Semiconductor Tlhahiso e itšetleha ka likhase tse fapaneng tse fapaneng, tse ka khetholloang ka mefuta e meraro ea sehlooho: likhase tse ngata, likhase tse ikhethang, le likhase tse tlohang. Likhase tsena li tlameha ho hloeka haholo haholo ho thibela tšilafalo, e ka senyang meetso ea mefokolo e bonolo le e rarahaneng.

Likhase tse ngata

Nitrogen (N₂):

Karolo e reng: N₂ e lokisa merero e mengata, ho kenyelletsa likamore tsa ho ipehoa ka ho senya le ho fana ka moea o ikhethang nakong ea methati e fapaneng ea semiconductor.
Lintlha tse ling: Netrojene hangata e sebelisoa ho tsamaisa le ho boloka li-silicon tsa silise ho fokotsa oxidation. Metsoalle ea eona ea kahare e etsa bonnete ba hore ha e arabeloe ka lisebelisoa tse ling, e e etsang e loketse ho boloka tikoloho e hloekileng ea ts'ebetso ea ts'ebetso ea ts'ebetso ea ts'ebetso.

Argon (ar):
Karolo ea eona: Ntle le ho kenya letsoho lits'ebetsong tsa eona, Argn e le ntho ea bohlokoa ho lits'ebetsong moo lipina tse laoloang ke tsa khase li bohlokoa.
Lintlha tse ling: Hobane ha e arabe ka lisebelisoa tse ngata, tse thusang ho tsitsipana le li-filimi tsa tšepe.

Helium (He):
Karolo ea: Boemo ba manyolo ba halefa ba hellium bo etsa hore motho a phutholohe le ho boloka mocheso o sa feleng nakong ea maiteko a maiketsetso.
Lintlha tse ling: Hangata e sebelisoa litsamaisong tsa matla a matla a matla bakeng sa lithograph tse nang le matla le bokhoni ba ho boloka tsela e ntle ho e-na le tšilafalo.

Fydrogen (H₂):
Karolo ena: Ho feta ts'ebeliso ea eona ea ho aha, hydrogen hape o thusa ho hloekisa bokantle 'me ho ka kenya tšebetsong karabelo ea lik'hemik'hale nakong ea li-commitures.
Lintlha tse ling: Ts'ebeliso ea hydrojene e lekantsoeng ea lifofane tse tšesaane ea ho laola thepa ka har'a semicondctor haholo.

Likhase tse ikhethang le li-dopants

Silane (Sih₄):
Karolo ena: Ntle le ho ba sesupo sa Teraka ea Sicon, Silane e ka etsoa hore e be sehlōhō filimi e fetisang e ntlafatsang litšobotsi tsa elektroniki.
Lintlha tse ling: Boiketsetso ba eona bo hloka hore lintho tsa eona li be le lintho tse mpe tsa polokeho, haholo ha u tsoakane le moea kapa oksijene.

Ammonia (NH₃):
Karolo: Ntle le ho hlahisa lifilimi tsa nitride nitride, Ammonia e bohlokoa ho hlahisa likarolo tse ntlafatsang tse ntlafatsang ts'epo ea lisebelisoa tsa semiconductor tse ntlafatsang ts'epo ea lisebelisoa tsa seiconductor.
Lintlha tse ling: E ​​ka kenakoloho lits'ebetsong tse hlokang ho kenyelletsa linate ho silicon, ho ntlafatsa thepa ea elektroniki.

Phosphine (ph₃), arsines (ash₃), and diborane (b₂h₆):
Karolo e reng: Likhase tse tsena ha li bohlokoa feela bakeng sa ho se boloke empa li boetse li bohlokoa bakeng sa ho fihlela thepa ea motlakase o hatelletsoeng oa semiconductor.
Lintlha tse ling: Chefo ea bona ea chefo e hloka litsamaiso tse tiileng le litsamaiso tsa ts'ireletso libakeng tsa boselamose ho etsa likotsi.

Ho ba le likhase tse hloekileng

Fluorocarbons (CF₄, SF₆):
Karolo ena: Likhasetso tsena li sebetsa ka mekhoa e metle ea ho itlhatsoa etha, e fanang ka ts'ebetso e phahameng e bapisoang le mekhoa e bolaeang e bolaeang metsi.
Lintlha tse ling: CF₄ le SF₆ ba bohlokoa ka lebaka la bokhoni ba bona ba ho ba le bokhoni ba ho ba le li-silicon hantle, ho lumella nako e monate ea qeto e ntle ea mohlala.

Chlorine (CL₂) le hydrogen Fluoge (HF):
Karolo e reng: Clorine e fana ka bokhoni ba ho itlhakisa botlolo, haholo ha HF e bohlokoa bakeng sa silicon dioxide e tlositsoeng.
Lintlha tse ling: Motsoako oa likhase tsena o lumella mekatole e sebetsang nakong ea mekhahlelo e fapaneng ea masela, e netefatsa libaka tse hloekileng tsa ho sebelisa mehato e fetileng ea ho sebetsa.

Nitrogen Trifluoride (NF₃):
Karolo: NF₃ ke Pivotal bakeng sa ho hloekisa tikoloho ka litsamaiso tsa CVD, ho araba le li-sinminant ho boloka ts'ebetso e nepahetseng.
Lintlha tse ling tse latelang: Leha litholoana ea eona ea Greenstone e ka ba khetho e ratoang e e etsa ka thata.

Oksijene (O₂):
Karolo: Ts'ebetso ea oxida e hlokometsoe ke oksijene e ka etsa likarolo tsa bohlokoa tsa ho intiki tsa semiconductor.
Lintlha tse ling: Karolo ea oksijene ea okgen ea ho ntlafatsa oxidation ea siino ho etsa hore literaka tsa Siono li bohlokoa bakeng sa ho itšehla thajana le ho sireletsa likarolo tsa potoloho le tšireletso tsa likarolo tsa potoloho.

Likhase tse hlahang ka har'a semiconductor tlhahiso

Ntle le likhase tsa moetlo tse thathamisitsoeng kaholimo, likhase tse ling li ntse li ela hloko tšebetsong ea semisonductor, ho kenyelletsa:

Carbon dioxide (Co₂): E sebelisoang likoting tse ling tsa ho hloekisa le ho ba tse sa tsoaneng, haholo-holo tse kenyelletsang lisebelisoa tse tsoetseng pele.

Silicon dioxide (sio₂): Le ha e se khase tlasa maemo a tloaelehileng, mefuta e saletsoeng ka masene ea silicon dioxide e sebelisoa lits'ebetsong tse itseng tsa lijo.

LITLHAKISO TSA BOPHELO

Indasteri ea semiconductor e tsepamisoa le ho fokotsa tšusumetso ea tikoloho e amanang le tšebeliso ea likhase tse fapaneng, haholo-holo tse nang le likhase tse matla tsa sethopo. Sena se lebisitse kholisong ea Tsamaiso ea taolo ea khase e tsoetseng pele le ho lekola likhase tse ling tse ka fanang ka melemo e tšoanang ka maoto a tlase a tikoloho.

Sephetho

Khase e sebelisitsoeng ho ho etsa karolo ea bohlokoa ea ho netefatsa ts'ebetso le katleho ea lits'ebetso tsa moriti. E le tsoelo-pele ea theknoloji, indasteri ea semiconductor e loanela lintlafatso tsa khase le tsamaisong ea khase e amanang le tšebeliso ea tsona.