Ukukhiqiza i-semicondector kuthembela ezinhlobonhlobo zamagesi, angahlukaniswa ngezigaba zaba yizinhlobo ezintathu eziphambili: Amagesi amaningi, Amagesi akhethekile, namagesi athepha. Lawa magesi kumele abe ngohlazo oluphezulu kakhulu ukuvikela ukungcoliswa, okungalimaza inqubo ethambile futhi eyinkimbinkimbi yokubumba.

Amagesi amaningi

I-Nitrogen (N₂):

Indima: I-N₂ isebenza ngezinhloso eziningi, kufaka phakathi izinjongo zokuhlanza amakamelo futhi inikeze isimo se-inert ngezigaba ezahlukahlukene zokukhiqiza i-semiconductor.
Amanothi angeziwe: I-nitrogen ivame ukuqashwa ezokuthutha kanye nokugcinwa kwama-silicon ama-wafers ukunciphisa i-oxifation. Imvelo yayo ye-inert iqinisekisa ukuthi ayiphenduli nezinye izinto, okwenza ilungele ukugcina izindawo ezihlanzekile zokucubungula.

I-Argon (AR):
Indima: Ngaphezu kokuzibandakanya kwayo ezinqubweni ze-plasma, i-argen isebenza ezinqubweni lapho izingoma ezilawulwa yigesi zibalulekile.
Amanothi angeziwe: Ngoba awenzi izinto eziningi zokwakha, i-argen nayo isetshenziselwa ukugcoba, okusiza ekufakweni kwamafilimu wensimbi noma ama-dielectric lapho izindawo lapho kufanele zigcinwe ngaphandle kokungcoliswa.

Helium (He):
Indima: Izakhiwo ze-Helium's Thermal zenza kube lusizo olukhulu ekupholiseni nasekulondolozeni ukuvumelana kwamazinga okushisa ngesikhathi sezinqubo ezisebenzayo.
Amanothi angeziwe: Imvamisa esetshenziswa ezinhlelweni zamandla ezi-laser eziphezulu ze-Lithography ngenxa yemvelo yayo engaphenduli futhi nekhono lokugcina indlela ebonakalayo engenakungcola.

I-Hydrogen (H₂):
Iqhaza: Ngaphezulu kwesicelo salo ekunikezelweni, i-hydrogen futhi isiza ekuhlanzeni ingaphezulu lama-wafers futhi ingabandakanyeka ekuphendukeni kwamakhemikhali ngesikhathi se-Epitaxy.
Amanothi angeziwe: Ukusetshenziswa kwe-hydrogen ekugcinweni kwamafilimu amancanyana avumela ukulawula okukhulu ngaphezulu kokugxila kwenkampani ngezinto ze-semiconductor, elungisa izakhiwo zazo zikagesi kakhulu.

Amagesi akhethekile nabakwaDopants

USilane (Sih₄):
Indima: Ngaphandle kokuba yi-PreverSory for Siliman Deposition, uSilane angabanjwa nge-polymermering kwifilimu yokudlula ethuthukisa izici ze-elekthronikhi.
Amanothi angeziwe: Ukuvuselelwa kwalo kudinga ukuphatha ngokucophelela ngenxa yokukhathazeka ngokuphepha, ikakhulukazi uma kuxutshwe nomoya noma umoya-mpilo.

I-Ammonia (NH₃):
Indima: Ngaphezu kokukhiqiza amafilimu we-nitride, i-ammonia ibalulekile ekukhiqizeni izingqimba zokuhamba ezithuthukisa ukuthembeka kwamadivayisi we-semiconductor.
Amanothi angeziwe: Ungabandakanyeka ezinqubweni ezidinga ukufakwa kwe-nitrogen ku-silicon, ngcono izakhiwo ze-elekthronikhi.

Phosphine (Ph₃), Arsine (Ash₃), noDiborane (B₂h₆):
Indima: Lawa magesi awabalulekanga nje kuphela ekudonsweni kodwa futhi agrimala ukufeza izakhiwo zikagesi ezifunwayo kumadivayisi we-semiconductor athuthukile.
Amanothi angeziwe: Ubuthi babo budinga amaphrothokholi aqinile wokuphepha kanye nezinhlelo zokuqapha ezindaweni zokubumba ukunciphisa izingozi.

Ukuhlanza kanye nokuhlanza amagesi

Fluorocarbons (CF₄, SF₆):
Indima: Lawa magesi aqashwa ezinqubweni ezomile ze-Etching, enikeza ukucaciswa okuphezulu uma kuqhathaniswa nezindlela ezimanzi ezi-etching.
Amanothi angeziwe: I-CF₄ ne-SF₆ zibalulekile ngenxa yekhono labo le-ETCh izinsiza ezisekelwe kuSilicon kahle, livumela ukulungiswa kwephethini elihle kakhulu kuma-microelectronics abucayi.

I-Chlorine (CL₂) neHydrogen Fluoride (HF):
Indima: I-Chlorine ihlinzeka ngokubhekisisa ama-etching amakhono, ikakhulukazi izinsimbi, ngenkathi i-HF ibalulekile ekususweni kwe-silicon dioxide.
Amanothi angeziwe: Inhlanganisela yalawa magesi ivumela ukususwa kwesendlalelo okusebenzayo ngezigaba ezahlukahlukene zokuqamba, ukuqinisekisa indawo ehlanzekile yezinyathelo ezilandelayo zokucubungula.

I-Nitrogen Trifluoride (NF₃):
Iqhaza: I-NF₃ ibaluleke kakhulu ekuhlanzeni kwemvelo ezinhlelweni ze-CVD, iphendula ngokungcola ukuze ilondoloze ukusebenza kahle.
Amanothi angeziwe: Naphezu kokukhathazeka mayelana nokuba khona kwegesi yabamba ukushisa, ukusebenza kahle kwe-NF₃ kukwenza kube yinto ekhethwayo emafektri amaningi, yize ukusetshenziswa kwayo kudinga ukucatshangelwa ngokucophelela kwemvelo.

Umoya-mpilo (O₂):
Indima: Izinqubo ze-oxidation ezenziwe nge-oksijini zingadala izingqimba ezibalulekile ezifaka ukufakwa e-semiconductor izinhlaka.
Amanothi angeziwe: Indima eyengeziwe ekwandiseni i-oxidation of Silicon ukwakha izingqimba ze-SIO₂ ibalulekile ukuze ihlukaniswe nokuvikelwa kwezakhi zesekethe.

Amagesi avelayo e-semiconductor ekhiqizwayo

Ngaphezu kwamagesi endabuko abhalwe ngenhla, amanye amagesi athola ukunakwa kwinqubo yokukhiqiza i-semiconductor, kufaka phakathi:

I-Carbon Dioxide (Co₂): Isetshenziswa kwezinye izinhlelo zokuhlanza kanye nokufaka izinhlelo, ikakhulukazi lezo ezibandakanya izinto ezithuthukile.

Silicon Dioxide (Sio₂): Yize kungenjalo igesi ngaphansi kwezimo ezijwayelekile, izinhlobo ezinamabala e-silicon dioxide zisetshenziswa ezinhlelweni ezithile zombuso.

Ukucatshangelwa Kwezemvelo

Imboni ye-semiconductor iya ngokuya igxile ekunciphiseni umthelela wezemvelo ohambisana nokusetshenziswa kwamagesi ahlukahlukene, ikakhulukazi lezo ezinamandla zokubulala abamba ukushisa. Lokhu kuholele ekuthuthukisweni kwezinhlelo zokulawulwa kwegesi ezithuthukile kanye nokuhlolwa kwamanye amagesi anganikeza izinzuzo ezifanayo ngesisekelo semvelo esiphansi.

Ukugcina

Amagesi asetshenziswa e-semiconductor ekhiqizweni adlala indima ebalulekile ekuqinisekiseni ukunemba nokusebenza kahle kwezinqubo zokuqamba. Njengobuchwepheshe buthuthuka, imboni ye-semiconductor ilwela ukuthuthuka ekuhlanzeni nasekuphathweni kwegesi, kuyilapho futhi ukubhekana nokuphepha kokuphepha kanye nokukhathazeka kwemvelo okuhambisana nokusetshenziswa kwazo.