I-smartphone ephaketheni lakho, ikhompyutha edeskini lakho, izinhlelo ezithuthukile emotweni yakho - akekho noyedwa wazo ongakwazi ngaphandle kokuthula, umsebenzi ongabonakali wamagesi akhethekile. Njengomnikazi wefektri yegesi yezimboni, mina, u-Allen, ngibonile mathupha ukuthi lezi zinto ezibucayi zakha kanjani umbhede wobuchwepheshe besimanje. Kwabaholi bebhizinisi njengoMark Shen, abahamba ngendawo eyinkimbinkimbi yokuhlinzekwa komhlaba wonke, ukuqonda la magesi kuwukhiye wokuvula amathuba amasha. Le ndatshana iyinkomba yakho ephelele yomunye wabadlali ababaluleke kakhulu kulo mkhakha: I-Nitrogen Trifluoride (NF₃). Sizodiliza lokhu okunamandla igesi, hlola iqhaza layo elibalulekile ku Inqubo Yokukhiqiza i-Semiconductor, bese uchaza ukuthi kungani ikhwalithi yayo nokunikezwa kwayo kubalulekile kuyo yonke Ukukhiqiza ngogesi imboni.

Yini ngempela i-nitrogen trifluoride (NF₃) igesi?

Ekubukeni kokuqala, I-nitrogen trifluoride, kuvame ukubizwa ngefomula yayo yamakhemikhali Nf₃, kungabonakala njengokunye nje izimboni igesi. Kuyinto engenamibala, engavuleki, futhi iphunga kancane landela. Kodwa-ke, emhlabeni we Ukukhiqiza okuthuthukile, lokhu igesi iyithuluzi elisebenza kakhulu. Kukhiqizwa ngokuqinile landela eyenziwe nge-athomu elilodwa le-nitrogen kanye nokwebathathu onkelayo ama-athomu. Isihluthulelo samandla aso silele kulesi sakhiwo. Emazingeni okushisa ekamelo, Nf₃ iqinile futhi itereti, Ukwenza kuphephe ukuthutha nokuphatha uma kuqhathaniswa namagesi aguqukayo.

Imilingo yenzeka lapho amandla esetshenzisiwe. Ngaphansi kwezimo eziphakeme zamandla ngaphakathi a semiconductor ithuluzi lokukhiqiza, njenge uhlobo igumbi, The Nf₃ ama-molecule ukuqinisa. Bahlukana bakhulule kakhulu phenduke onkelayo ama-radicals. Cabanga ngakho njengokuqhuma okulawulwayo esikalini esiyi-microscopic. Lezi mahhala onkelayo ama-athomu asebenza kahle kakhulu ekuvumeleni nasekususeni izinto ezingafuneki, ikakhulukazi anzini namakhompiyutha alo. Leli khono lokuzinza lapho ukuludinga futhi kakhulu phenduke Lapho ufuna kwenza Igesi ye-nitrogen trifluoride impahla ebalulekile ezweni eliqondile le Ukukhiqiza chip.

Le ndalo eyingqayizivele embaxambili yingakho Nf₃ usephenduke itshe lesimanje Ukuqanjwa kwe-semiconductor. Ukuqina kwayo kuqinisekisa ukuphepha nokwethenjwa ku-Supply Chain, kanti ukuvumelanisa kwayo kuhlinzeka ngokuhlanza okuphezulu kokuhlanza okuphezulu kanye namakhono okuthi abakhiqizi abadingayo. Njengoba sishiya sijule, uzobona ukuthi kuzwakala kanjani lokhu okulula igesi Inika amandla ukudalwa kwamadivayisi ayinkimbinkimbi kakhulu emhlabeni.

Kungani amagesi akhethekile abalulekile embonini ye-semiconductor?

Ukuqonda ukubaluleka kwe Nf₃, okokuqala sidinga ukwazisa indima ebanzi lokho Amagesi aqakathekile ngoba ku Umkhakha we-semiconductor. Ekhiqiza i umjikelezo ohlanganisiwe Kufana nokwakha i-skyscraper ku-canvas ngosayizi wesithonjana sakho. Kuyinqubo yokungeza nokususa inqwaba yezendlalelo ze-Ultra-Fighter zezinto ezahlukahlukene ku anzini ukufa. Njalo ngesinyathelo esisodwa, kusuka ekudaleni okungenalutho ukufa kwi-chip yokugcina, kuncike emkhathini olawulwa ngokucophelela wokukhethekile Amagesi we-elekthronikhi.

Lawa magesi enza imisebenzi eminingana ebucayi. Abanye, njenge ingonona na- alulimoni, asetshenziswa njengegesi ye-inert carriers ukudala indawo ezinzile, engasebenzi futhi esebenzayo futhi anciphise amagesi asebenzayo asebenzayo. Abanye basetshenziselwa imbemba, lapho a igesi kusetshenziselwa faka ifilimu elincanyana lezinto ezibonakalayo ku ukufa. Isibonelo, ngamakhemikhali Umhwamuko Imbemba (Iconse), amagesi asabela ukwakha ifilimu eliqinile eliba yingxenye yesivinini se-chip. Bese kuba namagesi atching, afana Nf₃, ezisetshenziselwa ukuveza kahle amaphethini kulezi zingqimba, ukudala izindlela eziyinkimbinkimbi zogesi ukugeleza.

Ngaphandle kokuhlala njalo, ultra-Ubumsulwa obuphezulu ukuhlinzekela la magesi ahlukahlukene, konke Inqubo Yokukhiqiza bekuzogaya ukumiswa. Ngisho ne-minuscule ukungcola phakathi ku igesi Angalimaza yonke i-watch of wefers, kubiza inkampani izigidi zamaRandi. Yingakho Abakhiqizi be-Semiconductor zizwela kakhulu ikhwalithi nokwethenjwa kwabahlinzeki babo begesi. Ubumsulwa be igesi ihumusha ngokuqondile kwikhwalithi futhi ukukhiqizwa komkhiqizo womkhiqizo wokugcina.

Isetshenziswa kanjani igesi ye-NF₃ ezinqubweni zokukhiqiza ze-semiconductor?

I-nitrogen trifluoride inezicelo ezimbili eziyinhloko, ezibucayi ku Izinqubo Zokukhiqiza ze-Semiconductor: I-plasma etching kanye nokuhlanza igumbi. Bobabili babalulekile ekwakheni ama-microchips asebenza kahle, kusuka kuma-processors kuya Imemori ye-NAnd Flash.

Okokuqala, ake sixoxe ngo-Etching. Ngemuva kwesendlalelo sezinto ezibonakalayo ezinje anzini dioxide ifakwe ku ukufa, kubhekwa iphethini ku-IT eKhanya. Le khasi okuthi i-etch Inqubo bese isusa okuqukethwe ngezindawo ezingavikelekile. Nf₃ wethulwa egumbini futhi wanika amandla ukudala a uhlobo-Ufu lokukhokhiswa ihhashi izinhlayiya nokusebenza kabusha onkelayo ama-radicals. Lawa ma-radicals amabhomu kahle ukufa ngaphezulu, ukuphendula nge anzini futhi uyiguqulele ibe a gaxe landela (anzini I-Tetrafluoride) engachithwa kalula ngaphandle kweChamber. Ukunemba kwale nqubo kuyamangaza ingqondo, okuvumela onjiniyela ukuba babambe izici eziyizinkulungwane zezikhathi ezincipha kunezinwele zomuntu.

Okwesibili, nokujwayelekile, Ukusetshenziswa kwe-nitrogen trifluoride injenge Ukuhlanza igesi. Ngesikhathi Isimo se-Chemical Vapor (Iconse) Inqubo, lapho amafilimu amancane atshalwa khona ukufa, izinto ezingafuneki nazo zakha ezindongeni zangaphakathi zegumbi lenqubo. Leli okuhlangene, imvamisa yenziwa anzini noma i-silicon nitride, kumele isuswe ngokuphelele phakathi kokucubungula ngamunye ukufa noma i-batch of wefers. Uma kungenjalo, lokhu kwakha kungavele kufezeke bese kufika ezweni elilandelayo ukufa, kubangela isici. Lapha, Nf₃ ifakwe egumbini elingenalutho ne uhlobo kukhishwe. -Namandla onkelayo Ama-radicals ahlanza izindonga zeChamber zihlanzekile, ziguqula okuqinile okuhlangene ku gaxe ukwengeza lokho kususwa kalula. Lo mjikelezo wokuhlanza Kugxeka ukulondolozwa ubumsulwa bendawo yokukhiqiza kanye nokuqinisekisa ukuphakama ukukhiqizwa komkhiqizo.

Yini eyenza i-NF₃ ibe yigesi ephakeme yokuhlanza uma iqhathaniswa nezinye izindlela?

Iminyaka eminingi, Umkhakha we-semiconductor bathembele ku-mporoorocarbons (PFCS) njenge-carbon tetrafluoride (CF₄) kanye hexafluoroathene (C₂f₆) yokuhlanza nokufaka. Ngenkathi esebenza ngempumelelo, lezi zinhlanganisela zeza nokubuyisa okukhulu: zingamagesi abamba ukushisa kakhulu abanamandla anezikhathi ezinde kakhulu zomoya. Isibonelo, i-C₂F₆ ine-a amandla aphezulu okufudumeza womhlaba wonke (GWP) futhi ingaqhubeka emkhathini iminyaka engu-10,000. Njengoba imithetho yezemvelo iqiniswa, imboni idinga ikhambi elingcono.

Yilapho Nf₃ kuqhamuke njengomnqobi ocacile. Lapho I-nitrogen trifluoride futhi a igesi egugile greenhouse, inesikhathi sokuphila esifushane somkhathi (cishe iminyaka engama-500). Okubaluleke kakhulu, kusebenza kahle kakhulu kwinqubo yokuhlanza. Ngaphakathi kwe- uhlobo igumbi, iphesenti eliphakeme kakhulu le Nf₃ ama-molecule aphula adedele ukuhanjiswa kwawo onkelayo qhathanisa nama-PFC. Lokhu kusho okuncane kunganquliwe igesi kuphelile kusuka egumbini. -Isimanje Izindwangu ze-semiconductor Faka nezinhlelo (ama-scrubes) abhubhisa cishe konke kunganquliwe Nf₃ futhi kube yingozi ukwengeza amagesi ngaphambi kokuba akhishwe.

Inhlanganisela yokusebenza kahle okuphezulu nokuhunyushwa okusebenzayo kusho ukuthi okungokoqobo Ukukhishwa Kwegesi Abamba ukushisa kusuka ekusebenziseni Nf₃ ziphansi kakhulu kunalezo ezivela kumagesi amadala e-PFC. Lokhu kusebenza okuphezulu kuyisizathu esibalulekile sokwamukelwa kwayo okusabalele.

Ngabe kukhiqizwa kanjani i-nitrogen trifluoride ephezulu?

Njengomenzi, ngingakutshela ukuthi ukukhiqiza Nf₃ kuyinkimbinkimbi futhi elawulwa kakhulu Inqubo yokukhiqiza. Umgomo ukudala umkhiqizo wokugcina obumsulwa ngokumangalisayo - ubumsulwa obuvame kakhulu 99.999% noma ngaphezulu-ngoba okuncane kakhulu ukungcola kungaba yinhlekelele ye ukukhiqizwa kwe-semicondector. Inqubo idinga ubuchwepheshe ekusingatheni amakhemikhali asebenzayo kakhulu, ikakhulukazi onkelayo.

Le khasi Ukukhiqizwa kwe-NF₃ imvamisa kubandakanya ukuphendula amoniya (a landela equkethe i-nitrogen) noma i-ammonium i-fluoride compound nge-Elemental onkelayo igesi ku-reactioror at amazinga okushisa aphezulu. Lokhu kuphendula kukhiqiza ingxube yamagesi, kufaka phakathi Nf₃, izinto ezingafinyeleleki, kanye nezinto ezahlukahlukene. Inselelo yangempela, futhi lapho ubuchwepheshe bomhlinzeki bubonisa ngempela ngempela, uku ukuhlambululela Isiteji esilandelayo.

Okuluhlaza gaxe ingxube idlula eziningana ukuhlambululela izinyathelo zokususa noma yiziphi izinhlanganisela ezingafuneki. Lokhu kuvame ukubandakanya uchungechunge lokuhlanza, sombano, kanye nezinqubo ze-distillation ze-cryogenic. Le khasi Inqubo yokuhlobisa, ikakhulukazi, ukusebenzisa amazinga okushisa aphansi kakhulu ukuhlukanisa amagesi ahlukene ngokususelwa kumaphoyinti abo abilayo, ahlukanise i- Nf₃ kusuka kunoma yikuphi ukungcola okusele. Zonke izinyathelo zibhekwe ngemishini yokuhlaziya ethuthukile ukuqinisekisa umkhiqizo wokugcina uhlangabezana nokucaciswa okuqinile kwe semiconductor imboni. Lokhu kuzibophezela ekulawulweni kwekhwalithi yilokho okuhlukanisa umphakeli othembekile kwabanye.

Yini ukuphepha nokuphathwa kokuphatha igesi ye-NF₃?

Ukuphepha kuyinto ebaluleke kakhulu kwizimboni igesi ibhizinisi. Lapho Nf₃ ayikholeki futhi iqinile emazingeni okushisa asekamelweni, kungumenzeli onamandla oxidizing, ikakhulukazi emazingeni okushisa aphezulu. Lokhu kusho ukuthi kungaphendula ngobudlova ngezinto ezivuthayo futhi kudinga ukuphathwa ngokucophelela. Ingozi eyinhloko ubuthi bayo; inhaling the igesi ingaba yingozi, umoya omncane wokungena kahle kanye nemishini yokuzivikela kubalulekile kunoma iyiphi Indawo Yokukhiqiza.

Yonke indawo yokuhlinzekwa, kusuka efektri yethu kuya kumakhasimende semiconductor Indwangu, yakhelwe ukuphepha. Nf₃ ihanjiswa ngamasilinda ensimbi aklanywe ngokukhethekile ngaphansi kwengcindezi ephezulu. Lawa ma-cylinders ahlolwe ngokuqinile nokuqinisekiswa ukuze aqinisekise ukuthi angaqukatha ngokuphepha igesi. Njengomhlinzeki, sinikezela ngemininingwane enemininingwane yokuphepha idatha yamashidi (SDS) kanye nokuqeqeshwa kumakhasimende ethu ngokugcina okufanele, ukuxhumana, kanye nezinqubo zokuphatha. Lokhu kufaka imihlahlandlela ku- Izinga Lokugeleza ukulawula nezinhlelo zokuthola ukuvuza.

Kwabanikazi bebhizinisi njengoMark, okukukhathalela okuningana kuyinto ethe xaxa yokuthenga, abambisene nomphakeli onerekhodi lokuphepha elifakazelwe libalulekile. Ukuxhumana okungasebenzi noma ukuntuleka kwezinqubomgomo zokuphepha ezicacile ezivela kumphakeli kuyifulegi elikhulu elibomvu. Siyaziqhenya ngokunikeza nje umkhiqizo, kepha insizakalo ephelele efaka ukwesekwa kanye nokuphepha kokuphepha, ukuqinisekisa igesi ifika futhi isingathwa ngokuphepha zonke izinyathelo zendlela.

Ingabe i-nitrogen trifluoride igesi ebamba ukushisa? Ukuqonda umthelela wezemvelo.

Kubalulekile ukuba kube sobala ngezinto zezemvelo ze Nf₃. Yebo, I-nitrogen trifluoride unamandla igesi ebamba ukushisa. Iphaneli ye-IntergovernNental ekushintsheni kwesimo sezulu (IPCC) ibale ukuthi inendawo yokufudumala yokufudumala ye-Global (GWP) yezikhathi ezinkulu kunekhabhoni dioxide isikhathi esiyiminyaka eyi-100. Leli iqiniso lokuthi imboni ithatha ngokungathi sína kakhulu.

Kodwa-ke, le ndaba ayipheli lapho. Le khasi umthelela emvelweni Kuya ngokuthi hhayi nje kumandla kaphethiloli, kepha ukuthi kungakanani okukhishwe emkhathini. Njengoba kushiwo ngaphambili, Nf₃ isebenza kahle kakhulu. Esikhathini esinamuhla semiconductor indawo, iningi le- igesi esetshenzisiwe idliwa noma ichithwe ngesikhathi senqubo yokwenza. Le khasi uhlobo kwehlisela phansi, nanoma yikuphi kunganquliwe igesi Lokho kukhathele kuthunyelwa ohlelweni lokuhlaziya. Lezi zinhlelo zisebenza kakhulu, zivame ukubhubhisa ngaphezu kwama-99% asele Nf₃.

Ukushintshwa komkhakha kusuka kuma-PFCs kuye Nf₃, kuhlangene nokusetshenziswa okubanzi kobuchwepheshe bokuhlaziya, empeleni kuholele ekunciphiseni okuphelele ku Ukukhishwa Kwegesi Abamba ukushisa ngeyunithi ngayinye yokukhiqiza. Negunya Abakhiqizi be-Semiconductor Futhi abahlinzeki begesi basebenza ngokubambisana ukuqinisekisa ukuthi ukuphuma kuncishisiwe. Lokhu kufaka ukunxusa inqubo yokuhlanza ukuze usebenzise inani elincane kakhulu igesi kudingekile futhi kugcinwe amasistimu wokuhlukumeza wokusebenza okuphezulu. Ngakho-ke, ngenkathi Nf₃ unamandla igesi ebamba ukushisa kulungiselelo lwelebhu, i-Real-World Environmental Footprint in Ukukhiqiza i-semiconductor ilawulwa ngokucophelela futhi iphansi kakhulu kunezinye izindlela ezathathelwa indawo.

Iyini indima yesizukulwane segesi esizeni sezindwangu ezinkulu ze-semiconductor?

Isilinganiso sanamuhla Ukukhiqiza i-semiconductor uyaphefumula. Izikhungo ezinkulu kunazo zonke, ezaziwa ngokuthi ama-mega-izindwangu, zidla amagesi amakhulu. Kwamagesi athile, njenge-nitrogen, kusebenza kahle kakhulu ukuyikhiqiza ngqo esikhungweni kunokuba amaloli ezinkulungwaneni zama-cylinders. Lokhu kwaziwa ngokuthi endaweni isizukulwane. Ukuze ukhetheke kakhulu futhi asebenzele igesi thanda Nf₃, kuvela imodeli ehlukile: endaweni ukuhlanzwa nokuhlaziywa.

Ngenkathi ugcwele Ukukhiqizwa kwe-NF₃ Ese-Fab akulungelwa ngenxa yobunzima bawo, abasebenzisi abakhulu bavame ukuba nobungcweti endaweni Izinhlelo zokulawulwa kwegesi. Ukunikezwa okuningi kwenqwaba Nf₃ ihanjiswa kwi-fab, bese lolu hlelo lusebenza okokugcina ukuhlambululela nokuhlaziywa kwekhwalithi okuqhubekayo ngaphambi kwe igesi Ingena amathuluzi okukhiqiza abizayo. Lokhu kuhlinzeka ngesendlalelo sokugcina sekhwalithi yekhwalithi, ukuqinisekisa ukuthi noma yikuphi ukungcoliswa okungaba khona kusuka emigqeni yokuhlinzekwa kubanjwa. Le ndlela ihlanganisa izinzuzo zezomnotho zokuthenga ngobuningi ngokuqinisekiswa kwekhwalithi ye endaweni Abaphathi.

Ukuqonda lezi zinhlobo zokuvela kwezidingo kubalulekile. Njengomhlinzeki, sandise izinsizakalo zethu ngaphezu kokugcwalisa ama-cylinder nje. Manje sisebenza Abakhiqizi be-Semicondector Global Ukuqamba kanye nokusebenzisa ukusebenzisa ukulethwa kwegesi okuphelele kanye nezixazululo zokuphatha. Lokhu kungafaka ukunikezelwa ukuhlelwa kwabasebenzi kanye nemishini ngendlela ethile umthamo wamakhasimende amakhulu, izinto ezikhethekile, noma ukuhlanganiswa nazo endaweni izinhlelo. Kumayelana nokuhlinzeka nge-chain etholakalayo futhi ethembekile ehlangabezana nezidingo ezifunwayo ze Ukukhiqiza amakhulu eminyaka wekhulu lama-21. Le yingxenye ebalulekile yecebo lethu, ikakhulukazi lapho ukhonza amaklayenti ngokubaluleka Amandla okukhiqiza.

Ngabe ukuhlanzeka kwe-NF₃ kukuthinta kanjani ukukhiqizwa kokukhiqiza ekukhiqizweni kwe-chip?

Ku semiconductor Umhlaba, "isivuno" konke. Kungamaphesenti ama-chip amahle, asebenzayo akhiqizwa kusuka kukodwa anzini ukufa. Isivuno esikhulu sisho inzuzo ephezulu; Isivuno esiphansi singalimaza ngokwezezimali. Ubumsulwa bamagesi wenqubo, ikakhulukazi i-arveive igesi thanda Nf₃, inethonya eliqondile nelimangalisa ukukhiqizwa komkhiqizo.

Cabanga an ukungcola njengenhlayiya encane yomswakama (h₂o) noma enye gaxe landela kuxutshwe ne Nf₃. Ngesikhathi senqubo ebucayi ye-ETCH, leyo ukungcola kungaphazamisa ukusabela kwamakhemikhali, okubangela isici se-microscopic ku-chip's circuetry. Kungavimba okuthi i-etch, ukushiya impahla lapho kungafanele kube khona, noma kudale ukugcwala ngokweqile, kususe izinto eziningi kakhulu. Noma iyiphi indlela, umphumela umjikelezo ohlanganisiwe izokwehluleka ukuhlolwa kwayo kokugcina. Lapho wenza izigidi zama-transistors ku-chip eyodwa, yebo enye "isici esibulala" esibangelwa yi ukungcola inganikeza yonke i-chip engenamsebenzi.

Kungakho sitshala imali kakhulu ekulawulweni kwekhwalithi. Ngokuhlinzeka ngokuqinisekiswa, i-ultra-Ubumsulwa obuphezulu Nf₃, sinikeza amakhasimende ethu ukuzethemba ukuthi igesi ngeke ibe ngumthombo wamaphutha. Ukulawula ukugxila yazo zonke izakhi ezansi ezansi ezingxenyeni-eziyizigidi eziyinkulungwane ziqinisekisa ukuthi Inqubo Yokukhiqiza iyazinza futhi iyaphindeka. Inqubo ezinzile iholela kokubikezelwa futhi okuphezulu ukukhiqizwa komkhiqizo, okuyinhloso yokugcina yawo wonke semiconductor Umkhiqizi. Indima yethu njengomphakeli we Amagesi aphezulu amsulwa ukususa okuguquguqukayo futhi kunikeze umkhiqizo wekhwalithi engaguquki.

Yini okufanele uyibheke kumphakeli we-nitrogen trifluoride?

Isikhulu sokuthengwa kwempahla njengoMarku, ukukhetha umphakeli ofanele ukuthola izinto ezibucayi ezifana Nf₃ idlulela ngaphezu kokuqhathanisa amanani. Ubungozi bokubambezeleka okubi kobambisene, izingqinamba zekhwalithi, ukuxhumana kabi - kumane nje kuphakeme kakhulu. Ngokusekelwe kokuhlangenwe nakho kwami, nazi izici ezibalulekile okufanele zicatshangelwe:

Okokuqala, ikhwalithi eqinisekisiwe kanye nezitifiketi. Umphakeli othembekile uzohlinzeka ngesitifiketi sokuhlaziywa (COA) ngakho konke ukuthunyelwa, echaza amazinga okuhlanzeka futhi afakwe kuhlu noma yikuphi ukungcola okutholakele. Kufanele zihambisane namazinga aphesheya anjenge-ISO 9001. Buza amakhono abo wokuhlaziya. Ngabe banemishini yokuthola ukungcola emazingeni adingekayo semiconductor Izicelo?

Okwesibili, ukuthembeka kokuthengwa kwethempeli nokusobala. Ingabe umphakeli angabonisa inethiwekhi eqinile yokuphamba ukuvikela ukubambezeleka? Ngabe bane-refundant Amandla okukhiqiza Ukuqinisekisa ukulethwa okuqhubekayo? Ukuxhumana kuyisihluthulelo lapha. Umhlinzeki wakho kufanele abe namandla, ahlinzeke ngezibuyekezo ngokuthumela futhi atholakale kalula ukuphendula imibuzo. Lokhu kubhekana ngqo nephuzu lobuhlungu lokuxhumana okungasebenzi kahle.

Ekugcineni, funa ubuchwepheshe bobuchwepheshe. Umhlinzeki omuhle akagcini nje ngokuthengisa umkhiqizo; Banikeza ikhambi. Kufanele baqonde izinhlelo zakho zokusebenza futhi bakwazi ukunikeza ukwesekwa kwezobuchwepheshe. Kufanele babe nolwazi ngokuphepha, ukuphatha, kanye nemithetho yezemvelo ezungeze Izicelo zegesi. Umhlinzeki ongenza njengomlingani onolwazi ubaluleke kakhulu kunoyedwa ongumthengisi nje. Lobuchwepheshe buyisisekelo sobudlelwano obude, obunenzuzo. Silwela ukuba ngumlingani wakho kuwo wonke amaklayenti ethu, abanikezeli nje igesi Kepha ukuthula kwengqondo okuza nakho.

Ukuthathwa Key

• Ithuluzi Elibalulekile: I-Nitrogen Trifluoride (NF₃) kuyinto ekhethekile ebucayi igesi isetshenziselwe i-plasma etching kanye nokuhlanza igumbi ku Inqubo Yokukhiqiza i-Semiconductor.
• Ukusebenza Okuphakeme: Nf₃ Isebenza kahle kakhulu futhi inomthelela ophansi wezemvelo ophumelelayo kunamagesi amadala e-PFC athathelwe indawo, ngenxa yamanani aphezulu okusetshenziswa kanye nezinhlelo zanamuhla zokuhlaziya.
• Ubumsulwa yinzuzo: Ubumsulwa be-Ultra-high Nf₃ akuxoxiswanga. Ngisho nokungcola kokulandela kungadala iziphambeko ku anzini ukufa, ukunciphisa kakhulu i ukukhiqizwa komkhiqizo futhi inzuzo ye Ukukhiqiza chip.
• Ukuphepha nokuphatha kubalulekile: Ngenkathi uzinzile, Nf₃ kuyinto enobuthi ne-oxidizing igesi Lokho kudinga ukuphathwa okukhethekile, amasilinda aqinisekisiwe, kanye nokuqonda okujulile kwezinqubomgomo zokuphepha.
• Ukukhetha umphakeli kubalulekile: Lapho ukhetha i Nf₃ Umhlinzeki, ubeka phambili ikhwalithi eqinisekisiwe yekhwalithi, ukuthembeka okutholakalayo, ukuxhumana okusobala, kanye nobuchwepheshe obujulile bezobuchwepheshe ngentengo yedwa.