2. Kuki inganda za Semiconductor zisaba ubuziranenge bwuzuye

Kugira ngo wumve ko ari ngombwa kwera cyane, umuntu agomba kumva igipimo cyinganda zigezweho. Uyu munsi chip yateye imbere iranga tristoriste ifite ubugari bwa nanometero nkeya. Kugira ngo ubyerekane neza, umugozi umwe wimisatsi yumuntu ufite uburebure bwa 80.000 kugeza 100.000.

Iyo urimo wubaka urwego kurwego rwa atome, molekile imwe ya ogisijeni cyangwa igitonyanga cya microscopique cyamazi irashobora gutera kunanirwa gukabije.

• Oxidation: Umwuka wa ogisijeni udakenewe urashobora kwitwara neza muburyo bwa silikoni nziza, ugahindura imashanyarazi.

• Kwanduza cyane: Ndetse agace kamwe kayobye karashobora kuzunguruka mugihe gito transistor ya nanoscale, bigatuma igice cyose cya microchip kidafite akamaro.

• Kugabanya Umusaruro: Muri fab itunganya ibihumbi bya wafer buri cyumweru, igabanuka ryumusaruro muke kubera kwanduza gaze birashobora guhinduka miriyoni icumi zamadorari yinjiza yatakaye.

Kubwibyo, Uwiteka semiconductor fluid argon byinjijwe mubidukikije byubwiherero bigomba kuba bidafite umwanda uwo ariwo wose wanduye.

3. Ibyingenzi Byibanze bya Semiconductor Liquid Argon

Urugendo rwa silicon wafer kuva mubikoresho fatizo kugeza microprocessor yarangije gufata intambwe amagana. Ultra-high isuku fluid argon yinjijwe cyane mubice byinshi byingenzi byuru rugendo.

3.1. Silicon Crystal Gukurura (Inzira ya Czochralski)

Urufatiro rwa microchip iyariyo yose ni silicon wafer. Izi waferi zaciwe zivuye mu ngano nini, imwe ya kirisiti ya silikoni imwe ikura hakoreshejwe uburyo bwa Czochralski (CZ). Muri ubu buryo, silikoni isukuye cyane ya silikoni yashonga muri quartz ikomeye cyane ku bushyuhe burenga 1,400 ° C. Imbuto ya kirisiti yatangijwe kandi ikururwa buhoro buhoro hejuru, ishushanya kristu ya silindrike itunganijwe neza.

Muri ubu buryo bukabije bwubushyuhe, silikoni yashongeshejwe irakora cyane. Niba ihuye na ogisijeni cyangwa azote, izakora dioxyde ya silicon cyangwa nitride ya silicon, isenya imiterere ya kristaline. Hano, argon ikora nkumurinzi wanyuma. Itanura rihora risukurwa hamwe numwuka ultra-high isuku yamazi argon kurema ikirere cyuzuye. Kuberako argon iremereye kuruta ikirere, ikora igipangu kirinda silikoni yashongeshejwe, ikemeza ko ingot yavuyemo itunganijwe neza kandi idafite inenge za microscopique.

3.2. Plasma Gutera no kubitsa

Chip zigezweho zubatswe mubice bya 3D. Ibi bikubiyemo gushira microscopique ibice byibikoresho byayobora cyangwa bikingira kuri wafer hanyuma ugahita ukuramo ibice byihariye kugirango ukore imirongo.

• Gusohora (Kubika Imyuka Ifatika - PVD): Argon ni gaze yambere ikoreshwa mugutemba. Mu cyumba cya vacuum, gaze ya argon iba ion muri plasma. Izi argon zuzuye neza noneho zihutishwa mubintu bigenewe (nkumuringa cyangwa titanium). Imbaraga za kinetic imbaraga za argon ziremereye zikuramo atome ku ntego, hanyuma igashyira neza kuri wafer ya silicon. Argon yaratoranijwe kubera ko misa ya atome ikwiranye neza no gusibanganya atome yicyuma neza nta shiti ikora nayo.

• Byimbitse Ion Etching (DRIE): Iyo ababikora bakeneye gucengera mu mwobo wimbitse, usobanutse neza muri silikoni - ingenzi cyane kubibikoresho byo kwibuka hamwe no gupakira neza - argon ikunze kuvangwa na gaze zidahwitse kugirango plasma ihindurwe kandi ifashe gutera ibisasu hejuru ya wafer, bikuraho ibicuruzwa biva mu mahanga.

3.3. DUV na EUV Lithographie (Excimer Lasers)

Lithographie ni inzira yo gukoresha urumuri kugirango icapure ibizunguruka kuri wafer. Mugihe imirongo yagabanutse, abayikora bagomba gukoresha urumuri hamwe nuburebure buringaniye. Aha niho ibikoresho bya elegitoroniki guhuza na fiziki optique.

Ubuvanganzo bwimbitse Ultraviolet (DUV) bushingiye cyane kuri laseri ya ArF (Argon Fluoride). Izi lazeri zikoresha neza imvange ya argon, fluorine, na gaze ya neon kugirango itange urumuri rwibanze cyane hamwe nuburebure bwa nanometero 193. Ubuziranenge bwa argon bukoreshwa muri ibyo byuma bya laser birakomeye bidasanzwe. Umwanda uwo ariwo wose urashobora gutesha agaciro optique ya laser, kugabanya ubukana bwurumuri, kandi bigatera inzira ya lithographie gucapa ibice bitagaragara cyangwa bifite inenge.

Ndetse no muri sisitemu nshya ya Extreme Ultraviolet (EUV) ya lithographie, argon igira uruhare runini nka gaze yogeza kugirango sisitemu yindorerwamo yoroheje, igoye cyane itarangwamo umwanda.

3.4. Annealing hamwe nubushyuhe bwo gutunganya

Nyuma ya dopants (nka boron cyangwa fosifore) yatewe muri silicon kugirango ihindure imiterere yumuriro wamashanyarazi, wafer igomba gushyukwa nubushyuhe bwinshi kugirango isane ibyangiritse kuri kasitori kandi ikore dopants. Iyi nzira, izwi nka annealing, igomba kubaho mubidukikije bigenzurwa cyane, bitarimo ogisijeni kugirango birinde ubuso bwa wafer okiside. Gukomeza gutemba kwa ultra-pure argon itanga ibidukikije byubushyuhe.

4. Liquid Argon Electronics: Guha imbaraga Igisekuru kizaza cya tekinoroji

Ijambo ibikoresho bya elegitoroniki muri rusange ikubiyemo urusobe rwibinyabuzima byubuhanga buhanitse hamwe nuburyo bwo gukora buterwa nibi bikoresho bya kirogenike. Mugihe tujya mubihe byiganjemo Intelligence Intelligence (AI), Internet yibintu (IoT), hamwe nibinyabiziga byigenga, ibyifuzo byimbaraga zikomeye, zikoresha ingufu biragenda byiyongera.

1. Kwihuta kwa AI na GPUs: Ibice binini byo gutunganya ibishushanyo mbonera (GPUs) bisabwa guhugura imiterere ya AI nkurugero rwindimi nini bisaba ubunini budasanzwe, butagira inenge silicon ipfa. Ninini ipfa, niko amahirwe menshi yuko umwanda umwe ushobora kwangiza chip yose. Ibidukikije bitagira inenge bitangwa na UHP argon ntabwo biganirwaho hano.

2. Kubara Quantum: Mugihe abashakashatsi batezimbere mudasobwa, ibikoresho birenze urugero bikoreshwa mugukora qubits bisaba ibidukikije bikora hafi ya zeru. Isuku ya Argon ningirakamaro mugutegura cryogenic no guhimba ibyo bizakurikiraho.

3. Amashanyarazi: Imodoka zikoresha amashanyarazi zishingiye kuri Silicon Carbide (SiC) na Gallium Nitride (GaN) amashanyarazi. Gukura ibyo bikoresho bya semiconductor kristal bisaba nubushyuhe burenze ubwa silikoni isanzwe, bigatuma inert ikingira inert ya argon ndetse ningirakamaro.

5. Ibyingenzi byurunigi rwo gutanga no gushakisha

Gukora ultra-high purity fluid argon nigitangaza cyubwubatsi bugezweho. Ubusanzwe ikurwa mu kirere ikoresheje cryogenic fractional distillation mubice binini bitandukanya ikirere (ASU). Ariko, kubyara gaze ni kimwe cya kabiri cyintambara; kuyigeza ku gikoresho cya semiconductor udatakaje ubuziranenge nabwo biragoye.

Kurwanya Umwanda Mugihe cyo Gutambuka

Buri valve, umuyoboro, hamwe nububiko bukora kuri ultra-high isuku yamazi argon bigomba kuba amashanyarazi yihariye kandi yabanje guhanagurwa. Niba ikigega cyo gutwara abantu gifite na microscopique yamenetse, umuvuduko wikirere ntuzareka argon gusa; ubushyuhe bwa kirogenike burashobora rwose gukurura umwanda wo mu kirere in, kwangiza icyiciro cyose.

Kurwego rwa fab, amazi ya argon abikwa mubigega byinshi byiganjemo vacuum. Ihita inyuzwa mumashanyarazi yihariye hamwe na point-yo-gukoresha-isuku ya gaze mbere yo kwinjira mu musarani.

Kugirango ukomeze umusaruro uhoraho, udahagarikwa, abakora semiconductor bagomba gufatanya nabatanga gazi yo murwego rwo hejuru bamenye neza urwego rutanga isoko. Kubikoresho bigezweho bigamije gushakisha itangwa ryizewe, ryizewe ryibi bikoresho byingenzi bifite ibipimo byera byera, bigashakisha ibisubizo by’inganda zikomoka ku nganda zitangwa n’abatanga ikizere nka Gaze ya Huazhong iremeza ko ibipimo nyabyo byujujwe kandi igihe cyo gukora kivaho.

6. Ibitekerezo byubukungu n’ibidukikije

Ubwinshi bwa argon ikoreshwa na gigafab igezweho iratangaje. Uruganda runini runini rukora imashini rushobora gukoresha metero kibe ibihumbi icumi za gaze ya ultra-yera buri munsi.

Kuramba no Gusubiramo

Kuberako argon ari gaze nziza kandi ntigikoreshwa muburyo bwa chimique mubikorwa byinshi bya semiconductor (ikora cyane nkingabo ikingira umubiri cyangwa plasma ikoreshwa), harikigenda cyiyongera mubikorwa byinganda zo kugarura no gutunganya sisitemu. Fabs yateye imbere iragenda ishyiraho ibice byo kugarura ibintu bifata imyuka ya argon ivuye mu itanura rya kirisiti ikurura ibyumba. Iyi gaze noneho yongeye kwezwa mugace. Ntabwo ibyo bigabanya gusa ikiguzi cyo gukora fab, ahubwo binagabanya ikirenge cya karubone kijyanye no gutembera no gutwara argon nshya mumwanya muremure.

7. Kazoza ka Argon mugukora neza

Nkuko inganda za semiconductor zisunika kuri 2nm, 14A (angstrom), no hanze yacyo, imyubakire ya transistor irahinduka. Turimo kuva muri FinFET tujya Irembo-Byose-Hafi (GAA) hanyuma amaherezo kugirango twuzuze ibishushanyo bya FET (CFET).

Izi nyubako za 3D zisaba ububiko bwa atome (ALD) hamwe na atomic layer etching (ALE) - inzira ikoresha silikoni mubyukuri atom imwe icyarimwe. Muri ALD na ALE, impiswi igenzurwa neza ya argon ikoreshwa mugusukura icyumba cya reaction hagati yimiti ya chimique, ikemeza ko reaction ibaho gusa aho igenewe hejuru ya atome.

Nkuko ubusobanuro bwiyongera, kwishingikiriza kuri semiconductor fluid argon biziyongera gusa. Ibisabwa kugira isuku birashobora no kurenga ibipimo 6N biriho ubu, bigasunika mubice bya 7N (99,99999%) cyangwa birenga, bigatuma habaho udushya twinshi mugusukura gaze hamwe nikoranabuhanga rya metero.

Umwanzuro

Biroroshye gutangazwa na microprocessor yarangiye - igice cya silicon kirimo miliyari za microscopique zahinduwe zishobora gukora trillioni zo kubara kumasegonda. Nyamara, iyi mpinga yubuhanga bwabantu iterwa rwose nibintu bitagaragara byubaka.

Ultra-hejuru yubuziranenge bwamazi argon ntabwo ari ibicuruzwa gusa; ni inkingi fatizo yinganda ziciriritse. Kuva mukurinda kuvuka gushonga kwa kristu ya silicon kugeza gushoboza plasma ikora imirongo ya nanometero nini, argon yemeza ko ibidukikije byera bikenewe kugirango amategeko ya Moore abeho. Nkumupaka wa ibikoresho bya elegitoroniki kwaguka kugirango ushyigikire AI, comptabilite, hamwe nogucunga ingufu ziterambere, icyifuzo cyamazi meza yuzuye, inert azakomeza kuba imbaraga ziterambere ryiterambere ryisi.

Ibibazo

Q1: Kuki amazi ya argon akundwa kuruta iyindi myuka ya inert nka azote cyangwa helium mubikorwa bimwe na bimwe bya semiconductor?

Igisubizo: Nubwo azote ihendutse kandi ikoreshwa cyane nka gaze isanzwe, ntabwo iba inert mubushyuhe bukabije; irashobora kwitwara hamwe na silicon yashongeshejwe kugirango ibe inenge ya nitride. Helium inert ariko yoroheje cyane kandi ihenze. Argon ikubita "ahantu heza" - ni inert rwose ndetse no mubushuhe bukabije, biremereye bihagije kugirango bipfundikire neza silikoni yashongeshejwe, kandi ifite misa nziza ya atome kugirango yirukane atome kumubiri mugihe cyo gutera plasma idateze imiti idashaka.

Q2: Nigute ultra-high isuku yamazi ya argon itwarwa mubihingwa bya semiconductor (fabs) bitanduye?

Igisubizo: Kubungabunga isuku mugihe cyo gutambuka nikibazo gikomeye cyibikoresho. UHP y'amazi ya argon itwarwa mumamodoka yihariye, yanduye cyane. Ubuso bw'imbere muri ibyo bigega, kimwe na valve zose hamwe na hose zoherejwe, bigizwe n'amashanyarazi kugeza ku ndorerwamo kugira ngo birinde gusohoka no gutemba. Mbere yo gupakira, sisitemu yose ikorerwa vacuum ikomeye. Iyo ugeze kuri fab, gaze inyura mumwanya-wo-gukoresha ibikoresho byogukoresha ibikoresho bya tekinoroji kugirango ikureho umwanda wose wa ppt urwego (ibice kuri tiriyari) mbere yuko argon igera kuri wafer.

Q3: Ni uruhe rwego rwukuri rusabwa kuri "semiconductor liquid argon," kandi ni gute ipimwa?

Igisubizo: Kubikorwa bya semiconductor byateye imbere, ubuziranenge bwa argon bugomba kuba byibuze “6N” (99,9999% byera), nubwo inzira zimwe zisaba 7N. Ibi bivuze ko umwanda nka ogisijeni, ubushuhe, na hydrocarbone bigarukira ku gice 1 kuri miliyoni (ppm) cyangwa ibice kuri miliyari (ppb). Izi ntera zanduye zapimwe mugihe nyacyo kuri fab ukoresheje ibikoresho byisesengura byunvikana cyane, nka Cavity Ring-Down Spectroscopy (CRDS) na Chromatografi ya Gas hamwe na sprometrike rusange (GC-MS), bigatuma igenzura rihoraho.