Besilokhu sisebenza efektri eChina ekhethekile ekukhiqizeni amagesi wezimboni. Ukusuka endaweni yami ephakeme, ngibone ukuvela kobuchwepheshe obumangalisayo, bonke banikwa amandla yinto iningi labantu abangaliboni: amagesi amsulwa aphezulu. Ama-microchips amancane ocingweni lwakho, ikhompyutha, nemoto izimangaliso zobunjiniyela banamuhla, kepha ukudalwa kwawo akunakwenzeka ngaphandle kokuthola okunembile futhi okungenaphutha kwalezi zinto ezikhethekile.

Uyakuqonda ukubaluleka kwekhwalithi kanye ne-chain ethembekile yokunikezela, kepha ungahle uzibuze ngobani Izindinganiso zamagesi ama-semiconductor ziphakeme kakhulu. Kungani ukuthunyelwa kwe-argon kudinga ukuba ngu-99.9999% okumsulwa? Lo mhlahlandlela uzobuyisa isihenqo emhlabeni we-semiconductor. Sizohlola amagesi athile asetshenzisiwe, abakwenzayo, nokuthi kungani ubumsulwa babo buyinto eyodwa ebucayi kakhulu. Ekupheleni, uzoba nokuqonda okucacile kwemikhiqizo oyitholile futhi uhlomele kangcono ukuxhumana nenani labo kumakhasimende akho.

Kungani amagesi akhethekile agxeka kakhulu ukubonwa kwe-semiconductor?

Cabanga nje ukwakha i-skyscraper lapho okusanhlamvu okukodwa okuhleliwe kungadala lonke isakhiwo ukuba siwa. Lelo izinga lokunemba elidingekayo ku Ukukhiqiza i-semiconductor imboni. "Amabhulokhi wokwakha" ale mboni awekho izitini nodaka, kepha ama-athomu, futhi amathuluzi "avame kakhulu amagesi. Konke into engekho ye umjikelezo ohlanganisiwe kwenzeka ngesilinganiso semicroscopic, lapho izingqimba zezinto zokwakha, imvamisa kuphela ama-athomu ambalwa, afakwa ngaphakathi noma afakwe kude a silicon wafer.

Lezi Izinqubo ze-semiconductor kuyazwela kakhulu. Noma iyiphi inhlayiya engafuneki noma yamakhemikhali ukungcola kungaphazamisa ukwakheka okubucayi kwe-microchip, ukuyinikeza okungenamsebenzi. Yilapho Kusetshenziswa amagesi. Bakha izindawo ezihlanzekile ze-Ultra, bahlinzeka ngezinto ezivuthiwe zezendlalelo ezintsha, futhi benze njengamakhemikhali "scalpels" abakha izindlela eziyinkimbinkimbi zogesi. Le khasi Inqubo Yokukhiqiza i-Semiconductor umdanso oyinkimbinkimbi we ukusabela kwamakhemikhali, futhi amagesi abadansi abaholayo. Ngaphandle kokuthola okuhlala njalo, okuthembekile, futhi okucacile kwalawa magesi, ama-elekthronikhi anamuhla ngeke avele abe khona.

Le khasi Amagesi asetshenziswa ekukhiqizweni kwe-semiconductor akuyona imikhiqizo yakho ejwayelekile yezimboni. Zizokwenziwa ukufeza amazinga okuhlanza okunzima ukuqonda, okuvame ukukalwa ezingxenyeni ezithile zezigidigidi noma izingxenye nge-trillion ngayinye. Lokhu kungenxa yokuthi ukusebenza kwe Amadivayisi we-semiconductor iboshelwe ngqo ekupheleleni kwesakhiwo sabo se-athomu. I-molecule esebenzayo ye-oksijini noma umphunga wamanzi kulokho okufanele kube yi-inert igesi kungadala i-oxidation, ukuguqula Izakhiwo zikagesi wesifunda nokuholela ekulimaleni. Yingakho Umkhakha okhethekile kubalulekile kakhulu emhlabeni wezobuchwepheshe.

Yiziphi izigaba eziphambili zamagesi asetshenziswa ekukhiqizweni kwe-semiconductor?

Lapho sikhuluma ngakho Amagesi e-semiconductor ekhiqizwayo, ngokuvamile bawela ezigabeni ezimbalwa ezibalulekile ngokususelwa emsebenzini wabo. Ukuqonda la maqembu kusiza ukucacisa iqhaza ngalinye igesi Idlala inkimbinkimbi Inqubo yokukhiqiza. Akuyona nje eyodwa noma amabili amagesi; okungokwesimanje I-semicondector fab kudinga okungaphezulu kwama-30 okuhlukile amagesi nokuxuba okusebenzayo ukuze usebenze.

Okokuqala kukhona Amagesi amaningi. Lokhu kungukusebenza kwamanzi, okusetshenziswe ngobuningi obukhulu kuyo yonke indawo. Cabanga ngawo njengomoya wesisekelo wengubo. Okuvame kakhulu yile:

• I-Nitrogen (N₂): Isetshenziselwa amakamelo okugeza kanye nemishini yokususa ama-contaminants futhi udale imvelo ye-inert.
• Umoya-mpilo (O₂): Isetshenziselwa ukutshala izingqimba ezisezingeni eliphakeme ze-silicon dioxide (Sio₂), ezenza njengabathambisi.
• I-Hydrogen (H₂): Isetshenziselwa ukuhlanza indawo nokuthile imbemba izinqubo.
• I-Argon (AR): A intshiseko igesi Kusetshenziselwa ukudala indawo ezinzile yezinqubo ezinjenge-sputtering.

Okulandelayo kukhona Amagesi akhethekile, obeye aziwe njengo Amagesi akhethekile kagesi. Lezi zikhethekile kakhulu, kaningi phenduke noma okuyingozi, amagesi enza imisebenzi ebucayi yokufaka kanye nokubekwa. Zisetshenziswa ngamanani amancane kepha zinezindleko eziphakeme kakhulu futhi zidinga ukuphatha ngokucophelela. Lokhu kungaqhutshelwa ngamaqembu afana:

• Amagesi we-Deposition: Lawa magesi, njengeSilane (Sih₄), angumthombo wezinto ezisetshenziselwa ukwakha izingqimba ze-chip. Babola futhi bafake a ifilimu elincanyana kokuqukethwe ku silicon wafer.
• Amagesi e-Etchant: Lezi izi Amagesi asebenzayo isetshenziselwe ukususa okokukhetha. Izibonelo zifaka amakhompiyutha we-fluorine afana ne-carbon tetrafluoride (CF₄) ne hydrogen chloride (Hcl). Zisetshenziswa ku Inqubo yokufaka ukudweba amaphethini wesifunda.
• Ama-Dopant Amagesi: Lawa magesi asetshenziselwa "ukubhala" anzini, okusho ukwethula ngenhloso ukungcola (a dobana) Ukushintsha kwayo Izakhiwo zikagesi. Lokhu kubalulekile ekwakheni ama-transistors. -Jwayelekile amagesi adonswayo faka i-arsine (ash₃) ne-phosphine (PH₃).

Ngabe i-nitrogen gesi isebenza kanjani njenge-workhorse e-semiconductor.

Ukube ubuzohamba nge Ukuqanjwa kwe-semiconductor indawo, i-Ubiquitous kakhulu igesi ungahlangana Nitrogen. Ngenkathi kungahlali kubambe iqhaza kokuphambili ukusabela kwamakhemikhali Lokho kwakha i-chip, indima yayo ibaluleke kakhulu ekwakheni izimo zalokhu kusabela ukuze iphumelele. I-nitrogen iyasetshenziswa ngokuyinhloko ngenxa yokuvutha kwayo; Akuphenduli kalula nezinye izinto, okwenza kube yi- "filler" ephelele igesi.

Ukusetshenziswa okuyinhloko kwe Nitrogen ekuhlanzeni nasekudaleni umkhathi we-inert. Ngaphambi kwanoma yimuphi umzwelo Inqubo ye-semiconductor angaqala, igumbi kufanele libe namahhala ngokuphelele linjenge-oksijini, umphunga wamanzi nothuli. Ubumsulwa obuphezulu Nitrogen idonswa egumbini lokukhipha lezi zinto ezingafuneki. Lokhu kuvimbela i-oxidation ngengozi noma okunye ukusabela okungenzeka konakalisa ukufa. Lesi simiso esifanayo sisetshenziswa kumathuluzi nama-pods ezokuthutha (ezaziwa njengezinhlanzi) ezithwala I-Silicon Wafers phakathi kwezigaba ezahlukahlukene ze Inqubo Yokukhiqiza.

Ngaphezu kwalokho, Nitrogen Idlala indima ebalulekile kuyo I-Photoolography, inqubo yokuphrinta ukwakheka kwesifunda ku-wafer. Esikhathini esijulile se-ultraviolet (DUV) i-litthography, isikhala phakathi kwelensi kanye ne ukufa igcwele umsulwa we-ultra Nitrogen (noma Ingonona) ukuvumela ukukhanya kwe-wavelength kudlule ngaphandle kokuthola umoya. Ngaphandle kwalesi simo se-inert, inqubo leyo bekungeke kwenzeke. Ngolwazi lwami oluhlinzeka ngezindwangu, isidingo sokuqhubeka, okuphezulu, nobumsulwa obuphezulu Nitrogen ukuhlinzeka akuxoxiswanga.

I-Aron idlala yiphi indima ekwakheni imvelo ephelele?

Njenge-nitrogen, Ingonona kuyinto enhle igesi, okusho ukuthi ingamakhemikhali itereti. Noma kunjalo, Kusetshenziswa i-Argon Ngezicelo ezithile lapho isisindo sayo se-athomu esindayo sinikeza inzuzo. Enye yezicelo ezibaluleke kakhulu kulezi zinhlelo zokusebenza ze-sputter, noma i-sputtering. Lokhu kungumvuphu ongokomzimba inqubo yokubekwa isetshenziselwe ukubeka phansi amafilimu ancanyana wensimbi, okwakha i-wiring ye umjikelezo ohlanganisiwe.

Ngokuthwebula, i-voltage ephezulu isetshenziswa egumbini lokuphumula eligcwele Igesi ye-argon. Lokhu kwakha i-plasma ekhokhiswayo efanelekile Ingonona ion. Lawa ma-ion asheshiswa futhi ashayele "kwelitshe" elenziwe ngensimbi sifuna ukufaka esikhundleni (njengethusi noma i-aluminium). Amandla okushayisana agxoba ama-athomu wensimbi ethagethi, lapho andiza khona egumbini elidlule eChamber nejazi silicon wafer kungqimba elincanyana, elifanayo. Ingonona Ilungele lokhu ngoba inzima ngokwanele ukuyeka ngempumelelo ama-athomu okuhlosiwe kepha ngamakhemikhali inerert ngokwanele ukuthi ngeke isabele ngefilimu yensimbi kusiza ukudala. Inikeza okuphelele imvelo yokubekwa kwe-sputter yezinsimbi.

Enye ukusetshenziswa kokhiye Ingonona ku-plasma etching. Kulokhu Inqubo yokufaka, Ingonona kuvame ukuxutshwa ne phenduke unya igesi. Le khasi Ingonona Isiza ukuqinisa i-plasma futhi iqhume indawo evulekile, isiza i-chemic etch futhi idale ukusikeka okunembile okuthe xaxa kokuqukethwe. Ukunikezwa okuthembekile kwe Ama-cylinders egesi e-Argon kubalulekile kunoma yisiphi isikhungo esenza i-metallization noma i-etching ethuthukile.

Ungachaza ukuthi i-hydrogen isetshenziselwa kanjani ukufakwa nokuhlanza?

Ngenkathi i-nitrogen ne-argon zibaluleke ngokungaphenduli, I-hydrogen ibaluleke kakhulu ngokuba kakhulu phenduke, kepha ngendlela ehlanzekile futhi elawulwa. I-hydrogen iyasetshenziswa kakhulu ngaphakathi Ukukhiqiza i-semiconductor yokuhlanza indawo kanye nohlobo oluthile lwe imbemba ebizwa ngokuthi ukukhula kwe-epitaxial. Ubukhulu bawo obuncane be-athomu buyakuvumela ukungena futhi baphendule ngezindlela amanye amagesi angenakukwazi.

Ngaphambi kokuba ungqimba olusha lungatshalwa ku ukufa, ingaphezulu kufanele lihlanzeke ngokuphelele, phansi ezingeni le-athomu. Igesi ye-hydrogen isetshenziswa kwinqubo yokushisa ephezulu ebizwa ngokuthi "i-hydrogen bake" ukususa noma iyiphi i-oxide yendabuko (isendlalelo esincanyana, esenzeka ngokwemvelo se-silicon dioxide) eye yakha ku anzini ingaphezulu. Le khasi i-hydrogen baphendukela ngomoya-mpilo, bakha umphunga wamanzi (h₂o) osuswe ngaphandle egumbini, beshiya i-pristine anzini ingaphezulu lilungele isinyathelo esilandelayo.

I-hydrogen futhi kuyinto esemqoka ngaphakathi -Epitaxial ukukhula (noma "epi"), inqubo ekhula ungqimba lwe-crystal olulodwa lwe anzini ngaphezulu kwe silicon wafer. Le nsendla entsha inesakhiwo esifanelekile sekristalu futhi ilawulwa ngokunembile dobana amazinga. I-hydrogen isebenza njengomthwali igesi Okwe anzini umthombo igesi (njengeSilane noma i-Tricloosilane). Iphinde iqinisekise imvelo yokukhula okuhlanzekile ngokuhlanza noma yimaphi ama-athomu omoya-mpilo. Ikhwalithi yalesi sendlalelo se-epitaxial ibalulekile ekusebenzeni kwama-processors aphezulu, okwenza ubumsulwa be I-hydrogen cylinder hlinzeka ngokugxeka ngokuphelele.

Ayini amagesi e-etchant futhi ahlanganisa kanjani ama-Microscopic Circuits?

Uma imali yokwakha izakhiwo, i-etching imayelana nokubamba ukukhetha ukuze idale amaphethini wesifunda. Cabanga ngakho njenge-microscopic stardpting. Ngemuva kokuthi iphethini lichazwa lisebenzisa I-Photoolography, etchant kusetshenziselwa amagesi ukuhlinzeka Amakhemikhali asho ukususa impahla ngezindawo ezingavikelekile ze ukufa. Lesi ngesinye sezinyathelo eziyinkimbinkimbi kakhulu futhi ezibucayi ngaphakathi Ukukhiqiza chip.

Le khasi Amagesi asetshenziswe e-etching Inqubo ngokuvamile i-fluorine, chlorine, noma amakhompiyutha asuselwa ku-bromine. Ukukhethwa kwe igesi kuya ngezinto ezibonakalayo ezifakwe.

• Amagesi asuselwa ku-Fluorine (e.g., CF₄, SF₆, NF₃) amahle kakhulu ngoku-etching anzini kanye ne-silicon dioxide.
• Amagesi asuselwa ku-Chlorine (e.g., Cl₂, Blc₃, HLCE) zivame ukusetshenziselwa izinsimbi ezinjenge-aluminium.

Lezi Amagesi asebenzayo zingeniswa egumbini le-plasma. I-plasma yephula igesi ama-molecule ahlukane kakhulu phenduke ama-ions kanye nama-radicals. Lawa ma-radicals azoqhubeka nobuso be ukufa, kwakha i-compactile entsha engadonswa kalula, ngaleyo ndlela "etching" okuqukethwe. Ukunemba okudingekayo kukhulu; Umgomo uku okuthi i-etch iqonde phansi (nge-anisotropically) ngaphandle kokukhulisa ungqimba oluphethwe. -Isimanje Izindwangu ze-semiconductor Sebenzisa i-Complex Ukuhlanganiswa kwegesi kanye nezimo ezilawulwa ngokucophelela zokufeza lokhu.

Uyini umgcini we-Chemical Vapor (CVD) nokuthi yimaphi amagesi ahilelekile?

Isimo se-Chemical Vapor (CVD) iyitshe legumbi inqubo yokubekwa phakathi kwa- Ukukhiqiza i-semiconductor. Yindlela eyinhloko esetshenziselwa ukudala amafilimu ahlukahlukene ahlukahlukene okufaka futhi aqhuba a a Idivaysi ye-semiconductor. Umbono oyisisekelo ukugeleza a igesi (noma ingxube yamagesi) ngaphezulu kokufudumala ukufa. Ukushisa kubangela igesi Ukuphendula noma ukubola ebusweni be-wafer, ushiye ifilimu eliqinile lezinto ozifunayo.

Ngayinye yalokhu kusabela kudinga izimo ezizinzile futhi ngokweqile Amagesi ahlanzekile aphezulu. Isibonelo, lapho ubeka ungqimba lwe-polysilicon usebenzisa uSilane, noma iyiphi i-oksijini ukungcola ku igesi Ukusakazwa kuzodala i-silicon dioxide ukwakha esikhundleni salokho, konakalisa izakhiwo ezisebenzayo zesendlalelo. Yingakho thina, njengomhlinzeki, sigxile kakhulu ku ukuhlambululela nokuhlaziywa kwalokhu Amagesi we-Deposition. Wonke umtapo wezincwadi we Amagesi aphezulu aphezulu wokuhlanzeka Sinikezela ukubhekelwa ekuhlangabezaneni nalezi zidingo eziqinile.

Kungani ubumsulwa be-Ultra-high buyinto ebaluleke kakhulu yamagesi ama-semiconductor?

Angikwazi ukweqile lokhu: ku Umkhakha we-semiconductor, ubumsulwa konke. Igama Ubumsulwa obuphezulu akusho ukuthi ama-99% noma angama-99.9%. Ingomane Amagesi we-semiconductor, sikhuluma ngakho Ubumsulwa be-Ultra-High (UHP), okuyi-99.999% (evame ukubizwa ngokuthi "ama-nines amahlanu") noma ngaphezulu. Kwabanye ababucayi inqubo amagesi, Isidingo singaba ngu-99.9999% ("ama-nines ayisithupha") noma ngaphezulu. Isizathu silula: Ukungcola kubulala ukusebenza.

Izici ezikwi-microchip yanamuhla zilinganiswa kuma-nanometers (ama-billionths emitha). Ngalesi silinganiso, inhlanganisela eyodwa yakwamanye amazwe noma i-molecule engafuneki ifana neBoulder phakathi kwe-superhighway. A ukungcola Can:

• Shintsha izakhiwo zikagesi: I-ion ye-sodium ion ingashintsha i-voltage ye-transtage ye-transistor, ibangele ukuba ivule noma icishiwe ngesikhathi esingafanele.
• Dala iziphambeko zesakhiwo: I-molecule ye-oksijini ingaphazamisa i-crystal latttice ephelele ngesikhathi sokukhula kwe-epitaxial, idale "ukukhishwa" okuvimbela ukugeleza kwe-elektroni.
• Imbangela Imibuthano Emfushane: Inhlayiyana yensimbi ingavimba imigqa emibili eseduze neyaseduze, idala okufishane.
• Yehlisa isivuno: Ukungcola okwengeziwe okukhona, kukhuphuka inani lama-chips angenaphutha ngakunye ukufa, okuthinta ngqo inzuzo.

Yingakho, njengomenzi, ukutshala kwethu okukhulu kakhulu ku-inutization and analytical imishini. Wonke amakhethini e igesi kumele Kuhlolwa ukuze uqinisekise ukuthi ihlangabezana nezingxenye-per-billion (PPB) noma izingxenye-per-trillion (PPT) ezidingekayo ngamakhasimende ethu. Le khasi funa amagesi aphezulu okumsulwa yilokho okushayela konke imakethe ekhethekile yegesi Nge-elekthronikhi.

Siqinisekisa kanjani ikhwalithi nokunikezwa okuthembekile kwamagesi ahlanzekile aphezulu?

Ukuze uthole isikhulu sokuthengwa kwempahla njengoMarku, lo ngumbuzo obaluleke kakhulu. Intengo enhle ingenanjongo uma igesi Ikhwalithi ayihambisani noma ukuthunyelwa sekuphuze. Ngizwe izindaba ezesabekayo: Abahlinzeki bahlinzeka ngezitifiketi zenkohliso zokuhlaziywa, noma ukuthunyelwa kwe Amagesi akhethekile Ukuphakanyiswa kumasiko amasonto, kubangele ukumiswa komugqa wokukhiqiza. Ukubhekana nalawa amaphuzu abuhlungu kusesimweni sefilosofi yethu yebhizinisi.

Ukuqinisekisa ikhwalithi iqala nge ukuhlambululela inqubo. Sisebenzisa amasistimu athuthukile afana ne-crygenic distillation kanye nezinto ezikhethekile ze-adsorbent ukususa ukungcola kokungcola. Kepha inqubo ayipheli lapho. Isinyathelo esibucayi kakhulu ukuqinisekiswa. Sisebenzisa izinsimbi zokuhlaziya zombuso njengegesi ye-Chromatograph-Mass Spectrometers (GC-MS) ukuvivinya zonke izilinda ezizodwa ngaphambi kokuthi kuthunyelwe. Sinikezela ngamakhasimende ethu ngesitifiketi esinemininingwane nesikoliwe sokuhlaziywa (COA) kuyo yonke i-batch, eqinisekisa Ubumsulwa begesi.

A Ukunikezwa okuthembekile I-Chain ingenye ingxenye ye-equation. Lokhu kufaka:

• Ukulungiselela isilinda esiqinile: Amasilinda we Amagesi wokuhlanza aphezulu we-Ultra-High uhlole inqubo ekhethekile yokuhlanza nokuhamba kabusha ukuze uqinisekise ukuthi isitsha ngokwaso asingcolisi igesi.
• Intelligent Logistics: Sisebenza nabalingani be-Logistics abanolwazi abaqonda imithetho yokuthumela ingcindezi ephezulu futhi kwesinye isikhathi izinto eziyingozi emhlabeni jikelele. Sinikeza yonke imibhalo edingekayo ukuze siqinisekise imvume yamasiko abushelelezi.
• Ukuxhumana okucacile: Amaqembu ethu okuthengisa kanye namaqembu okusekela aqeqeshelwe ukuhlinzeka ngezibuyekezo ezijwayelekile. Uzohlala usazi isimo se-oda lakho, kusuka ekukhiqizweni kuya ekulethweni kokugcina. Siyaqonda ukuthi kuyabonakala ukuhlinzekwa kwamagesi aphezulu okumsulwa kubalulekile kumakhasimende ethu ukuphatha amashejuli abo okukhiqiza. Sinikela ngisho nokwahlukahlukana ingxube yegesi Izinketho zokuhlangabezana nezidingo ezithile zenqubo.

Ikusasa libambeni amagesi embonini ye-semiconductor?

Le khasi Umkhakha we-semiconductor ungalokothi ume. Njengoba kubikezelwe ngumthetho we-MOORE, abenzi be-chipmaker bahlala becindezela ukudala amadivayisi amancane, asheshayo, namanzi anamandla. Lokhu kuvuselelwa okuvuselelayo kunomthelela ngqo Amagesi nokuxutshwa isetshenziswe ekubumbeni kwabo. Njengoba sithuthela ku isizukulwane esilandelayo se-semiconductor Ubuchwepheshe, osayizi besici bancipha kuma-nanometers ambalwa nje, izidingo zobumsulwa begesi zizokweqisa ngokwengeziwe.

Sibona inkambiso ekulweni nezinto ezintsha ezidlula anzini, njenge-gallium nitride (gan) kanye ne-silicon Carbide (Sic), edinga okusha nokuhlukile inqubo amagesi ngokufaka kanye nokubekwa esikhundleni. Kukhona futhi ukunyakaza ekufinyeleleni izakhiwo eziyinkimbinkimbi zezakhiwo ze-3D, njenge-Finfet ne-Gate-All-Air-ezungeze (Gaa) ezungeza ama-transtors (GAA), okudinga ukunemba okukhulu kakhulu ku imbemba na- okuthi i-etch izinyathelo. Lokhu kusho igesi ekhethekile Imboni kumele ihlale isungula njalo ukuthuthukisa ama-molecule amasha futhi uzuze amazinga aphezulu ukuhlambululela.

Ngombono wami njengomphakeli, ikusasa liphathelene nobambiswano. Akusanele ukuthengisa isilinda se igesi. Kufanele sisebenzisane kakhulu namakhasimende ethu ku Ukukhiqiza ngogesi Umkhakha ukuqonda imigwaqo yabo yezobuchwepheshe yesikhathi esizayo. Lokhu kusivumela ukuthi silindele isidingo se-New Amagesi ahlanzekile aphezulu bese utshala imali ekukhiqizweni kanye namakhono wokuhlaziya ukuze ubanikeze. Amaqhawe angabonakali we semiconductor emhlabeni - amagesi - azoqhubeka nokuba phambili kwentuthuko yezobuchwepheshe.

Ukuthathwa Key

Njengoba utholile amagesi wezimboni zemakethe ye-semiconductor efunwayo, nazi izinto ezibaluleke kakhulu okufanele uzikhumbule:

• Ukuhlanzeka kubaluleke kakhulu: Isici esisodwa esibucayi kakhulu Ubumsulwa be-Ultra-High. Ukungcola, ngisho nasezingxenyeni ezithile zamazinga ezigidigidi, kungadala ukuthi kuhluleke inhlekelele eyinhlekelele futhi kunciphise ukukhiqizwa kokukhiqiza.
• Amagesi anemisebenzi ethile: Amagesi awaguquki. Bangamathuluzi akhethekile kakhulu asetshenziselwa izinqubo ezihlukile njengokudala umkhathi we-inert (nitrogen, argon), izingqimba zokwakha (Amagesi we-Deposition njengezimbuzane zaseSilane), kanye nokuqopha amasekethe (Amagesi e-Etchant njenge-CF₄).
• Ukuhlinzekwa kokuhlinzekwa kubalulekile: Umphakeli othembekile wenza okungaphezu kokuthengisa umkhiqizo nje. Baqinisekisa ikhwalithi ngokuhlolwa okuqinile, bahlinzeka ngokuqinisekiswa okuyiqiniso, ukuphatha izinto eziyinkimbinkimbi, futhi balondoloze ukuxhumana okucacile ukuvimbela ukubambezeleka okubizayo kokukhiqiza.
• Ulwazi lobuchwepheshe lungeza inani: -Zwayo ngobani athile igesi iyasetshenziswa futhi ngobani Ukuhlanzeka kwayo kubalulekile kakhulu kukuvumela ukuthi ube ngumlingani ophumelelayo kumakhasimende wakho, ukucacisa ikhwalithi nokwakha ukwethenjwa isikhathi eside.
• Umkhakha uyavela: Ukucindezela kwama-chips amancane futhi anamandla ngokwengeziwe kusho isidingo se-New, noma simsulwa Amagesi akhethekile kuzoqhubeka kuphela ukukhula. Ukubambisana nomhlinzeki obheke phambili kubalulekile ukuze uhlale phambili.