Umhlaba wesimanje usebenzisa ama-chips. Kusukela ku-smartphone ephaketheni lakho kuya kumasistimu okuqondisa kubunjiniyela be-aerospace, okuncane Idivaysi ye-semiconductor iqhawe elingaculwanga lenkathi yedijithali. Kodwa liyini iqhawe ngemuva kweqhawe? Yizwe elingabonakali, elivame ukuguquguquka lamagesi akhethekile. Ngokuqondile, i-fluorine chemistry idlala indima ebalulekile ku- Ukukhiqiza i-semiconductor inqubo engeke ikwazi ukushintshwa.

Uma uphethe i-supply chain noma wengamele ikhwalithi yomkhiqizo ku- semiconductor isisekelo, uyazi ukuthi umkhawulo wephutha unguziro. I-spike eyodwa emswakameni noma izinhlayiyana ezincane kakhulu zingonakalisa ukukhiqizwa kokukhiqizwa kwezigidigidi zamadola. Lesi sihloko singena sijula endimeni ka equkethe i-fluorine amagesi—kungani siwasebenzisela, ikhemistri ethile ewenza aphumelele, kanye nokubaluleka okubalulekile kokuzinza nokuhlanzeka kwe-supply chain. Sizohlola ukuthi lezi zindlela Amagesi ahlanzekile aphezulu zisetshenziswa ku okuthi i-etch nezinyathelo zokufaka, nokuthi kungani ukuzifuna kozakwethu othembekile kuyisinqumo esibaluleke kakhulu ongasenza kulo nyaka.

Kungani imboni ye-semiconductor incike kangaka kumagesi aqukethe i-fluorine?

Ukuze uqonde i Umkhakha we-semiconductor, kufanele ubheke ithebula le-periodic. I-silicon yi-canvas, kodwa onkelayo ibhulashi. I Ukuqanjwa kwe-semiconductor inqubo ihilela ukwakha izingqimba zezinto zokwakha bese uzisusa ngokukhetha ukuze udale amasekhethi. Le nqubo yokususa ibizwa ngokuthi i-etching.

Onkelayo iyingxenye ye-electronegative kakhulu. Ngamagama alula, ikulambele ngendlela emangalisayo ama-electron. Uma sethula igesi ye-fluorine noma ama-fluorinated compounds ekamelweni le-plasma, ama-athomu e-fluorine asabela ngobudlova nge-silicon futhi i-silicon dioxide. Lokhu kusabela kwamakhemikhali kuguqula i-silicon eqinile ibe amagesi aguquguqukayo (njenge-silicon tetrafluoride) engampontshwa kalula. Ngaphandle kwalokhu kuphinda kusebenze kwamakhemikhali, asikwazanga ukudala imisele encanyana encane nezimbobo zokuxhumana ezidingekayo kwesimanjemanje Amadivayisi we-elekthronikhi.

Phakathi kwa- ukukhiqiza umthamo omkhulu, isivinini nokunemba kukhona konke. Amagesi aqukethe i-fluorine hlinzeka ngamanani aphezulu we-etch adingekayo ukuze uqhubeke nokuphuma, kuyilapho unikeza ukukhetha ukusika into eyodwa ngaphandle kokulimaza isendlalelo esingaphansi kwayo. Kuyisenzo esibucayi sokulinganisa se ikhemistri kanye ne-physics.

Yini eyenza i-fluorine chemistry ihluke kangaka ekufakweni okunembayo okuphezulu?

Ungase ubuze, kungani ungasebenzisi i-chlorine noma i-bromine? Senza, ngezingqimba ezithile. Nokho, i-fluorine chemistry inikeza inzuzo eyingqayizivele lapho unamathisela izinto ezisekelwe ku-silicon. Isibopho phakathi kwe-silicon ne-fluorine siqine ngendlela emangalisayo. Nini equkethe i-fluorine I-plasma ishaya isicwecwe, ukusabela kuyingozi futhi kuyazenzekela.

Umlingo uyenzeka ku- uhlobo. Ku-a Inqubo ye-semiconductor ekamelweni, sisebenzisa amandla aphezulu kugesi ozinzile njenge-Carbon Tetrafluoride (CF4) noma i-Sulfur Hexafluoride (SF6). Lokhu kuhlukanisa igesi, ikhiphe i-reactive onkelayo ama-radicals. Lawa ma-radicals ahlasela ingaphezulu le ukufa.

"Ukunemba kwe- okuthi i-etch ichaza ukusebenza kwe-chip. Uma ukuhlanzeka kwegesi yakho kushintshashintsha, isilinganiso sakho se-etch siyashintshashintsha, futhi isivuno sakho siyaphahlazeka."

Lokhu kuholela kumqondo we i-anisotropic etching - ukusika uqonde ngaphandle kokudla eceleni. Ngokuxuba onkelayo nabanye inqubo amagesi, onjiniyela bangakwazi ukulawula iphrofayili yomsele ngokuphelele. Leli khono libalulekile njengoba sidlulela kumanodi amancane (7nm, 5nm, nangaphansi), lapho ngisho ne-nanometer yokuchezuka ihluleka khona.

Amagesi ekwenziweni kwe-semiconductor aqhuba kanjani izinqubo ezithuthukisiwe ze-etch?

Izinqubo ze-Etch zingamathuluzi okubaza we izindwangu. Kunezinhlobo ezimbili eziyinhloko: i-wet etch (usebenzisa amakhemikhali awuketshezi njenge i-hydrogen fluoride) kanye ne-etch eyomile (kusetshenziswa i-plasma). Okwesimanje Kuthuthukisiwe ama-node ancike cishe kuphela ekufakweni kwe-plasma eyomile ngoba kunembe kakhulu.

Ngo ejwayelekile ukufakwa kwe-plasma ukulandelana, a igesi e-fluorinated yethulwa. Ake sibheke izinhlobonhlobo ezisetshenzisiwe:

• I-Carbon Tetrafluoride (CF4): Ihhashi lomsebenzi lokukhipha i-oxide.
• I-Octafluorocyclobutane (C4F8): Isetshenziselwa ukufaka isendlalelo se-polymer ezindongeni eziseceleni zomsele, ezivikela ngenkathi okuphansi kuqoshwe ngokujula.
• I-Sulfur Hexafluoride (SF6): Yaziwa ngamanani e-silicon etching asheshayo.

Ukuxhumana phakathi kwe- uhlobo kanye i-substrate iyinkimbinkimbi. Kubandakanya ukuqhuma ngokomzimba ngama-ion kanye nokusabela kwamakhemikhali ngama-radicals. I imishini yokukhiqiza i-semiconductor kumelwe ilawule ngokuqinile ukugeleza, ukucindezela, nengxubevange yala magesi. Uma i igesi ekhethekile iqukethe ukungcola okunjengomswakama, ingenza i-hydrofluoric acid ngaphakathi kwemigqa yokudiliva noma igumbi, ibangele ukugqwala kanye nokukhubazeka kwezinhlayiyana.

Kungani i-Nitrogen Trifluoride iyinkosi yokuhlanza igumbi?

Lapho etching nokuhlanza hambani nibambene, ukuhlanza impahla yokukhiqiza kubalulekile njengokucubungula iwafa. Phakathi Isimo se-Chemical Vapor (CVD), izinto ezifana ne-silicon noma i-tungsten zifakwa ku-wafer. Nokho, lezi zinto zibuye zimboze izindonga zekamelo. Uma le nsalela yanda, iyahlakazeka futhi iwele kuma-wafers, ibangele amaphutha.

Ngena I-Nitrogen Trifluoride (NF3).

Eminyakeni edlule, imboni yasetshenziswa i-greenhouse ene-fluorinated amagesi afana ne-C2F6 yokuhlanza igumbi. Nokho, i-NF3 isiphenduke indinganiso izinqubo zokuhlanza igumbi ngenxa yokusebenza kahle kwayo okuphezulu. Uma iphulwa emthonjeni we-plasma ekude, i-NF3 ikhiqiza inani elikhulu ama-athomu e-fluorine. Lawa ma-athomu akhuhla izindonga zegumbi, aphendule izinsalela eziqinile zibe igesi ekhishwayo.

I-nitrogen trifluoride iyakhethwa ngoba inezinga eliphezulu lokusetshenziswa (igesi eningi iyasetshenziswa ngempela) kanye nekhabhoni ekhishwayo ephansi uma iqhathaniswa nendala. ama-ejenti okuhlanza. Kumphathi wesikhungo, lokhu kusho isikhathi esincane sokulungiswa kanye nokusebenza ngokushesha.

Yiziphi izinhlanganisela ezine-fluorinated ezibalulekile ekukhiqizeni umthamo omkhulu?

Le khasi i-semiconductor supply chain incike kubhasikidi othize amagesi ane-fluorine. Ngayinye "ineresiphi" ethile noma uhlelo lokusebenza. Ngo I-Jiangsu Huazhong Gas, sibona isidingo esikhulu salokhu okulandelayo:

Lezi ama-fluorinated compounds ziyigazi lempilo ukukhiqiza umthamo omkhulu. Ngaphandle kokulandelana kwalokhu amagesi ku-semiconductor ukukhiqiza, imigqa iyama. Kulula kanjalo. Yingakho abaphathi bokuthenga abafana no-Eric Miller behlala beqapha ukuhlinzekwa kothile ngokuphazamiseka.

Kungani amagesi ahlanzekile engumgogodla wesivuno se-semiconductor?

Angikwazi ukugcizelela lokhu ngokwanele: Ubumsulwa buyikho konke.

Lapho sikhuluma ngakho Amagesi ahlanzekile aphezulu, asikhulumi "ngebanga lezimboni" elisetshenziselwa ukushisela. Sikhuluma nge-5N (99.999%) noma i-6N (99.9999%) ubumsulwa.

Kungani? Ngoba a Idivaysi ye-semiconductor inezici ezikalwa ngama-nanometer. I-molecule eyodwa yokungcola kwensimbi noma inani elincane lomswakamo (H2O) lingabangela ukujikeleza okufushane noma livimbele ungqimba ekubambeleleni.

• Umswakama: Isabela nge onkelayo ukudala i-HF, edla uhlelo lokulethwa kwegesi.
• I-oksijini: I-oxidize i-silicon ngokungalawuleki.
• Izinsimbi Ezisindayo: Bhubhisa izakhiwo zikagesi ze-transistor.

Njengomphakeli, umsebenzi wethu uwukuqinisekisa ukuthi i-Xenon ephezulu noma I-Electronic Grade Nitrous oxide uthola ihlangana eqinile Amazinga Wezimboni. Sisebenzisa i-chromatography yegesi ethuthukisiwe ukuze sithole Landelela Ukungcola phansi kwezingxenye ngebhiliyoni ngalinye (ppb). Kumthengi, ukubona Isitifiketi Sokuhlaziya (COA) akuwona nje umsebenzi wamaphepha; yisiqiniseko sokuthi labo Ukuqanjwa kwe-semiconductor ngeke ibhekane nokuphahlazeka kwesivuno okuyinhlekelele.

Ngabe imboni ikuphatha kanjani ukukhishwa kwegesi ebamba ukushisa kanye ne-GWP?

Kukhona indlovu ekamelweni: imvelo. Abaningi amagesi e-fluorinated abe okusezingeni eliphezulu I-Global Warming Potential (GWP). Isibonelo, Sulfir hexafluoride (SF6) ingenye yeziningi amagesi abamba ukushisa anamandla eyaziwa ngumuntu, ene-GWP ephindwe izikhathi eziyizinkulungwane kune-CO2.

Le khasi imboni yokukhiqiza i-semiconductor ingaphansi kwengcindezi enkulu yokunciphisa i-carbon footprint yayo. Lokhu kuye kwaholela ekushintsheni okukhulu okubili:

1. Ukunciphisa: Izindwangu bafaka "amabhokisi okushisa" amakhulu noma ama-scrubber emigqeni yabo yokukhipha umoya. Lezi zinhlelo zephula okungaphendulwanga igesi ebamba ukushisa ngaphambi kokuba ikhishwe emkhathini.
2. Ukufaka esikhundleni: Abacwaningi bafuna enye indlela okuthi i-etch amagesi ane-GWP ephansi. Kodwa-ke, ukuthola i-molecule esebenza kahle ne-C4F8 noma i-SF6 ngaphandle komthelela wendawo kunzima ngamakhemikhali.

I-nitrogen trifluoride bekuyisinyathelo esiqonde endleleni efanele yokuhlanza ngoba iphuka kalula kunama-PFC amadala, okuholela ekunciphiseni jikelele ukukhishwa uma izinhlelo zokunciphisa zisebenza kahle. Ukunciphisa Ukukhishwa Kwegesi Abamba ukushisa akuseyona nje umnyakazo wePR; kuyisidingo sokulawula e-EU nase-US.

Ingabe i-semiconductor supply chain isengozini yokushoda kwegesi okukhethekile?

Uma iminyaka embalwa edlule isifundise okuthile, kungukuthi ukuhlinzekwa kothile ithambile. Abakhiqizi be-semiconductor baye babhekana nokushoda kwakho konke kusuka ku-neon kuya ama-fluoropolymers.

Ukunikezwa kwe igesi ye-fluorine kanye nokuphuma kwayo kuncike ekumbiweni kwe-fluorspar (calcium fluoride). I-China ingumthombo omkhulu womhlaba wonke wale nto eluhlaza. Lapho ukungezwani kwezwe kukhula noma imizila yezokuthutha ivaleka, ukutholakala kwalokhu okubalulekile inqubo amagesi ukwehla, futhi amanani ayakhuphuka.

Kumthengi onjengo-Eric, ukwesaba i-"Force Majeure" kungokoqobo. Ukunciphisa lokhu, izinkampani ezihlakaniphile zihlukanisa abahlinzeki bazo. Bafuna ozakwethu abangababo iso-tanks futhi basungule amanethiwekhi okuthutha. Ukwethembeka ku indawo enele ibaluleke njengokuhlanzeka kwegesi. Ungathola okumsulwa C4F8 igesi emhlabeni, kodwa uma libhajwe ethekwini, akusizi ngalutho fab.

Yiziphi izimiso zokuphepha zokuphatha iHydrogen Fluoride nezinye izinto ezinobuthi?

Ukuphepha kuyisisekelo semboni yethu. Abaningi equkethe i-fluorine amagesi anobuthi, ama-asphyxiants, noma asebenza kakhulu. I-Hydrogen Fluoride (HF), evame ukusetshenziswa ku-wet etch noma ekhiqizwa njengomkhiqizo, iyingozi kakhulu. Ingena esikhunjeni futhi ihlasele isakhiwo samathambo.

Ukuphatha lezi zinto kudinga ukuqeqeshwa okuqinile kanye nemishini ekhethekile.

• Ama-Cylinders: Kufanele iqinisekiswe nge-DOT/ISO futhi ihlolwe njalo ukugqwala kwangaphakathi.
• Amavalvu: Ama-valve e-diaphragm asetshenziselwa ukuvimbela ukuvuza.
• Izinzwa: Izindwangu ze-semiconductor zimbozwe kuzinzwa zokuthola igesi ezicupha ama-alamu lapho kuvuza kancane.

Uma sigcwalisa isilinda nge I-Electronic Grade Nitrous oxide noma i-etchant enobuthi, siyiphatha njengesikhali esilayishiwe. Siqinisekisa ukuthi isilinda sipholishelwe ngaphakathi ukuze sivimbele izinhlayiya nokuthi i-valve ivaliwe futhi ivalwe. Kumakhasimende ethu, ukwazi ukuthi igesi yenethiwekhi noma i-etchant ifika iphephile, emaphaketheni athobelayo iyimpumuzo enkulu.

Yini ezayo ngezinto ezisetshenziswa enqubweni yokwenziwa kwe-semiconductor?

Le khasi ukukhiqizwa kwe-semicondector I-roadmap inolaka. Njengoba ama-chips ethuthela ezakhiweni ze-3D ezifana ne-Gate-All-Around (GAA) transistors, inkimbinkimbi etching nokuhlanza iyanda. Sibona isidingo sezinto ezingavamile igesi e-fluorinated izingxube ezingaqopha izimbobo ezijulile, eziwumngcingo ngokunemba kwe-athomu.

I-Atomic Layer Etching (ALE) kuyindlela evelayo esusa okokusebenza ungqimba olulodwa lwe-athomu ngesikhathi. Lokhu kudinga umthamo onembe ngendlela emangalisayo Amagesi asebenzayo. Ngaphezu kwalokho, ukucindezela kokukhiqizwa "okuluhlaza" cishe kuzogqugquzela ukwamukelwa okusha i-fluorine chemistry enikeza ukusebenza okufanayo nokuphansi GWP.

Ikusasa ngelabo abakwazi ukusungula kukho kokubili ukuhlanganiswa kwegesi nokuhlanzwa. Njengoba Izinto ze-semicondector ziyaguquguquka, amagesi asetshenziswa ukuwabumba kumele aguquke nawo.

Ukuthathwa Key

• I-Fluorine ibalulekile: I-Fluorine chemistry isihluthulelo sokwenza amandla okuthi i-etch na- ihlanzekile uyangena Ukukhiqiza i-semiconductor.
• Ukuhlanzeka kuyinkosi: Ukuhlanzeka okuphezulu (6N) akuxoxiswana ngakho ukuze kuvinjwe amaphutha nokuqinisekisa ukuzinza kwenqubo.
• Izinhlobonhlobo zamagesi: Amagesi ahlukene afana ne-CF4, SF6, kanye I-nitrogen trifluoride sebenza izindima ezithile ku into engekho.
• Umthelela Wezemvelo: Ukuphatha Ukukhishwa Kwegesi Abamba ukushisa na- ukwehliswa kuyinselelo ebalulekile yemboni.
• Ukuphepha Kokunikezela: A eqinile ukuhlinzekwa kothile nozakwethu abathembekile bayadingeka ukuze kugwenywe ukumiswa kokukhiqiza.

Kwa-Jiangsu Huazhong Gas, siyaziqonda lezi zinselele ngoba siphila ngazo nsuku zonke. Ukuthi udinga Ikhwalithi ephezulu ye-Xenon ngenqubo yakho entsha ye-etch noma ukulethwa okuthembekile kwamagesi ezimboni ajwayelekile, silapha ukuze sisekele ubuchwepheshe obakha ikusasa.