Ammonia (NH₃), nk'ibyingenzi byingenzi bya chimique, bifite ibyifuzo byinshi mu mirima itandukanye y'inganda, hamwe n'uruhare rwayo ari ngombwa cyane mu gukora ingamba za semiconductor. Ammonia agira uruhare runini mubyiciro byinshi byumusaruro wa semiconductor, harimo no kubitsa nitrides, ionscalantation kandi doping, isuku, no kwerekana inzira. Iyi ngingo izacengera ibisabwa na Ammonia mu nganda za Semiconductor, gusesengura uruhare runini mu kuzamura imikorere y'ibikoresho, kugabanya ibiciro, no kuganira ku bibazo bihura nabyo n'iterambere ry'iterambere rizaza.

1. Imiterere yibanze hamwe nimyitwarire yimiti ya Ammonia

Ammonia ni ikigo gigizwe na azote na hydrogen, kizwiho alkalinity cyayo kandi gikunze kuboneka mu mva ifumbire ya azoge. Ammonia ibaho nka gaze mubushyuhe bwicyumba ariko irashobora guterwa ubushyuhe buke, ikabigira isoko ya gaze cyane. Mu nganda za semiconductor, imitungo ya ammonia igira uruhare runini munzira nyinshi zitoroshye, cyane cyane mubijyanye no kubitsa imiti (CVD), ionscation cyangwa ibikorwa byogusukura / byogusukura / byo gukora isuku / byoroshya / byo gukora isuku / ibikoresho.

Molekile ya Ammonia irashobora kubyitwaramo hamwe ningata zitandukanye, Silicon, nibindi bikoresho byo gukora nitride cyangwa kubikora. Ibi bitekerezo ntabwo bifasha gusa mugukora ibikoresho bya firime byoroheje ariko nanone byifuzwa, ubushyuhe, nubukanishi bwibikoresho, bityo bitera imbere ibikoresho bya semiconductor.

2. Gusaba Ammonia muri Semiconductor Inganda

Ammonia agira uruhare runini mu gukora i Semiconductor, cyane cyane mu turere dukurikira:

2.1 Kubika Filime zoroheje za Nitride

Muri Semiconductor igezweho, filime ntoya, nka silicon nitride (si₃n₄), aluminium nitride (aln), ikoreshwa na titanium nitride (tin), cyangwa ibikoresho byo kwigunga amashanyarazi, cyangwa ibikoresho byo kwigunga amashanyarazi, cyangwa ibikoresho byo kwigunga amashanyarazi, cyangwa ibikoresho byo kwigunga amashanyarazi, cyangwa ibikoresho byo kwigunga amashanyarazi, cyangwa ibikoresho byo kwigunga amashanyarazi, cyangwa ibikoresho byamashanyarazi. Mugihe cyo kubitsa aya mafilime, Ammonia akora nk'isoko y'ingenzi ya azote.

Kubika imiti (CVD) ni bumwe muburyo bukunze kugaragara kuri firime ya Nitride. Ammonia Ikiranuka na gaze nka Silane (Sih₄) ku bushyuhe bwinshi bwo kubora no gukora film ya Silicon Nitride. Imyitwarire niyo ikurikira:

3sih4 + 4Nh3 → SI3N4 + 12h2

Iyi mikorere ivamo gushiraho urwego rumwe rwa Silicon Sitride kuri Silicon Wafer. Ammomiya itanga isoko ya azote ihamye kandi ituma igenzura neza yimyitwarire nizindi masoko yihariye, yo kugenzura ubuziranenge, ubugari, nubwisanzure bwa firime.

Filime Nitride ifite ubushyuhe buhebuje, amashanyarazi, no kurwanya okiside, bituma bikaba ngombwa cyane muri semiconductor. Bakoreshwa cyane mu kazuzwa ihuriweho (ISS) nkibice byibasira, electrode gusa, hamwe na optique ya optique mubikoresho bya optoelectronic.

2.2 ion amplantation kandi doping

Ammonia Kandi ugira uruhare runini mubikorwa byo gukora ibikoresho bya semiconductor. DUPCGE ni tekinike ikomeye ikoreshwa mu kugenzura inyungu z'amashanyarazi mu guhimba ibikoresho bya semiconductor. Ammonia, nka azote ikora neza, akenshi ikoreshwa ifatanije nizindi myugwa (nka fosphine ph₃₆) kugirango ikongene afront mubikoresho nka arsenium arsenium na gallium.

Kurugero, ubushake bwo gukora burashobora guhindura imitungo yamashanyarazi ya silicon gukora n-ubwoko cyangwa ubwoko bwa semicondo. Muburyo bwo gukora ibintu neza, Ammonia itanga isoko ya azote yo hejuru, iremeza neza hejuru yimigambi. Ibi nibyingenzi kuri miniaturogetion no gutanga umusaruro wimikorere minini muburyo bunini cyane (Vlsi) gukora.

2.3 Gusukura no kugashyiraho

Gusukura no kugashyiraho moshi ni urufunguzo rwo kwemeza ubwiza bwibikoresho byo gukora semiconductor. Ammonia ikoreshwa cyane muriyi nzira, cyane cyane mumirongo ya plasma no gukora isuku yimiti.

Muri Plasma ETCHING, AMMONIYA irashobora guhuzwa nizindi myugwa (nka chlorine, cl₂) kugirango ifashe gukuramo imyenda ya kamere, ibimari bya oxide, hamwe numwanda wicyuma uhereye hejuru. Kurugero, Amoni yakirana na ogisijeni kubyara amoko ya ogisijeni ya reactive (nka O₃ na O₂), bikuraho neza inka zo hejuru kandi zikareba umutekano mubikorwa byakurikiyeho.

Byongeye kandi, Ammomia irashobora gukora nkigisubizo cyo gukora isuku, ifasha gukuraho ibisigara byakozwe kubera imiti cyangwa inzira ikurikirana, bityo ikomeza isuku ya wafer.

3. Ibyiza bya Ammomia mu nganda za semiconductor

Ammoa itanga ibyiza byinshi muri Semiconductor ikora, cyane cyane mubice bikurikira:

3.1 isoko ya azote ikora

Inkomoko ikora neza kandi nziza itanga atome ihamye kandi yuzuye ya azote yo kubitsa firime za nitride hamwe na dopite. Ibi ni ngombwa kugirango uhimbye ibikoresho bya micro- na Nano-spomice yo gukora semiconductor. Mubihe byinshi, Ammonia yitonze kandi igenzurwa kurusha izindi nzego zitukura (nka gaze ya azote cyangwa azote ya azote).

3.2 Igenzura ryiza

Gukemura Ammonia bituma bituma bigenzura neza ibiciro na filime filckness muburyo butandukanye bworoshye. By adjusting the flow rate of ammonia, temperature, and reaction time, it is possible to precisely control the thickness, uniformity, and structural characteristics of the films, thus optimizing the performance of the devices.

3.3 Ibiciro-byiza hamwe nubucuti bwibidukikije

Ugereranije nizindi nkomoko ya azote imyuka, Ammoniya iri hasi cyane kandi ifite imikoreshereze ya azote nyinshi, bigatuma irungu nini cyane mumusaruro munini wa SemiconduChutor. Byongeye kandi, Amoni recycling no gukoresha ikoranabuhanga bagenda batera imbere, batanga umusanzu mubidukikije.

4. Umutekano n'ibidukikije

Nubwo hari uruhare runini mu gukora ibipimo bya semiconductor, Amoni yatanga umusaruro ushobora kubyara. Ku bushyuhe bwicyumba, AmoniMia ni gaze, kandi muburyo bwamazi, ni ibyangiritse cyane kandi uburozi, bisaba ingamba zumutekano zikabije mugihe cyo gukoreshwa.

1. Ububiko no gutwara abantu: Ammonia agomba kubikwa ahantu hake no gukanda imikazo, ukoresheje ibikoresho byihariye hamwe na pipeline kugirango birinde kumeneka.
2. Umutekano ukora: Abakora imirongo yumusaruro wa Semiconductor bakeneye kwambara ibikoresho birinda, nka vanggles, gants, na masike ya gaze, kugirango birinde Amoni guhura numubiri wumuntu.
3. Gutunga imyanda: Gukoresha Ammoni birashobora gutanga imyuga yangiza, uburyo bwo kuvura imyanda bunoze bugomba kuba bugomba kuba kugirango uwuko uhako ubwumvikane buke.

Mugihe inzira yo gukora semiconductor ikomeje gutera imbere kandi icyifuzo cyibikoresho byo hejuru byiyongera, uruhare rwa Ammonia mu nganda zizakomeza kwiyongera. Ibi ni ukuri cyane cyane mubyerekeranye na ruswa-petifiya yinjijwe, Quam Kubara, hamwe nikoranabuhanga ripamba. Byongeye kandi, nk'amabwiriza y'ibidukikije ahinduka uteye isoni, iterambere ry'umusaruro wa Grener no gusubiramo ikoranabuhanga kuri Ammonia bizahinduka ikintu gikomeye mu nganda.

Porogaramu ya Ammonia mu nganda za semiconductor itanga urufatiro rukomeye rwo guteza imbere ibikoresho bya elegitoroniki bigezweho. Uruhare rwarwo mugutezimbere umusaruro, kugabanya ibiciro byo gukora, no gutwara udushya twikoranabuhanga ni ngombwa. Mugihe porogaramu ikoranabuhanga, Ammonia ikomeje kwaguka, gufasha inganda za semiconductor ihinduka igiye kugirira neza imikorere no kuramba ibidukikije.

Ammonia, nka chimique yingenzi, igira uruhare runini mukora semiconductor. Ni ngombwa kugirango uyirebye firime za Nitride, doping, no gusukura / etching inzira. Hamwe no gukomeza imbere ikoranabuhanga rya semici ya semiconductor, porogaramu ya Amoni yashyizweho kugirango ikure, igatanga umusanzu uteye imbere mu iterambere ry'ikoranabuhanga no gufasha inganda za semiconductor ihinduka mu nzira nziza kandi ishingiye ku bidukikije.