Mun kasance mai gudanar da masana'antar a China wanda ya ƙware wajen samar da gas na masana'antu. Daga qailata, Na shaida juyin halitta na fasaha, duk abin da ya mamaye da yawancin mutane ba sa gani: gas mai tsafta mai tsabta. A kananan microchips a wayarka, kwamfuta, da mota abubuwa ne da ban mamaki na ingarma na zamani, amma halittarsu ba shi yiwuwa ba tare da samar da wadatattun abubuwan gas ba.

Ka fahimci mahimmancin inganci da ingantaccen sarkar samar da kaya, amma kuna iya mamaki me ya sa Ka'idojin Gases na SemicondCort suna da sararin samaniya. Me yasa jigilar Argon ke buƙatar zama 99,99999%? Wannan jagorar zata ja da baya kan labulen a duniyar yaduwar semicondantoric. Za mu bincika takamaiman gas da aka yi amfani da shi, abin da suke yi, kuma me yasa tsarkakakkiyar su ita ce guda mafi mahimmancin mahimmanci. A karshen, kuna da cikakkiyar fahimta game da samfuran da kuka samo asali kuma ku zama amintaccen kayan don sadarwa darajar su ga abokan cinikin ku.

Me yasa abubuwan gas na musamman suke da matukar muhimmanci ga magungunan semiconduttor?

Ka yi tunanin gina saman skyscraper inda guda bai dace da hatsi na yashi zai iya haifar da tsarin gaba ɗaya ba. Wannan shine matakin da ake buƙata a cikin Magana na Semiconducting masana'antu. "Tubalan Ginin" na wannan masana'antar ba tgicks da turmi ba, amma kwayoyin halitta, da "kayan aikin" galibi suna yawan gases. Duka ƙira na hade da'awa yana faruwa ne a kan sikelin microscopic, inda yadudduka kayan abu, galibi kawai 'yan ciyayi lokacin farin ciki, ana ajiye su a kan ko kuma ethched nesa daga Silicon Wafer.

Waɗannan Tsarin aiki na Semiciction suna da hankali mai hankali. Kowane barbashi mara amfani ko sunadarai hakafi na iya rushe ginin m na microchip, yana mayar da shi mara amfani. Wannan shine Ana amfani da gas. Suna ƙirƙirar mahalli mai tsabta, samar da albarkatun albarkatun don sabon yadudduka, kuma suna ɗaukar "ƙirjin sinadarai" waɗanda ke ɗaukar hanyoyin da ke cikin intrica don wutar lantarki. Da Tsarin masana'antar semiconductor wani hadadden rawa ne na Kayan aikin sunadarai, kuma gas sune masu rawa. Ba tare da akai, abin dogara ba, kuma musamman tsarkakakken wadataccen wadatar waɗannan gas, na zamani Lantarki ba zai wanzu ba.

Da gas da aka yi amfani da shi a cikin masana'antar semiconductor ba samfuran masana'antu ba. Ana amfani da injiniyoyi don biyan matakan tsarkakakke waɗanda ke da wuyar fahimta, sau da yawa an auna su a cikin sassan kowane biliyan ko ma sassan kowane tiriliyan. Wannan saboda aikin ne na Na'urorin semiconductor ana ɗaure shi kai tsaye ga kammalawar tsarin atomic. Murabilin mai ƙima na oxygen ko ruwa a cikin abin da ya kamata ya kasance ineret iskar gas na iya haifar da iskar shaka, canza kaddarorin lantarki na da'irar da kai ga lahani. Wannan shine dalilin da ya sa Kasuwanci na Gases yana da muhimmanci sosai ga duniyar fasaha.

Menene manyan nau'ikan gas da aka yi amfani da shi a cikin masana'antar semiconductor?

Idan muka yi magana akai Gases a cikin masana'antar semicondur, gaba ɗaya sun fada cikin wasu 'yan keyan ƙananan abubuwan dangane da aikinsu. Fahimtar wadannan kungiyoyi suna taimakawa wajen bayyana rawar da kowannensu iskar gas wasa a cikin hadaddun Tsarin samarwa. Ba kawai ɗaya ko biyu gas bane; na zamani semiconductor Fabi na bukatar sama da 30 daban-daban gas da gaurayuwa don aiki.

Na farko sune Manyan gas. Waɗannan su ne wakilai, ana amfani dasu a cikin babban adadin. Yi tunanin su a matsayin yanayin tushe na fab. Mafi na kowa shine:

• Nitrogen (n₂): An yi amfani da su don tsarkakakkun ɗakuna da kayan aiki don cire mashahuri kuma ƙirƙirar yanayin weert.
• Oxygen (o ₂): Amfani da shi don girma silicon dioxide dioxide (sier₂), wanda aiki a matsayin masu ba da izini.
• Hydrogen (H₂): Amfani da tsabtatawa saman da kuma takamaiman ajiya tafiyar matakai.
• Argon (Ar): Wani Gas na Inert An yi amfani da shi don ƙirƙirar yanayin tsayayyen tsari don tafiyar matakai kamar zub da ruwa.

Na gaba sune Gases na Gaske, kuma ana kiranta Gases na sana'a. Waɗannan sune takamaiman takamaiman, sau da yawa mai kasa da ko haɗari, gas wanda ke yin mahimman ayyuka na etching da ajiya. Ana amfani dasu a cikin ƙananan adadi amma suna da tsada sosai kuma suna buƙatar kulawa sosai. Wadannan za a iya kara raba cikin kungiyoyi kamar:

• Ajiye gas: Waɗannan gas, kamar Silane (sih ₄), sune tushen kayan da ake amfani da su don gina yadudduka na guntu. Sun lalata da adana a fim na bakin ciki na kayan a kan Silicon Wafer.
• Etchant Gases: Wadannan su ne Maimaitawa gas amfani da shi don cire kayan. Misalan sun hada da mahadi masu zane kamar carbon tetrafluhluntade (Cf₄) da Kayrogen chloride (HCL). Ana amfani dasu a cikin Tsarin etching don ɗaukar tsarin da'ira.
• Dopant gas: Ana amfani da waɗannan gas zuwa "Dope" da silicon, wanda ke nufin da gangan gabatar da takamaiman hakafi (a dankara) canza ta kaddarorin lantarki. Wannan shi ne tushen asali don ƙirƙirar transistors. Na kowa Gases Dopant sun hada da Arsine (Ash₃) da phosphine (PH₃).

Ta yaya iskar shitogen zai kasance a matsayin mai aiki a cikin fa'idodin semicondantor?

Idan kun yi tafiya ta Tsarin halittar Semicmikation Cibiyar, mafi yawan abin da ya fi dacewa iskar gas za ku gamu da shi Nitrogen. Yayinda ba koyaushe yake shiga cikin babban ba Kayan aikin sunadarai Wannan yana gina guntu, rawar da ta sa tana da matukar muhimmanci ga ƙirƙirar yanayi don wadancan halayen don cin nasara. Ana amfani da nitrogen da farko don haɗawa; Ba ya yiwuwa a amsa wasu abubuwan, ya sa cikakke "filler" iskar gas.

Babban amfani na Nitrogen yana cikin kange da ƙirƙirar yanayin inerterphere. Kafin kowane mai hankali tsarin semiconducor Za a fara, ɗakin ya zama cikakke daga ƙazantu kamar oxygen, tururi, tururi, da ƙura. Babban-tsarkaka Nitrogen an girgiza shi ta hanyar daki don tura wadannan abubuwan da ba a so. Wannan yana hana hadari da hadari ko wasu halayen da zasu lalata wafer. Ana amfani da wannan ka'idodin ga kayan aikin kuma jigilar pods (wanda aka sani da foups) wanda ke ɗauka Silicon Wafers tsakanin matakai daban-daban na masana'antu.

Bugu da ƙari, Nitrogen yana taka muhimmiyar rawa a ciki Wasshayi, tsarin buga zane da'ira a kan wafer. A cikin zurfin zumbin zamani (duv) magada, sarari tsakanin ruwan tabarau da wafer cike da mai tsarkakakke Nitrogen (ko Argon) Don ba da damar ɗan gajeren haske don wucewa ta hanyar iska. Ba tare da wannan yanayin makamancin wannan ba, tsari ba zai yiwu ba. A cikin kwarewar samar da wadata zuwa Fabs, buƙatar ci gaba, girma mai girma, da kuma tsarkaka Nitrogen wadata ba sasantawa bane.

Wace rawa Argon tayi wasa a kirkirar cikakkiyar muhalli?

Kamar nitrogen, Argon mai daraja ne iskar gas, ma'ana yana da emolical m. Koyaya, Ana amfani da Argon Don takamaiman aikace-aikace inda nauyi na atomic yake bayarwa. Ofaya daga cikin mahimman waɗannan aikace-aikacen ne sputer ajiya, ko shafa. Wannan tururi ce ta jiki Tsarin ajiya Amfani da shi don sanya ƙasa m fina-finai, wanda ke samar da wiring na hade da'awa.

A cikin zubda ruwa, ana amfani da babban wutar lantarki a cikin ɗakin matan cike da Gas na Argon. Wannan yana haifar da plasma na abin da aka caji Argon ions. Wadannan ions suna hanzarta kuma sun fasa cikin "manufa" da aka yi da karfe muna son saka (kamar tagulla). Fadakarwar rikice-rikice na buga kwayoyin cuta na ƙarfe daga makasudin, wanda sannan tashi a kan ɗakin da sutura Silicon Wafer A cikin bakin ciki, uniform Layer. Argon Kammalallen wannan ne saboda yana da nauyi sosai don rarraba kwayoyin zarra da niyya amma masu cutar kimiya ya isa ya kirkiro. Yana ba da cikakken muhalli ga mai saukar da kayan masarufi.

Wani mahimmin amfani don Argon yana cikin platma etching. A cikin wannan Tsarin etching, Argon yawanci gauraye da mai kasa da mahaifa iskar gas. Da Argon Taimaka wajen magance plasma da jiki a zahiri, taimaka wajan sinadarai da kuma samar da ƙarin madaidaici, a tsaye a cikin kayan. Amintaccen wadataccen abinci Argon gas gas yana da mahimmanci ga kowane yanki yana yin ƙarfe ko ci gaba.

Kuna iya bayanin yadda ake amfani da hydrogen don ajiya da tsabtatawa?

Yayin da nitrogen da Argon suna da daraja don ba da aiki ba, Hydrogen an kimanta shi don kasancewa sosai mai kasa da, amma a cikin tsabta mai tsabta da tsari. Ana amfani da hydrogen a cikin Magana na Semiconducting Don tsabtace samaniyoyi da kuma takamaiman nau'in ajiya da ake kira inganta ci gaban. Girman karamin atomic yana ba shi damar shiga kuma ya amsa a cikin hanyoyin sauran gas ba zai iya ba.

Kafin sabon Layer za a iya girma akan wafer, farfajiya dole ne ya kasance mai tsabta sosai, ƙasa zuwa matakin atomic. Gas hydrogen gas Ana amfani da shi a cikin babban tsari da ake kira "hydrogen gasa" don cire duk wani nau'in iris na asali (bakin ciki, a zahiri, a zahiri wanda ke faruwa Limary na silicon dioxide) wanda ya kafa akan silicon farfajiya. Da hydrogen Yana da oxygen tare da oxygen, samar da tururi mai tururi (H₂o) wanda a sumbace shi daga cikin ɗakin, ya bar wani mai farfado silicon a shirye yake don mataki na gaba.

Hydrogen shima babban abin da ke cikin epitaxial Girma (ko "EMI"), tsari wanda ya girma a cikin Layer Layer silicon a saman Silicon Wafer. Wannan sabon Layer yana da cikakken tsarin kriscin kuma an sarrafa shi daidai dankara matakan. Hydrogen yana aiki a matsayin mai ɗaukar kaya iskar gas Ga silicon mafari iskar gas (kamar silane ko trichlorosila). Hakanan yana tabbatar da ingantaccen yanayi na haɓaka ta hanyar yin lalata kowane irin zarra na oxygen. Ingancin wannan epitaxail shine babban abu ga aikin masu sarrafawa, sa tsarkaka ta Silinda na Hydrogen wadata sosai.

Wadanne abubuwa ne na Etchant kuma ta yaya suke gudanar da da'awar microscopic?

Idan ajiya yana game da gina yadudduka, etching shine game da selectely yana ɗaukar su kora don ƙirƙirar tsarin kewaye. Ka yi tunanin shi azaman microscopic sculping. Bayan an ayyana wani tsari ta amfani da Wasshayi, Etchant Ana amfani da gas don samar da Abubuwan sunadarai suna nufin cire abu daga wuraren da ba su da inshorar wafer. Wannan shine ɗayan mahaɗan matakai masu mahimmanci a ciki guntu masana'antu.

Da gas da aka yi amfani da shi a cikin etching Tsarin aiki ne yawanci, chlorine, ko bromine mahadi. Zabi na iskar gas ya dogara da abin da ake amfani da shi.

• Gases-tushen gas (E.G., Cf₄, SF₆, NF₃) suna da kyau kwarai ga etching silicon da silicon dioxide.
• Gas na tushen ginin (E.G., Cl₂, BCL₃, ana yawan amfani da hcl) don karafa na etching kamar alumini.

Waɗannan Maimaitawa gas an gabatar dasu a cikin dakin plasma. Plasma ta karya iskar gas Molecuki baya cikin sosai mai kasa da ions da tsattsauran ra'ayi. Wadannan tsattsauran ra'ayi sannan amsa tare da saman wafer, samar da sabon fili mai fasali wanda za'a iya sauƙaƙe a cikin sauƙi, don haka "etching" kayan. Daidai da ake buƙata babban; Makasudin shine mahaifa madaidaiciya ƙasa (wanda ba tare da izini ba) ba tare da lalata tsarin da aka tsara ba. Na zamani SeMicondutor Fabs amfani da hadaddun gyada gas kuma a hankali sarrafa plasma da gangan don cimma wannan.

Mecece ajiye tururuwa ta sinadarai (CVD) kuma waɗanne gases ke da hannu?

Kayan aikin rigakafi (CVD) shine Cornestone Tsarin ajiya a Magana na Semiconducting. Wannan ita ce farkon hanyar da aka yi amfani da ita don ƙirƙirar abubuwan banƙyama da finafinan bakin ciki waɗanda ke yin Na'urar SeMiconductor. Ainihin ra'ayin shine ya kwarara a iskar gas (ko cakuda gas) a kan mai zafi wafer. Zafi yana haifar da iskar gas Don amsawa ko bazu a kan wafer na wafer, barin bayan wani m fim na da ake so kayan da ake so.

Kowane ɗayan waɗannan halayen yana buƙatar yanayi mai ban mamaki mai ban mamaki kuma musamman Gases mai tsabta. Misali, lokacin da aka ajiye polysilicon Layer ta amfani da Silane, kowane oxygen hakafi a cikin iskar gas Runduna za ta haifar da dioxide dioxide don samar da maimakon, lalata kaddarorin da ke cikin Layer. Wannan shine dalilin da ya sa mu, a matsayin mai siyarwa, mai da hankali sosai akan tsarkakewa da nazarin waɗannan Actiadi gases. Dukan dakin karatu na Jama mai girma mai kyau na gas Muna samarwa shine gorared don haɗuwa da waɗannan buƙatun masu tsauri.

Me yasa tsarkakakken tsarkakakkiyar-yafi dacewa da mafi mahimmancin gas na gases?

Ba zan iya wuce wannan ba: A cikin masana'antar semiconduct, m shi ne komai. Ajalin babban-tsarkaka baya nufin 99% ko ma 99.9%. Don \ domin Gases na semiconductor, muna magana ne Ultra-hawan tsarkakakke (UHP), wanda yawanci kamu 99.999% (galibi ana kiranta "guda biyar") ko sama. Ga wasu mahimmancin Ganawar aiwatarwa, buƙatun na iya zama 99.9999% ("nines shida" ko ma sama. Dalilin abu ne mai sauki: Cigelinants kashe.

Abubuwan fasali a kan microchip na zamani ana auna su a nan-nanometers (biliyan kimanin mita). A wannan sikelin, fashewar ƙasashe guda ɗaya ko kwayoyin da ba'a so kamar dutsen a tsakiyar wani babban abu. Wani hakafi Can:

• Alter da aka canza kaddarorin lantarki: A m sodium ion zai iya canza bakin kofa veristage na transistor, yana haifar da canzawa ko kashewa a lokacin da ba daidai ba.
• Haifar da lahani na halitta: Kwayoyin oxygen na iya rushe cikakken lattice cikakke a lokacin haɓakar haɓakawa, ƙirƙirar "disclocation" wanda ke ba da gudummawar lantarki.
• Haifar da gajeren da'irori: Karfin ƙarfe na ƙarfe zai iya gada a kan layi biyu, ƙirƙirar gajeriyar gajere.
• Rage yawan amfanin ƙasa: A mafi yawan crasslinants ne, mafi girman yawan kwakwalwan kwamfuta akan kowane wafer, wanda ke tasiri riba kai tsaye.

Wannan shine dalilin da ya sa, a matsayin mai ƙira, babban hannun jarin mu yana cikin tsarkakewa da kayan aikin nazari. Kowane tsari na gas dole Za a gwada don tabbatar da cewa ya cika sassan-da biliyan (ppb) ko sassan-ppt-plaillion (Ppt) da abokan cinikinmu ke buƙata. Da Buƙatar gas mai ƙarfi shi ne abin da ke fitar da duka Kasuwancin Gas na Gas don lantarki.

Ta yaya za mu tabbatar da ingancin wadataccen gas mai ƙarfi?

Don jami'in siyan kamar alama, wannan shine mafi mahimmancin tambaya. Babban farashi mara ma'ana idan iskar gas ingancin abu ne mara nauyi ko jigilar kaya ya makara. Na ji labarun tsere: Masu ba da Takaddar Shaida na Bincike, ko jigilar kayayyaki na Gases na Gaske Ana riƙe shi a cikin kwastan na makonni, yana haifar da layin samarwa don dakatar da. Magana wadannan maki raɗaɗi shine a matsayin tushen falsafar mu.

Tabbatar da ingancin farawa tare da tsarkakewa tsari. Muna amfani da tsarin ci gaba kamar distillation mai distenic da keɓaɓɓen kayan adsorbent don cire imceware rashin jituwa. Amma tsari bai ƙare a can ba. Mafi mahimmancin matakin gaskiya ne. Muna amfani da kida na jihar-na zane-zane kamar na Chromatographer-strackers (GC-Ms) don gwada kowane silinda guda ɗaya kafin a tura shi. Muna ba abokan cinikinmu da cikakken bayani da ingantaccen takardar shaidar (CoA) ga kowane tsari, yana bada garantin Gas da gas.

A abin dogaro Sarkar shine sauran rabin karatun. Wannan ya shafi:

• Robusder Sheeperer Shiri: Silinda don Ultra-tsaunin tsaunin tsarkin sama Ana yin amfani da tsaftacewa na musamman da kuma pastivation tsari don tabbatar da kwandon da kansa ba ya gurbata iskar gas.
• Lissafin hankali: Muna aiki tare da gogaggen abokan aiki waɗanda waɗanda suke fahimtar ka'idodin don jigilar manyan matsi kuma wani lokacin kayan haɗari a duniya. Muna samar da duk bayanan da suka zama dole don tabbatar da ingantaccen kwastam.
• Share sadarwa: Kungiyoyinmu da tallafi na tallafawa ana horar da su don samar da sabuntawa na yau da kullun. Kullum kuna san matsayin odar ku, daga samarwa zuwa isar ƙarshe. Mun fahimci cewa abin da ake iya faɗi samar da gas mai ƙarfi yana da mahimmanci ga abokan cinikinmu don sarrafa jadawalin samarwa. Har ma muna ba da daban-daban cakuda gas zaɓuɓɓuka don biyan takamaiman bukatun tsari.

Menene makomar gaba don gas a cikin masana'antar semiconductor?

Da masana'antar semiconduct ba zai taba tsaye ba. Kamar yadda dokar Moore ta annabta, chipmmakes koyaushe suna turawa karamar karami, da sauri, kuma mafi yawan na'urori masu ƙarfi. Wannan bidi'a mara kyau yana tasiri kai tsaye gas da gaurayawan amfani a cikin yalwarsu. Yayinda muke motsawa zuwa tsara na gaba na semiconductor Fasaha, tare da sigar fasali sun yi watsi da siztersan nanometers 'yan nanomecters kawai, da buƙatun don tsarkaka zai zama mafi tsananin matsananci.

Muna ganin sabon abu bayan silicon, kamar gallium nitride (ganawa) da silicon carbide (Sic), wanda ke buƙatar sabo da daban-daban Ganawar aiwatarwa don etching da ajiya. Akwai kuma motsawa zuwa mafi hadaddun gine-gine na 3D, kamar Finfet da ƙofofin (Gaa) masu fassara ne, waɗanda ke buƙatar mafi girman daidaito a cikin ajiya da mahaifa matakai. Wannan yana nufin gas na musamman Masana'antu dole ne su kirkiro don haɓaka sabbin kwayoyin kuma cimma manyan matakan tsarkakewa.

Daga hangen kaina a matsayin mai ba da kaya, makomar shine game da kawance. Ba ya isa kawai don kawai sayar da silinda iskar gas. Dole ne muyi aiki tare da abokan cinikinmu a cikin Masana'antu na lantarki SANARWA don fahimtar hanyoyin fasahar su ta gaba. Wannan yana ba mu damar tsammanin buƙatar sababbi Gases mai tsabta Kuma saka hannun jari a cikin samarwa da nazarin da za su iya ba su. Jarumai masu ganuwa na semiconductor GASKIYA - Gases - za a ci gaba da kasancewa a farkon ci gaban fasaha.

Maɓalli

Kamar yadda kuka samo gas na masana'antu don kasuwar semicondantor din, ga mafi mahimmancin abubuwan da za a iya tunawa:

• Tsarkakakanci abu ne mai mahimmanci: Guda mafi mahimmancin mahimmanci shine Ultra-hawan tsarkakakke. CIGABA, har ma da matakan-kashi-biliyan-biliyan, na iya haifar da lalatattun na'urar da kuma rage yawan amfanin ƙasa.
• Gas suna da takamaiman ayyuka: Gas ba ne ba za'a iya canzawa. Suna da kayan aikin musamman da ake amfani da su don aiwatar da abubuwa daban-daban kamar ƙirƙirar wuraren INETHEPERS (NITROGEN, Argon),Actiadi gases kamar Silane), da sassaƙa da'ir (Etchant Gases kamar cf₄).
• Sarkar samar tana da mahimmanci: Mai siyar da kaya ya yi fiye da sayarwa kawai. Suna tabbatar da inganci ta hanyar gwaji mai tsauri, samar da ingantattun takardar shaida, kuma kula da bayyananniyar sadarwa don hana jinkirin samarwa.
• Ilimin fasaha yana ƙara darajar: Fahimta me ya sa wani iskar gas ana amfani da shi kuma me ya sa Tsarkinsa yana da mahimmanci yana ba ku damar zama abokin zama masu tasiri ga abokan cinikin ku, yana musayar inganci da gina dogaro da lokaci.
• Masana'antar tana ci gaba: Chips na karami da kuma kwakwalwan kwamfuta masu ƙarfi suna nufin buƙatun sabon, har ma da zaɓaɓɓu Gases na Gaske zai ci gaba da girma. Hadin gwiwa tare da mai siye mai kallo shine mabuɗin zama a gaba.