Twagiye dukora uruganda mubushinwa kabuhariwe mugukora imyuka yinganda. Duhereye ku ngingo yanjye, nabonye ubwihindurize bw'ikoranabuhanga budasanzwe, byose byakozwe n'ikintu abantu benshi ntibigera babona: imyuka nziza. Microchips ntoya muri terefone yawe, mudasobwa, n'imodoka ni ibitangaza by'ubuhanga bugezweho, ariko ibyo baremye ntibishoboka nta gase nziza kandi itagira inenge.

Urumva akamaro k'ubwiza n'urunigi rwizewe, ariko urashobora kwibaza kubera iki Ibipimo bya gaze ya semiconductor ni hejuru yubumenyi bwikisho. Kuki kohereza Argon bigomba kuba 99.9999%? Aka gatabo kazasubiza inyuma umwenda ku isi ya Semiconductor. Tuzasesengura imyuka yihariye yakoreshejwe, ibyo bakora, nimpamvu isuku yabo ari ikintu kimwe gikomeye. Mugusoza, uzasobanukirwa neza ibicuruzwa utunganijwe kandi bifite ibikoresho byiza kugirango ushyikirize agaciro kabo kubakiriya bawe.

Kuki imyuka yihariye itoroshye ko igihimbano cya semiconductor?

Tekereza kubaka ibara aho ingano imwe yisumbuye yumucanga ishobora gutera imiterere yose gusenyuka. Urwo ni urwego rwibisobanuro bisabwa muri Gukora Semiconductor inganda. "Inyubako Zubaka" ntabwo ari amatafari na minisiteri, ariko atome, n'ibikoresho "akenshi bikunze gaze idasanzwe. Byose ibihimbano ya an Umuzunguruko bibaho kurwego rwa microscopic, aho aho bikoresho, akenshi atome nkeya, yashyizwe kumurongo cyangwa yashyizwe kuri a Silicon Wafer.

Ibi inzira ya semiconductor birumvikana cyane. Ikintu icyo ari cyo cyose udashaka cyangwa imiti umwanda irashobora guhungabanya ubwubatsi bwibiryo bya microchip, bitanga ubusa. Aha niho imyuka ikoreshwa. Barema ibidukikije byavaje-bisukuye, bitanga ibikoresho fatizo kubice bishya, kandi bakora nkibikoresho "byerekana" bitwara inzira zikomeye zamashanyarazi. The Inzira ya Semiconductor ni imbyino igoye ya Ibisubizo by'imiti, kandi imyuka ni ababyinnyi bayobora. Hatabayeho guhoraho, kwizerwa, kandi bitanze cyane, ibikoresho bya elegitoroniki bigezweho ntabwo byari kubaho.

The imyuka ikoreshwa mukora inganda za semiconductor ntabwo ari ibicuruzwa byawe bisanzwe. Baringaniza kugirango bahure nurwego rutoroshye bigoye kubyumva, akenshi bapimirwa mubice kuri miliyari cyangwa ibice kuri tiriyari. Ni ukubera ko imikorere ya Ibikoresho bya Semiconductor ni ihamye mu buryo butunganijwe n'imiterere yabo ya atome. Molekile itwara ogisijeni cyangwa imyuka y'amazi mugihe gikwiye kuba inert gaze irashobora gutera okiside, guhinduranya Umutungo w'amashanyarazi y'umuzenguruko no kuyobora ku cyunganizi. Iyi niyo mpamvu Inganda zidasanzwe ni ingenzi cyane kwisi yikoranabuhanga.

Nibihe byiciro byingenzi bya gaze bikoreshwa mukora semiconductor?

Iyo tuvuze imyuka mu nganda zikoresha semiconductor, muri rusange bagwa mubyiciro byingenzi bishingiye kumikorere yabo. Gusobanukirwa aya matsinda bifasha gusobanura uruhare buri gaze ikina mu kigo Igikorwa. Ntabwo ari imyuka imwe cyangwa ibiri gusa; igezweho Semiconductor Fab bisaba inshuro 30 zitandukanye imyuka no kuvanga gukora.

Ubwa mbere ni imyuka nini. Aya ni yo bakorana, ikoreshwa mubwinshi mukigo. Bitekerezeho nkikirere cyibanze cya fab. Ibisanzwe ni:

• Azote (n₂): Ikoreshwa mu guhanagura ibyumba n'ibikoresho kugirango ikureho umwanda no gushyiraho ibidukikije.
• Ogisijeni (O₂): Byakoreshejwe Gukura Ubunini Bwiza muri Silicon Dioxyde (Sio₂) Ibice, bikora nka Abanyeshuri.
• Hydrogen (h₂): Ikoreshwa mugusukura hejuru kandi muburyo bwihariye Kubitsa inzira.
• Argon (ar): An gaze ya inert ikoreshwa mu gukora ibidukikije bihamye kugirango itunganyirize nkugutera.

Ibikurikira ni imyuka yihariye, uzwi kandi nka imyuka yihariye ya elegitoroniki. Ibi nibisobanuro byihariye, kenshi reaction cyangwa biteye akaga, imyuka ikorera imirimo ikomeye yo kugashyiraho no kubitsa. Bakoreshwa muburyo buke ariko bafite ibiciro byinshi binini kandi bisaba gukemura neza. Ibi birashobora gukomeza kugabanywa mumatsinda nka:

• Imyuka yo kubitsa: Izi myuka, nka Silane (Sih₄), nisoko yibikoresho ikoreshwa mukubaka ibice bya chip. Barabora no kubitsa a firime yoroheje y'ibikoresho kuri Silicon Wafer.
• Imyuka ya Etchant: Ibi ni imyuka itoroshye ikoreshwa muguhitamo gukuraho ibikoresho. Ingero zirimo ibintu bya fluorine nka carbone tetrafluide (cf₄) na hydrogen chloride (HCL). Bikoreshwa muri ETCHING gukora imiterere yumuzunguruko.
• Imyuka ya dopant: Izi myuka ikoreshwa kuri "dope" silicon, bivuze kumenyekanisha nkana umwanda (a dopant) guhindura ibyayo Umutungo w'amashanyarazi. Ibi nibyingenzi kugirango bareme tristostor. Bisanzwe imyuka ya dopant Shyiramo arsine (ash₃) na fosphine (PH₃).

Nigute gaze ya azoge ikorwa nkakazi ka semiconductor?

Niba ugomba kunyura muri a ibihimbano bya semiconductor Ikigo, icyo gihe cyose gaze wahura ni Azote. Mugihe bitahorana uruhare muri rusange Ibisubizo by'imiti Kubaka chip, uruhare rwarwo ni ngombwa rwose mugukora ibisabwa kugirango ibyo bitekerezo bigerweho. Azote ikoreshwa Ahanini ku mpeta zayo; Ntabwo byoroshye kubyitwaramo nibindi bintu, bituma "uhize" gaze.

Ikoreshwa ryibanze kuri Azote ni mu guhana no gukora ikirere kivanga. Mbere yo kumva Inzira ya Semiconductor Irashobora gutangira, Urugereko rugomba kuba nta musaruro wanduye nka ogisijeni, imyuka y'amazi, n'umukungugu. Ubuziranenge-ubuziranenge Azote Yakuwe mu cyumba kugira ngo asunike ibyo bintu bidakenewe. Ibi birinda impyisi cyangwa ibindi bitekerezo byangiza wafer. Iri hame rimwe rikoreshwa mubikoresho no gutwara abantu (bizwi nka Foups) ibyo bitwara Silicon Wafers hagati y'ibyiciro bitandukanye bya inzira yo gukora.

Byongeye kandi, Azote ugira uruhare runini muri Yamazaki, inzira yo gucapa igishushanyo cyumuzunguruko kuri wafer. Muri Ultraviolet ya none (Duv) Lithography, umwanya hagati ya lens na wafer yuzuyemo ultra-yera Azote (cyangwa Argon) Kwemerera urumuri rugufi-rwuburebure kunyura utitaye ku kirere. Hatariho iki kigo kivanze, inzira ntizashoboka. Mubunararibonye bwanjye butanga ababyigibyimba, icyifuzo cyo gukomeza, gifite byinshi-byinshi, nubususu bweruye Azote Gutanga ntabwo biganirwaho.

Ni uruhe ruhare Arugoni agira mu kurema ibidukikije byiza?

Nka azote, Argon ni umunyacyubahiro gaze, bivuze ko ari imitima inert. Ariko, Argon irakoreshwa Kubisabwa byihariye aho uburemere bwa atomic butanga inyungu. Kimwe muricyo cyingenzi muribi porogaramu ni ukubikwa, cyangwa kujura. Iyi ni imyuka yumubiri inzira yo kubitsa ikoreshwa mugushiraho firime zinamye, zikora intwaro ya Umuzunguruko.

Muguhutira, voltage ndende ikoreshwa mucyumba cya vacuum cyuzuyemo Gaze ya argon. Ibi birema plasma yishyurwa neza Argon ion. Iyi ont irahumamye irasenya "intego" ikozwe mubyuma dushaka kubitsa (nkumuringa cyangwa alumini). Imbaraga zingamizi Zikomanga Ibyuma Atome Kumurongo, hanyuma ugurutse hirya no hino Silicon Wafer mu gice cyoroshye, kimwe. Argon Nibyiza kubibi kuko biremereye bihagije kugirango ugabanye neza intego ya atome ariko indumire ihagije kuburyo itazayitwara hamwe nicyuma cyicyuma kifasha kurema. Itanga neza Ibidukikije byo kubitsa ibyuma.

Urundi rufunguzo rukoreshwa kuri Argon ni muri Plasma ETCHING. Muri ibi ETCHING, Argon akenshi ivanze na a reaction etchant gaze. The Argon Ifasha guhagarika Plasma no guhurira kumubiri hejuru, ifasha etch etch no gukora neza, gukata gucika muburyo. ITANGAZO RIZERE RYA Gaze ya argon ni ngombwa kubikoresho byose bikora ibyuma cyangwa byateye imbere.

Urashobora gusobanura uburyo hydrogen ikoreshwa mugutanga no gukora isuku?

Mugihe azoten na argon bahabwa agaciro kubera kudakora, Hydrogen ihabwa agaciro kuba cyane reaction, ariko muburyo busukuye kandi bugenzurwa. Hydrogen ikoreshwa cyane Gukora Semiconductor Kubuso bwo gusukura no muburyo bwihariye bwa Kubitsa bita kuzamura eptaxial. Ingano yacyo ntoya yemerera kwinjira no kubyitwaramo muburyo bundi gaze ntishobora.

Mbere yuko urwego rushya rushobora guhingwa kuri a wafer, ubuso bugomba kuba busukuye rwose, hasi kurwego rwa atome. Gaze ya hydrogen ikoreshwa muburyo bwo hejuru cyane bwitwa "hydrogen itsin" kugirango ikureho amavuta kavukire (yoroheje, isanzwe ya dioxyde delicon dioxyde delicon) yashinze kuri silicon hejuru. The hydrogen yitabira ogisijeni, ikora imyuka y'amazi (H₂o) yacika mu cyumba, asiga neza silicon hejuru yiteguye kuntambwe ikurikira.

Hydrogen nabyo ni ikintu cyingenzi muri Epitaxial Gukura (cyangwa "EPI"), inzira ikura igice cya kirisiti imwe silicon hejuru ya Silicon Wafer. Iyi mirongo mishya ifite imiterere ya kirisiti itunganye kandi igenzurwa neza dopant urwego. Hydrogen Ibikorwa nk'abatwara gaze kuri silicon isoko gaze (Nka Silane cyangwa Triichlorosilane). Iremeza kandi imikurire isukuye yo guhora atome ya ogisijeni. Ubwiza bwiki Engera Igicapo nibyingenzi mubikorwa byo gushinga imikorere yo hejuru, bigatuma ubuziranenge bwa Hydrogen silinder gutanga cyane.

Niki gaze ya etchant kandi nigute batwara imirongo microscopique?

Niba kubitsa bijyanye no kubaka ibice, ething iri hafi kubitwara kugirango bibe kure kugirango bakore imiterere yumuzunguruko. Bitekerezeho nka microscopique. Nyuma yicyitegererezo gisobanurwa ukoresheje Yamazaki, etchant imyuka ikoreshwa mugutanga Imiti isobanura gukuraho ibikoresho mubice bidakingiwe bya wafer. Iyi ni imwe mu ntambwe zikomeye kandi ikomeye muri Chip Gukora.

The imyuka ikoreshwa muri etching Inzira isanzwe ni fluorine, chlorine, cyangwa imiti ishingiye ku nteko. Guhitamo gaze Biterwa nibikoresho byarumiwe.

• Imyuka ishingiye kuri gaze (urugero, cf₄, SF₆, NF₃) ni byiza cyane kubishyiraho silicon na dioxyde delicon.
• Imyuka ishingiye ku shlorine .

Ibi imyuka itoroshye bitangizwa mu cyumba cya Plasma. Plasma imena gaze molekile zitandukanye reaction ions na radicals. Ibi bikaba noneho bitwara hejuru ya wafer, gushiraho urukigo rushya ruhindagurika rushobora kuvoma byoroshye, bityo "kururika" ibikoresho. Ibisobanuro bisabwa ni byinshi; Intego ni etch Bigororotse (anisotropique) udashyize ahagaragara urwego rwamashusho. Bigezweho Semiconductor Fabs Koresha uruganda Uruvange rwa gaze kandi igenzurwa neza plasma kugirango ubigereho.

Ni ubuhe buryo bwa chique vapor (cvd) ninde wabigizemo uruhare?

Kubika imiti (CVD) ni imfuruka inzira yo kubitsa in Gukora Semiconductor. Nuburyo bwibanze bukoreshwa mugukora firime zitandukanye kandi zitwara neza zigize a igikoresho cya semiconductor. Igitekerezo cyibanze ni ugutemba a gaze (cyangwa imvange ya gaze) hejuru yashyuha wafer. Ubushyuhe butera Uwiteka gaze Kwitwara cyangwa kubora hejuru ya Wafer, gusiga inyuma ya firime ikomeye yibikoresho wifuza.

Buri kimwe muri ibyo reaction gisaba ibihe bidasanzwe kandi bikabije imyuka yo hejuru. Kurugero, mugihe ubitseho igice cya Polysilicon ukoresheje Silane, ogisijeni iyo ari yo yose umwanda muri gaze Umugezi watera dioxyde ya silicon kugirango ikore ahubwo, kwangiza imitungo igendanwa. Iyi niyo mpamvu, nkumutanga, kwibanda cyane kuri kwezwa n'isesengura ry'ibi imyuka yo kubitsa. Isomero ryose rya Gaze yo hejuru cyane Dutanga ni hogamiye guhura nibisabwa.

Kuki ultra-ndende isukuye ikintu cyingenzi kuri gaze ya semiconductor?

Sinshobora gukabya ibi: muri inganda za semiconductor, ubuziranenge ni byose. Ijambo ubuziranenge-ubuziranenge Ntabwo bivuze 99% cyangwa 99.9%. Kuri Indwara ya Semiconductor, turimo kuvuga Ultra-Isuku . Kubyingenzi inzira, Icyifuzo gishobora kuba 99.9999% ("nine esheshatu") cyangwa hejuru. Impamvu iroroshye: Abanduye kwica imikorere.

Ibiranga kuri microchip igezweho bipimirwa muri Nanometero (miliyari ya metero). Kuri iyi ncipande, akantu kamwe k'amahanga cyangwa molekile idashaka ni nka boulder hagati yumubunge. An umwanda irashobora:

• Ahindura imiterere y'amashanyarazi: Sodium ya strey on irashobora guhindura voltage ya trestage ya transistor, bituma bihinduka cyangwa kuzimya mugihe kitari cyo.
• Shiraho inenge zukuri: Molecule ya ogisijeni irashobora guhungabanya akazu ka kristu itunganijwe mugihe cyo guhora cyo hejuru, zirema "imyigaragambyo" bibangamira.
• Bitera imirongo ngufi: Ibice bya Metallic birashobora kurasa bibiri byegeranye bikora imirongo, bigatuma umusingi wapfuye.
• Kugabanya Umusaruro: Ibindi byanduye birahari, umubare munini wa chip ifite inenge kuri buri wafer, bigira ingaruka ku nyungu.

Iyi niyo mpamvu, nkuwabikoze, ishoramari ryinshi riri mu kwezwa no gusesengura. Buri cyiciro cya gaze igomba Igeragezwa kugirango rihuze nibice-miliyari (ppb) cyangwa ibice-kuri tiriyari (ppt) ibisobanuro bisabwa nabakiriya bacu. The Gusaba imyuka yo hejuru nicyo gitera byose isoko ryihariye rya gaze kuri elegitoroniki.

Nigute dushobora kwemeza ubuziranenge kandi bwizewe bwa mseswa zisukuye?

Ku mukozi ushinzwe gutanga amasoko nka Mariko, iki nikibazo cyingenzi. Igiciro kinini ntacyo bivuze niba gaze ubuziranenge ntibuhuye cyangwa ibyoherejwe biratinze. Numvise inkuru ziteye ubwoba: Abatanga ibitekerezo bitanga ibyemezo byuburiganya bwo gusesengura, cyangwa kohereza imyuka yihariye Gufungirwa muri gasutamo mu byumweru, bigatera umurongo uhagarara. Gukemura ahanditse ububabare ni murwego rwa filozofiya yacu yubucuruzi.

Kubuza ubuziranenge butangirana na kwezwa inzira. Dukoresha sisitemu yateye imbere nkakogenic yatandukanije kandi ibikoresho byihariye bya adsorbent kugirango dukureho umwanda. Ariko inzira ntabwo irangira. Intambwe ikomeye cyane ni igenzura. Dukoresha ibikoresho bya leta-yubuhanzi nka chromatografi-rusange (gc-ms) kugerageza buri silinderi imwe mbere yuko yoherezwa. Dutanga abakiriya bacu icyemezo kirambuye kandi cyukuri cyisesengura (COA) kuri buri cyiciro, cyemeza Uwiteka Isuku.

A Gutanga kwizerwa urunigi ni ikindi gice cya kimwe cya kabiri cyo kugereranya. Ibi birimo:

• Kwishima Cylinder Gutegura: Silinderi kuri Ultra-Isura Yuzuye Gukora inzira idasanzwe yo gukora isuku no kwitondera kugirango urebe ko kontineri ubwayo idahumuriza gaze.
• Ibikoresho byubwenge: Dukorana nabafatanyabikorwa ba logistique bumva amabwiriza yo kohereza igitutu kinini kandi rimwe na rimwe ibikoresho bishobora guteza imbere muburyo mpuzamahanga. Dutanga ibyangombwa byose kugirango tumenye neza gasutamo.
• Itumanaho risobanutse: Amakipe yacu yo kugurisha no gushyigikira yatojwe gutanga ibishya bisanzwe. Uzahora uzi imiterere ya gahunda yawe, uhereye kumusaruro kugeza ku itara rya nyuma. Twumva ko biteganijwe Gutanga imyuka yo hejuru ni ngombwa kubakiriya bacu gucunga gahunda zabo. Ndetse dutanga bitandukanye imvange ya gaze Amahitamo yo kuzuza ibikenewe byihariye.

Ni iki ejo hazaza hateganijwe imyuka mu nganda za semiconductor?

The inganda za semiconductor Ntuzigere uhagarara. Nkuko byahanuwe namategeko ya Moore, Chipmarake bahora basunika kurema mato, byihuse, nibikoresho bikomeye. Guhangashya udushya tugira ingaruka itaziguye imyuka n'ivanga ikoreshwa mu guhimba kwabo. Mugihe twimukiye kuri Igisekuru kizaza cya Semiconductor Ikoranabuhanga, hamwe nimiterere yimiterere igabanuka kuri Nanometero nkeya, ibisabwa kugirango isukure izaba ikabije.

Turimo kubona icyerekezo cyo kubikoresho bishya birenze silicon, nka gallium nitride (gan) na karbide ya silicon (sic), bisaba ibishya kandi bitandukanye inzira kuri etching no kubitsa. Hariho kandi kugenda yerekeza kubwubatsi bugoye bwa 3D, nka Fornet nirembo-hafi ya yose (Gaa), bisaba gusobanuka cyane muri Kubitsa na etch Intambwe. Ibi bivuze gaze idasanzwe Inganda zigomba guhora udushya guteza imbere molekile nshya kandi igera ku nzego zo hejuru za kwezwa.

Ukurikije uko mbibona nkugutanga, ejo hazaza ni ubufatanye. Ntabwo bikiri bihagije kugirango ugurishe silinderi ya gaze. Tugomba gukorana cyane nabakiriya bacu muri Inganda za elegitoroniki Umurenge kugirango usobanukirwe ni ikibuga cyikoranabuhanga. Ibi bidufasha kumenya ibikenewe bishya imyuka yo hejuru no gushora mubikorwa byo gukora no gusesengura kubitanga. Intwari zitagaragara za semiconductor Isi - imbohe-izakomeza kuba ku isonga ryiterambere ryikoranabuhanga.

ABAFATANYIJE

Mugihe uherereye imyuka yinganda zisaba isoko rya Semigonductor isaba, Hano hari ibintu byingenzi byo kwibuka:

• Ubuziranenge ni umwanya munini: Ikintu kimwe gikomeye ni Ultra-Isuku. Abapfumu, ndetse no ku rwego rw'ubutegetsi bw'imihango, barashobora gutera ibikoresho byangiza no kugabanya umusaruro.
• Imyuka ifite imirimo yihariye: Imyuka ntabwo ihinduka. Nibikoresho byihariye bikoreshwa muburyo butandukanye nko gukora ikirere cya inert (arrogen, argon), kubaka ibice (imyuka yo kubitsa Nka Silane), no kubabaza (Imyuga ya Etchant nka CF₄).
• Urunigi rutanga rukomeye: Utanga isoko yizewe akora ibirenze kugurisha ibicuruzwa. Biremeza uko ubuziranenge Binyuze mu bizamini bikomeye, tanga ibyemezo byukuri, gucunga ibikoresho bifatika, no gukomeza gushyikirana neza kugirango wirinde gutinda kwa umusaruro bihebuje.
• Ubumenyi bwa tekiniki bwongera agaciro: Gusobanukirwa kubera iki runaka gaze ikoreshwa kandi kubera iki Isuku ryayo ni ngombwa cyanemerera kuba umufatanyabikorwa mwiza kubakiriya bawe, ushimangira ubuziranenge no kubaka ikizere cyigihe kirekire.
• Inganda zirahinduka: Gusunika kuri chip nto kandi ikomeye bivuze gusaba gushya, ndetse no kwera imyuka yihariye bizakomeza kwiyongera gusa. Gufatanya na hamwe-kureba imbere ni urufunguzo rwo gukomeza imbere.