Emhlabeni wobuchwepheshe besimanje, semiconductor uyinkosi. Lezi zinto ezincane, eziyinkimbinkimbi zinamandla konke kusuka kuma-smartphones ethu ezimotweni zethu kanye nezikhungo zedatha eziqhuba i-Intanethi. Kepha yimuphi amandla okudalwa kwalezi zinhlamvu? Impendulo, ngokumangazayo, is igesi. Hhayi nje igesi, kodwa Amagesi ahlanzekile aphezulu kokuhlanzeka okungenakucatshangelwa. Njengoba u-Allen, umnikazi wefekthri onemigqa yokukhiqiza eyisikhombisa egxile kumagesi wezimboni, ngizibonele mathupha ukuthi isidingo sobumsulwa sivezwe kanjani. Le ndatshana ingeyabaholi bebhizinisi njengoMark Shen, abaphambili be igesi ukuhlinzekwa kothile. Uyaqonda ikhwalithi nentengo, kepha ukuhola ngokweqiniso kule makethe, udinga ukuqonda ngobani. Sizomdumaza umhlaba oyinkimbinkimbi we ukukhiqizwa kwe-semiconductor, echaza ngamagama alula kungani umuntu oyedwa inhlanganisela phakathi ku igesi ukusakazwa kungabiza izigidi zefektri. Lesi yinkomba yakho yokukhuluma ulimi lwe Umkhakha we-semiconductor nokuba ngumlingani osemqoka.

Iyiphi indima edlalwa yi-chip ye-semiconductor?

Emgogodleni wayo, ukukhiqizwa kwe-semiconductor inqubo yokwakha ama-microscopic, amaseliphu kagesi ahlanganiswe amancane ku-disc emhlophe ye anzini, owaziwa ngokuthi a ukufa. Cabanga ukuzama ukwakha i-skyscraper usayizi wesitembu sokuposa, ngezigidigidi zamakamelo nasemahholo. Lesi silinganiso esikhuluma ngawo. Ukufeza lokhu, awukwazi ukusebenzisa amathuluzi omzimba. Esikhundleni salokho, konke Inqubo Yokukhiqiza kuncike ochungechungeni lokuphendula okunembile kwamakhemikhali, kanye nemoto eyinhloko yalokhu kusabela igesi.

Amagesi enza njengezandla ezingabonakali ezakha le mibuthano. Benza imisebenzi eminingana ebucayi. Abanye, njenge nitrogen, dala imvelo ehlanzekile futhi ezinzile ngokuphelele, ukuvikela ukusabela okungafuneki. Ezinye, ezaziwa ngokuthi amagesi enqubo, zingamabhulokhi wokwakha noma amathuluzi okuqoshwa. Isibonelo, okuqondile Uhlobo lwegesi ingahle isetshenziselwe ukubeka ungqimba lwe-microscopic lwezinto ezisebenzayo, kanti enye igesi isetshenziselwa ukukwenza kahle okuthi i-etch izinto ezibonakalayo zokwakha indlela yesekethe. Njalo ngesinyathelo esisodwa, kusuka ekuhlanzeni ukufa Ukwakha ama-transistors okugcina, kubandakanya okuthile igesi noma ingxube yamagesi. Ukunemba kwe ukuhamba kwegesi kanye nokwakheka kwalo kwamakhemikhali kuchaza ngokuqondile impumelelo ye Ukukhiqiza chip inqubo.

Kungani ubumsulwa bubaluleke kakhulu ekukhiqizweni kwe-semiconductor?

Ezimpilweni zethu zansuku zonke, uthuli oluncane noma ukungcoliswa komoya akusona isivumelwano esikhulu. Kepha ngaphakathi a semiconductor Isitshalo sokwamukelwa, noma "fab," kuyinhlekelele. Izakhi ezakhiwe ku anzini ukufa zivame ukukalwa kuma-nanometers - lokho ku-billionths yemitha. Ukubeka lokho ngombono, izinwele zomuntu ezifanayo zingama-nanometers angama-75,000 ububanzi. Uthuli oluncane inhlanganisela awukwazi ngisho nokubona iBoulder enkulu emhlabeni we semiconductor ukuboniswa.

Yingakho ubumsulwa yisimo esisodwa esibaluleke kakhulu samagesi isetshenziswa ku-semiconductor ukukhiqiza. Noma iyiphi i-molecule engafuneki - noma ngabe i-molecule yamanzi elahlekile, insimbi encane inhlanganisela, noma okuhlukile igesi molecule-kubhekwa njenge ukungcola. Leli ukonakalisa ingaphazamisa ngokuphelele ubucayi ukusabela kwamakhemikhali kwenzeka ku ukufaingaphezulu. Okukodwa ukungcola kungavimba umjikelezo ekwakheni, kubangele umjikelezo omfushane, noma aguqule Izakhiwo zikagesi ze-semiconductor impahla. Ngoba eyodwa ukufa ingaqukatha amakhulu noma izinkulungwane zama-chips ngazinye, iphutha elilodwa elincane lingaholela ekulahlekelweni kwezezimali okukhulu. Yonke inqubo ifuna amazinga aphezulu obumsulwa ukusebenza nhlobo.

Ukungcola kumagesi kulimaza ukukhiqizwa kwe-semiconductor?

Lapho ukungcola ikhona kwinqubo igesi, kungadala "Killer icala. "Lokhu akuyona nje iphutha elincane; kungukuthi icala lokho kunikeza yonke i-microchip kuleso sigaba se ukufa akanamsebenzi. Ake sibheke ukuthi lokhu kwenzeka kanjani. Ngesikhathi imbemba isigaba, lapho amafilimu amancane azakhelwe ungqimba ngongqimba, ongafuneki inhlanganisela ingafika ebusweni. Lapho isendlalelo esilandelayo sefakwa ngaphezulu, kwakha i-microscopic bump noma i-void. Leli fana lingaphula ukuxhumana kagesi noma ukudala umuntu ongahlosiwe, abhubhise ngempumelelo i-transistor eyakhiwe.

Imiphumela yalokhu iyalimaza umugqa ophansi wengubo. I-metric eyinhloko yempumelelo ku semiconductor I-Fab ithi "isivuno" -Iphesenti lama-chip asebenzayo akhiqizwa okukodwa ukufa. Ngisho nethonsi elincane ngaphakathi Veza, kusuka kuma-95% kuya ku-90%, kungamelela izigidi zamaRandi kwimali elahlekile. Ukungcola kwegesi yimbangela eqondile yokuncipha Veza. Yingakho Abakhiqizi be-Semiconductor bathambekele nge Ubumsulwa begesi. Badinga ukuqiniseka ukuthi igesi Ukufaka amathuluzi awo amadola ayizigidi eziyizinkulungwane eziningi akunamhlaba nakancane kunoma yikuphi -ngcolisayo lokho kunganciphisa Inqubo Yokubukelwa Yemithi Yemithinductor. Kungumdlalo wokunemba emicroscopic lapho kune-zero ye-zero ngephutha.

Yini amagesi asemqoka asetshenziswa ku-semiconductor?

Uhla lwamagesi asetshenziswa ku Umkhakha we-semiconductor kukhulu, kepha ngokuvamile bawela ezigabeni ezimbili: amagesi amaningi kanye namagesi akhethekile.

• Amagesi amaningi ngobuningi: Lokhu kusetshenziswa ngamanani amakhulu futhi kwakha isisekelo semvelo yokukhiqiza.

  • I-Nitrogen (N₂): Lokhu yi-Workorse. I-Ultra-High ubumsulwa Nitrogen isetshenziselwa ukwakha "umkhathi" we-inert "ngaphakathi kwamathuluzi wokuqamba. Lokhu kuhlanza umoya-mpilo, umswakama, nezinye izinhlayiya, ukuvikela i-oxidation engafuneki noma ukonakalisa ye ukufa.
  • I-Hydrogen (H₂): Kuvame ukusetshenziswa ngokuhlanganiswa namanye amagesi, i-hydrogen kubalulekile ngokuqinisekile imbemba Izinqubo kanye nokwakha izimo ezithile zamakhemikhali ezidingekayo ukwakha izakhiwo ze-transtostor.
  • I-Argon (AR): Njengomuntu orert igesi, I-argen isetshenziswa kwinqubo ebizwa ngokuthi yi-sputtering, lapho isetshenziselwa ukuqhuma khona okuqondiwe, kungqongqoza ama-athomu akhulula lokho ukufa. Kusetshenziselwa ukudala uhlobo Kwabaningi okuthi i-etch izinqubo.

• Amagesi akhethekile: Lezi ziyinkimbinkimbi, evame ukuba yingozi, futhi amagesi anezinhloso eziningi asetshenziselwa izinyathelo ezithile. Ziyizithako "ezisebenzayo".

  • Ama-etchants: Amagesi afana ne-chlorine (CL₂) ne-hydrogen bromide (hbr) asetshenziselwa ukubhala kahle noma okuthi i-etch amaphethini angena ezingxenyeni ze ukufa.
  • Ama-dopants: Amagesi anjenge-arsine (ash₃) ne-phosphine (PH₃) asetshenziselwa ukwethula ngenhloso ngokuqondile ukungcola ku anzini Ukushintsha izakhiwo zayo zikagesi, yiphi ukuthi ama-transistors alawulwa kanjani.
  • Amagesi we-Deposition: USilane (Sih₄) uyisibonelo sakudala, esisetshenziswa njengomthombo we anzini ukufaka amafilimu amancanyana.

Ukuze uthole isikhulu sokuthengwa kwempahla njengoMarku, kubalulekile ukwazi ukuthi ngenkathi wonke la magesi ehlukile, abelana ngesidingo esisodwa esivamile: ukweqisa ubumsulwa.

Ungakwazi yini ukuchaza imali nokufaka ngamagama alula?

Ukukhiqizwa kwe-semicondector Kubandakanya amakhulu ezinyathelo, kepha iningi lazo lihlukahlukene kwezinqubo ezimbili ezibalulekile: imbemba na- okuthi i-etch. Ukuqonda lokhu ngamagama alula kuwukhiye wokuqonda indima ye igesi.

1. Ukufakwa: ukwakha izingqimba
Cabanga nge imbemba njengokupenda okufafaza ngama-molecule. Umgomo ukwengeza ungqimba lwe-ultra-mncane, ofanayo oluphelele lwento ebonakalayo ku silicon wafer.

• Inqubo: Inqubo igesi (NjengoSilane) kuxutshwe ne igesi yenethiwekhi (thanda nitrogen noma i-hydrogen). Leli igesi ingxube isengeniswa egumbini eliqukethe ukufa. A ukusabela kwamakhemikhali kubangelwa, imvamisa ngokushisa noma a uhlobo, kubangela ama-molekyuli athi "ukucacisa" ngaphandle kwe igesi futhi wakhe okuqinile ifilimu elincanyana use ukufaingaphezulu.
• Kungani kuhlanzekile: Uma kunokungcola inhlanganisela ku igesi Sakaza, kufana nocezu lothuli lokungena kupende wakho wokufafaza. Izofakwa kungqimba entsha, idale ukwakheka icala. Uma kukhona okungafuneki igesi I-Molecule, ingasabela ngokungalungile, iguqula ukwakheka kwamakhemikhali kanye nezindawo zikagesi zesendlalelo.

2. Ukuqongelela: Ukuqopha amasekethe
Ngemuva kokwakha ungqimba, udinga ukuguqula iphethini yokujikeleza kuyo. Okuthi i-etch inqubo yokususa okukhethiwe.

• Inqubo: Le khasi ukufa ihlanganiswe nokuqukethwe okubucayi okukhanyayo okubizwa ngokuthi i-photoresist. Iphethini kubhekwe kuyo (njenge-stencil). Izindawo eziveziwe zilukhuni ngaleso sikhathi. Le khasi ukufa isekwe egumbini eligcwele i-etchant igesi (njenge-compact esekelwe ku-fluorine). Leli igesi kunikezwe amandla ku uhlobo Yisho, ukuyenza ixazulule kakhulu. Le khasi uhlobo amabhomu ukufa, Ukudla ngamakhemikhali okuqukethwe -nye Ezindaweni ezingavikelwe yi-stencil.
• Kungani kuhlanzekile: Ukungcola ngamagesi Kusetshenziselwa uku-etching kungaguqula isilinganiso sokuphendula. Lokhu kungadala ukuthi amasekethe aqoshwe kakhulu, anciphise kakhulu, noma cha. Iseli inhlanganisela ukungcola kungavimba ngisho okuthi i-etch ukucubungula endaweni eyodwa encane, kushiye ngemuva "kokuthunyelwe" kwezinto ezingafuneki ezikhipha umjikelezo.

Ngabe ubumsulwa begesi obukhulu buka kanjani futhi bugcinwe?

Ku Umkhakha we-semicondector womhlaba wonke, Ukulinganiswa okujwayelekile kokuhlanzeka okufana ne- "persenti" akusizi ngalutho. Sisebenzelana nayo ukonakalisa esikalini okunzima ukuyiqonda. Ubumsulwa bukalwa phakathi izingxenye nge-trillion ngayinye (PPT). Lokhu kusho ngakho konke trillion igesi Ama-molecule, angaba ne-molecule eyodwa noma ezimbili zokungcola kuphela.

Ukufezekisa nokuqinisekisa leli zinga le Ubumsulwa begesi, uhlelo oluyinkimbinkimbi lwe Ukuhlanzwa kwegesi futhi ukuhlaziywa kuyadingeka.

Efektri yethu, asikhiqizi nje igesi; Siphila futhi siphefumula ikhwalithi yokulawula. Le khasi Ukunikezwa kwegesi iketanga le semiconductor Indwangu ifaka iziphetho ezikhethekile ezifakwe ngasikhathi sokusetshenziswa. Ngaphezu kwalokho, kuthuthukile Ukuhlaziywa kwegesi Amathuluzi asetshenziselwa Ukuqapha real-time. Amasu afana I-Atmospheric Pressure Ionization Mass ama-spectrometry (APIMS) angenza ukutholwa kokungaphenduki phansi ezingxenyeni ezingxenyeni-per-trillion, kuqinisekisa i-uhp igesi (Ubumsulwa be-Ultra-high) Ukufaka ithuluzi lenqubo kuphelele.

Yini eyenza umphakeli wegesi ebumsulwa ephakeme ethembekile?

Ukuze uthole inhloko yokuthengwa kwempahla njengoMarku, oye wabhekana nobuhlungu bokubambezeleka kokuthumela kanye nezitifiketi zenkohliso, ukuthembeka kuyikho konke. Emhlabeni we I-semiconductor ebuhlungu ephezulu Amagesi, ukuthembeka kuphumule ngezinsika ezintathu: ukukhiqizwa kokungaguquguquki, ukuqinisekiswa kwekhwalithi, kanye nobuchwepheshe bokuhlelela.

1. Ukukhiqiza Ukuvumelana: Umphakeli onokwethenjelwa kufanele abe namandla okukhiqiza aqine futhi angagunyaziwe. Imigqa yethu yokukhiqiza eyisisekelo yefektri, ngokwesibonelo, iqinisekisa ukuthi siyakwazi hlangana nesidingo esikhulu Futhi ukuthi inkinga kulayini owodwa ayimiseli yonke indawo yethu. Lokhu kunciphisa ubungozi bokuphazamiseka kokuhlinzekwa okungavala idola elinezigidigidi eziningi semiconductor Indwangu.
2. Isiqinisekiso sekhwalithi esiqinisekisiwe: Akwanele ukukufuna igesi ebuhlungu ephezulu. Kufanele ukwazi ukukufakazela. Lokhu kusho ukutshala imali kwizisetshenziswa zokuhlaziya zombuso ukutholwa kokungaphenduki. Kusho futhi ukuhlinzeka ngezitifiketi ezisobala, ezilandelwayo zokuhlaziywa (COA) ngakho konke ukuthunyelwa. Ukulwa nokukhwabanisa kwesitifiketi kumayelana nokwakha ubuhlobo besikhathi eside kususelwa ekuthembekeni nasekuqinisekiseni idatha.
3. Ubuchwepheshe bokuhlelela: Ukuthola a igesi esolisayo noma uketshezi lwe-cryogenic kusuka eChina kuya e-USA akulula. Kudinga iziqukathi ezikhethekile, ulwazi lwemithetho yokuthumela yamazwe omhlaba, nokuhlela ngokucophelela ukugwema ukubambezeleka. Umhlinzeki onokwethenjelwa uyakuqonda lokhu akusho nje ukuhambisa ibhokisi; Iphatha ingxenye ebucayi yomhlaba wonke semiconductor ukuhlinzekwa kothile.

Uyini umehluko phakathi kwegesi eningi negesi ekhethekile?

Ukuqonda umehluko phakathi igesi eningi na- igesi ekhethekile ukhiye wanoma ngubani obandakanyeka ekuthambekeni kwe Umkhakha we-semiconductor. Ngenkathi bobabili bedinga ukweqisa ubumsulwa, isikali sabo, ukuphatha, kanye nesicelo sehluke kakhulu.

Amagesi amaningi, njenge Amagesi aphezulu aphezulu wokuhlanzeka, Bukela ku amagesi anjenge-nitrogen, umoya-mpilo, i-argon, kanye i-hydrogen. Bayisisekelo semvelo yebabe. Igama elithi "inqwaba" libhekisela kumanani amakhulu asetshenzisiwe. Lawa magesi avame ukukhiqizwa esizeni noma eduzane futhi alethwe ngamapayipi azinikezele ngqo ohlelweni lwangaphakathi lokusabalalisa lwangaphakathi. IZINSELELE ZAMAHHALA LAPHA LAPHA ubumsulwa Ngamanethiwekhi amakhulu okusabalalisa nokuqinisekisa ukuchithwa, okufumazwa okunamandla.

Igesi ekhethekile (noma igesi ye-elekthronikhi) kubhekiswa esigabeni esibanzi samagesi ajwayelekile ahlukile, asebenzayo, noma anobungozi asetshenziswa ngamanani amancane wezinyathelo ezithile zenqubo efana ne-etching futhi imbemba. Izibonelo zihlanganisa uSilane, i-ammonia, uBoron Trichloride, ne-nitrogen trifluoride. Lokhu kuhanjiswa kumasilinda aphezulu wengcindezelo ephezulu. Izinselelo ezine igesi ekhethekile ukuphepha okwedlulele ekusingatheni, ukuqinisekisa ukuhlanganiswa okuphelele kokuvumelana kokuxutshwa kwegesi, nokuvimbela noma yikuphi ukusabela kwamakhemikhali ngaphakathi kwesilinda esingahlehlisa isimo segesi.

Ngabe kuvela kanjani isidingo segesi ye-semiconductor ephakeme?

Le khasi Umkhakha we-semiconductor ungalokothi ume. Umthetho kaMoore, ukubonwa ukuthi inani lama-transistors e-chip liphinda kabili cishe njalo eminyakeni emibili, liyaqhubeka nokucindezela imingcele ye-physics. Njengoba ama-transtors ancipha, baba ngokwengeziwe ngokwengeziwe ukonakalisa. A usayizi wezinhlayiyana lokho kwamukelekile eminyakeni emihlanu edlule "KWABOLL icala"Namuhla.

Le moto engenacala yama-chips amancane futhi anamandla ngokwengeziwe isho isidingo samazinga aphezulu we Ubumsulwa begesi kuyakhula. Sisuka ezweni lapho izingxenye zezingxenye ezimbili eziyizigidi zezingxenye zegolide ziye zakhona lapho izingxenye ze-per-trillion ziyisidingo esincane sokungena se Kuthuthukisiwe ama-node. Ngaphezu kwalokho, izinto ezintsha kanye nokwakhiwa kwe-chip, njenge-3D NAPH ne-GAST-All-azungeze (GAA), dinga iphothifoliyo entsha yonke ye igesi yesizukulwane esilandelayo ukuxuba kanye nokwandulela. Nga- Abakhiqizi begesi, sikulo mjaho oqhubekayo wokuqamba, ukuthuthukisa ubuchwepheshe obusha bokuhlanza kanye nezindlela zokuhlaziya ukuhambisana ne Umkhakha we-semicondector womhlaba wonke.

Njengomthengi, yiziphi izitifiketi zekhwalithi okufanele ngizibheke?

Ukuzulazula emhlabeni wabahlinzeki kungaba nzima, ikakhulukazi lapho usebenzelana nemikhiqizo yezobuchwepheshe. Izitifiketi zinikeza ukuqinisekiswa okubalulekile, okuvela eceleni kwamakhono womhlinzeki nokuzibophezela kwekhwalithi. Lapho ngithola khona Amagesi ahlanzekile aphezulu Okwe Umkhakha we-semiconductor, Nazi izinto ezimbalwa okufanele uzibheke:

• ISO 9001: Lesi isitifiketi esiyisisekelo sezinhlelo zokulawulwa kwekhwalithi. Kubonisa ukuthi umphakeli unezinqubo ezichazwe kahle neziphindaphindwayo zokukhiqiza, ukuhlolwa, kanye nokulethwa.
• ISO / IEC 17025: Lokhu kubalulekile. Kuyindinganiso yekhono lokuhlolwa kwezindawo zokuhlola nokulinganisa. Umphakeli ngalesi sitifiketi ufakazele ukuthi ilebhu yazo engaphakathi endlini - eyakha isitifiketi sakho sokuhlaziywa - inembile futhi ithembekile.
• Ukuhlaziywa okulandelwayo: Njalo funa isitifiketi sokuhlaziywa (COA) sawo wonke amasilinda esisodwa noma i-batch. Lesi sitifiketi kufanele sichaze izinga eliqondile lobucayi Ukungcola kugesi, kulinganiswa ngezindlela ezithile zokuhlaziya ezifana igesi i-chromatography noma i-spectrometry eningi.

Njengomholi onqumayo njengoMark, ithuluzi lakho elihle kakhulu ukubuza imibuzo ephenya. Musa nje ukubuza "yile igesi Umsulwa? "Buza" Ubonisa kanjani ukuthi ihlanzekile? Ngikhombise isitifiketi selebhu yakho. Chaza inqubo yakho ukuze kuqinisekiswe ukungaguquguquki okuningi. "Uchwepheshe othembekile futhi onokwethenjelwa azokwamukela le mibuzo futhi abe nethemba, izimpendulo ezisobala.

Ukuthathwa Key

• Igesi iyithuluzi: Phakathi kwa- Ukukhiqiza i-semiconductor, amagesi akuzona nje izinto zokwakha; zingamathuluzi anemba asetshenziselwa ukwakha futhi anikeze iziyingi ze-microscopic ku silicon wafer.
• Ubumsulwa yikho konke: Isikali se Ukukhiqiza chip incane kangangokuba umuntu ongafuneki inhlanganisela noma ukungcola I-Molecule ingabhubhisa i-chip, yokwenza Ubumsulwa be-Ultra-High Isidingo esingaxoxiswanga.
• Isivuno yinhloso: Umthelela wokuqala we Ukungcoliswa kwegesi ukwehliswa ekwakhiweni Veza, okuhunyushela ngqo ezigidini zamaRandi elahlekile imali elahlekile ye Izindwangu ze-semiconductor.
• Izinqubo ezimbili eziphambili: Izinyathelo eziningi ekwenzeni i-chip zihilela noma imbemba (izingqimba zokwakha) noma okuthi i-etch (Amaphethini wokuqothula), zombili ezincike ngokuphelele ekuphendukeni okunembile kwamakhemikhali amagesi amsulwa.
• Ukwethembeka kubalulekile: Umphakeli othembekile ku igesi ye-semiconductor Imakethe kumele ikhombise ukukhiqizwa kokukhiqizwa, ukuqinisekiswa kwekhwalithi okuqinisekisiwe ngamalebhu aqinisekisiwe, kanye nokuphathwa kwezinto zolwazi.
• Ikusasa limsulwa: Njengoba ama-semiconductors athuthuke kakhulu, isidingo samazinga aphezulu Ubumsulwa begesi (Phansi ezingxenyeni-per-trillion) kuzoqhubeka nokukhula.