Indasteri ea semiconductor, joalo ka motheo oa nts'etsopele ea mahlale a sejoale-joale, ho kenyelletsa likhase tse ngata tse phahameng tsa bohlooho le bohloeki bo phahameng. Likhoele tse ikhethang tsa semiconductors tse buang ka likhatiso tse bapalang karolo ea bohlokoa tsa tlhahiso ea li-semiconductor, ho beha lifilimi tsa Chipi, ho ba le mekhoa e litšila le lits'ebetso tse tšesaane le lits'ebetso tse tšesaane. Likhaletso tsena li tlameha ho latela litlhokahalo tse thata tsa bohloeki, bo tsitsitseng le taolo e nepahetseng ka lebaka la lits'ebetso tsa karabelo. Sengoliloeng sena se tla hlahisa likhase tse 'maloa tse ikhethang tse sebelisoang li-semicoctor' me li tšohla karolo ea tsona molemong oa ho etsa seiconductor.

1. Hydrogen (H₂)

Hydrogen e sebelisoa haholo ka har'a semiconductor tlhahiso, haholo-holo ho Deposition ea mouoane oa lik'hemik'hale (CVD) le phokotso ea phokotso. Ho CVD, hydrojene hangata e tsoakoa le likhase tse ling ho lema lifilimi tse tšesaane, joalo ka lifilimi tsa silicon. Fydrogen le eona e sebetsa e le moemeli oa ho fokotsa mochini oa lisebelisoa tsa tšepe le lits'ebetso tsa ho tlosoa ho tlosoa. Ntle le moo, hydrojene e sebelisoa ho hloekisa le ho phekola linotsi tsa semicondctor ho tlosa litšila le ho ntlafatsa boleng ba li-chip.

2. Nitrogen (N₂)

Nitrogen, khase ea mehele, haholo-holo e sebelisoa haholo ho fana ka tikoloho ea mahala ea oksijene ea semiconductor E sebelisoa hangata ka lisebelisoa tsa ho hloekisa, lits'ebetso tsa ho futhumatsa, ho ea le motlatsi oa maikutlo a leholimo. Ka deposisira ea vapor le lits'ebetsong tse sa tsoaneng, naetrojene e tsoakoa hangata le likhase tse ling ho tsitsisa maemo le ho laola sekhahla sa karabelo. Nitrogen e boetse e sebelisetsoa ho hatella oxidation, e sirelletsang lisebelisoa tse hlokolosi ho tsoa tšenyo ea oxida.

3. Oksijene (O₂)

Oksijene e bapala karolo ea bohlokoa indastering ea semiconductor, haholo ts'ebetsong ea oxida. Ka sebopeho sa silika 1 ea sioxide sethaleng se holim 'a wafer, oksijene e bohlokoa. Ka ho kenyelletsa oksijene, mefuta ea li-oxi ea apereng extsil e sebakeng sa silicon, e bohlokoa bakeng sa ts'ebetso ea motlakase le ho tsitsa ha sesebelisoa. Oksijene e boetse e sebelisoa ho hloekisa le ho netefatsa ka likhase tse ling tsa lik'hemik'hale ho theha oxides kapa ho tlosa lifilimi tse ling tsa tšepe.

4. Carbon Tetrafluoride (CF₄)

Carbon Tetrafluollide e sebelisoa haholo lits'ebetsong tsa ho ba. Semiconductor Enching, CF₄ e kopantsoe le likhase tse ling ho tlosa lifilimi tse soseng hanyane tsa silicon, silicon nitride, tšepe le lisebelisoa tse ling. Ha CF₄ e kopanya le foorine, e etsa flior o etsa flior o etsa flior o na le flior e nang le bohato bo matla mme o ka ba joalo ka lisebelisoa tse thata. Khase ena e bohlokoa bakeng sa papiso e ntle ea ho lokisa holimo ho tlhahiso e kopaneng ea potoloho.

5. Hydrogen chloride (hcl)

Khase ea hydrogen ea hydrogen ea hydrogen E sebetsana le lifilimi tsa tšepe ho theha li-clodides, tse lumellang likarolo tsa tšepe hore li tlosoe. Ts'ebetso ena e sebelisoa haholo ho tloha ha ho patiloe ha lifilimi tsa tšepe tse tšesaane, ho netefatsa hore o ne a e-na le meralo ea Chip.

6. Nitrogen Trifluoride (NF₃)

Nitrogen Trifluoride e sebelisoa haholo ho hloekisa masala a Deposition ho lisebelisoa tsa Plasma. Ho litsamaiso tsa Plasma, li arabela ka lisebelisoa tse behiloeng (joalo ka fluorides tse behiloeng habonolo) ho theha fliorde e tlosoang habonolo. Khase ena e sebetsa hantle haholo ts'ebetsong ea ho hloekisa, ho thusa ho boloka bohloeki ba lisebelisoa tsa Etlango le ho ntlafatsa ho nepahala le ts'ebetso ea mekhoa ea ho etsa kopo.

7. Silane (Sih₄)

Silane ke khase e tloaelehileng e sebelisoang khafetsa ho Deposition ea mouoane oa mouoane oa lik'hemik'hale (CVD), haholo-holo bakeng sa ho beha lifilimi tsa silicon tse tšesaane. Silane o bolaoa ka lithemparetjha tse phahameng tsa siceon ho etsa lifilimi tsa silicon sebakeng se bohlokoa sa semiconductor Ka ho fetola phallo ea silene le karabelo ea boitšoaro, sekhahla sa lifilimi le boleng ba lifilimi li ka laoloa hantle.

8. Boron trifluoride (bf₃)

Boron Trifluoride ke khase ea bohlokoa ea ho thellela E sebelisoa ho fetola thepa ea motlakase ea kristale ka ho araba ka subrate ea silise ho etsa karolo e lakatsehang e fihlang. Ts'ebetso ea Boron e bohlokoa bakeng sa ho theha mofuta oa semicondtor lisebelisoa, le khase ea BF₃ e bapala karolo ea bohlokoa ts'ebetsong ena.

9. Sulphur Hexafluoride (SF₆)

Sulfur Hexafluorride e sebelisoa haholo ka tatellano ea litsamaiso tsa semiconductor, haholo-holo e le ho ba le mafura a phahameng. Ka lebaka la thepa ea eona e phahameng ea motlakase le tsitsipano ea lik'hemik'hale, SF₆ e ka kopantsoe le likhase tse ling ho tlosa li-filimi tse ka nepo le ho netefatsa lipaterone tse nepahetseng. E boetse e sebelisoa haholo ka hothe ha iont ea ion, ka ho sebetsa hantle ho tlosa lifilimi tse sa batleheng tsa tšepe.

Sephetho

Likhoele tse ikhethang tsa semicondtor li bapala karolo e ke keng ea lekanngoa ea ho etsa tlhahiso ea lipotoloho tse kopaneng. Ha theknoloji e ntse e tsoela pele, tlhokahalo ea tlhoekiso e phahameng le ts'ebetso ea likhase tsena e eketseha, ho khothaletsa barekisi hore ba tsoele pele boleng le mefuta ea likhase. Nakong e tlang, indasteri ea semiconductor e tla tsoela pele ho itšetleha ka likhase tsena tse ikhethang ho tšehetsa tlhahiso ea li-chips tsa mochine o latelang oa mahlale le mahlale a mahlale a latelang. Ka hona, kutloisiso le ho etsa likhase tse ikhethang tsa semiconductor li tla ba tsa bohlokoa ho khanna nts'etsopele e tsoelang pele ea indasteri ea semiconductor.