I-Ammonia (NH₃), njenge-realent ebalulekile yamakhemikhali, inezicelo ezihlangene ezinkundleni ezahlukahlukene zezimboni, neqhaza layo libaluleke kakhulu ekukhiqizweni kwe-semiconductor. I-Amoniya idlala indima ebalulekile ezigabeni eziningana zokukhiqizwa kwe-semiconductor, kufaka phakathi ukubekwa kwama-nitrides, i-ion ukufakwa kanye nokuhlanzwa, ukuhlanza nezinqubo ze-doping. Le ndatshana izolungisa ekusetshenzisweni kwe-ammonia embonini ye-semiconductor, ihlaziya indima yayo ebalulekile ekuthuthukiseni ukusebenza kwensiza, ukunciphisa izindleko, kanye nokuxoxa ngezinselelo ezibhekene nazo kanye nezindlela zokuthuthuka ezizayo.

1. Izakhiwo eziyisisekelo kanye nokuziphatha kwamakhemikhali kwe-ammonia

I-Amonia iyindawo ehlanganisiwe eyenziwe nge-nitrogen ne-hydrogen, eyaziwa nge-alkalinity yayo eqinile futhi ivame ukutholakala kumanyolo wezimboni we-nitrogen. I-Ammonia ikhona njengegesi emazingeni okushisa asekamelweni kodwa ingafakwa amazinga okushisa aphansi, okwenza kube ngumthombo wegesi osebenzayo. Emkhakheni we-semiconductor, izakhiwo zamakhemikhali ze-ammonia zikwenza kube ngxenye esemqoka yezinqubo ezimbalwa ezibucayi, ikakhulukazi ku-Chemical Vapor Design (CVD), nokuhlanza / ukuhlanganisa imisebenzi.

Ama-molecule e-ammonia angasabela ngezinsimbi ezahlukahlukene, i-silicon, nezinye izinto zokwakha ama-nitrides noma azenze. Lokhu kusabela akukusizi nje kuphela ekwakheni izinto ezifiselekayo zefilimu kodwa futhi kuthuthukisa nogesi, okushisayo, kanye nemishini yezinto zokwakha, ngaleyo ndlela kuthuthukiswa ubuchwepheshe be-semiconductor.

2. Izicelo ze-ammonia ekukhiqizeni kwe-semiconductor

I-Amoniya idlala indima ebalulekile ekukhiqizeni i-semiconductor, ikakhulukazi kulezi zindawo ezilandelayo:

2.1 Ukubekwa kwamafilimu amancane we-nitride

Esikhathini sama-semiconductor e-semiconductor e-semicide, amafilimu amancane, anjenge-silicon nitride (i-SITNN₄), i-aluminium nitride (i-ALN), ne-titanium nitride (i-titanium nitride (i-titanium nitride (tin), asetshenziswa izabelo zokuzivikela, noma izinto ezisebenzayo. Ngesikhathi sokubekwa kwalawa mafilimu ama-nitride, i-ammonia isebenza njengomthombo obalulekile we-nitrogen.

I-Chemical Vapor Deposition (CVD) ingenye yezindlela ezivame kakhulu ze-nitride ifilimu. Amoniya Iphendula ngamagesi anjenge-sane (sih₄) emazingeni okushisa aphezulu okubola futhi akha amafilimu e-silicon nitride. Ukuphendula kungokulandelayo:

I-3sih4 + 4NHH3 → I-SI3N4 + 12h2

Le nqubo iholela ekwakhekeni kwengqimba eyunifomu ye-silicon nitride endaweni ye-silicon wafer ebusweni. I-Ammonia inikeza umthombo ozinzile we-nitrogen futhi inika amandla ukulawulwa okuqondile kokusabela neminye imithombo kaphethiloli ngaphansi kwemibandela ethile, ngaleyo ndlela elawula ikhwalithi, ubukhulu, kanye nokufana kwefilimu.

Amafilimu we-nitride anokuqina okuhle kakhulu okushisayo, ukufakwa kukagesi, kanye nokumelana no-oxidation, okwenza babaluleke kakhulu ekukhiqizweni kwe-semiconductor. Zisetshenziswa kabanzi kwiziSekethe ezihlanganisiwe (i-ICS) njengezendlalelo zokufakwa kwezingeniso, izingqimba ze-electrode zodwa, namafasitela abonakalayo kumadivayisi we-Optoelectronic.

2.2 ion ukufakwa kanye nokudonsa

Amoniya Ibuye idlale indima ebalulekile kwinqubo yokudonswa kwezinto ze-semiconductor. I-DoPing yindlela ebalulekile esetshenziselwa ukulawula ukuqina kukagesi kwezinto zokwakha ezisetshenziswayo zamadivayisi we-semiconductor. I-Amonia, njengomthombo osebenza kahle we-nitrogen, imvamisa isetshenziswa ngokuhlangana namanye amagesi (njenge-phosphine ph₃ kanye ne-diborane ph₃ kanye ne-diborane B₂h₆) ukuze ifake ama-nitrogen afane ne-silicon ne-gallium arsenide (gaas) nge-ion ukufakwa.

Isibonelo, i-nitrogen doping ingashintsha izakhiwo zikagesi ze-silicon ukudala uhlobo lwe-n-texmector. Ngezinqubo ezisebenzayo ze-nitrogen doping, i-ammonia ihlinzeka ngomthombo wobumsulwa we-nitrogen, iqinisekisa ukulawulwa okuqondile kokugxila kokudonsa. Lokhu kubalulekile encazelweni miniaturization kanye nokukhiqizwa kwamadivaysi aphezulu okusebenza okuphezulu kakhulu okuhlanganisiwe (VLSI) ukukhiqiza.

2.3 Ukuhlanza nokufaka

Izinqubo zokuhlanza nezi-etching ziyisihluthulelo sokuqinisekisa ikhwalithi ephezulu yamadivayisi ekukhiqizweni kwemithimonductor. I-Amonia isetshenziswa kabanzi kulezi zinqubo, ikakhulukazi ku-plasma etching kanye nokuhlanza amakhemikhali.

E-plasma etching, i-ammonia ingahlanganiswa namanye amagesi (njenge-chlorine, i-CL₂) ukusiza ukususa ukungcoliswa kwezinto eziphilayo, izingqimba ze-oxide, nokungcola kwensimbi kusuka endaweni ephansi. Isibonelo, i-ammonia iphendula ngo-oksijini ukukhiqiza izinhlobo ze-oxygen ezisebenzayo (ezinjenge-O₃ ne-O₂), ezisusa ngempumelelo ama-oxide angaphezulu futhi aqinisekise ukusebenza ngezinqubo ezilandelayo.

Ngaphezu kwalokho, i-ammonia ingasebenza njenge-solvent ezinhlokweni zokuhlanza, isiza ukususa izinsalela zokulandela umkhondo ezakhiwe ngenxa yokusabela kwamakhemikhali noma ukucubungula ubumsulwa obuphezulu be-wafer.

3. Izinzuzo ze-ammonia embonini ye-semiconductor

I-Ammonia inikeza izinzuzo eziningana e-semiconductor ekhiqiza, ikakhulukazi kulezi zindawo ezilandelayo:

3.1 umthombo osebenza kahle we-nitrogen

I-Ammonia ngumthombo osebenza kahle futhi omsulwa we-nitrogen ohlinzeka ngokuhlinzekwa okuqinile futhi okuqondile kwama-athomu we-nitrogen wokulungiswa kwamafilimu we-nitride nezinqubo zokudla. Lokhu kubalulekile ekubumbeni kwamadivayisi amancane a-micro- kanye nano-scale ekukhiqizweni kwe-semiconductor. Ezimweni eziningi, i-ammonia iyasebenza futhi ilawulwa kunamanye amagesi omthombo we-nitrogen (anjenge-nitrogen gesi noma i-nitrogen oxides).

3.2 Ukulawulwa Kwenqubo Ehle kakhulu

Ukuvuselelwa kwe-ammonia kuyakuvumela ukulawula kahle amanani okusabela kanye nobukhulu befilimu ezinhlokweni ezihlukahlukene eziyinkimbinkimbi. Ngokushintsha izinga lokugeleza kwe-ammonia, izinga lokushisa, nesikhathi sokuphendula, kungenzeka ukuthi ulawule ngokunembile ubukhulu, ukufana, kanye nezimpawu zokwakheka kwamafilimu, ngaleyo ndlela wenze kahle ukusebenza kwamadivayisi.

3.3 Ukusebenza kwezindleko kanye nobungane bezemvelo

Uma kuqhathaniswa namanye amagesi omthombo we-nitrogen, i-ammonia iphansi ngezindleko futhi inokusebenza kahle kwe-nitrogen okusetshenziswayo, okwenza kube yinzuzo enkulu ekukhiqizweni okukhulu kwemithi ye-semiconductor. Ngaphezu kwalokho, ukuvumelanisa kabusha kwe-ammonia nokusebenzisa kabusha ubuchwepheshe sekuthuthukile ngokwengeziwe, kufaka isandla ekubeni nobungane bayo bezemvelo.

4. Ukuphepha kanye Nezinselelo Zemvelo

Naphezu kwendima yayo ebalulekile ekwenziweni kwemithi ye-semiconductor, i-ammonia iveza izingozi ezingaba khona. Emazingeni okushisa ekamelo, i-ammonia yigesi, futhi ngendlela yayo ye-liquid, iyawohloka kakhulu futhi inobuthi, idinga izindlela zokuphepha eziqinile ngesikhathi sokusetshenziswa.

1. Ukugcinwa Nokuhamba: I-Amoniya kufanele ligcinwe emazingeni okushisa aphansi nezingcindezi eziphakeme, zisebenzisa iziqukathi ezikhethekile namapayipi ukuvimbela ukuvuza.
2. Ukuphepha kokusebenza: Abasebenza emigqeni yokukhiqiza i-semiconductor badinga ukugqoka imishini yokuvikela, efana nama-goggles, amagilavu ​​kanye namamaski wegesi, ukuvikela ukuvezwa kwe-ammonia emzimbeni womuntu.
3. Ukungcola Kwegesi Yegesi: Ukusetshenziswa kwe-ammonia kungakhiqiza amagesi angcolile okungcola okulimazayo, amasistimu wokwelashwa awohlokayo azosebenza ukuze aqinisekise ukuthi ukuphuma kuhlangabezana namazinga wemvelo.

Njengoba izinqubo zokukhiqiza ze-semiconductor ziyaqhubeka nokuthuthuka futhi isidingo sokusebenza kwensiza ephakeme, iqhaza le-ammonia embonini lizoqhubeka likhula. Lokhu kuyiqiniso ikakhulukazi kumasetheli ahlanganisiwe weNano-Scale ahlanganisiwe, ama-Chips we-Quantum Computing, kanye nobuchwepheshe bokupaka okuthuthukile. Ngaphezu kwalokho, njengoba izimiso zezemvelo ziba nzima, ukuthuthukiswa kokukhiqizwa okuluhlaza okotshani kanye nobuchwepheshe bokuvuselela kabusha kwe-ammonia kuzoba yinto ebucayi esikhathini esizayo embonini.

Izicelo ze-ammonia embonini ye-semiconductor zinikeza isisekelo esiqinile sokuthuthukiswa kwe-elekthronikhi yanamuhla. Indima yayo ekwenzeni ngcono ukusebenza kahle kokukhiqiza, ukunciphisa izindleko zokukhiqiza, nokushayela ubuchwepheshe obusha kubalulekile. Njengoba kuthuthukiswa ubuchwepheshe, uhlelo lokusebenza lwe-ammonia luzoqhubeka nokwandisa, ukusiza imboni ye-semiconductor yavela ekusebenzeni kahle kanye nokusimama kwemvelo.

Amoniya, njenge-realent ebalulekile yamakhemikhali, idlala indima ebaluleke kakhulu ekwenziweni kwemithimonductor. Kubaluleke kakhulu ekugcinweni kwamafilimu we-nitride, doping, nezinqubo zokuhlanza / zokuhlanza. Ngenqubekela phambili eqhubekayo yobuchwepheshe be-semiconductor, izicelo zika-ammonia zisethwe ukukhulisa, ukwenza iminikelo ebalulekile kwintuthuko yezobuchwepheshe nokusiza imboni ye-semiconductor yavela ngendlela esebenza kahle nenemvelo.