Terefone mu mufuka wawe, mudasobwa ku meza yawe, sisitemu yateye imbere mu modoka yawe - nta na kimwe muri byo cyashobokaga nta mirimo icecetse, itagaragara ya imyuga yihariye. Nka nyiri uruganda rwa gaze yinganda, njye, Allen, wabonye ubwabo uburyo ibi bikoresho bikomeye byerekana uburiri bwikoranabuhanga bugezweho. Ku bayobozi b'ubucuruzi nka Mariko Shen, uyobora urunigi rugoye ku isi, gusobanukirwa izo myuka ni urufunguzo rwo gufungura amahirwe mashya. Iyi ngingo nubuyobozi bwawe bwuzuye kuri umwe mubakinnyi bakomeye muriki gice: Azote trifluoride (nf₃). Tuzakuramo ibi bikomeye gaze, shakisha uruhare rukomeye muri Inzira ya Semiconductor, hanyuma usobanure impamvu ubuziranenge no gutanga cyane kuri byose Inganda za elegitoroniki inganda.

Ni ubuhe bwoko bwa azote? Nf₃) gaze?

Urebye, Azote trifluoride, akenshi bivugwa na formula yayo yimiti Nf₃, birasa nkindi nganda gaze. Ni ibara ridafite ibara, ridakubiye, kandi rihumura gato uruganda. Ariko, mwisi ya Gukora Byambere, iyi gaze nigikoresho cyo hejuru. Ni ibyakozwe uruganda bikozwe muri atom imwe na batatu Fluorine atome. Urufunguzo rwimbaraga zayo ziri muriyi miterere. Ku bushyuhe bwicyumba, Nf₃ ni uhagaze neza kandi inert, bikaba byiza gutwara no gupima ugereranije na gaze yihishe.

Ubumaji bubaho iyo ingufu zikoreshwa. Munsi yingufu-zingufu muri a semiconductor igikoresho cyo gukora, nka a plasma Urugereko, The Nf₃ molekile kubora. Bamena kandi barekure cyane reaction Fluorine radicals. Tekereza nkigiturika kigenzurwa kumurongo wa microscopic. Ubu buntu Fluorine atome igira ingaruka bidasanzwe mubyitwaramo no gukuraho ibikoresho bidakenewe, cyane cyane silicon n'ibigo byayo. Ubu bushobozi bwo guhangayikishwa mugihe ubikeneye kandi cyane reaction Iyo ubishaka Azote trifluoride gaze umutungo utagereranywa mu isi yuzuye ya Chip Gukora.

Iyi miterere idasanzwe niyo mpamvu Nf₃ yahindutse imfuruka yikigezweho ibihimbano bya semiconductor. Umutekano wacyo utanga umutekano no kwizerwa mu ruhererekane rutanga, mu gihe uduha ubushobozi bwo gukora isuku no kugashyiraho ubushobozi bukenewe. Mugihe dusembuye cyane, uzabona uburyo iyi yoroheje-yoroshye gaze ituma ishyirwaho ryibikoresho bigoye kwisi.

Kuki imyuka yihariye ikenewe mu nganda za semiconductor?

Gusobanukirwa n'akamaro ka Nf₃, dukeneye kubanza gushima uruhare rwa kabiri imyuka ni ngombwa kuri muri inganda za semiconductor. Gukora an Umuzunguruko ni nko kubaka ibara kuri canvas ingano ya thumbnail yawe. Nuburyo bwo kongera no gukuraho ibintu byinshi bya ultra-bito-byoroheje yibikoresho bitandukanye kuri a silicon wafer. Buri ntambwe imwe, uhereye kurema ubusa wafer Kuri chip yanyuma, ishingiye ku mwuka ugenzurwa witonze imyuka ya elegitoroniki.

Izi myuga zikora imirimo myinshi ikomeye. Bimwe, kimwe argon na helium, zikoreshwa nka imyuka itwara inert kugirango ikore ibidukikije bihamye, bidakora no guhuza imyuka myinshi. Abandi barakoreshwa Kubitsa, aho a gaze ikoreshwa Kubitsa firime yoroheje yibikoresho kuri wafer. Kurugero, mumiti Imyuka Kubitsa (Cvd), imyuka yitwara kugirango ikore film ikomeye ihinduka igice cyumuzunguruko. Noneho hariho imyuka ya etchling, nka Nf₃, zikoreshwa muburyo bwiza bwo gukora imiterere muri ibi bice, bituma inzira zifatika zamashanyarazi zitemba.

Udafite aho uhoraho, ultra-ubuziranenge-ubuziranenge Gutanga iyi myuka itandukanye, yose inzira yo gukora yasya guhagarara. Ndetse na minuscule umwanda muri gaze yashoboraga kwangiza icyiciro cyose cya waferi, gitwara miliyoni amamiriyoni y'amadolari. Iyi niyo mpamvu Abakora Semiconductor Ntibisanzwe byumva neza ubuziranenge no kwizerwa kwabatanga baze. Ubuziranenge bwa gaze bisobanurwa neza nubwiza kandi Umusaruro y'ibicuruzwa byanyuma.

Nigute NF₃ ikoreshwa muburyo bwo gukora semiconductor?

Azote trifluoride ifite ibipimo bibiri byibanze, bikomeye muri Inganda zikora Semiconductor: Plasma ETCHING N'IMIKORESHEREZE. Byombi ni ngombwa mugukora microchips yimikorere myinshi, uhereye kubitunganya kuri Nand flash.

Ubwa mbere, reka tuvuge kuri ething. Nyuma yikimenyetso nka silicon dioxyde ishyirwa kuri a wafer, icyitegererezo giteganijwe kuri yo gukoresha urumuri. The etch inzira noneho ikuraho ibikoresho biva ahantu hateganijwe. Nf₃ yinjijwe mu cyumba kandi afite imbaraga zo gukora a plasma-Umucu ion ibice no gukora Fluorine radicals. Ibi bitera rwose ibisasu wafer hejuru, kubyitwaramo hamwe na silicon no kuyihindura muri a gase uruganda (silicon Tetrafluoride) ishobora guhuzwa mucyumba. Ibisobanuro by'iki gikorwa ni ibitekerezo-bitera ubwenge, bituma abashakashatsi bitwara ibintu biranga ibihumbi n'ibihumbi binanutse kuruta umusatsi wumuntu.

Iya kabiri, kandi isanzwe, Gukoresha azote trifluoride ni nka gusukura gaze. Mu gihe cya Kubika imiti (Cvd) inzira, aho firime zinanutse kuri wafer, ibikoresho udashaka nabyo byubaka kurukuta rwimbere rwurugereko. Ibi ibisigisigi, akenshi byakozwe silicon cyangwa Silicon Nitride, igomba kuvaho burundu hagati yo gutunganya buri wafer cyangwa icyiciro cya wafers. Niba atari byo, iyi nyubako irashobora guhindagurika no kugwa ku gikurikira wafer, bigatera inenge. Hano, Nf₃ yashyizwe mucyumba cyubusa na a plasma irashya. Imbaraga Fluorine Radicals Scrub Uruhu Rusukuye, Guhindura bikomeye ibisigisigi muri a gase byqroduct guhonwa byoroshye. Uku gusukura ni ngombwa gukomeza ubuziranenge bwibidukikije no guharanira hejuru Umusaruro.

Niki gitera NF₃ gaze isukurwa ugereranije nubundi buryo?

Imyaka myinshi, the inganda za semiconductor Wishingikirize kuri PerfluoRocarbons (PFCS) nka Carbone Tetrafluide (CF₄) na hexafluoroethane (C₂f₆) yo gukora isuku no kugashyiraho. Mugihe akamaro, ibi bikoresho byaje hamwe nibisubizo bikomeye: ni imyuga ya parike nini cyane hamwe nubuzima burebure cyane. Kurugero, C₂f₆ ifite a Ubushobozi bwo hejuru kwisi (GWP) kandi irashobora gutsimbarara mu kirere kimaze imyaka 10,000. Nkamabwiriza y'ibidukikije yongereye, inganda zikeneye igisubizo cyiza.

Aha niho Nf₃ yagaragaye nkumutsinzi usobanutse. Mugihe Azote trifluoride na na gaze ya parike ikomeye, ifite ubuzima buciriritse bwikirere (hafi imyaka 500). Icy'ingenzi, birakora neza cyane muburyo bwo gukora isuku. Imbere ya plasma Urugereko, umubare munini cyane wa Nf₃ molekile zimena kugirango zirekure Fluorine ugereranije na pfcs. Ibi bivuze bike idakosowe gaze arambiwe mu Rugereko. Bigezweho Semiconductor Fabs kandi ushyireho sisitemu yo kugabanuka (scrubbers) irimbura hafi ya byose idakosowe Nf₃ kandi byangiza byqroduct imyuka mbere yuko zirekurwa.

Guhuza imikorere yo murwego rwohejuru kandi byoroshye kugabanuka bivuze ko nyirizina Ibihuha bya Greenhouse Kuva Gukoresha Nf₃ birarenze cyane kurenza ibyo muri gaze ya kera ya PFC. Iyi mikorere isumba izindi nimpamvu nyamukuru yo kurera kwayo.

Nigute azori ya azote yo hejuru ya azori?

Nkumukora, ndashobora kukubwira ibyo bitanga Nf₃ ni ikintu gikomeye kandi kigenzurwa cyane Igikorwa. Intego ni ugukora ibicuruzwa byanyuma bidasanzwe - akenshi 99.999% ubuziranenge cyangwa hejuru-kuko na gato umwanda irashobora kuba ibyago kuri Umusaruro wa Semiconductor. Inzira isaba ubuhanga mugukemura imiti yitonze, cyane cyane Fluorine.

The NF₃ Umusaruro mubisanzwe bikubiyemo gufata ammonia (a uruganda ikubiyemo azote) cyangwa ibihimbano fluoride indege hamwe nibyiciro Fluorine gaze muri reaction kuri ubushyuhe bwo hejuru. Iyi myitwarire itanga imvange ya gaze, harimo Nf₃, ibikoresho bidasubirwaho, hamwe nibikoresho bitandukanye. INGORANE NYAKURI, KANDI AHO UKORESHEJWE KOMISIYO BIREKANA KOKO, biri muri kwezwa icyiciro gikurikira.

Mbisi gase imvange inyura muri byinshi kwezwa intambwe zo gukuraho ibice byose bidakenewe. Ibi akenshi bikubiyemo urukurikirane rwo gukubitwa, adsorption, nakogenic yo kugabanya ibintu. The inzira yo gutandukanya, byumwihariko, ukoresha ubushyuhe buke cyane kugirango utandukanye imyuka itandukanye ishingiye kumanota yabo abitse, ahitamo Uwiteka Nf₃ uhereye ku banduye. Intambwe yose ikurikiranwa hamwe nibikoresho byo gusesengura bihanitse kugirango ibicuruzwa byanyuma byujuje ibisobanuro byihariye bya semiconductor inganda. Uku kwiyemeza kugenzura ubuziranenge nibyo bitandukanya utanga isoko yizewe nibindi.

Ni ubuhe buryo bw'umutekano no gukemura ibibazo bya gaze?

Umutekano nicyo kintu cyambere munganda gaze ubucuruzi. Mugihe Nf₃ ntabwo ari umuriro kandi uhagaze neza mubushyuhe bwicyumba, ni umukozi ukomeye wa okiside, cyane cyane mubushyuhe bwinshi. Ibi bivuze ko ishobora kwitwara nabi hamwe nibikoresho byaka kandi bisaba gukemura neza. Ingaruka z'ibanze ni uburozi bwayo; guhumeka gaze Birashobora kwangiza, bityo ibikoresho bikwiye hamwe nibikoresho byo kurinda ni ngombwa kuri buriwese Urubuga.

Urunigi rwose rutanga, ruva muruganda rwacu rugana umukiriya semiconductor fab, yubatswe hafi yumutekano. Nf₃ itwarwa na silinderi yateguwe cyane. Aba silinderi bahatanira kwipimisha no kwemeza kugirango babeho neza gaze. Nkumutanga, dutanga amabara arambuye yumutekano (SDS) hamwe namahugurwa kubakiriya bacu kububiko bukwiye, guhuza, no gukoresha uburyo. Ibi birimo umurongo ngenderwaho kuri igipimo kugenzura no kutitaho ibintu.

Kubafite ubucuruzi nka Mariko, impungenge nyamukuru ni urunigi rworoshye kandi rwizewe, gufatanije nuwabitanze bafite amateka yukuri yumutekano ni ngombwa. Itumanaho ridakora cyangwa kubura protocole yumutekano isobanutse kubitanga ni ibendera rikomeye ritukura. Twishimiye ko ntatanga ibicuruzwa gusa, ahubwo ni serivisi yuzuye irimo inkunga yinjira n'umutekano, kubungabunga gaze Kugera kandi bifatwa neza buri ntambwe yinzira.

Nitroduen trifluoride gaze ya parike? Gusobanukirwa ingaruka zishingiye ku bidukikije.

Ni ngombwa kuba umucyo kubijyanye nibidukikije bya Nf₃. Yego, Azote trifluoride ni imbaraga gaze ya parike. Itsinda ry'imihindagurikire y'imihindagurikire y'ikirere (IPCC) ryabaze ko rifite ubushobozi bwo gushyushya isi (GWP) inshuro ibihumbi zirenze karubone dioxyde mugihe cyimyaka 100. Ibi ni ukuri inganda zifatana uburemere cyane.

Ariko, inkuru ntishobora kurangira aho. The Ingaruka kubidukikije Ntibyemewe gusa nubushobozi bwa gaze, ariko kumafaranga angahe arekuwe mu kirere. Nkuko byavuzwe haruguru, Nf₃ ni byiza cyane. Muri kijyambere semiconductor Ikigo, ubwiganze bunini bwa gaze ikoreshwa irakoreshwa cyangwa isenywa mugihe cyo gukora. The plasma kumena, kandi icyaricyo cyose idakosowe gaze ibyo binaniwe byoherejwe kuri sisitemu yo kugabanuka. Sisitemu ifite akamaro kanini, akenshi isenya 99% yo gusigaye Nf₃.

Inganda zihinduka muri PFC kuri Nf₃, ihuriweho no gukoresha cyane tekinoroji yo kugabanuka, mubyukuri byatumye inshundura igabanuka Ibihuha bya Greenhouse ku gice cy'umusaruro. Ashinzwe Abakora Semiconductor Kandi abaguzi ba gaze bakorera hamwe kugirango bihuze nibyo bihumanya bigabanuka. Ibi bikubiyemo guhitamo inzira yo gukora isuku kugirango ukoreshe umubare muto wa gaze ngombwa kandi ukomeze sisitemu yo kugabanuka kubikorwa bya peak. Rero, mugihe Nf₃ ni imbaraga gaze ya parike Muburyo bwa laboratoire, ibirenge byisi-byisi Gukora Semiconductor ni gucungwa neza kandi byoroshye cyane kurenza ubundi buryo bwasimbuwe.

Ni uruhe ruhare rwa gaze ya gaze y'urubuga kuri fame ya semiconductor nini?

Igipimo cya kijyambere Gukora Semiconductor ni Byihuse. Ibikoresho binini, bizwi nka mega-fab, bimara imyuka nini. Kuri gaze zimwe, nka azote, birakora neza kubabyara mukigo aho gukandagira mubinyabuzima ibihumbi. Ibi bizwi nka kurubuga ibisekuru. Kuri Byihariye kandi Bya reaction gaze nka Nf₃, icyitegererezo gitandukanye gato kiragaragara: kurubuga kwezwa no gusesengura.

Mugihe cyuzuye NF₃ Umusaruro Kuri fab ntisanzwe biterwa nuburemere bwayo, abakoresha benshi bakunze kuba bafite ubuhanga kurubuga Sisitemu yo gucunga gaze. Amashanyarazi menshi ya Nf₃ igezwa kuri fab, hanyuma iyi sisitemu ikora yanyuma-stage kwezwa kandi ukomeje gusesengura neza imbere ya gaze yinjira ibikoresho bihenze. Ibi bitanga urwego ruhebuje rwo kugenzura ubuziranenge, buremeza ko kwanduza ibikorwa byose bivuye kumirongo itangwa. Ubu buryo buhuza inyungu zubukungu zigura byinshi hamwe nicyizere cyiza cya kurubuga Ubuyobozi.

Gusobanukirwa iyi moderi yo gutanga imbaraga ni ngombwa. Nkumutanga, twaguye serivisi zacu zirenze kwuzura silinderi. Ubu dukorana Abakora Semiconductor ku isi Gushushanya no gushyira mubikorwa ibisubizo byo gutanga no gucunga. Ibi birashobora kubamo kwiyeguriye Imana umurongo ubushobozi bwumukiriya ukomeye, ibikoresho byihariye, cyangwa kwishyira hamwe nabo kurubuga sisitemu. Nugutanga urunigi rworoshye kandi rwizewe rwujuje ibyifuzo bisaba Gukora ibirori 21 byo mu kinyejana. Iki nigice cyingenzi cyingamba zacu, cyane cyane iyo ukorera abakiriya bafite akamaro Umusaruro.

Nigute NF₃ isuku igira ingaruka kumusaruro mukora chip?

Muri semiconductor Isi, "Umusaruro" ni byose. Ni ijanisha ryibintu byiza, bigakora kuri kimwe silicon wafer. Umusaruro mwinshi bisobanura inyungu nyinshi; Umusaruro muto urashobora kubangamira amafaranga. Ubuziranenge bwimikorere imyuka, cyane cyane reaction gaze nka Nf₃, ifite ingaruka zitaziguye kandi zidasanzwe kuri Umusaruro.

Tekereza an umwanda nk'akato gato k'ubushuhe (H₂o) cyangwa ikindi gase uruganda bivanze na Nf₃. Mugihe cyoroshye cyane, ibyo umwanda Irashobora kubangamira reaction yimiti, itera inenge microscopique muri chip ya chip. Irashobora guhagarika etch, gusiga ibikoresho aho bitagomba kuba, cyangwa gutera hejuru, ukureho ibintu byinshi. Inzira zose, ibisubizo Umuzunguruko bizananirana ikizamini cya nyuma. Mugihe ukora amamiriyoni yafashwe kuri chip imwe, ndetse "sinefe" ​​imwe yatewe na an umwanda irashobora guhindura chip yose idafite akamaro.

Iyi niyo mpamvu dushora imari cyane muburyo bwiza. Mugutanga ibyemezo, ultra-ubuziranenge-ubuziranenge Nf₃, duha abakiriya bacu kwizera ko Uwiteka gaze ntabwo bizaba isoko yinenge. Kugenzura kwibanda ya buri gice gihagaze kugeza kumihango-miliyari ireba ko inzira yo gukora irahagaze kandi isubirwamo. Igikorwa gihamye kiganisha ku byateganijwe kandi hejuru Umusaruro, niyihe ntego nyamukuru kuri buri semiconductor Uruganda. Uruhare rwacu nk'abatanga Imyuga yo hejuru yihariye ni ukukuraho impinduka kandi utange umusaruro wubwiza butavongera.

Niki ukwiye gushakisha mumateka ya azote muri Trifluoride?

Kumukozi ushinzwe gutanga amasoko nka Mark, guhitamo utanga isoko iburyo kubikoresho bikomeye nka Nf₃ irenze kure gusa. Ingaruka z'ubufatanye bubi - gutinda kohereza, ibibazo byiza, itumanaho ribi - ni hejuru cyane. Ukurikije uburambe bwanjye, dore ibintu by'ingenzi tugomba gusuzuma:

Ubwa mbere, ubuziranenge hamwe nimpano. Utanga inguzanyo yizewe azatanga icyemezo cyisesengura (COA) hamwe nibicuruzwa byose, birambuye urwego rwuzuye kandi utondekanya umwanda uwo ariwo wose wagaragaye. Bagomba kubahiriza amahame mpuzamahanga nka ISO 9001. Baza ubushobozi bwabo bwo gusesengura. Bafite ibikoresho byo kumenya umwanda kurwego rusabwa semiconductor Porogaramu?

Icya kabiri, urunigi rwiringirwa no gukorera mu mucyo. Utanga isoko arashobora kwerekana urusobe rwitondewe kugirango wirinde gutinda? Bafite inyongeramuco Umusaruro Kugirango hamenyekane neza? Itumanaho ni urufunguzo hano. Utanga isoko agomba gukora neza, atanga amakuru agezweho yo kohereza no guhita aboneka kugirango asubize ibibazo. Ibi bikemura mu buryo butaziguye ububabare bwo gutumanaho budakora.

Hanyuma, shakisha ubuhanga bwa tekiniki. Utanga isoko meza ntabwo agurisha ibicuruzwa gusa; Batanga igisubizo. Bagomba kumva ibyifuzo byawe kandi bagashobora gutanga inkunga ya tekiniki. Bagomba kuba ubumenyi kubyerekeye umutekano, gutunganya, ndetse n'amabwiriza y'ibidukikije akikije Porogaramu ya gaze. Utanga uwatanze ushobora gukora nkumufatanyabikorwa uzi agaciro afite agaciro katagira agaciro kurenza umwe numucuruzi gusa. Ubuhanga ni ishingiro ryimibanire yigihe kirekire, yunguka. Duharanira kuba uwo mufatanyabikorwa kubakiriya bacu bose, ntabaha Uwiteka gusa gaze Ariko amahoro yo mumutima azana nayo.

ABAFATANYIJE

• Igikoresho cy'ingenzi: Azote trifluoride (nf₃) ni umwihariko gaze ikoreshwa mu mashyi ya plasma no gusukura muri Inzira ya Semiconductor.
• Imikorere myiza: Nf₃ ni byiza cyane kandi bifite ingaruka nziza zishingiye ku bidukikije kuruta imyuka ya kera ya PFC yasimbuye, tubikesha ibiciro byo gukoresha hejuru na sisitemu yo kugabanuka.
• Isuku ni inyungu: Ultra-Hejuru Isuku ya Nf₃ ntabwo ari ibiganiro. Ndetse no gukurikira umwanda birashobora gutera inenge kuri a silicon wafer, kugabanya cyane Umusaruro kandi inyungu za Chip Gukora.
• Umutekano no gufata ni urufunguzo: Mugihe gihagaze, Nf₃ ni uburozi no kuri okiside gaze Ibyo bisaba gufata neza, silinderi yemejwe, no gusobanukirwa cyane protocole yumutekano.
• Guhitamo abatanga ni ngombwa: Mugihe uhitamo an Nf₃ Utanga isoko, shyira imbere ubuziranenge, urunigi rwiringirwa, itumanaho ribonerana, hamwe nubuhanga bwimbitse bwa tekiniki hejuru yigiciro wenyine.