Amazi meza cyane ya Argon munganda ya Semiconductor nuyobora amasoko
Hamwe niterambere ryihuse ryinganda za semiconductor kwisi yose, inzira yo gukora chip yinjiye byuzuye mugihe cya nanometero. Muri ubu buryo busobanutse neza bwo gukora, umunota uwo ariwo wose ihindagurika ryibidukikije cyangwa umwanda wibintu birashobora gutuma iseswa ryicyiciro cyose. Kubwibyo, imyuka yihariye ya elegitoronike hamwe na gaze yinganda zifite isuku nyinshi bigira uruhare rudasubirwaho. Muri bo, amazi meza ya argon yahindutse urufunguzo rwingirakamaro rushobora gukoreshwa mubikorwa bya buri munsi bya semiconductor fabs kubera ubudahangarwa bwimiti ihebuje nibintu byiza bifatika.
Iyi ngingo izasesengura byimazeyo ibyingenzi byingenzi byamazi ya argon mugikorwa cyo gukora chip kandi bitange umurongo wogutanga amasoko yumwuga kumasosiyete atanga amasoko.
Porogaramu Zibanze: Kuki Liquid Argon idashobora gutandukana na Semiconductor Manufacturing?
Mubikorwa byimbere-Impera-yumurongo (FEOL) uburyo bwo gukora igice cya kabiri, amazi ya argon ya semiconductor akoreshwa cyane cyane mubyiciro bikurikira byerekana umusaruro wibicuruzwa:
- Kubika Imyuka Yumubiri (PVD) / Gusohora: Gazi ya Ultra-isukuye ya gaz, yakozwe na gaze ya gaz ya argon, niyo gazi ikora cyane mubikorwa bya PVD. Mu cyumba cya vacuum, ion ya argon yihutishwa n’umuriro w'amashanyarazi kugira ngo utere ibisasu ku ntego, bigatuma atome zigamije kwimuka no kubitsa neza hejuru ya wafer kugira ngo ikore firime y'icyuma. Isuku ryinshi nicyo gisabwa kugirango ubucucike bwumuriro n'amashanyarazi bihamye.
- Umutekano Wuzuye Kurinda Ikirere: Mugihe cyo gukurura silikoni ya monocrystalline (nkibikorwa bya Czochralski) hamwe nubushyuhe bwo hejuru bwo hejuru, silicon ikora byoroshye na ogisijeni mubushyuhe bwinshi. Kubwibyo, gaze ya argon igomba guhora itangizwa kugirango isimbuze ikirere, itanga ibidukikije rwose bitandukanijwe na ogisijeni nubushuhe, bityo bigatuma imikurire ya kirisiti ya kirisiti ikura neza.
- Cryogenics hamwe na tekinoroji ya Wafer: Mubikorwa byiterambere nka Ultraviolet ikabije (EUV) lithographie, ubushyuhe bukabije bwa ultra-low ibiranga amazi ya argon (ingingo itetse -186 ° C) rimwe na rimwe bikoreshwa muburyo bwo gukonjesha ibikoresho byuzuye. Icyarimwe, tekinoroji ya argon aerosol nayo ikoreshwa mugukora nanometero-nini ya micye-isukura mikorobe isukuye hejuru ya wafer, ishobora kudakuraho ibintu byangiza umunota.
Ubwiza bugena umusaruro: Ibipimo bikaze bya Liquid Argon yuzuye
Inganda za semiconductor zisabwa kubikoresho fatizo birakabije bidasanzwe. Inganda zisanzwe zo mu rwego rwa nganda zisanzwe zikenera gusa kugera kuri 99.9% cyangwa 99,99%, ariko ibi ntibiri hafi yo gukenera gukora chip. Kuri yujuje ibyangombwa bisukuye byamazi argon, ubuziranenge bwibanze busabwa kugera kuri 99,999% (5N), kandi mumitwe igezweho, birakenera no kugera kuri 99,9999% (6N) cyangwa hejuru.
Icy'ingenzi ni ukugenzura umwanda. Ibiri muri ogisijeni, azote, ubushuhe, hydrocarbone yose (THC), hamwe na ion ion yicyuma bigomba kugenzurwa cyane kuri ppb (ibice kuri miliyari) cyangwa ndetse na ppt (ibice kuri tiriyari). Nubwo umunota umwe wumwanda wivanze mumuyoboro wa gazi, bizakora inenge nkeya hejuru ya wafer, bitera imiyoboro migufi ya chip cyangwa imigezi ivaho, bikuraho neza umusaruro kandi bizana igihombo kinini mubukungu.
Amasoko yo gutanga amasoko: Nigute ushobora gusuzuma no guhitamo umwuga utanga amazi ya Argon?
Urebye uruhare rukomeye rwa gaze zifite isuku nyinshi mugukora imirongo yumusaruro, gushakisha no kubona ibyangombwa byuzuye kandi bishoboye gutanga isoko ya argon ni umurimo wibanze kumasoko no gutanga amasoko. Mugihe cyo gusuzuma abashobora gutanga isoko, birasabwa kwibanda kubipimo bitatu bikurikira:
Ubushobozi bukomeye bwo kugenzura no gupima ubushobozi: Abatanga isoko ryiza bagomba kuba bafite ibikoresho byo murwego rwo hejuru byo gusesengura ibintu nka Gas Chromatographs (GC) na Mass Spectrometers (MS). Bagomba kuba bashoboye gutanga COA irambuye (Icyemezo cyisesengura) kuri buri cyiciro kugirango barebe ko habaho ubuziranenge bwuzuye mubitangwa.
Isoko rikomeye ryo gutanga urunigi no kwihanganira itangwa: Ubusanzwe Fabs ikora 24/7/365, kandi ikiguzi cyo hasi ni kinini cyane. Kubwibyo rero, abatanga isoko bagomba kuba bafite ubushobozi bunini bwo kubika amazi, amato yabo bwite yamakamyo ya tanker, hamwe na gahunda zihutirwa zo gutabara byihutirwa.
Ibikoresho bigezweho hamwe na tekinoroji ya “Secondary Contamination”: Nubwo isuku ya gaze yaba ingana iki, ntacyo bimaze iyo yanduye mugihe cyo gutwara. Ibyibandwaho bigomba kwibanda kububiko bwa cryogenic bubika ibicuruzwa hamwe na tanker yimbere yo gutunganya urukuta rwimbere (nko kumenya niba yarigeze kuvurwa na Electropolishing / EP), hamwe na Standard Operating Procedures (SOP) kugirango isukure valve na pipine mugihe cyo kuzuza no kwimura, byemeza ko isuku nyinshi ishobora gutangwa neza kuva muruganda kugeza kumurongo wabakiriya.
Umwanzuro
Mu gukomeza gutera imbere kw'Amategeko ya Moore, isukari nyinshi yo mu bwoko bwa argon ntabwo ikoreshwa gusa, ahubwo ni "escort itagaragara" kubikorwa bya semiconductor byateye imbere. Ubuhanga kandi bukomeye gusuzuma no guhitamo a amazi ya argon hamwe nimbaraga zuzuye kugirango harebwe uburyo bwiza kandi butajegajega bwogutanga amazi ya argon ya semiconductor niryo pfundo ryibanze kuri buri ruganda rukora inganda kugirango rutezimbere umusaruro kandi rutsinde mumarushanwa yisoko ryisi.
Ibibazo
Ikibazo cya 1: Ni mu buhe buryo igenzura ryanduye ry’amazi meza ya argon akoreshwa mu gukora semiconductor?
Igisubizo: Birakabije. Semiconductor-urwego rwamazi ya argon ntisaba gusa ubuziranenge bwa 99,999% (5N) cyangwa hejuru yayo, ariko cyane cyane, ishyiraho imipaka ikabije kumwanda wihariye. Kurugero, ubushuhe (H2O) na ogisijeni (O2) mubisanzwe birasabwa kubikwa munsi ya 10 ppb; kuri 7nm no munsi yumutwe wateye imbere, umwanda ion ibyuma bikenera no kugenzura ppt-urwego (ibice kuri tiriyari).
Q2: Mugihe uhisemo utanga amazi ya argon, nigute ushobora kwirinda umwanda wa kabiri mugihe cyo gutwara no kwimura?
Igisubizo: Urufunguzo rwo gukumira umwanda wa kabiri ruri mubikoresho byabatanga ibikoresho nibisobanuro bikora. Mugihe cyo gutanga amasoko, menya niba utanga isoko akoresha tanker-isuku yo mu bwoko bwa tankerogi ya tanker yagenewe semiconductor (liner y'imbere ikenera polisingi na passivation idasanzwe). Hagati aho, suzuma SOP yabo kugirango bapakururwe kumazi, urebe neza ko isuku ihagije yo gusukura no kuyisimbuza bikorwa mbere yo guhuza imiyoboro, kandi ko ibikoresho byo kugenzura imyuka ya ogisijeni / ibinyabuzima bifite ibikoresho.
Q3: Ni izihe ngaruka zihariye zizatera wafer niba argon y'amazi ya semiconductor itujuje ubuziranenge?
Igisubizo: Niba ubuziranenge butujuje ubuziranenge (nko kuvanga na ogisijeni ya trike cyangwa ubushuhe), bizatera reaction ya okiside itunguranye kuri wafer ya silicon mugihe cy'ubushyuhe bwo hejuru cyangwa uburyo bwo gukurura kristu. Muri PVD isuka, umwanda uzavanga muri firime yabitswe, uhindure ubukana bwa firime nibintu bifatika. Ibi bizahita bitera inenge zica nkumuzunguruko mugufi hamwe nizunguruka zifunguye kuri wafer, bigabanye cyane umusaruro wa chip.
