo guhimba ("Fab") rushobora gutwara miliyari y'amadorari yo kubaka no guha ibikoresho. The gaze yakoreshejwe ni ibintu byinshi muribi byiciro bihenze. Niba a gaze idasanzwe yanduye hamwe na an umwanda, ntabwo bigira ingaruka gusa kubirwanyi kuri ubu bitunganyirizwa; Irashobora kandi kwanduza ibikoresho byo gutunganya bihenze ubwabyo. Ibi birashobora kuganisha igihe cyagutse cyo gukora isuku no gusaba, kongeraho kugirango ukingurire kandi uhagarike gahunda yumusaruro - ububabare bukomeye kumuntu nka Mark Shen, ushingiye ku itangwa mugihe cyo gukemura ibibazo byabakiriya be. Kubwibyo, kwemeza Isuku ya elegitoroniki yihariye Binyuze mu gaciro Isesengura ryanduye ni ingamba zo kugabanya ingaruka zo kugabanya iminyururu yose itangwa. Kwibanda kuri imyuka ndende ni ubudahwema kuko imigabane ni myinshi.

Ni izihe ngorane z'ingenzi duhura nazo mu isesengura ry'umwanda wicyuma muri gaze idasanzwe?

Gusesengura Induru in imyuka idasanzwe, cyane cyane ibyo bikoreshwa muri semiconductor Inganda, irerekana ibibazo byihariye. Ingorabahizi zibanze zituruka mubihe bike cyane aho umwanda Birashobora kuba ikibazo - akenshi mubice-miliyari (ppb) cyangwa ibice-kuri tiriyari (ppt). Gutahura no guhuza neza umunota umwe ntibisaba gusa ibikoresho byo gusesengura cyane nka ICP-MS Ariko kandi usukuye bidasanzwe ibidukikije hamwe nibidukikije byikigereranyo hamwe na protocole kugirango wirinde kumenyekanisha hanze kwanduza.

Ikibazo kimwe gikomeye ni icyitegererezo. Benshi imyuka yihariye yakoreshejwe in ibikoresho bya elegitoroniki birakora cyane, binini, cyangwa hamwe na pyrophoric (gutwika ubwayo mu kirere). Neza kandi neza kwimura ibi imyuka mu gikoresho cyo gusesengura nka an ICP-MS Utarinze guhindura gaze ya gaze cyangwa kwanduza igikoresho bisaba intera yihariye nuburyo bwo gukemura. Kurugero, gutera mu buryo butaziguye a gaze nka hydrogen chloride (HCL) muburyo busanzwe ICP-MS sisitemu irashobora kubyangiza cyane. Kubwibyo, uburyo butaziguye, nko gukunda impinja (bubbling gaze binyuze mumazi yo gufata umwanda) cyangwa umutego wo gufatanya, akenshi ukoreshwa. Ariko, ubu buryo bushobora kumenyekanisha amasoko yabo bwite ya kwanduza cyangwa gusesengura igihociramo niba bitakozwe neza. Guhitamo gaze Kuborohereza, nibiba ngombwa, bigomba no kuba udashaka ubuziranenge.

Indi mbogamizi ni "ingaruka za matrix." Igice kinini gaze ubwayo (urugero, argon, azote, hydrogen) irashobora kubangamira kumenya shakisha umwanda. Kurugero, muri ICP-MS, plasma yaremye kuva ku bwinshi gaze irashobora gukora ions politotomic ifite umubare munini wishyurwa nkintego runaka Induru, biganisha kubyiza cyangwa umubare udahwitse. Abasesenguzi bagomba gukoresha tekinike nkingaruzi / reaction muri ICP-MS cyangwa gukemura byinshi-byoroshye gutsinda kugirango utsinde ibyo biganiro bibi. Byongeye kandi, ibipimo bya kalibrasi bikoreshwa mukugereranya Icyuma igomba kuba yukuri kandi irambuye, kandi inzira yose isesengura igomba kwemezwa kugirango yiringirwa Isesengura ryanduye Ibisubizo. Twebwe, nkubitanga, natwe duhangayikishijwe n'ubunyangamugayo bwa silinders n'ubushobozi bwabo bwo gutanga umusanzu Induru Igihe kirenze, ibyo bisaba kugenzura ubuziranenge bukomeje.

Urashobora gukoresha igikoresho cyo kuvunja cya gaze kizamura neza gupima umwanzuro?

Yego, Gukoresha igikoresho cyo kuvunja irashobora rwose kugira uruhare runini muguhuza ukuri kwa gukurikira gupima, cyane cyane iyo uhuye nibibazo gaze matrice cyangwa iyo bigamije ultra-hasi gutahura imipaka. A igikoresho cyo kuvunja, rimwe na rimwe bivugwa nka sisitemu yo gukuraho matrix, mubyukuri ikora muguhitamo gukuraho ubwinshi gaze (igice kinini cya gaze ya gaze) mugihe wihanganira shakisha umwanda y'inyungu. Iyi ntambwe mbere yo kwibandaho irashobora kunoza ibintu bidasanzwe uburyo bwo gusesengura ibisesenguzi byakurikiyeho ICP-MS cyangwa Gazi chromatograph sisitemu.

Ihame riri inyuma ya benshi ibikoresho byo guhanahana gaze birimo igice cya kabiri cya kimwe cya kabiri cyangwa uburyo bwatoranijwe bwo guhitamo / DEPORTIVE. Kurugero, membrane ya palladium irashobora gukoreshwa muguhitamo gukuraho hydrogen kuva a imvange ya gaze, emerera abandi umwanda muri gaze Kwibanda no kurengana a detector. Mu buryo nk'ubwo, ibikoresho byihariye bya adsorbent birashobora gutega agaciro umwanda kuva gutemba gaze umugezi, ushobora noneho kuba umuhanga mu bunini buto bw'isuku gaze yo gusesengura. Mugukagabanya umubare munini gaze kugera kuri detector, ibi bikoresho bigabanya insanganyamatsiko za matrix, hamagara urusaku rwinyuma, kandi wongere neza igipimo-cyurusaku rwintego shakisha umwanda. Ibi birashobora kugutera hepfo imipaka yo gutahura.

Inyungu za Gukoresha igikoresho cyo kuvunja biragaragara cyane iyo gusesengura umwanda muri elegitoroniki Imyuka igoye gukora muburyo butaziguye cyangwa itera kwivanga mubikoresho byo gusesengura. Kurugero, mugihe ugerageza gupima ogisijeni cyangwa ubushuhe muburyo bworoshye cyane gaze idasanzwe, a igikoresho cyo kuvunja birashobora gutandukanya ibi umwanda mubyinshi gaze nka argon cyangwa helium mbere yuko bagera kuri detector. Ibi ntibiteze imbere gusa ariko birashobora no kurinda ibice byisesengura byunvikana. Nkumurimo wa 99.999% Isuku 50l Cylinder XENON, Twumva agaciro k'ubuhanga nkubwo buteye imbere mugukemura bidasanzwe ubuziranenge ya gake kandi imyuka idasanzwe. Iyi side yikoranabuhanga Gusunika Gazi n'icyiciro cyo kugenzura.

Ihuza rito: Isesengura ryanduye muri gaze rikoreshwa mukora semiconductor.

The gaze ikoreshwa mu buryo butaziguye ni amaraso yubuzima bwa fomwari. Ibi birimo ntabwo gusa imyuka nini nka azote kandi argon, ariko nanone kandi imyuka yihariye ya elegitoroniki nka Imizi . ETCHING CASE (urugero, NF₃, SF₆, CL₂ kugirango ashushanye), Imyuka ya Ion . Kuri buri kimwe muribi gaze irakenewe, urwego n'ubwoko bwemewe umwanda ni Byasobanuwe neza kuko gutandukana kwose birashobora guhindura muburyo butaziguye semiconductor Wafer. Ibi bikora Isesengura ryanduye kuri aba inzira intambwe ikomeye yo kugenzura.

Reba uburyo bwo kubitsa kumurongo wa Silikon Dioxyde, insulator isanzwe muri tramestors. Niba ogisijeni gaze ikoreshwa Kuri iki gikorwa kirimo Hydrocarbon umwanda, karubone irashobora kwinjizwa mumyanda, gutesha agaciro imitungo yayo yo kwigarurira kandi ishobora kuyobora kunanirwa kw'ibikoresho. Mu buryo nk'ubwo, niba ething gaze ikubiyemo ibintu bitunguranye umwanda, irashobora guhindura igipimo cya ETCH cyangwa guhitamo, biganisha ku bintu binini cyane, bito cyane, cyangwa bikozwe nabi. Ndetse na an umwanda muri an gaze ya inert nka Gaze ya argon ikoreshwa mu guhingurwa irashobora kwimurirwa hejuru, bigira ingaruka kumishinga. Ingaruka za an umwanda Akenshi itunganya-yihariye, bisobanura an umwanda yihanganiye intambwe imwe irashobora kuba ingenzi umwanda mu kindi.

Iyi sano ikomeye isaba uburyo bwuzuye kuri Isesengura ryanduye. Ntabwo ari ukugenzura ibicuruzwa byanyuma; Harimo gukurikirana ibikoresho fatizo, muburyo bwinzuzi, na nyuma gaze gusukura ibyiciro. Kuri Semiconductor yihariye imyuka, ibisobanuro kuri umwanda muri semicionductor Porogaramu akenshi ikunze gukomera, isunika imipaka yo gutahura isesengura. Turakorana cyane nabakiriya bacu muri Semiconductor na electronics umurima kugirango wumve umwihariko wabo umwanda Ssetindities kuri Bitandukanye imyuka na gaze. Ubu buryo bwo gufata bufasha kwemeza ko Uwiteka Isuku yihariye Dutanga duhora twujuje ibisabwa bisabwa inzira zabo ziterambere. Ikibazo kiri mu kumenya a Urwego runini rwanduye ku rugero rugabanuka.

Hanze ya laboratoire: Imyitozo myiza yo gukemura inzengu zisumba cyane Semiconductor kugirango wirinde kwanduza.

Guharanira Isuku ya elegitoroniki yihariye ntabwo irangiza iyo gaze asiga ibicuruzwa byacu. Kubungabunga ibyo ubuziranenge inzira yose kugeza aho ikoresha muri a semiconductor FAB isaba kwitondera cyane gukora, kubika, no kugabura. Ndetse hejuru gaze ya gaze irashobora kwanduzwa niba idacungwa neza. Muri gaze ya Huazhong, ntabwo twibanze gusa kubyara imyuka yo hejuru Ariko kandi ugire inama abakiriya bacu mubikorwa byiza byo gukumira downch kwanduza.

Ibikorwa Byingenzi birimo:

• Guhitamo Ibigize: Ibigize byose muri sisitemu yo gutanga gaze - harimo silinders, abagenzuzi, indangagaciro, igituba, na fittings - zigomba gukorwa mubikoresho bikwiye (urugero, ibyuma byatoye bidafite ishingiro) kandi byemejwe byumwihariko kandi byemejwe kuri Ultra-Isuku (UHP). Gukoresha ibikoresho bitari byo birashobora kugutera kwimuka kwa umwanda cyangwa a umwanda Kwinjira muri gutemba.
• Sisitemu Ubunyangamugayo: Sisitemu yo gutanga gaze igomba kumeneka. Ndetse ntoya yamenetse irashobora kwemerera icyombora Abanduye Nka ogisijeni, ubuhehere, kandi kwishyiriraho ikibazo cyo kwinjiza sisitemu, kumvikana Isuku. Kugenzura buri gihe ni ngombwa.
• Uburyo bwo Gusukura: Uburyo bukwiye bukwiye ni ngombwa igihe cyose ihuriro ryakozwe cyangwa silinderi yahinduwe. Ibi bikubiyemo guswera imirongo hamwe na gaze yo mu isuku (nka argon cyangwa azote) kugirango ukureho umwuka uwo ariwo wose wafashwe cyangwa umwanda. Gusukura bidahagije nisoko rusange ya kwanduza. Dukunze gusaba parikingi yikora kugirango duhanire.
• Ibikoresho byitanze: Ukoresheje abishyuza nimirongo yihariye imyuka cyangwa imiryango ya imyuka irashobora gukumira kwanduza. Ibi ni ngombwa cyane mugihe cyo guhinduranya hagati ya an gaze ya inert no kwitwara neza cyangwa gaze.
• Cylinder Gutwara: Silinders bigomba gukemurwa no kwitondera kwirinda kwangirika. Bagomba kubikwa mubice byagenwe, bifite umwuka mwinshi, na "mbere, muri," hanze "Gucunga Ibarura bigomba gukorwa. Gukoresha ubuhehere bwabumwe na ogisijeni Isesengura ryingenzi zirashobora kandi gufasha gukurikirana indangamuntu zose zibisanzwe umwanda.

Kubakiriya nka Mark Shen, utanga impuzandengo ya releale cyangwa gukoreshwa mugukora, gusobanukirwa nibi bikorwa byiza ni ngombwa mugukomeza Uwiteka ubuziranenge bwibicuruzwa basezeranya abakiriya babo. Ni inshingano zisangiwe. Turemeza ibyacu Hydrogen silinder Ibicuruzwa, kurugero, byuzuye kandi bikomeza gukumira umwanda Kwinginza, ariko sisitemu-yumukoresha igira uruhare runini rufite uruhare runini. Kurwanya umwanda ni imbaraga zihoraho ziva mumisaruro kugirango usabe.

Witegereze mumupira wa kirisiti: Ni ubuhe buryo buzaza dushobora kwitega kumenyekanisha umwambaro ku myuka yo mu rwego rwa elegitoroniki?

Gushakisha ubuziraherezo ubuziranenge in Imyuga yo mu rwego rwa elegitoronike kandi byoroshye Kumenya umwambanyi Uburyo ni urugendo rukomeza, ruyobowe numuvuduko udahwema urwara semiconductor inganda. Mugihe ibikoresho biranga bigabanuka muri sub-10 nyakanwa hamwe nibikoresho bishya hamwe nubwubatsi bugaragara (nka 3d nand 3d nand 3d nand-hafi-hirya no hino), ingaruka zabasebe shakisha umwanda bizahinduka byinshi. Ibi bizakenera iterambere ryinshi muri byombi Gusunika Gazi tekinoroji kandi Isesengura ryanduye ubushobozi.

Turashobora gutegereza inzira nyinshi:

• Imipaka yo gutahura Ubuhanga bwo gusesengura bumeze ICP-MS, Gazi ya chromatography-misa yerekana (GC-MS), hamwe na cavity Impeta-hasi ya spectroscopy (crds) izakomeza guhinduka, gusunika gutahura imipaka ku mutego Urwego rw'akarengane kumanuka kurwego rumwe rwa PPT cyangwa no muri PPQ. Ibi bizasaba udushya muri ion inkomoko, gusesengura rusange, kandi detector ikoranabuhanga.
• Ahantu hamwe no gukurikirana igihe nyacyo: Hano haribisabwa na sisitemu yo gusesengura bishobora gukurikirana Isuku Mugihe nyacyo, mugihe cyo gukoresha muri semiconductor fab. Ibi bituma kugirango hamenyekane ako kanya kwanduza ibyabaye cyangwa kuzenguruka muri umwanda Urwego, Gushoboza ibikorwa byo gukosora byihuse no kugabanya igihombo cyibicuruzwa. Iseruzi nto na chemometric algorithms izagira uruhare runini hano.
• Isesengura rya gaze ya gaze igoye: Ejo hazaza semiconductor Inzira zirashobora kuba zirimo bigoye Uruvange rwa gaze hamwe nibigize byinshi bihuriye. Gusesengura umwanda Mubikoresho nkibi bigoye bizasaba ingamba nshya zisesengura hamwe nibikoresho byo gusobanura amakuru. Ubushobozi bwo gupima an umwanda Mubice kimwe nta kwivanga nabandi bizaba ngombwa.
• Wibande kuri "umwicanyi" ntamwanda: Ubushakashatsi buzakomeza kumenya umwihariko umwanda muri semicionductor Gutunganya bifite ingaruka nini ku buryo budasobanuye ku gikoresho cyangwa umusaruro, ndetse no mu rwego rwo hasi cyane. Uburyo bwo gusesengura buzaba intego kuri iyi "yica" umwanda.
• Isesengura ryamakuru na AI: Umubare munini wamakuru yatanzwe nateye imbere Isesengura ryanduye sisitemu izakoreshwa ukoresheje ai na mashini biga kugirango bamenye imigendekere, ihanura kwanduza ibibazo, kandi byoroshye Gusunika Gazi inzira. Ibi birashobora gufasha mubuyobozi bukora neza aho gukemura ibibazo.

Muri gaze ya Huazhong, twiyemeje kuguma ku isonga muri aya majyambere. Dukomeje gushora imari mu bushakashatsi n'iterambere, gufatanya n'abafatanyabikorwa mu nganda n'amasomo yo guteza imbere ubumenyi bwa gaze ndende umusaruro kandi Isesengura ryanduye. Kubakiriya bacu, harimo nibitekerezo byiza nka Mark Shen, Ibi bivuze ko hatangwamo imyuka yihariye ya elegitoroniki ibyo byuzuza ibyo bifatika bya Inganda za elegitoroniki n'inganda za semiconductor. Intera yacu Helium, uzwiho kurubakwa no gukoresha muburyo bwihariye, ninyungu zubugenzuzi bwateye imbere kugirango ugenzure bike umwanda urwego.

Ibyingenzi bifata kwibuka:

• Imyuka yihariye ya elegitoronike ni ngombwa kuri Gukora Semiconductor, n'ibyabo ubuziranenge ntabwo ari ibiganiro.
• Ndetse shakisha umwanda, yapimwe muri ppb cyangwa ppt, irashobora gutera inenge zikomeye nigihombo cyatanze semiconductor ibikoresho.
• Bisanzwe umwanda muri gaze Shyiramo izindi myuka (nka O₂, H₂o), Induru, na kwishyiriraho ikibazo.
• ICP-MS ni ibuye rya mperimworomo kugirango tumenye a Urwego runini rwanduye, cyane cyane Induru, ku ntsinzi ya Ultra-muke.
• Gukomeza Isuku bisaba gufata neza na sisitemu inyangamugayo kuva kuri gazi silinderi kugeza aho ikoresha kugirango wirinde kwanduza.
• Ejo hazaza hazabona no munsi gutahura imipaka, Gukurikirana igihe nyacyo, na Ai-gutwara Isesengura ryanduye kuri amanota ya elegitoroniki imyuka.
• Kugenzura ubushobozi bwose umwanda ni ngombwa kugirango ubare ubuziranenge bwibicuruzwa kandi kwizerwa bigezweho ibikoresho bya elegitoroniki.