Inganda za Semiconductor, nkibanze yiterambere ryikoranabuhanga rigezweho, ririmo imyuka myinshi igaragara kandi ifite isuku yo hejuru cyane muburyo bwo gukora. Imyuga yihariye ya semicondu yerekeza ku myuga ifite uruhare runini mu musaruro wa Semiconductor, Chip Inganda zo gukora, gutwika filime, etching, nibindi bikorwa. Iyi myuka igomba kuba yujuje ibisabwa mu kwezwa, gushikama, no kugenzura neza inzira reaction. Iyi ngingo izatangiza imyuga myinshi isanzwe ikoreshwa muri semiconducuct hanyuma muganire ku nshingano zabo mugikorwa cya Semiconductor.

1. Hydrogen (h₂)

Hydrogen Byakoreshejwe cyane mukora Semiconductor Inganda, cyane cyane mubijyanye no guhuza imiti (CVD) no kugabanya. Muri CVD, hydrogen ivanze nizindi myuga kugirango ikure firime zito, nka firime ya silicon. Hydrogène ikora kandi nkumukozi ugabanya mubitsa yicyuma no gukuramo oxide. Byongeye kandi, hydrogen ikoreshwa mugusukura no kuvura igice cya semiconductor kugirango ukure neza hejuru yimyenda kandi itezimbere ubwiza bwa chipi.

2. Azote (n₂)

Azote, gaze ya inert, ikoreshwa cyane cyane mugutanga ibidukikije bidafite ogisijeni mukora semiconductor. Bikunze gukoreshwa mubikoresho byogusukura, ibishushanyo mbonera, kandi nkumucukuzi mubitabo. Muburyo bwumwuka no kugashyiraho inzira, azote akenshi ivangwa nizindi myuga kugirango ihamye imiterere ihamye kandi igenzure igipimo cya reaction. Azote nayo ikoreshwa muguhagarika okiside, kurinda ibikoresho byoroshye byangiritse.

3. Ogisijeni (O₂)

Ogisijeni bigira uruhare rukomeye mu nganda za semiconductor, cyane cyane muburyo bwa okiside. Mu gushiraho urwego rwa dioxide ya silicon hejuru ya wafer ya silicon, ogisijeni ni ngombwa. Mu kumenyekanisha ogisijeni, impapuro za oxide imwe hejuru yubuso bwa silicon, ni ngombwa mugukora amashanyarazi nigikoresho gihamye. Ogisijeni nayo ikoreshwa mugusukura no kugashyiraho inzira, ikareba indi myuka yimiti yo gukora oxide cyangwa gukuraho firime zimwe.

4. Carbone Tetrafluoride (CF₄)

Carbone tetrafluide ikoreshwa cyane muburyo bwo kwerekana. Muri Semiconductor etching, CF₄ ivanze nizindi myugwa kugirango ukure neza firime zinanutse za silicon, Silicon Nitride, icyuma, icyuma, nibindi bikoresho. Iyo cf₄ ihuza na fluorine, ikora fleohine, zifite imitekerereze ikomeye kandi ishobora gukora neza ibikoresho. Iyi gaze ningirakamaro kugirango ishushanyijeho-precision yo hejuru yanditseho umusaruro wumuzunguruko.

5. Hydrogen chloride (HCL)

Hydrogen chloride gaze ikoreshwa cyane nka gaze ya etchling, cyane cyane mumakoko yibikoresho byicyuma. Ikiranuka hamwe na firime yicyuma kugirango ikore chloride, yemerera ibyuma kugirango bikurweho. Iyi nzira irakoreshwa cyane mugushushanya firime zoroheje, kureba neza imiterere ya chip.

6. Azote trifluoride (nf₃)

Azote trifluoride ikoreshwa cyane mu gusukura ibisigisigi byo kubitsa mubikoresho bya plasma. Mubikorwa bya Plasma, NF₃ reacts hamwe nibikoresho byabitswe (nka silicon flucon) kugirango ikore byoroshye fluorides. Iyi gaze ikora neza muburyo bwo gukora isuku, ifasha kubungabunga isuku y'ibikoresho byo kugashyiraho ibikoresho no kunoza ukuri no gukora neza.

7. Silane (Sih₄)

Silane ni gaze isanzwe ikoreshwa mu kubitsa imiti (CVD), cyane cyane kubitsa film yoroheje. Silane yanduye ubushyuhe bwo hejuru kugirango akore firime ya silicon ku buso bwa substrate, ni ngombwa mu gukora ingamba za Semiconductor. Muguhindura imigendekere ya silane no kubya reaction, igipimo cyibipimo no kuri firime birashobora kugenzurwa neza.

8. Boron Trifluoride (BF₃)

Boron Trifluoride ni gaze yingenzi ikora, mubisanzwe ikoreshwa muburyo bwa Boron mugukora semiconductor. Byakoreshejwe muguhindura imitungo y'amashanyarazi ya kristu yo gufata hamwe na silicon sustrate kugirango ikore urwego rwifuzwa. Inzira ya Boron ni ngombwa mugukora ibikoresho bya semiconductor ya p-ubwoko, na bf₃ gaze ifite uruhare runini muriki gikorwa.

9. Sulfur hexafluoride (sf₆)

Sulfur hexafluoride ikoreshwa cyane muri semiconductor itunganya, cyane cyane muburyo bwo kwerekana cyane. Kubera amashanyarazi yacyo yo hejuru y'amashanyarazi, SF₆ irashobora guhuzwa nandi gaze yo gukuraho neza film y'ibikoresho no kumenya neza imiterere. Birakoreshwa kandi cyane muri ontching, Gukuraho neza Filime idashaka.

Umwanzuro

Imyuka yihariye ya semicondu abaganga bagira uruhare idakosowe mugukora imirongo ihuriweho. Mugihe ikoranabuhanga rikomeje gutera imbere, icyifuzo cyo kwezwa cyane no gukora izo myuga biriyongera, bituma abatanga aho bahorana uburyo bwiza n'ubwoko bwa gaze. Mu bihe biri imbere, inganda za semiconductor zizakomeza kwishingikiriza kuri iyi myuga yihariye yo gushyigikira umusaruro w'igisekuru gikurikira hamwe n'ubuhanga mu ikoranabuhanga. Kubwibyo, gusobanukirwa no gushyira mu bikorwa imyuka yihariye ya semiconductor izaba ingenzi mu gutwara iterambere rihoraho ryinganda za semiconductor.