Txoj Kev Lag Luam Kev Lag Luam

Nrog rau txoj kev loj hlob ntawm vaj huam sib luag tiaj tiaj thev naus laus zis, cov neeg siv khoom yuav tsum muaj cov gases tshwj xeeb thiab kev paub ntxiv. Huazhong Gas muab lub vaj huam sib luag tiaj tus neeg yuav khoom nrog ntau cov ntaub ntawv roj tshwj xeeb, suav nrog doping, zaj duab xis suav nrog cov ntaub ntawv thov tu cov txheej txheem.

Cov khoom pom zoo rau koj kev lag luam

Nqaij iab

Kev lag luam qib hluav taws xob feem ntau yog siv rau hauv kev tsim cov TFT (nyias zaj duab xis txuas) / LCD (LTPS substrates rau LCDs.

Tshuaj asmaunias

Ua ke nrog kev ua si, nws tsim cov silicon nitride txheej ntawm ib-si tauv.

Roj av

Kev tsim tawm ntawm LTPS thiab Mos cov transistors tau nce kev siv cov nitrous oxide. Los ntawm qhov kev pom ntawm kev noj thiab siv nyob rau hauv mo ntau lawm, n2o tau surpassed nf3 los ua cov khoom siv hluav taws xob hauv mo ntau lawm.

Nitrogen trifluoride

NF3 yog cov khoom siv hluav taws xob feem ntau hauv A-SI thiab LTPS zaub ntau lawm thiab yog siv rau kev tu Pecvd Chajbers.