Ammonia (nh₃), a matsayin muhimmin sake karawa mai mahimmanci, yana da aikace-aikacen yaduwa a kan filayen masana'antu daban-daban, tare da rawar da ta taka muhimmiyar muhalli musamman. Ammonia plays a vital role in several stages of semiconductor production, including the deposition of nitrides, ion implantation and doping, cleaning, and etching processes. Wannan takaita zai iya yin wannan labarin na aikace-aikacen Ammonia a cikin masana'antar masana'antu, yayin da ke tattaunawa kan kalubalen da ke fuskanta da kuma abubuwan ci gaba na gaba.

1. Kayayyakin asali da halayen sunadarai na ammoniya

Ammonia babban fili ne na nitrogen, wanda aka sani da karfi alkarabar kuma ana yawanci samu a samakar takin taki nitrogen. Ammoniya ta wanzu a matsayin gas a zazzabi a daki amma ana iya jefa shi a yanayin zafi mai rauni, yana sanya shi tushen da ya yi. A cikin masana'antar semictionectory, kadarorin sunadarai na ammonia sanya shi wani muhimmin aikin matakai masu yawa, musamman a ajiya vaporation (CVD), ion sanya / da tsaftacewa / etching aiki.

Ammonani kwayoyin za su iya amsawa tare da karafa daban-daban, silicon, da sauran kayan don samar da nitries ko don dope su. Wadannan halayen ba wai kawai taimakawa wajen samar da kayan fim da ake so ba amma kuma inganta abubuwan lantarki, da zafi, da kuma kayan aikin injiniyoyi na kayan.

2. Aikace-aikace na Ammonia a Semiconductor

Ammoniya ta taka muhimmiyar rawa a cikin masana'antar semicondur

2.1 bashi da fina-finai na bakin ciki

A cikin magunguna na semicondurek, nitride fina-finai, irin su silicon nitride (si₃n₄), aladen), da titanium nitride (aln), ana yaduwa da titanium nitride, ko kayan shole. A cikin ajiya na waɗannan fina-finai na nitride, ammonia suna hidima a matsayin asalinsu na nitrogen.

Cikakken vapor (CVD) yana ɗaya daga cikin hanyoyin da aka fi dacewa don ajiye fim ɗin nitride fim. Ammoniya A da gas kamar Silane (sih ₄) A babban yanayin zafi don bazu da kuma samar da finafinan silicon nitride finafinan. Amsawar kamar haka:

3SIH4 4NH3 → Si3n4 + 12H2

Wannan tsari yana haifar da ƙirƙirar silican silican silikon nitride layer a kan silikon wafer surface. Ammonia yana samar da tushen tsayayyen nitrogen kuma yana ba da damar yin amfani da wasu hanyoyin gas tare da wasu takamaiman yanayi, don haka ke aiwatar da ingancin fim.

Ni fina-finai na nitride yana da kyakkyawan kwanciyar hankali, rufi na lantarki, da juriya na ciki, yana yin su masu mahimmanci a cikin masana'antun Semiconductor. An yi amfani da su sosai a cikin da'irar da aka haɗa su (iCS) kamar yadda yadudduka na lantarki, wayoyin waka na lantarki, da kuma windows na hanawa a cikin na'urorin tsadar na'urori.

2.2 ion andnantation da doping

Ammoniya Har ila yau, yana taka muhimmiyar rawa a cikin kayan doping na kayan semiconductor. Doping dabara ce mai mahimmanci da aka yi amfani da ita don sarrafa lantarki na kayan a cikin abubuwan da ke cikin na'urorin semiconducation. Ammoniya, a matsayin ingantaccen tushen nitrogen, ana amfani da shi sau da yawa a cikin haɗin gwiwa tare da sauran gases (kamar phosphine phh₆ da Dibora B₂₆) don sanya nitrogen a cikin kayan silside (Gaas) ta hanyar ion

Misali, doping doping na iya daidaita kaddarorin lantarki na silicon don ƙirƙirar n-nau'in semicondorors ko p-nau'in semiconducontorors. A lokacin ingantaccen tsarin tafiyar hawainiya, ammonia ta samar da asalin tushen nitrogen, tabbatar da iko daidai gwargwado. Wannan yana da mahimmanci ga miniamin kai da samar da na'urori masu aiki a cikin manyan abubuwan haɗin kai na babban tsari (VLLI).

2.3 Tsabtace da etching

Tsaftacewa da aiwatarwa shine mabuɗin don tabbatar da ingancin na'urori a cikin kayan masana'antar a Semicontoret. Ana amfani da ammoniya sosai a cikin waɗannan hanyoyin, musamman a Platsma etching da tsabtatawa sunadarai.

A plasma etching, ammonia za a iya tare da sauran gass (kamar chlorine, cl₂) don taimakawa cire gurɓataccen kwayoyin halitta, ƙazanta yadudduka, da ƙarfe na ƙarfe daga farfajiyar wafer. Misali, Ammoniya ta yi magana da iskar oxygen don samar da nau'in oxygen mai yawa (kamar o ₂), wanda yadda ya kamata cire kwanciyar hankali da tabbatar da kwanciyar hankali da tabbatar da kwanciyar hankali a cikin ayyukan da ya dace.

Ari ga haka, ammoniya na iya aiki a matsayin sauran ƙarfi a cikin hanyoyin tsabtace tsaftacewa, don haka kuskuren aiwatar da shawo kan wafer.

3. Fa'idodi na ammoniya a cikin masana'antar semiconducer

Ammonia tana ba da fa'idodi da yawa a yankuna na semiconduter, musamman a bangarorin masu zuwa:

3.1 ingantaccen tushen nitrogen

Ammoniya ingantaccen tushe da kuma asalin nitrogen wanda ke samar da madaidaiciyar wadataccen nitrogen zarra don ajiya na nitride. Wannan yana da mahimmanci ga ƙirar micro- da sikelin na Nano a cikin sikelin magunguna. A yawancin lokuta, ammoniya ta fi mai ba da ƙarfi da kuma sauran gas na tsutsotsi na nitrogen (kamar gas na nitrogen ko nitrogen oxides;

3.2 Kyakkyawan sarrafawa

Ammoniya na ammoniya yana ba shi damar yin daidai da kudaden da aka yi da kauri a cikin tsarin rikitarwa daban-daban. Ta hanyar daidaita yawan kwararar ammoniya, zazzabi, da lokacin da aka dauki finafinai na fina-finai, don haka inganta ayyukan na'urorin.

3.3 farashin mai mahimmanci da kuma muhalli

Idan aka kwatanta da sauran gas na gas, ammoniya ba shi da ƙarancin kuɗi kuma yana da haɓaka nitrogen amfani, yana sa shi sosai m a manyan-sikelin samarwa. Bugu da ƙari, sake dawo da kayan kwalliya da kuma sake amfani da fasahar su zama ci gaba, suna ba da gudummawa ga amincin muhalli.

4. Aminci da ƙalubalen muhalli

Duk da muhimmiyar rawa a cikin masana'antar masana'antu, ammoniya ta gabatar da haɗarin haɗari. A zazzabi a ɗakin, ammonia gurbi ne, kuma a cikin hanyar ruwa, yana da lahani sosai, yana buƙatar matakan aminci yayin amfani.

1. Ajiya da sufuri: Dole ne a adana Ammonia a yanayin zafi mai zafi da matsin lamba, ta amfani da kwantena da bututun da zasu hana leaks.
2. Tsaro: Ma'aikata a cikin layin samar da kayan aikin semicondik suna buƙatar sa kayan aikin kariya, kamar sugggles, safofin hannu, da maski mai kyau, don hana bayyanar da ɗan adam.
3. Maganin gas gas: Amfani da Ammonia na iya samar da gas mai cutarwa, don haka ingantaccen tsarin kulawa da sharar gida dole ne ya kasance a wurin don tabbatar da cewa watsi ta bayyana ka'idojin muhalli.

Kamar yadda ayyukan magunguna na semicondort suka ci gaba da ci gaba da buƙatar mafi girma na na'urar ta ƙaruwa, rawar Ammoniya a masana'antar za ta ci gaba da girma. Wannan gaskiya ne musamman a babban-sikelin Nano-sikelin da'irar da'irori, Quantum computing kwakwalwan kwamfuta, da samar da kayan talla mai tara. Bugu da ƙari, a matsayin ƙa'idojin muhalli sun zama mai siye, haɓaka haɓaka haɓaka da fasahar sake sarrafawa don ammoniya za ta zama mahimmancin mahimmancin masana'antu.

Aikace-aikacen Ammoniya a cikin masana'antar semiconductor suna samar da ingantaccen tushe don ci gaban lantarki. Matsayinsa wajen inganta ingancin samarwa, rage farashin masana'antu, da kuma tuki kirkirar fasaha, ba makawa. A matsayin cigaba na fasaha, aikace-aikacen Ammoniya za su ci gaba da fadada, taimaka masana'antar semiconductor ta buga zuwa mafi inganci da dorewa da dorewa da dorewa.

Ammoniya, a matsayin mai mahimmanci mai mahimmanci, yana taka rawar gani a cikin masana'antar Semiconductor. Yana da mahimmanci ga ajiya na nitride fina-finai, doping, da tsaftacewa / etching matakai. Tare da ci gaba da ci gaba da ci gaban fasaha na Semiconductor, ana shirya aikace-aikacen Ammononia da ke sanannen gudummawa ga ci gaban fasaha da kuma taimakawa masana'antar Semiconductor ta canzawa da kuma ingantacciyar hanyar muhalli.