A cikin duniyar fasaha ta zamani, semiconductor sarki ne. Waɗannan ƙananan ƙwayoyin cuta mai haɓaka komai daga wayoyinmu zuwa motocinmu da kuma cibiyoyin bayanai waɗanda ke gudanar da Intanet. Amma menene ikon ƙirƙirar waɗannan kwakwalwan kwamfuta? Amsar, abin mamaki, shi ne iskar gas. Ba kawai wani iskar gas, amma Gases mai tsabta na tsabta mara kyau. Kamar yadda Allen, mai mallakar masana'anta tare da layin masana'antu bakwai na masana'antu, Na ga yadda bukatar tsarkake ta ruwa. Tarihin Tasum na Kasuwanci kamar Mark Shen, waɗanda suke a kan gaba wajen iskar gas samarwa sarkar. Kuna fahimtar inganci da farashi, amma don jagoranci da gaske a cikin wannan kasuwa, kuna buƙatar fahimtar da me ya sa. Za mu lalata hadadden duniyar masana'anta semiconductor, yin bayani cikin sharuddan da ya sa bata guda barbashi a cikin iskar gas rafi na iya kashe kayan masana'antu. Wannan shine jagorarku wajen yin magana da harshen na masana'antar semiconduct kuma zama abokin tarayya mai mahimmanci.

Wace rawa ta yi wasa don yin guntu na semiconductor?

A zuciyar sa, masana'anta semiconductor tsari ne na gina microscopic, da'irorin lantarki da yawa a kan wani bakin ciki diski na silicon, wanda aka sani da wafer. Ka yi tunanin kokarin gina skyscraper girman hatimi na hatimi, tare da biliyoyin dakuna da dakin aure. Wannan sikelin da muke magana akai. Don cimma wannan, ba za ku iya amfani da kayan aikin zahiri ba. Maimakon, duka masana'antu Reces a jerin abubuwan sunadarai, da abin hawa na farko don waɗannan halayen iskar gas.

Gases suna aiki kamar yadda ba a ganuwa ba ke gina waɗannan da'irori. Suna yin ayyuka da yawa masu mahimmanci. Wasu, kamar nitrogen, ƙirƙirar yanayi mai tsabta da tsayayyen yanayi, yana hana halayen da ba'a so ba. Wasu, da aka sani da gas gas, ainihin ginin gini ko kayan aikin jigilar kayayyaki. Misali, takamaiman Nau'in gas za a iya amfani da shi don adana Layer na Ciniki na kayan aiki, yayin da wani iskar gas ana amfani dashi daidai mahaifa Auna kayan da za a samar da hanyar da'ira. Kowane mataki guda, daga tsaftace wafer Don gina masu sauƙin ƙarshe, ya ƙunshi takamaiman iskar gas ko cakuda gas. Tsarin gas Gas da kayan aikin sunadarai kai tsaye suna nuna nasarar nasarar na guntu masana'antu tsari.

Me yasa tsarkakakkiyar take da mahimmanci a cikin masana'antar ƙwayoyin semicondu?

A cikin rayuwarmu ta yau da kullun, ƙaramin ƙura ko gurbacewar iska ba babbar yarjejeniya ba ce. Amma a cikin semiconductor Itace tsiro, ko "FA," Wata masifa ce. An gina kayan aikin a kan silicon wafer ana auna sau da yawa a nandost - wannan biliyan na mita. Don saka CEWA A cikin hangen zaman gaba, gashin mutum ɗaya yana kusan shekaru 75,000 nemourers. Kankanin ƙura barbashi Ba za ku iya zama ma gani ba ce mai tsayi a duniyar semiconductor Faji

Wannan shine dalilin m shine mafi mahimmancin halayen gas amfani a cikin semiconductor samar. Duk wani kwayoyin da ba'a so ba - ko kwayar cutar ruwa mai rauni, wani karamin karfe barbashi, ko wani daban iskar gas An dauki kwayoyin- hakafi. Wannan samu na iya rushe m Chemismer dauki faruwa a kan waferfarfajiya. Guda hakafi na iya toshe da'irar daga forming, haifar da taƙaitaccen da'ira, ko canza the kaddarorin lantarki na semiconductor abu. Saboda guda ɗaya wafer na iya ƙunsar ɗaruruwan ko dubban kwakwalwan kwamfuta, kuskure ɗaya na iya haifar da asarar kuɗi. Duk aikin yana buƙatar mafi girman matakan tsarkakakke yin aiki kwata-kwata.

Ta yaya impurities ya yi a cikin gas na gaskai wrem

Lokacin da hakafi ya kasance a cikin tsari iskar gas, yana iya haifar da "kisa aibi. "Wannan ba karamin abu bane kawai; a aibi wanda ke sanya baki ɗaya microchip a wannan sashin na wafer mara amfani. Bari mu kalli yadda wannan ya faru. A lokacin ajiya Lokaci, inda ake gina fina-finai ta Layer, wanda ba a so barbashi zai iya sauka a farfajiya. Lokacin da aka ajiye na gaba a saman, yana ƙirƙirar karo na microscopic ko rashin komai. Wannan aibi zai iya warware haɗin lantarki ko ƙirƙirar ɗaya wanda ba zai kula da shi ba, yadda ya lalace ya lalace.

Sakamakon wannan yana lalata da layin kasan almara. Babban awo na farko don cin nasara a semiconductor FA ya "yawan amfanin ƙasa" -he adadin kwakwalwan kwamfuta da aka samar daga guda wafer. Koda karamin raguwa a ciki yawa, daga kashi 95% zuwa 90%, na iya wakiltar miliyoyin daloli a cikin kudaden shiga. Gas rashin daidaituwa ne kai tsaye sanadin rage yawa. Wannan shine dalilin masana'antun semiconducters suna damu da Gas da gas. Suna buƙatar tabbatar da cewa iskar gas Shiga kayan aikin dala biliyan da yawa ya kasance cikakke daga kowane gurbi wannan na iya lalata da Tsarin Tsarkakewa na SeMemictik. Wasan kwaikwayon microscopic inda akwai daki mai kyau don kuskure.

Menene manyan gas ɗin da ake amfani da su a cikin matsanancin ƙage?

Kewayon gas da aka yi amfani da shi a cikin masana'antar semiconduct yana da yawa, amma gabaɗaya sun fada kashi biyu: Manyan gas da gas na musamman.

• Manyan gas: Ana amfani da waɗannan abubuwa masu yawa da kuma samar da tushen yanayin masana'antu.

  • Nitrogen (n₂): Wannan shi ne mai aiki. Matsanancin-babba m Nitrogen ana amfani dashi don ƙirƙirar INETER "yanayin" a cikin kayan ƙirƙira. Wannan pinges oxygen, danshi, da sauran barbashi, yana hana iskar shaka mara amfani ko samu na wafer.
  • Hydrogen (H₂): Sau da yawa ana amfani dashi a hade tare da sauran gas, hydrogen yana da mahimmanci ga wasu ajiya Hanyoyi kuma don ƙirƙirar takamaiman yanayin sunadarai sosai da ake buƙata don gina tsarin transistor.
  • Argon (Ar): Kamar yadda babu makawa iskar gas, An yi amfani da Argon a wani tsari da ake kira sputtering, inda ake amfani da shi don jefa kayan da aka yi niyya, ƙwanƙwasa zarra sako-sako da wancan sannan ajiye akan wafer. Hakanan ana amfani dashi don ƙirƙirar plasma a cikin mutane da yawa mahaifa tafiyar matakai.

• Gases na Gaske: Waɗannan suna da hadaddun, sau da yawa haɗari, kuma manyan gas mai amfani da kayan gas da aka yi amfani da su don takamaiman matakan matakan. Su ne "sinadaran" masu aiki.

  • Etchant: Gas kamar chlorine (cl₂) da hrbren bromide (HBR) ana amfani da su don daidaitawa ko mahaifa tsarin a cikin yadudduka na wafer.
  • Kopst: Gases kamar su Arsine (Ash₃) da Phosphine (PH₃) suna gabatar da takamaiman hakafi cikin silicon Don canza kaddarorin lantarki, wanda shine yadda ake sarrafa masu musayar.
  • Ajiye gas: Silane (sih ₄) misali ne na gargajiya, ana amfani dashi azaman tushen silicon don adana finafinai na bakin ciki.

Don jami'in sayen kamar alama, yana da mahimmanci a san cewa yayin da waɗannan gas ɗin daban daban, suna da bukata ɗaya: matsananci m.

Kuna iya bayanin ajiya da etching a cikin sauki sharuddan?

Samar da helemiconduction Ya ƙunshi ɗaruruwan matakai, amma yawancinsu suna bambance-bambance na manyan hanyoyi na asali: ajiya da mahaifa. Fahimtar wadannan a cikin sauki sharuɗɗa shine mabuɗin fahimtar rawar iskar gas.

1. Ajiye: gina yadudduka
Yi tunani ajiya Kamar feshin fesa tare da kwayoyin. Manufar shine don ƙara orl-na bakin ciki, cikakkiyar madaidaicin kayan abu a kan Silicon Wafer.

• Tsarin: Tsari iskar gas (Kamar Silane) an gauraye da gas mai mai (kamar nitrogen ko hydrogen). Wannan iskar gas Daga nan sai aka gabatar da cakuda cikin dakin da ke dauke da wafer. A Chemismer dauki an hade, galibi ta hanyar zafi ko a plasma, haifar da kwayoyin don "hazo" daga cikin iskar gas kuma samar da m fim na bakin ciki a kan waferfarfajiya.
• Me yasa tsarkakawar al'amuran: Idan akwai gurbata barbashi a cikin iskar gas Roke, kamar dai bakin turɓaya yana shiga cikin fenti mai feshin ku. Zai fara saka a cikin sabon Layer, ƙirƙirar tsari aibi. Idan akwai wani abu da ba a so iskar gas Molecule, zai iya amsawa ba daidai ba, canza kayan shafa kayan shafa da kaddarorin lantarki na Layer.

2. Etching: kula da da'irori
Bayan gina Layer, kuna buƙatar ɗaukar tsarin kewaye a ciki. Mahaifa shine aiwatar da zabi a cirewa.

• Tsarin: Da wafer an mai da shi tare da kayan da ake kira puroresist. An kirkiro wani tsari a kansa (kamar stencil). Abubuwan da aka fallasa sannan ya taurare. Da wafer Shin, an sanya shi a cikin ɗakin da aka cika tare da Etchant iskar gas (kamar mai zane-zane mai launin shuɗi). Wannan iskar gas yana da ƙarfi cikin plasma Jiha, yana mai da hankali sosai. Da plasma jefa bomar wafer, kimiyyar emolicy cin abinci kawai A cikin yankunan da ba'a kare shi ba.
• Me yasa tsarkakawar al'amuran: Rashin ƙarfi a cikin gas amfani da etching na iya canza adadin amsawa. Wannan na iya haifar da da'irori da za a sassaka da yawa, kunkuntar, ko a'a. Karfe barbashi hakafi zai iya toshe mahaifa Tsarin aiki a cikin kankanin tabo guda, wanda ya fita a bayan wani "post" na kayan da aka so wanda ke gajawa kewaye.

Ta yaya tsarkakakkiyar mai cike da iskar gas ta auna kuma ta kiyaye?

A cikin Masana'antu na duniya, daidaitattun ma'aunin tsarkakewa kamar "kashi" marasa amfani. Muna ma'amala da samu a kan sikelin da yake da wuyar fahimta. An auna tsarkakewar a ciki sassa a kowace tiriliyan (Ppt). Wannan yana nufin kowane m iskar gas Molecules, za a iya samun kwayoyin halitta ɗaya ko biyu kawai.

Don cimma da tabbatar da wannan matakin Gas da gas, tsarin sihiri Gas da bincike ana buƙatar bincike.

A masana'antarmu, bamu samar da iskar gas; Muna zaune da numfashi iko mai inganci. Da wadata sarkar don semiconductor FA ya ƙunshi masu samar da abubuwan da aka samar da su a lokacin amfani. Bugu da ƙari, ci gaba Binciken Gas Ana amfani da kayan aikin don Kulawa na Gaskiya. Dabaru kamar ATMOSPHERORY IILIFIF Mass Spectometry (apims) na iya aiwatarwa Gano marasa hankali ƙasa zuwa sassan-per-trillion matakin, tabbatar da Gas na UHP (Ultra-high tsarkakakke) Shigar da kayan aiki tsari cikakke ne.

Me ke sa mai samar da amintaccen gas mai ƙarfi?

Don siyan kai kamar Markus, wanene ya ɗanɗana zafin sharar jirgi da takaddun zamba, dogaro shine komai. A cikin duniyar Babban-tsarki semiconductor Gases, dogaro ya kasance a kan dirkoki uku: daidaitawa, daidaitawa, tabbataccen inganci, da gwaninta na tunani.

1. Halitta Bayyana: Mai ba da abu mai kyau dole ne ya yi aiki da ƙarfi da kuma iyawar samarwa. Lines ɗin masana'antar samarwa guda bakwai, misali, tabbatar da cewa za mu iya biyan babban bukatar Kuma wannan matsala akan layi ɗaya ba ta dakatar da fitowarmu gaba ɗaya ba. Wannan yana rage haɗarin wadataccen rudani wanda zai iya rufe dala biliyan da yawa semiconductor FAB.
2. Tabbacin ingantaccen ingancin: Bai isa ya ce kuna da gas mai tsabta. Dole ne ku iya tabbatar da shi. Wannan yana nufin saka hannun jari a cikin kayan aikin na zamani na nazari na Gano marasa hankali. Hakanan yana nufin samar da takaddun shaida m, takaddun shaida na bincike (coa) tare da kowane jigilar kaya. Cigaba da zurin takardar sheda shine game da gina dangantaka ta dogon lokaci dangane da aminci da bayanan tabbatacce.
3. Kwarewar Jagora: Samun iskar gas ko ruwa mai ruwa daga China ga Amurka ba mai sauki bane. Yana buƙatar ƙwannun kwantena, sanin ƙa'idodin jigilar kayayyaki na duniya, da kuma shiryayye shirin don guje wa jinkiri. Mai ba da labari ne ya fahimci wannan kawai ba kawai jigilar akwati; Yana sarrafa muhimmin bangare na duniya semiconductor samarwa sarkar.

Menene banbanci tsakanin gas da gas na musamman?

Fahimtar bambanci tsakanin gas mai girma da gas na musamman shine mabuɗin ga kowa da ya shiga cikin firgita don masana'antar semiconduct. Yayin da duka biyun suna buƙatar matsananci m, sikelin su, suna ma'amala, da aikace-aikace sun bambanta sosai.

Manyan gas, kamar Jama mai girma mai kyau na gas, koma zuwa gas kamar nitrogen, oxygen, Argon, da hydrogen. Su ne tushe na muhalli na Fabi. Kalmar "fitila" tana nufin yawan adadin da aka yi amfani da shi. Wadannan gas na yawanci ana samar dasu akan-site ko kusa kuma an kawo su ta hanyar da bututun mai kai tsaye zuwa tsarin rarraba sararin ciki kai tsaye. Babban kalubalen anan suna ci gaba m A kan hanyoyin sadarwar rarrabawa da kuma tabbatar da ba da daɗewa ba, samar da wadata.

Gas na musamman (ko gas na lantarki) yana nufin babban rukuni na yawanci m, mai baya, ko kuma gas mai haɗari da aka yi amfani da shi a cikin ƙananan matakan matakai kamar etching da ajiya. Misalai sun hada da Silane, Ammonia, Boron Trifloride, da nitrogen Brifloride. An kawo waɗannan a cikin silin da ke da matsin lamba. Kalubalen da gas na musamman su ne matsanancin lafiya a cikin m, tabbatar da cikakken cakuda daidaitattun daidaito na gaurawar gas, da kuma hana wasu halayen sunadarai a cikin silinda zasu iya sasantawa ingancin gas.

Ta yaya ake bukatar gas na tsananin ƙarfi na Semiconductor?

Da masana'antar semiconduct ba zai taba tsaye ba. Dokar Moore, lura da yawan masu binciken a kan guntu sun ninka kowane shekaru biyu, ya ci gaba da tura iyakokin kimiyyar lissafi. Kamar yadda masu transists sun yi girgiza kai, sun zama mafi hankali sosai ga samu. A Girman barbashi Wannan ya yarda da shekaru biyar da suka gabata ne "mai kisa aibi"Yau.

Wannan rumbun da ke da karami don karami da kuma kwakwalwan kwamfuta masu ƙarfi suna nufin buƙatun har ma da matakan Gas da gas yana girma. Muna tafiya daga duniyar da-biliyan-biliyan-biliyan ne na zinare zuwa ɗaya inda sassan-talanti ne na shigarwar shigarwa don ci gaba semiconductor nodes. Bugu da ƙari kuma, sabbin kayan da all sillates, kamar Nand Nand da ƙofar Comistors, suna buƙatar sabon fayil ɗin gas mai zuwa Gaurayawar da abubuwan da suka shafi. Kamar yadda Masana'antar Gas, Muna cikin rayuwa mai mahimmanci na ci gaba, muna haifar da sabbin hanyoyin samar da hanyoyin tsarkakewa da hanyoyin bincike don kiyayewa tare da Masana'antu na duniya.

A matsayin mai siye, menene ingancin takaddun shaida zan nema?

Kewaya duniyar masu samarwa na iya zama mai wahala, musamman idan ma'amala da samfuran fasaha. Takaddun shaida suna ba da mahimmanci, ƙimar ƙungiya ta uku na ikon mai kaya da sadaukarwa don inganci. Lokacin da ƙanana Gases mai tsabta Ga masana'antar semiconduct, Anan ga wasu 'yan abubuwa don neman:

• ISO 9001: Wannan babban ne na asali don ingantaccen tsarin sarrafawa. Ya nuna cewa mai siye da ingantattun hanyoyin aiwatarwa da hanyoyin samar da kayayyaki, dubawa, da isarwa.
• Iso / IEEC 17025: Wannan mahimmanci ne. Ka'idojin cancanta da dakunan gwaje-gwaje. Mai ba da tallafi tare da wannan takardar shaidar ta tabbatar da cewa dakin gidansu - wanda ya haifar da takardar shaidar tantance bayanai - daidai yake kuma abin dogara.
• Mai sarrafawa: Koyaushe nemi takardar shaidar (coa) ga kowane silinda guda ɗaya ko tsari. Wannan Takaddun shaida ya kamata ya ba da cikakkun bayanai daidai matakin mahimmanci impurities a cikin gas, an auna ta da takamaiman hanyoyin nazari kamar Gas Chromatography ko taro na farko.

A matsayinsa na yanke hukunci mai yanke hukunci kamar Mark, mafi kyawun kayan aikinku shine a nemi tambayoyi. Ba kawai tambaya "wannan iskar gas tsarkakakke? "Tambayi" Yaya kuke tabbatar da tsarkakakkiyar? Nuna min takaddun lab ɗinku. Bayyana aiwatarwa don tabbatar da tabbatar da abubuwa da yawa. "Mai ƙwarewa da gaske da ingantacciyar abokin zama za ku yi maraba da waɗannan tambayoyin kuma ku kasance da tabbaci, amsoshi masu tabbaci.

Maɓalli

• Gas kayan aiki ne: A Magana na Semiconducting, gas ba kayan kawai bane; Su kayan aikin da aka yi amfani da su don ginawa da kuma sassaƙa vishercopic da'irori akan a Silicon Wafer.
• Tsarkake komai: Sikelin na guntu masana'antu yana da karamin abu wanda ba a so ba barbashi ko hakafi kwayar cutar zata iya lalata guntu, yin Ultra-hawan tsarkakakke Bukatar da ba sasantawa ba.
• Yawan amfanin ƙasa shine burin: Babban tasirin Rashin Gas yana raguwa a masana'antu yawa, wanda ya fassara kai tsaye ga miliyoyin daloli a cikin kudaden shiga SeMicondutor Fabs.
• Manyan matakai biyu: Mafi yawan matakai wajen yin guntu hade ko dai ajiya (yadudduka) ko mahaifa (Tsarin sassa), duka biyun sun dogara da ainihin halayen sunadarai na gas mai tsabta.
• Dogara shine mabuɗin: Mai amintaccen mai kaya a cikin Gas na SeMiconductor Dole ne kasuwa ta nuna daidaiton samarwa, tabbacin ingancin ingancin ta hanyar tabbatar da Lages, da kuma tsarin kula da kwararru.
• Makomar ta tsarkaka: A matsayinka na Semiconductors zama mafi ci gaba, bukatar ko da manyan matakan Gas da gas (ƙasa zuwa sassa-da-trillion) zai ci gaba da girma.