Duniyar zamani tana gudana akan kwakwalwan kwamfuta. Daga wayowin komai da ruwan da ke cikin aljihun ku zuwa tsarin jagora a aikin injiniyan sararin samaniya, ƙaramin Na'urar SeMiconductor shine gwarzon zamani na zamani wanda ba a yi masa waƙa ba. To amma mene ne jarumin bayan jarumin? Ita ce ganuwa, sau da yawa m duniya na musamman gas. Musamman, sunadarai na fluorine yana taka muhimmiyar rawa a cikin Magana na Semiconducting tsari wanda kawai ba za a iya maye gurbinsa ba.

Idan kana sarrafa sarkar samarwa ko kula da ingancin samfur a cikin a semiconductor foundry, kun san cewa gefen kuskure ba kome ba ne. Karu ɗaya a cikin danshi ko ɓangarorin da ba a gani ba na iya lalata ayyukan samarwa na miliyoyin daloli. Wannan labarin ya nutse cikin zurfin rawar mai dauke da sinadarin fluorine iskar gas - dalilin da yasa muke amfani da su, ƙayyadaddun sunadarai da ke sa su tasiri, da mahimmancin mahimmancin kwanciyar hankali da tsabta. Za mu bincika yadda waɗannan Gases mai tsabta ana amfani da su a ciki mahaifa da matakan ajiya, kuma dalilin da yasa samo su daga amintaccen abokin tarayya shine mafi mahimmancin yanke shawara da za ku iya yanke a wannan shekara.

Me yasa masana'antar semiconductor ta dogara da iskar gas mai ɗauke da fluorine?

Don fahimtar da masana'antar semiconduct, Dole ne ku kalli tebur na lokaci-lokaci. Silicon shine zane, amma fukai buroshi ne. The Tsarin halittar Semicmikation tsari ya haɗa da gina kayan yadudduka sannan a zaɓi cire su don ƙirƙirar da'irori. Ana kiran wannan tsarin cirewar etching.

Fukai shine mafi yawan sinadari na electronegative. A cikin sauki sharuddan, yana da tsananin yunwa ga electrons. Lokacin da muka gabatar sinadarin fluorine ko mahadi masu fluorinated cikin dakin plasma, atom ɗin fluorine suna mayar da martani da ƙarfi da silicon da silicon dioxide. Wannan sinadari yana juyar da siliki mai ƙarfi ya zama iskar gas mai canzawa (kamar silicon tetrafluoride) wanda za'a iya fitar dashi cikin sauƙi. Idan ba tare da wannan amsawar sinadarai ba, ba za mu iya ƙirƙirar ramuka da ramukan tuntuɓar da ake buƙata don zamani ba Na'urorin lantarki.

A masana'anta mai girma, gudun da daidaito su ne komai. Gas masu dauke da fluorine Samar da ƙimar ƙima mai girma da ake buƙata don ci gaba da samarwa, yayin da kuma ke ba da zaɓi don yanke kayan abu ɗaya ba tare da lalata layin da ke ƙarƙashinsa ba. Yana da m daidaita aikin ilmin sunadarai da ilimin lissafi.

Menene ke sa sinadarin fluorine ya keɓanta don ƙaƙƙarfan etching?

Kuna iya tambaya, me yasa ba a amfani da chlorine ko bromine ba? Muna yin, don wasu yadudduka. Duk da haka, sunadarai na fluorine yana ba da fa'ida ta musamman lokacin da aka haɗa kayan tushen silicon. Dangantakar da ke tsakanin silicon da fluorine tana da ƙarfi sosai. Yaushe mai dauke da sinadarin fluorine plasma ya bugi wafer, abin da ya faru shine exothermic kuma ba tare da bata lokaci ba.

Sihiri yana faruwa a ciki plasma. A cikin a tsarin semiconducor chamber, muna amfani da makamashi mai ƙarfi zuwa iskar gas kamar Carbon Tetrafluoride (CF4) ko Sulfur Hexafluoride (SF6). Wannan yana karya gas baya, yana sakin amsawa fukai masu tsattsauran ra'ayi. Wadannan masu tsattsauran ra'ayi suna kai hari a saman wafer.

"Madaidaicin mahaifa ya bayyana aikin guntu. Idan tsarkin iskar gas ɗin ku ya canza, ƙimar etch ɗin ku tana canzawa, kuma yawan amfanin ku ya lalace."

Wannan yana haifar da ra'ayi na anisotropic etching-yanke kai tsaye ba tare da cin abinci a gefe ba. Ta hanyar hadawa fukai da sauran Ganawar aiwatarwa, injiniyoyi na iya sarrafa bayanin martabar mahara daidai gwargwado. Wannan ƙarfin yana da mahimmanci yayin da muke matsawa zuwa ƙananan nodes (7nm, 5nm, da ƙasa), inda ko da nanometer na karkacewa ya zama gazawa.

Ta yaya iskar gas a cikin masana'antar semiconductor ke tafiyar da ayyukan etch na ci gaba?

Tsari-tsare su ne kayan aikin sassaka na kayan ado. Akwai manyan nau'ikan guda biyu: rigar etch (amfani da sinadarai na ruwa kamar hydrogen fluoride) da bushewar etch (ta amfani da plasma). Na zamani ci gaba semiconductor nodes sun dogara kawai akan busassun etching na plasma saboda ya fi daidai.

A cikin al'ada plasma etching layi, a iskar gas an gabatar da shi. Bari mu dubi nau'ikan da aka yi amfani da su:

• Carbon Tetrafluoride (CF4): Kayan aiki don cire oxide.
• Octafluorocyclobutane (C4F8): Ana amfani da shi don saka wani Layer na polymer akan bangon bangon mahara, yana kare su yayin da ƙasa ke da zurfi.
• Sulfur Hexafluoride (SF6): An san shi don ƙimar etching silicon mai saurin gaske.

Ma'amala tsakanin plasma da substrate yana da rikitarwa. Ya ƙunshi bama-bamai ta jiki ta hanyar ions da halayen sinadarai ta masu tsattsauran ra'ayi. The semiconductor masana'antu kayan aiki dole ne a kula da kwarara, matsa lamba, da cakuduwar wadannan iskar gas. Idan da gas na musamman ya ƙunshi ƙazanta kamar danshi, yana iya haifar da hydrofluoric acid a cikin layin bayarwa ko ɗakin, yana haifar da lalata da lahani.

Me yasa Nitrogen Trifluoride shine sarki na aikace-aikacen tsaftace ɗakin?

Lokacin da etching da tsaftacewa tafi hannu da hannu, tsaftace kayan aikin masana'anta yana da mahimmanci kamar sarrafa wafer. Lokacin Cinta na Chemical (CVD)Ana ajiye kayan kamar silicon ko tungsten akan wafer. Duk da haka, waɗannan kayan kuma suna rufe bangon ɗakin. Idan wannan ragowar ya taru, sai ya fashe ya faɗo kan wafers, yana haifar da lahani.

Shiga Nitrogen Trifluoride (NF3).

Shekaru da suka wuce, ana amfani da masana'antar fluorinated greenhouse iskar gas kamar C2F6 don tsaftace ɗakin. Koyaya, NF3 ya zama ma'auni don matakan tsaftace ɗakin ɗakin saboda yawan ingancinsa. Lokacin da aka rushe a cikin tushen plasma mai nisa, NF3 yana haifar da adadi mai yawa na sinadarin fluorine. Waɗannan atom ɗin suna goge bangon ɗakin da tsafta, suna mai da ƙaƙƙarfan ragowar su zama iskar gas da ake fitarwa.

Nitrogen brifloride An fi so saboda yana da ƙimar amfani mafi girma (yawancin iskar gas ana amfani da shi a zahiri) da ƙananan hayaƙi idan aka kwatanta da tsofaffi. tsaftacewa jamiái. Ga mai sarrafa kayan aiki, wannan yana nufin ƙarancin lokaci don kiyayewa da saurin fitarwa.

Wadanne mahadi masu fluorinated suke da mahimmanci don ƙira mai girma?

Da semiconductor wadata sarkar ya dogara da kwandon takamaiman iskar gas mai dauke da sinadarin fluorine. Kowannensu yana da takamaiman “girke-girke” ko aikace-aikace. A Jiangsu Huazhong Gas, muna ganin buƙatu mai yawa ga masu zuwa:

Waɗannan mahadi masu fluorinated su ne jinin rai masana'anta mai girma. Ba tare da tsayayye na waɗannan ba iskar gas a cikin semiconductor samarwa, layin tsayawa. Yana da sauki haka. Wannan shine dalilin da ya sa manajojin siye kamar Eric Miller ke sa ido akai-akai samarwa sarkar don rushewa.

Me yasa iskar gas mai tsafta ke zama kashin bayan yawan amfanin semiconductor?

Ba zan iya jaddada wannan isa ba: Tsafta ita ce komai.

Idan muka yi magana akai Gases mai tsabta, ba muna magana ne game da "ma'aunin masana'antu" da ake amfani da su don waldawa ba. Muna magana ne game da 5N (99.999%) ko 6N (99.9999%) tsarki.

Me yasa? Domin a Na'urar SeMiconductor yana da fasali da aka auna a cikin nanometers. Kwayoyin halitta guda ɗaya na ƙazanta na ƙarfe ko adadin danshi (H2O) na iya haifar da ɗan gajeren kewayawa ko hana Layer daga mannewa.

• Danshi: Mai da martani da fukai don ƙirƙirar HF, wanda ke lalata tsarin isar da iskar gas.
• Oxygen: Oxidizes da silicon ba tare da sarrafawa ba.
• Karfe Masu nauyi: Rusa kayan lantarki na transistor.

A matsayin mai kaya, aikinmu shine tabbatar da cewa high-tsarki Xenon ko Lantarki Grade Nitrous Oxide za ku sami gamuwa mai tsauri Ka'idojin masana'antu. Muna amfani da ci-gaba na chromatography gas don ganowa gano rashin jituwa ƙasa zuwa sassa akan biliyan (ppb). Ga mai siye, ganin Takaddun Bincike (COA) ba kawai takarda ba ne; shi ne garantin cewa su Tsarin halittar Semicmikation ba zai fuskanci hatsarin yawan amfanin ƙasa ba.

Ta yaya masana'antar ke sarrafa hayakin iskar gas da GWP?

Akwai giwa a cikin dakin: muhalli. Da yawa iskar gas da high Yiwuwar ɗumamar Duniya (GWP). Misali, Sulfur hexaflumide (SF6) yana daya daga cikin mafi m greenhouse gas sananne ga mutum, tare da GWP dubban sau sama da CO2.

Da semiconductor masana'antu masana'antu yana cikin matsanancin matsin lamba don rage sawun carbon. Wannan ya haifar da manyan canje-canje guda biyu:

1. Ragewa: Fabs suna girka manya-manyan “akwatunan ƙonawa” ko masu gogewa akan layukan shaye-shayensu. Waɗannan tsarin suna rushe abubuwan da ba a yi ba gas gas kafin a sake shi cikin yanayi.
2. Sauya: Masu bincike suna neman madadin mahaifa gas tare da ƙananan GWP. Duk da haka, gano kwayoyin da ke aiki da C4F8 ko SF6 ba tare da tasirin muhalli yana da wahala a sinadarai ba.

Nitrogen brifloride ya kasance mataki na madaidaiciyar hanya don tsaftacewa saboda yana rushewa cikin sauƙi fiye da tsofaffin PFCs, yana haifar da ƙasa da gaba ɗaya fitarwa idan tsarin ragewa suna aiki daidai. Ragewa Maganin gas na Green Green ba kawai motsi ne na PR ba; buƙatun tsari ne a cikin EU da Amurka.

Shin sarkar samar da semiconductor na da rauni ga ƙarancin iskar gas na musamman?

Idan 'yan shekarun nan sun koya mana wani abu, shi ne cewa samarwa sarkar mai rauni ne. Semiconductor masana'antun sun fuskanci karancin komai daga neon zuwa fluoropolymers.

The wadata na sinadarin fluorine kuma abubuwan da suka samo asalinsa sun dogara da hakar ma'adinai na fluorspar (calcium fluoride). Kasar Sin ita ce babbar tushen wannan danyen abu a duniya. Lokacin da tashe-tashen hankula na geopolitical suka tashi ko hanyoyin dabaru suka toshe, kasancewar waɗannan mahimman abubuwa Ganawar aiwatarwa faduwa, kuma farashin ya yi tashin gwauron zabi.

Ga mai siye kamar Eric, tsoron "Force Majeure" gaskiya ne. Don rage wannan, kamfanoni masu basira suna bambanta masu samar da su. Suna neman abokan hulɗa waɗanda suka mallaki nasu iso-tanka kuma sun kafa hanyoyin sadarwa na dabaru. Dogara a cikin dabi'u yana da mahimmanci kamar tsabtar gas. Kuna iya samun mafi tsarki C4F8 gas a duniya, amma idan ya makale a tashar jiragen ruwa, ba shi da amfani fab.

Menene ka'idojin aminci don sarrafa Hydrogen Fluoride da sauran abubuwa masu guba?

Tsaro shine tushen masana'antar mu. Da yawa mai dauke da sinadarin fluorine iskar gas ko dai masu guba ne, masu asphyxiants, ko kuma suna maida martani sosai. Hydrogen Fluoride (HF), galibi ana amfani da shi a cikin jika ko ƙirƙira azaman samfuri, yana da haɗari musamman. Yana shiga cikin fata kuma yana kai hari ga tsarin kashi.

Karɓar waɗannan kayan yana buƙatar horo mai ƙarfi da kayan aiki na musamman.

• Sillinders: Dole ne ya zama ƙwararren DOT/ISO kuma ana bincika akai-akai don lalata na ciki.
• Valves: Ana amfani da bawul ɗin diaphragm don hana zubewa.
• Sensors: Semiconductor fabs an rufe su a cikin firikwensin gano iskar gas waɗanda ke haifar da ƙararrawa a ɗan yaɗuwa.

Lokacin da muka cika silinda da Lantarki Grade Nitrous Oxide ko wani abu mai guba, muna ɗaukarsa kamar makami da aka ɗora. Muna tabbatar da cewa an goge silinda a ciki don hana ɓarna kuma an rufe bawul ɗin kuma an rufe shi. Ga abokan cinikinmu, sanin cewa gas mai mai ko sauran ya zo cikin aminci, marufi masu dacewa babban taimako ne.

Menene ke gaba ga kayan da aka yi amfani da su a aikin ƙirƙira semiconductor?

Da samar da helemiconduction taswirar hanya ta kasance m. Yayin da kwakwalwan kwamfuta ke motsawa zuwa tsarin 3D kamar transistor Gate-All-Around (GAA), da rikitarwa etching da tsaftacewa yana ƙaruwa. Muna ganin bukatar ƙarin m iskar gas gaurayawan da za su iya fitar da zurfi, kunkuntar ramuka tare da daidaiton atomic.

Atomic Layer Etching (ALE) wata dabara ce da ta kunno kai wacce ke cire abu daya Layer atomic a lokaci guda. Wannan yana buƙatar daidaitaccen allurai na musamman Maimaitawa gas. Bugu da ƙari, yunƙurin masana'antar "kore" zai iya haifar da ɗaukar sabbin abubuwa sunadarai na fluorine wanda ke ba da wannan aikin tare da ƙananan GWP.

Na gaba na waɗanda za su iya ƙirƙira a cikin haɗin gas da tsarkakewa. Kamar yadda Kayan Kayan SeMemictor juyin halitta, iskar gas da ake amfani da su don siffata su dole ne su samo asali.

Maɓalli

• Fluorine yana da mahimmanci: Chemistry na fluorine shine mabuɗin kunnawa don mahaifa da mai tsabta shiga Magana na Semiconducting.
• Tsarki shine Sarki: High-tsarki (6N) ba zai yiwu ba don hana lahani da tabbatarwa tsarin kwanciyar hankali.
• Gases iri-iri: Gas daban-daban kamar CF4, SF6, da Nitrogen brifloride yi takamaimai matsayi a ciki ƙira.
• Tasirin Muhalli: Gudanarwa Maganin gas na Green Green da ragewa kalubalen masana'antu ne mai mahimmanci.
• Tsaron Kaya: Mai ƙarfi samarwa sarkar kuma amintattun abokan tarayya sun zama dole don kauce wa dakatarwar samarwa.

A Jiangsu Huazhong Gas, mun fahimci waɗannan ƙalubalen saboda muna rayuwa a kowace rana. Ko kuna bukata Babban Purity Xenon don sabon tsarin etch ɗin ku ko ingantaccen isar da iskar gas ɗin masana'antu, muna nan don tallafawa fasahar da ke gina gaba.