I-Huazhong gesi yanikezela ekulwazi kahle ubuciko nesayensi yezimboni futhi igesi ekhethekile ukukhiqiza. Ezweni lanamuhla lobuchwepheshe obuphakeme, ikakhulukazi ngaphakathi kwe semiconductor imboni, isidingo se Ubumsulwa be-Ultra-High amagesi akuyona nje ukukhetha; Kuyisidingo esiphelele. Le ndatshana idonsela ezweni elibucayi Ukuhlaziywa kokungcola ingomane Amagesi akhethekile kagesi. Sizohlola ukuthi kungani ngisho nakubo kunabo bonke ukungcola ungaba nemiphumela emikhulu, ukuthi sikuthola kanjani lokhu kuncipha Landelela Ukungcola, nokuthi kusho ukuthini kumabhizinisi. -Zwayo Ukungcola kwegesi kanye nezindlela zabo ukuhlambululela nokutholwa, njengokuthi ICP-MS, kubalulekile ekuqinisekiseni ukuthembeka nokusebenza kwesimanje Ama-Electronics. Lesi siqeshana sisifanele isikhathi sakho ngoba sinikeza umbono kafektri ngokugcina ulukhuni ubumsulwa begesi ekhethekile kagesi, itshe legumbi semiconductor na- Ama-Electronics Imikhakha.

Kuyini ngempela amagesi akhethekile kagesi futhi kungani ubumsulwa babo bubalulekile kangaka e-semiconductor ekhiqizweni?

Amagesi akhethekile kagesi, kuvame ukubizwa ngokuthi Amagesi we-elekthronikhi noma Amagesi we-semiconductor, yisigaba esiyingqayizivele se Amagesi ahlanzekile aphezulu na- Ukuhlanganiswa kwegesi ngokuqondile njiniyela izinqubo eziyinkimbinkimbi ezibandakanyeka ekukhiqizeni izakhi ze-elekthronikhi. Cabanga ngawo njengabasunguli abangabonakali beminyaka yedijithali. Lezi Amagesi asetshenziswa ku-semiconductor Ukwahlulela kufaka phakathi uhla oluhlukile, njenge-sane (sih₄) ukufaka izingqimba ze-silicon, i-nitrogen trifluoride (NF₃) yokuhlanza iChamber, ingonona (AR) njengesihlangu se-inert, futhi ahlukahlukene Amagesi adonsayo njengePhosphine (PH₃) noma i-Arsine (ASH₃) ukuguqula izakhiwo zikagesi ze semiconductor izinto zokwakha. Igama "Ukukhethekile ngogesi"ngokwayo iqokomisa uhlelo lwazo lwe-collected kanye nokunemba okwedlulele okudingekayo ekubumbeni kwabo. Lezi akuzona zonke izinsuku zakho amagesi wezimboni; Ukucaciswa kwabo kuqinile kakhulu.

Ukubaluleka okufana kwabo ubumsulwa ayikwazi ukweqiwe, ikakhulukazi ngaphakathi ukukhiqizwa kwe-semiconductor. Izindawo ezihlanganisiwe zesimanje zokuhlanganisa (i-ICS) Izici zokudluliswa kwezindawo ezihamba phambili kanye nezindlela ezihamba kancane ezikuhle kakhulu, ezivame ukukalwa ngama-nanometers (ama-billionths emitha). Ngalesi silinganiso semicroscopic, ngisho ne-athomu elilodwa elingafuneki - a ukungcolaI--Can yenza njenge-boulder emfudlaneni omncane, iphazamisa ukugeleza kukagesi okuhlosiwe noma okubangela izinkinga zesakhiwo. Lokhu kungaholela kwi-chip enephutha, futhi embonini lapho kukhiqizwa khona izigidi zama-chips ku-wafer eyodwa, ukulimala kwezezimali kanye nomonakalo ovela ekusakazeni okugcwele ukonakalisa kungaba mkhulu. Ngakho-ke, ubumsulwa begesi ekhethekile kagesi yinsika eyisisekelo lapho yonke I-Electronics ne-semiconductor izimboni zimi. -Ma yini ukungcola kunganciphisa ukusebenza kwedivayisi, isivuno, kanye nokwethenjwa, ukwenza okuqinile Ubumsulwa begesi Lawula okubalulekile.

EHuazhong Gas, siyaqonda ukuthi amakhasimende ethu ku Izimboni ze-Semiconductor Thembela kithi ukuhlinzeka ngamagesi ahlangana noma adlule "ama-nines amahlanu" (99.999%) noma "ama-nines ayisithupha" (99.9999%) amazinga wokuhlanzana). Lokhu kusho ukuthi noma yini ukungcola kumele kube khona ekugxiliseni okuphansi kunezingxenye ngesigidi (i-PPM) noma izingxenye ngebhiliyoni ngalinye lesigidigidi (PPB). Ukufeza nokuqinisekisa okunjalo ubumsulwa obuphezulu amazinga adinga ubuhlakani ukuhlambululela amasu futhi, ikakhulukazi, athuthukile Ukuhlaziywa kokungcola Izindlela. Ukuba khona kokungalindelekile ukungcola kungakhombisa nezinkinga nge ama-cylinders egesi noma i-supply chain, ukwenza amasheke asezingeni eliphakeme abalulekile. Siqinisekisa ukuthi eyethu Isilinda se-nitrogen Iminikelo, ngokwesibonelo, ahlangabezana nalezi zindinganiso eziqondile, njengoba i-nitrogen ingugesi we-worworse emisebenzini eminingi yokuqamba ama-semiconductor.

Kanjani ngisho nezimpawu zokulandela umkhondo ezingokwemvelo ze-derail semicinductor?

Kwesinye isikhathi kunzima ukucabanga ukuthi kwakuncane kangakanani, a Ukulandelela Ukungcola Kukalwa ezingxenyeni ezithile zezigidigidi (PPB) noma izingxenye nge-trillion ngayinye (PPT), kungadala izinkinga ezibalulekile ezinjalo. Kepha emhlabeni we semiconductor Ezokukhiqiza, lezi microscopic ukungcola zingama-pullight amakhulu. Ake sibheke inqubo evamile yokubukwa kwe-semiconductor: Kubandakanya inqwaba, kwesinye isikhathi amakhulu, ngezinyathelo ezibucayi ezifana nezinto zokugcina (ukubeka phansi amafilimu amancanyana), i-etching (ukususa impahla), kanye nokufakwa kwama-athomu athile). Isinyathelo ngasinye sithembela emvelweni ephelele yamakhemikhali, evame ukudalwa noma ukugcinwa yi Amagesi akhethekile kagesi. Uma a igesi esetshenzisiwe Kwenye yalezi zinyathelo zithwala okungafuneki ukungcola, lokho ukungcola ingafakwa ezingxenyeni ezintekenteke ze semiconductor idivaysi.

Ngokwesibonelo, Ukungcola Kwensimbi Njenge-sodium, i-iron, noma yethusi, ngisho nasekugxileni okuphansi kwe-ultra, kungashintsha kakhulu izakhiwo zikagesi ze-silicon. Bangadala izindlela ezingafuneki ezisebenzayo, okuholela emibukeni emifushane, noma basebenzise "njengezicupho" eziphazamisa ukugeleza kwama-elektroni, kunciphise idivaysi noma benze kwaba ukwehluleka ngokuphelele. A ukungcola Ingaphinde iphazamise ukusabela kwamakhemikhali okuhloswe ngayo kwisinyathelo senqubo. Isibonelo, a -ngcolisayo E-etching gesi kungadala ukufakwa ngaphansi kokunye noma ngaphezulu-ngaphezulu, konakalisa amaphethini aqondile ku-wafer. Umthelela akusona nje kuma-chip ngamunye; Akutholakali ukungcola Udaba lungaholela kuwo wonke amaqembu ama-wafers ahlatshwa umxhwele, okuholela ezigidini zamaRandi ekulahlekelweni, ukubambezeleka kokukhiqiza, kanye nekhanda lokuthengwa kwezimpahla zokuthengwa kwempahla njengoMark Shen, odinga ukuqinisekisa ukuhlinzekwa kwezinto ezizinzile. Lokhu kuqokomisa isidingo esibucayi sokuqina Landelela ukulinganiswa kokungcola kokungcola.

Inselelo ukuthi izinga "elamukelekayo" kunoma yikuphi ukungcola kugcina kuncipha njengoba semiconductor Izici zedivayisi ziba zincane. Okwakuthathwa njengemukelekile ukungcola izinga leminyaka elidlule lingaba yinhlekelele ukonakalisa Namuhla. Le drive engenakuguquguquka ye-miniaturization ibeka ingcindezi enkulu kubakhiqizi begesi kanye nama-lab ahlaziya ukuthuthukisa umkhawulo wokutholwa amakhono. -Lingeneyo phithananasisa Ukungcola, ama-austy amancane othuli angabonakali ngamehlo anqunu, angavimba ukukhanya ngezinyathelo ze-photolithography noma adale iziphambeko ezibonakalayo endaweni engaphezulu. Ngakho-ke, ukulawula wonke amandla ukungcola - Noma ngabe Gaseous, Metallic, noma phithananasisa - kubalulekile. Le khasi uhla lokungcola lokho kungadala ukuthi izingqinamba zikhulu, zigcizelela isidingo sokubanzi Ukuhlaziywa kwegesi.

Yini abahlukumezi abavame kakhulu? Ukuhlonza ukungcola ngamagesi nge-elekthronikhi.

Lapho sikhuluma ngakho Ukungcola ngamagesi ihloselwe i- I-Electronics ne-semiconductor Umkhakha, sibheke ku-Cast of Charport of Chared, ngalinye linamandla okubangela ukulimala okukhulu. Lezi Ukungcola okuzotholwa ingahlukaniswa kabanzi kumafomu e-gaseous, wensimbi, kanye namafomu. Ukuqonda laba bantu abanenkinga evamile kuyisinyathelo sokuqala esisebenzayo Ukuhlaziywa kokungcola nokulawula. Okuqondile Ukungcola okukhona ingahluka ngokuya ngegesi ngokwayo, indlela yayo yokukhiqiza, isitoreji, nokusingathwa.

Gaxe ukungcola kukhona amanye amagesi akhona ku-main igesi ekhethekile. Ngokwesibonelo, ku ubumsulwa obuphezulu I-nitrogen, i-gaseous ejwayelekile ukungcola ingafaka i-oksijini (O₂), umswakama (i-H₂O), i-Carbon Dioxide (Co₂), Co₂), Carbon Moxide (co), kanye ne-hydrocarbons (CHₓ). Umoya-mpilo kanye nomswakama yizinkinga ikakhulukazi njengoba zisebenza kakhulu futhi zingaholela ku-oxidation engafuneki ye semiconductor izinto zokwakha noma imisebenzi yenqubo. Noma ku intshiseko igesi thanda ingonona, lokhu kungaba khona lapho kulandelwa amazinga. Njengenkampani, sivame ukubona izicelo zokuhlaziywa kwe uhla olubanzi lokungcola, kufaka phakathi lezi zinhlobo ezisebenzayo. Isibonelo, amakhono ethu afaka ukukhiqiza inkimbinkimbi Indawo yokukhuthaza Imikhiqizo, lapho ilawulwa yingxenye ngayinye, kufaka phakathi i-gaseous engaba khona ukungcola, kubaluleke kakhulu.

Ukungcola Kwensimbi okunye ukukhathazeka okukhulu. Lawa ama-athomu ezinsimbi ezinjengeSodium (NA), i-Potassium (K), i-calcium (CA), i-Iron (FU), i-Chromium (CR), i-Chromium (AL). Bangavela ezintweni eziluhlaza, imishini yokukhiqiza (njengamapayipi kanye nama-reactors), noma ngisho ama-cylinders egesi bona uqobo uma bengalashwa kahle. Njengoba kushiwo, lezi Ukungcola Kwensimbi ingathinta kakhulu ukusebenza kukagesi semiconductor amadivayisi. Ukuthola lezi emazingeni e-PPB noma e-PPT kudinga amasu wokuhlaziya abucayi afana ne-plasma ehlanganisiwe ehlanganisiwe ye-plasma mass spectromeetry (ICP-MS). Kudingeka futhi sicabangele phithananasisa ndaba. Lezi izinhlayiya ezincane eziqinile noma eziwuketshezi zimiswe ku ukuhamba kwegesi. Bangadala amaphutha abonakalayo kuma-wafers, avimbele ama-nozzles emishini, noma angenise okunye ukungcola. I-Filtration iyisihluthulelo sokususa ama-conclates, kepha ukuqapha amazinga abo nakho kuyingxenye yokugcwala okuphelele isimo segesi Uhlelo. -Nye Amagesi akhethekile kagesi nazo Amagesi awonakalisayo noma Amagesi anobuthi, okunezela enye isendlalelo sobunzima ekuphatheni kwabo nasekuhlaziyweni kwabo, kuqinisekise ukuthi ukungcola Iphrofayili ayikhuli lezi zingozi.

I-ICP-MS: I-Gold Standard yokuthola ukungcola kwensimbi kumagesi we-semiconductor?

Uma kukhulunywa Ukuhlaziywa kokungcola kwensimbi phakathi kwa- Amagesi wokuhlanza aphezulu we-Ultra-High, Kuhlanganiswe ngokungahambi kahle kwe-plasma spectromeetry, noma ICP-MS, kubhekwa kabanzi njengobuchwepheshe obuphambili. Kuyindlela enamandla yokuhlaziya engathola futhi ilinganise uhla olubanzi Ukungcola Okuyisisekelo, imvamisa phansi amazinga aphansi ngokumangazayo - cabanga izingxenye-trillion (PPT) noma izingxenye-per-quadrillion (PPQ) ngezinto ezithile. Lokhu kuzwela yikho ICP-MS sekubaluleke kakhulu ku semiconductor imboni, lapho, njengoba sixoxile khona, ngisho neminwe emincane Ukungcola Kwensimbi kungalimaza ikhwalithi yomkhiqizo.

Kanjani ICP-MS sebenza umlingo wayo? Ngamagama alula, isampula igesi (noma isixazululo esithathwe kugesi) singeniswa ku-plasma eshisa kakhulu, okwenziwe nge ingonona. Le plasma, ukufinyelela amazinga okushisa angu-6,000 kuya ku-10,000 ° C, ayinamandla ngokwanele ukudiliza ama-molecule egesi kanye nama-athomu akhona, kufaka phakathi noma iyiphi Ukungcola Kwensimbi. Lawa ma-ion asuswa kwi-plasma futhi aqondiswe kwi-mass spectrometer. I-mass spectrometer isebenza njengesihlungi esinembile kakhulu, ukuhlukanisa ama-ion ngokususelwa ku-ratio yabo yokukhokhisa. A umtshingo Ngemuva kwalokho kubalwa ama-ion ngesisindo ngasinye, kusivumela ukuthi sikhombe ukuthi yiziphi izinto ezikhona futhi zingakanani. Ikhono le ICP-MS ukuskena i-spectrum ebanzi ye ukungcola kwensimbi kumagesi akhethekile ngasikhathi sinyenza ukuthi isebenze kahle.

Lapho ICP-MS inamandla amakhulu, akunjalo ngaphandle kwezinselelo zayo, ikakhulukazi lapho usebenza Amagesi asetshenziswa ku-semiconductor ukuboniswa. Indlela eyodwa evamile ukubopha ukungcola kusuka kuvolumu enkulu yegesi eqoqweni eliphakathi nendawo noma uketshezi, oluse luhlaziywa ngalo ICP-MS. Kodwa-ke, Direct umjovo oqondile wegesi ku ICP-MS Isistimu futhi iya ngokuya ivame kakhulu kuzinhlelo ezithile, yize idinga izindawo ezikhethekile. Ukukhetha kwendlela kuncike kokuthile Ukungcola kwegesi yentshisekelo, igesi matrix, kanye nokudingekayo umkhawulo wokutholwa. EHuazhong Gas, sitshala imali kakhulu emishini yokuhlaziya yezwe-ye-arty-of-the-art. ICP-MS amakhono, ngoba siyazi ukuthi ukuhlinzeka ngokwethembekile Ukuhlaziywa kokungcola Idatha ibalulekile ethembeni amakhasimende ethu endaweni yethu Ukuhlanzeka okuphezulu ngogesi amagesi. Ukunemba kwe ICP-MS kusiza ukuqinisekisa ukuthi ubumsulwa bamagesi ihlangabezana nezidingo eziqinile ze Ibanga le-elekthronikhi izinto zokwakha.

Kungani ukuhlanzeka kwegesi okungaguquki kungukuxoxisana nge-elekthronikhi kanye nezimboni ze-semiconductor?

Isidingo sokungavuthi Ubumsulwa begesi ku Ama-elekthronikhi kanye nezimboni ze-semiconductor akukhona nje okuthandayo; Kuyisidingo esiyisisekelo esiqhutshwa yi-physics kanye nezomnotho wokukhiqiza amadivaysi wanamuhla. Nga- semiconductor Izici zedivayisi zincipha esikalini se-nanometer, ukuzwela kwazo kunoma yiluphi uhlobo ukonakalisa ama-skyrockets. A ukungcola Lokho kungenzeka ukuthi akunakwa kumadivayisi amadala, amakhulu manje angadala ukwehluleka okuyinhlekelele kuma-cutting-odge-odge-odder ama-chip. Lokhu kuthinta ngokuqondile isivuno - amaphesenti ama-chip amahle nge-perser ngayinye semiconductor Umkhiqizi.

Cabanga ngokwakha okuyinkimbinkimbi kwe-microprocopessor yesimanje noma i-chip ye-memory. Inezigidigidi zama-transestors, ngalinye limangalisa lobunjiniyela be-miniature. Ukusebenza kwalezi zinto zokudlulisela kuncike ezingxenyeni eziqondile zikagesi ze semiconductor izinto ezisetshenzisiwe, ezikhona, zithambekele kakhulu ukungcola. Isibonelo, athile Ukungcola Kwensimbi Angakwazi ukwethula amazinga wamandla angafuneki ngaphakathi kwe-Silicon Band Gap, okuholela ekukhuphukeni kokuvuza kwamanje noma okuncishisiwe kokuhamba. Lokhu kusho kancane kancane, kusebenza kahle, noma amadivayisi angasebenzi ngokuphelele. Gaxe ukungcola Njengomoya-mpilo noma umswakama kungaholela ekwakhekeni kwezendlalelo ezingafundiwe ze-oxide, eziguqula ubukhulu befilimu noma izakhiwo ezibonakalayo ezibalulekile ekusebenzeni kwedivayisi. Okuphelele isimo segesi ihumusha ngokuqondile ku ikhwalithi yomkhiqizo kanye nokwethembeka.

Ngaphezu kwalokho, The Ama-elekthronikhi kanye nezimboni ze-semiconductor zibonakaliswa izinqubo zokukhiqiza eziyinkimbinkimbi futhi ezibizayo. Okukodwa semiconductor Isitshalo sokucebisi ("fab") singabiza izigidigidi zamaRandi ukwakha nokuhlomisa. Le khasi Kusetshenzisiwe amagesi zibalulekile ezitebhisini eziningi zenqubo ezibizayo. Uma a igesi ekhethekile ingcolisiwe nge ukungcola, akuthinti nje ama-wafers njengamanje acutshungulwa; Futhi kungangcolisa imishini yokusebenza ebizayo uqobo. Lokhu kungaholela ekuvumeni okwengeziwe kokuhlanza kanye nokufakelwa, ukwengeza izindleko zokukhiqiza kanye nokuphazamisa amashejuli wokukhiqiza - iphuzu elikhulu lobuhlungu obufana noMark Shen, othembela ekunikezelweni ngesikhathi esifanele sokuhlangabezana nezidingo zamakhasimende akhe. Ngakho-ke, ukuqinisekisa ubumsulwa begesi ekhethekile kagesi ngokusebenzisa okuqinile Ukuhlaziywa kokungcola Ingabe isu elibucayi lokunciphisa ubungozi kulo lonke i-supply chain. Ukugxila ku Amagesi amsulwa aphezulu ayinakulangazelela ngoba izigxobo ziphakeme kakhulu.

Yiziphi izinselelo ezibalulekile esibhekana nazo ekuhlaziyeni ukungcola kwensimbi ngamagesi akhethekile?

Ukuphunisa Ukungcola Kwensimbi phakathi kwa- amagesi akhethekile, ikakhulukazi lezo ezisetshenziswe ku semiconductor imboni, iveza isethi yezinselelo ezihlukile. Ubunzima obukhulu buvela ekugxilweni okuphansi kakhulu lapho lezi ukungcola kungaba yinkinga - kaningi ezingxenyeni-per-bhiliyoni (PPB) noma ngisho nezingxenye ze-Per-Trillion (PPT). Ukuthola nokunciphisa ngokunembile amanani anjalo anjalo adinga ukuthi akuwona nje kuphela ukuhlaziya okuhlaziya kokuhlaziya okufana ICP-MS Kepha futhi uhlanze ngokuhlukile okuvinjelwe_aryytical izindawo kanye nemifanekiso ephathelene nesampula yesampula yokugwema ukwethula ngaphandle ukonakalisa.

Inselelo eyodwa ebalulekile isingeniso sesampula. -Ngakanani Kusetshenziswe amagesi akhethekile phakathi kwa- Ama-Electronics zisebenza kakhulu, zilimaze kakhulu, noma i-pyrophophoric (zikhaza ngokuzenzakalelayo emoyeni). Ngokuphepha nangokuphumelelayo nokudlulisela lokhu Amagesi kuthuluzi lokuhlaziya njenge ICP-MS ngaphandle kokushintsha isampula igesi noma ukungcolisa ithuluzi kudinga izindawo ezikhethekile nezinqubo zokuphatha. Ngokwesibonelo, ukujova ngokuqondile a igesi esolisayo njenge-hydrogen chloride (hcl) ibe ngcono ICP-MS uhlelo lungalimaza kakhulu. Ngakho-ke, izindlela eziqondile, njengokuphamba kwe-Impinger (kuhlabelela igesi ngokusebenzisa uketshezi ukuze kuthathwe ukungcola) Noma ukudonsa kwe-cryogenic, kuvame ukuqashwa. Kodwa-ke, lezi zindlela zingaletha imithombo yazo engaba khona ukonakalisa noma ukulahleka kokuhlaziya uma kungenziwanga kahle. Ukukhethwa kwe igesi yenethiwekhi Ukuze ujabule, uma kudingeka, kufanele futhi kube nge-Indeccable ubumsulwa.

Enye inselelo "umphumela we-matrix." Inqwaba igesi ngokwayo (e.g., ingonona, i-nitrogen, i-hydrogen) ingaphazamisa ukutholwa kwe Landelela Ukungcola. Ngokwesibonelo, ku ICP-MS, i-plasma yakhiwa ngobuningi igesi kungadala i-polyatomic ion enesilinganiso esifanayo sokushaja njengoba kwelitshe Ukungcola Kwensimbi, okuholela kwimikhosi engamanga noma ukweqiwa okungalungile. Abahlaziyi kumele basebenzise amasu afana nokushayisana / amaseli okuphendula ku ICP-MS noma ukulungiswa okuphezulu kwe-mass spectrometry ukunqoba lokhu kuphazamiseka okubonakalayo. Ngaphezu kwalokho, izindinganiso zokulinganisa ezisetshenziselwa ukwakheka Ukungcola Kwensimbi kumele kube ngokunembe kakhulu futhi kulandeke, futhi inqubo yonke yokuhlaziya kumele iqinisekiswe ukuqinisekisa ukwethenjwa kwe Ukuhlaziywa kokungcola Imiphumela. Thina, njengomphakeli, futhi sikhathazeka ngobuqotho be ama-cylinders egesi namandla abo okunikela Ukungcola Kwensimbi Ngokuhamba kwesikhathi, okudinga ukulawulwa kwekhwalithi okuqhubekayo.

Ngabe ukusebenzisa idivaysi yokushintshana kwegesi kuthuthukisa ukunemba kokulinganisa ukulinganisa okungekho emthethweni?

Yebo, Kusetshenziswa idivaysi yokushintshana kwegesi ngempela ungadlala indima enkulu ekuthuthukiseni ukunemba kwe Landelela ukulinganiswa kokungcola kokungcola, ikakhulukazi lapho ubhekene nenselele igesi ama-matric noma lapho kuhlose ukubheja okuphansi Imikhawulo yokutholwa. A insiza yokushintshana kwegesi, kwesinye isikhathi okubizwa ngokuthi uhlelo lokuqeda i-matrix, empeleni lusebenza ngokukhipha inqwaba igesi (isakhi esiyinhloko se isampula igesi) ngenkathi kugxila Landelela Ukungcola yentshisekelo. Lesi sinyathelo sokuqala sokuhlushwa singathuthukisa kakhulu ukuzwela kwamasu alandelayo wokuhlaziya afana ICP-MS noma Igesi Chromatograph izinhlelo.

Isimiso esingemuva kwabaningi Amadivayisi Wokushintshana Kwegesi kubandakanya ulwelwesi oluvumelekile noma i-akhethiseli ye-adsorption / deforption mechanism. Isibonelo, ulwelwesi lwe-Palladium lungasetshenziswa ukuze ulususe i-hydrogen kusuka ku ingxube yegesi, ukuvumela okunye Ukungcola ngamagesi ukugxila futhi kudluliselwe ku umtshingo. Ngokufanayo, izinto ezikhethekile ze-adsorbent zingabamba ezinye ukungcola kusuka ekugelezeni igesi ukusakazwa, okungase kuncishiswe nge-shisa ngendlela encane ehlanzekile igesi yenethiwekhi Ukuhlaziywa. Ngokunciphisa inani lenqwaba igesi Ukufinyelela umtshingo, lawa madivaysi anciphisa ukungqubuzana matrix, wehlise umsindo wasemuva, futhi ukhulise ngempumelelo isilinganiso se-Signal-to-Noise selitshe Landelela Ukungcola. Lokhu kungaholela ephansi umkhawulo wokutholwa.

Izinzuzo ze Kusetshenziswa idivaysi yokushintshana kwegesi zibonakala ikakhulukazi lapho zihlaziya Ukungcola ngogesi Amagesi okunzima ukuphatha ngokuqondile noma okubangela ukuphazamiseka okukhulu kwizinsimbi zokuhlaziya. Isibonelo, lapho uzama ukukala oksijini noma umswakama osebenzayo igesi ekhethekile, a insiza yokushintshana kwegesi ingahlukanisa lokhu ukungcola ku-benign ngokwengeziwe igesi yenethiwekhi thanda ingonona noma i-helium ngaphambi kokufika umtshingo. Lokhu akugcini nje ngokuthuthukisa ukunemba kepha kungavikela nezinto ezibucayi zokuhlaziya. Njengomenzi we 99.999% purity 50l Cylinder Xenon Gas, siyaqonda ukubaluleka kwamasu athuthukile aqinisekisa okuhlukile ubumsulwa okungavamile futhi amagesi akhethekile. Lobu buchwepheshe busiza ekubucayi Ukuhlanzwa kwegesi nezigaba zokuqinisekisa.

Isixhumanisi esibucayi: Ukuhlaziywa kokungcola ngamagesi asetshenziswa ngqo ekukhiqizweni kwe-semiconductor.

Le khasi Amagesi asetshenziswe ngqo e-semiconductor ekwenziweni yi-Lifeblood yenqubo yokuqamba. Lokhu kufaka hhayi nje Amagesi amaningi njenge-nitrogen futhi ingonona, kodwa futhi nohlolo oluningi Amagesi akhethekile kagesi njenge Amagesi e-EpiTaxial (e.g., uSilane, i-Germane ekhulayo izingqimba zekristalu), amagesi (e.g., NF₃, SF₆, Cl₂ for Patterning), Amagesi wokufakwa kwe-Ion (e.g., i-arsine, i-phosphine, i-boron trifluoride ye-doping), kanye namagesi wokubeka. Kokunye kwalokhu Kudingeka amagesi, izinga nohlobo lokwamukelekayo ukungcola achazwa ngokuqinile ngoba noma yikuphi ukuphambuka kungakwazi ukuhumusha ngokuqondile ku-defects ku- semiconductor wafela. Lokhu kwenza Ukuhlaziywa kokungcola Okwalokhu inqubo amagesi Isinyathelo esibaluleke kakhulu sokulawula ikhwalithi.

Cabanga ngokubekwa kwesendlalelo se-silicon dioxide, isethalethi esivamile kuma-transistors. Uma umoya-mpilo igesi iyasetshenziswa Kule nqubo iqukethe i-hydrocarbon ukungcola, I-Carbon ingafakwa engxenyeni ye-oxide, ehlisa izakhiwo zayo ezifaka amandla futhi iholela ekuhlulekeni kwamadivayisi. Ngokufanayo, uma i-etching igesi iqukethe okungalindelekile ukungcola, kungashintsha isilinganiso se-eTCH noma ukhethe, okuholela kwizici ezikhulu kakhulu, zincane kakhulu, noma zibunjwe ngokungalungile. Ngisho ne- ukungcola ku intshiseko igesi thanda Isilinda segesi ye-Argon Isetshenziselwa ukushushuluza kungadluliselwa endaweni ebukhali, okuthinta ikhwalithi yefilimu. Umthelela we ukungcola kuvame ukucaciswa, okusho ukuthi an ukungcola Kubekezelelwe ngesinyathelo esisodwa kungaba nzima -ngcolisayo kolunye.

Lesi sixhumanisi esibucayi sidinga indlela ephelele Ukuhlaziywa kokungcola. Akukona nje ukubheka umkhiqizo wokugcina; Kubandakanya ukuqapha izinto ezingavuthiwe, imifudlana esebenza ngaphakathi, nasekupheleni kokugcina igesi izigaba zokuhlanza. Ingomane I-semiconductor ekhethekile amagesi, ukucaciswa kwe Ukungcola ku-semiconductor Izicelo zivame ukuqina kakhulu, zicindezela imingcele yokutholwa kokuhlaziya. Sisebenzisana kakhulu namakhasimende ethu ku semiconductor kanye ne-elekthronikhi inkambu yokuqonda okuthile kwayo ukungcola izinzwa zehlukile Amagesi kanye nokuhlanganiswa kwegesi. Le ndlela yokubambisana isiza ukuqinisekisa ukuthi amagesi akhethekile akhethekile Sihlinzeka njalo sihlangabezana nezidingo ezifunwayo zezinqubo zazo zokukhiqiza ezithuthukile. Inselelo ilele ekutholeni a uhla olubanzi lokungcola emazingeni ancipha njalo.

Ngaphesheya kwelebhu: Imikhuba emihle yokuphatha amagesi aphezulu wokuhlanza ubumsulwa ukuvikela ukungcoliswa.

Ukuqinisekisa ubumsulwa begesi ekhethekile kagesi ayipheli lapho igesi ishiya indawo yethu yokukhiqiza. Ukugcina lokho ubumsulwa yonke indlela eya ephuzwini lokusebenzisa ku semiconductor Indwangu idinga ukunakwa ngokucophelela ukuphatha, ukugcinwa nokusatshalaliswa. Ngisho okuphezulu kakhulu igesi ehlanzekile ingangcoliswa uma ingaphathwa kahle. EHuazhong Gas, asigxili nje ekukhiqizeni Amagesi ahlanzekile aphezulu Kepha futhi weluleke amaklayenti ethu ngemikhuba emihle kakhulu ukuvikela phansi ukonakalisa.

Imikhuba emihle kakhulu ebalulekile ifaka:

• Ukukhetha kwengxenye: Zonke izingxenye ohlelweni lokulethwa kwegesi - kufaka phakathi ama-cylinders egesi, abalawuli, ama-valve, ama-tubing, kanye nokufakelwa - kumele kwenziwe ngezinto ezifanele (isb. Ubumsulwa be-Ultra-High (UHP) insizakalo. Kusetshenziswa izinto ezingalungile kungaholela ekuphumeni kwe ukungcola noma a ukungcola kwensimbi Ukungena ku ukuhamba kwegesi.
• Ubuqotho besistimu: Uhlelo lokulethwa kwegesi kumele luvuzwe. Ngisho nokuvuza okuncane kungavumela umyeni ukungcola njengomoya-mpilo, umswakama, futhi phithananasisa Matter ukufaka uhlelo, ukuyekethisa Ubumsulwa begesi. Ukuhlola okuvuzayo okujwayelekile kubalulekile.
• Izinqubo Zokuhlanza: Izinqubo ezifanele zokuhlanza zibalulekile ngaso sonke isikhathi lapho ukuxhumeka kwenziwa noma isilinda sishintshiwe. Lokhu kubandakanya ukudonsa imigqa nge Ukumsulwa okuphezulu kwegesi intshiseko (thanda ingonona noma i-nitrogen) ukususa noma yimuphi umoya obhajwe noma ukungcola. Ukuhlanza okunganele kungumthombo ojwayelekile we ukonakalisa. Sivame ukuncoma amaphaneli we-purge azenzakalelayo ukuqinisekisa ukuvumelana.
• Okokusebenza okunikezelwe: Kusetshenziswa abalawuli abazinikezele kanye nemigqa ngokuqondile Amagesi noma imindeni ye Amagesi kungavimbela ukungcoliswa kokuwela. Lokhu kubaluleke kakhulu lapho ushintsha phakathi kwe intshiseko igesi kanye nokusebenza okusebenzayo noma igesi esolisayo.
• Ukuphathwa kwe-Cylinder: Ama-cylinders egesi kufanele iphathwe ngokunakekela ukugwema ukulimala. Kufanele zigcinwe ezindaweni eziqokiwe, ezinomoya omuhle kakhulu, futhi "ekufeni kokuqala" kumele zisetshenziswe. Ukusebenzisa umswakama ozinikele nomoya-mpilo Abahlaziyi emaphoyinti ababucayi bangasiza nokuqapha noma yikuphi ukungena kwalokhu okujwayelekile ukungcola.

Kumakhasimende afana noMark Shen, athola amagesi wokuthengisa kabusha noma ukusetshenziswa ekwenziweni, ukuqonda lezi zindlela zokuphatha kubalulekile ukuze ulondoloze ikhwalithi yomkhiqizo bathembisa kumakhasimende abo. Kungumsebenzi owabiwe. Siqinisekisa ukuthi eyethu I-hydrogen cylinder Imikhiqizo, ngokwesibonelo, iyagcwaliswa futhi igcinwe ukuvikela ukungcola I-Ingress, kepha uhlelo lomsebenzisi wokugcina ludlala indima ebaluleke ngokulinganayo. Ukulwa no ukungcola ngumzamo oqhubekayo wokukhiqiza ukufaka isicelo.

Ugqolozele eBal Crystal Ball: Yiziphi izinto ezintsha zesikhathi esizayo esingalindela ekutholweni kokungcola kwamagesi webanga le-elekthronikhi?

Ukufuna okuphezulu ubumsulwa phakathi kwa- Amagesi webanga le-elekthronikhi futhi uzwela kakhulu ukutholwa kokungaphenduki Izindlela ziwuhambo oluqhubekayo, oluqhutshwa ijubane elingapheli lokuvuselela okusha ku semiconductor imboni. Njengoba izici zedivayisi zincipha ekungeneni kwendawo ye-nanometer eyi-10 kanye nezinto ezintsha zokwakha kanye nokwakhiwa kwezakhiwo (njenge-3D NAND ne-All-azungeze ama-transter Landelela Ukungcola izophonswa ngokwengeziwe. Lokhu kuzodinga ukuthuthuka okwengeziwe kuzo zombili Ukuhlanzwa kwegesi ubuchwepheshe futhi Ukuhlaziywa kokungcola amakhono.

Singalindela izitayela eziningana:

• Imikhawulo yokutholwa ephansi: Amasu okuhlaziya afana ICP-MS, I-chromatography yegesi-ubuningi be-spectrometry (GC-MS), kanye ne-Cavity Ring-Down Spectroscopy (CRDS) izoqhubeka nokuvela, ukusunduza Imikhawulo yokutholwa Okwenzi uhla lokungcola Phansi kumazinga we-ppt eyodwa noma ngisho nakusizinda se-PPQ. Lokhu kuzodinga izinto ezintsha emithonjeni ye-ion, ama-mass analyzers, futhi umtshingo ubuchwepheshe.
• In-Situ kanye nokuqapha kwesikhathi sangempela: Kunesidingo esikhulayo sezinhlelo zokuhlaziya ezingakwazi ukuqapha Ubumsulwa begesi ngesikhathi sangempela, ngqo endaweni yokusebenzisa ngaphakathi kwe semiconductor Indwangu. Lokhu kuvumela ukutholwa ngokushesha kwanoma yikuphi ukonakalisa imicimbi noma ukudonsa ngaphakathi ukungcola Amazinga, ukunika amandla isenzo sokulungisa ngokushesha kanye nokunciphisa ukulahleka komkhiqizo. Izinzwa ezincane nama-algorithms athuthukile azodlala indima ebalulekile lapha.
• Ukuhlaziywa kwezingxube zegesi eziyinkimbinkimbi: -Phambili semiconductor izinqubo zingafaka inkimbinkimbi eyengeziwe Ukuhlanganiswa kwegesi ngezakhi eziningi ezisebenzayo ezisebenzayo. Ukuphunisa ukungcola Kuma-matrices anjalo ayinselele kuzodinga amasu amasha wokuhlaziya namathuluzi wokuhumusha wedatha amabiwo. Ikhono lokukala a ukungcola Kwingxenye eyodwa ngaphandle kokuphazamiseka kwabanye kuzoba nzima.
• Gxila ekungcoleni "Killer": Ucwaningo luzoqhubeka nokuthola imininingwane ethile Ukungcola ku-semiconductor Ukucutshungulwa okunomthelela omkhulu ongafanele ekusebenzeni kwensiza noma ekuvuthweni, ngisho nasemazingeni aphansi kakhulu. Izindlela zokuhlaziya zizobhekiswa zibhekiswe kakhudlwana kulokhu "Killer" ukungcola.
• I-Data Analytics ne-AI: Inani elikhulu lemininingwane ekhiqizwa yi-Advanced Ukuhlaziywa kokungcola Izinhlelo zizohlinzekwa kusetshenziswa i-AI kanye nomshini wokufunda ukukhomba izitayela, zibikezela amandla ukonakalisa izingqinamba, nokwandisa Ukuhlanzwa kwegesi izinqubo. Lokhu kungasiza ekuphatheni kwekhwalithi esebenzayo kunokuba kuxazululwe izinkinga ezisebenzayo.

E-Huazhong Gas, sizibophezele ekuhlaleni phambili kwale ntuthuko. Siqhubeka ngokutshala imali ekucwaningeni nasekuthuthukisweni, sisebenzisana nabalingani bezimboni kanye nezikhungo zemfundo ukuqhubekisela phambili isayensi ye igesi ebuhlungu ephezulu ukukhiqiza kanye Ukuhlaziywa kokungcola. Kumakhasimende ethu, okubandakanya nalawo njengekhwalithi-njengoMark Shen, lokhu kusho ukunikezwa okuthembekile Amagesi akhethekile kagesi okuhlangabezana nezidingo ezivelelayo ze Ama-elekthronikhi kanye nezimboni ze-semiconductor. Uhla lwethu lwe Alulimoni, yaziwa ngokuvuselelwa kwayo nokusetshenziswa kwezicelo ezikhethekile, futhi izinzuzo ezivela kulokhu kuhlolisiswa kokuhlaziywa okuthuthukile ukuze kuqinisekiswe okuncane ukungcola amazinga.

Ukubekezela okusemqoka ukukhumbula:

• Amagesi akhethekile kagesi zibalulekile ku- Ukukhiqiza i-semiconductor, nezona ubumsulwa akuxoxiswanga.
• -Lingeneyo Landelela Ukungcola, kulinganiswe ku-PPB noma nge-PPT, kungadala iziphambeko ezinkulu nokulahleka kwezithelo ngaphakathi semiconductor amadivayisi.
• -Jwayelekile Ukungcola ngamagesi faka amanye amagesi (njenge-O₂, H₂O), Ukungcola Kwensimbi, futhi phithananasisa ndaba.
• ICP-MS ubuchwepheshe begumbi lokuthola a uhla olubanzi lokungcola, ikakhulukazi Ukungcola Kwensimbi, emazingeni aphansi we-Ultra.
• Ukugcina Ubumsulwa begesi kudinga ukuphathwa ngokucophelela nokwethembeka kohlelo kusuka ku- Isilinda kaphethiloli kuze kube sezingeni lokusebenzisa ukuvimbela ukonakalisa.
• Ikusasa lizobona liphansi Imikhawulo yokutholwa, ukuqapha kwangempela, kanye ne-ai-eqhutshwa Ukuhlaziywa kokungcola ingomane Ibanga le-elekthronikhi amagesi.
• Ukulawula wonke amandla ukungcola kubalulekile ekuqinisekiseni ikhwalithi yomkhiqizo kanye nokwethenjwa kwesimanje Ama-Electronics.