Argon dareere saafi ah oo sarreeya xagga wax-soo-saarka semiconductor iyo hagaha wax iibsiga
Iyadoo horumarinta degdega ah ee warshadaha semiconductor-ka caalamiga ah, hababka wax soo saarka chip ayaa si buuxda u galay xilligii nanometerka. Habkan wax-soo-saarka ee aadka u saxan, daqiiqad kasta oo isbeddel deegaan ah ama wasakhaysan waxay u horseedi kartaa in la xoqo dhammaan dufcaddii maraqyada. Sidaa darteed, gaaska khaaska ah ee elektiroonigga ah iyo gaaska warshadaha saafiga ah waxay ciyaaraan door aan la bedeli karin. Waxaa ka mid ah. dareere nadiif ah oo sarreeya waxay noqotay furaha lagama maarmaanka ah ee laga maarmi karo hawlgallada maalinlaha ah ee qalabka wax-soo-saarka semiconductor sababtoo ah firfircoonideeda ugu dambeysa ee kiimikaad iyo sifooyinka jireed ee wanaagsan.
Maqaalkani wuxuu si qoto dheer u falanqeyn doonaa codsiyada asaasiga ah ee argon dareeraha ee hababka wax soo saarka chip wuxuuna siin doonaa hage wax iibsiga xirfadeed ee kooxaha silsiladaha sahayda ganacsiga.
Codsiyada Muhiimka ah: Waa maxay sababta dareeraha Argon uga go'i la'yahay wax soo saarka Semiconductor?
Habka wax soo saarka semiconductor-ka hore-Dhammaadka (FEOL), argon dareeraha ah ee semiconductors ayaa ugu horrayn lagu dabaqaa marxaladaha asaasiga ah ee soo socda ee go'aaminaya wax-soo-saarka badeecada:
- Dhigista Uumiga Jirka (PVD) / Tuug: Gaaska argon-ga ah ee aadka u saafiga ah, oo uu sameeyay gaaska dareeraha argon-ka, ayaa ah gaaska ugu caadiga ah ee shaqeeya ee geeddi-socodyada PVD. Qolka faakuumka dhexdiisa, ions argon waxa lagu dedejiyaa beer koronto si ay u duqeeyaan walxaha bartilmaameedka ah, taas oo keenaysa in atamyada bartilmaameedka ahi ay burburaan oo ay si siman u dhigaan dusha sare ee wafer si ay u sameeyaan filim bir ah. Nadiifinta sare waa shardi si loo hubiyo cufnaanta iyo isku dheelitirnaanta korantada ee filimka.
- Gebi ahaanba Badbaadsan Jawi Ilaaliyaha Inert: Inta lagu jiro habka jiidashada silikoon monocrystalline (sida habka Czochralski) iyo hababka heerkulka sare ee heerkulka, silikoon si fudud ayay ula falgashaa oksijiinta heerkulka sare. Sidaa darteed, gaaska argon waa in si joogto ah loo soo bandhigaa si loo beddelo hawada, iyada oo la siinayo jawi aan firfircoonayn oo ka go'an oksijiinta iyo qoyaanka, taas oo hubinaysa koritaanka qumman ee muraayadda silikoon.
- Cryogenics iyo Farsamada Nadiifinta Wafer: Nidaamyada horumarsan sida lithography Ultraviolet (EUV), sifooyinka heerkulka aadka u hooseeya ee argon dareeraha (barka karkarinta -186 ° C) ayaa mararka qaarkood lagu dabaqaa nidaamyada qaboojinta ee qalabka saxda ah. Isla mar ahaantaana, tignoolajiyada aerosol ee argon waxaa sidoo kale loo isticmaalaa nadiifinta-nadiifinta-nanometer-ka-yar ee dusha sare ee wafer-ka, kaas oo aan burburin karin walxaha daqiiqadaha ah.
Tayada ayaa go'aamisa Wax-soo-saarka: Heerarka Adag ee Dareereha Nadiifinta Sarreya ee Argon
Shuruudaha warshadaha semiconductor ee alaabta ceeriin waa kuwo aad u adag. Argon dareeraha heerka warshadaha caadiga ah sida caadiga ah wuxuu u baahan yahay oo kaliya inuu gaaro nadiif ah 99.9% ama 99.99%, laakiin tani waa ka fog tahay buuxinta baahiyaha soosaarka chip. Waayo dareere nadiif ah oo nadiif ah oo u qalma, daahirsanaanta aasaasiga ah ayaa caadi ahaan looga baahan yahay si ay u gaarto 99.999% (5N), iyo qanjidhada horumarsan, waxay xitaa u baahan tahay inay gaarto 99.9999% (6N) ama ka sareeya.
Muhiimad badan ayaa ah ilaalinta wasakhda. Waxa ku jira ogsajiinta, nitrogen, qoyaanka, wadarta hydrocarbons (THC), iyo raadraaca ion birta waa in si adag loo xakameeyaa heerka ppb (qaybaha halkii bilyan) ama xitaa ppt (qayb trillion) Xitaa haddii qadar daqiiqad ah oo wasakh ah ay isku darto dhuumaha gaaska, waxay samayn doontaa cillado yaryar oo ku yaal dusha sare ee wafer, taasoo keenaysa wareegyada gaaban ee gaaban ama daadinta hadda, taasoo si toos ah hoos u dhigeysa heerka wax-soo-saarka waxayna keenaysaa khasaare dhaqaale oo weyn.
Hagaha Soo Iibka: Sida loo Qiimeeyo oo loo doorto Bixiyaha Dareere Argon ee Xirfadlaha ah?
Marka la eego doorka muhiimka ah ee gaasaska saafiga ah ee sarreeya ee hawlgalka khadadka wax soo saarka, helitaanka iyo hubinta alaab-qeybiyaha dareeraha ah ee argon oo dhammaystiran oo tayo leh waa hawl muhiim ah oo loogu talagalay kooxaha wax soo iibsiga iyo saadka. Marka la qiimeynayo alaab-qeybiyeyaasha suurtagalka ah, waxaa lagu talinayaa in diiradda la saaro saddexda cabbir ee soo socda:
Xakamaynta Tayada Adag iyo Awoodaha Imtixaanka: Alaab-qeybiyeyaasha aadka u wanaagsan waa in lagu qalabeeyaa qalabka falanqaynta raadraaca heerka-sare sida Gaas Chromatographs (GC) iyo Mass Spectrometers (MS). Waa inay awoodaan inay bixiyaan COA tifaftiran (Shahaadada Falanqaynta) dufcad kasta si loo hubiyo joogteynta buuxda ee nadiifnimada inta u dhaxaysa dhalmada.
Adkeysiga Silsiladda Sahayda ee Adag iyo Deganaanshaha Bixinta: Fabs sida caadiga ah waxay shaqeeyaan 24/7/365, iyo qiimaha wakhtiga hoos u dhacu aad buu u sarreeyaa. Sidaa darteed, alaab-qeybiyeyaashu waa inay lahaadaan awoodo kaydin dareere oo maxalli ah oo baaxad leh, raxantooda booyadaha booyadaha ee cryogenic, iyo qorshooyin degdeg ah oo dhammaystiran oo hubinta sahayda degdegga ah.
Kontaynarro Horumarsan iyo Tignoolajiyada Ka-hortagga "Wasakhowga Dugsiga Sare": Si kasta oo ay nadiif u tahay gaasku, faa'iido ma leh haddii ay wasakhaysan tahay inta lagu jiro gaadiidka. Diiradadu waa inay ahaataa alaab-qeybiyaha kaydinta kaydinta cryogenic iyo tignoolajiyada daawaynta gidaarka gudaha ee booyadaha (sida haddii ay soo martay daawaynta Electropolishing/EP), iyo sidoo kale Hababka Hawlgelinta Heerka (SOP) ee waalka iyo dhuumaha nadiifinta inta lagu jiro marxaladaha buuxinta iyo wareejinta, iyadoo la hubinayo in nadiifinta sare si toos ah looga keeni karo warshadda ilaa terminalka macaamiisha.
Gabagabo
Marka la eego horumarka joogtada ah ee Sharciga Moore, dareeraha nadiifka ah ee argon ma aha oo kaliya isticmaalka aasaasiga ah, laakiin sidoo kale "la socoshada aan la arki karin" ee hababka semiconductor sare. Si cilmiyaysan oo adag u qiimaynaya una dooranaya a dareere argon alaab-qeybiye oo leh awood dhamaystiran si loo hubiyo tayada sare iyo xasiloonida sahayda dareeraha argon ee semiconductors waa aasaaska muhiimka ah ee shirkad kasta oo wax soo saarka semiconductor si loo hagaajiyo wax-soo-saarka habka iyo ku guuleysiga tartanka suuqa caalamiga ah.
FAQ
Q1: Sidee u adag tahay xakamaynta wasakhda ah ee dareeraha nadiifka ah ee argon ee loo isticmaalo wax soo saarka semiconductor?
Jawaab: Aad u adag. Argon dareeraha heerka-semiconductor kaliya uma baahna nadiifinta guud ee 99.999% (5N) ama ka sareeya, laakiin si ka sii muhimsan, waxay xad adag saaraysaa wasakhda gaarka ah. Tusaale ahaan, heerka qoyaanka (H2O) iyo ogsijiinta (O2) ayaa inta badan loo baahan yahay in lagu hayo ka hooseeya 10 ppb; 7nm iyo ka hooseeya qanjidhada horumarsan, wasakhda birta ion xitaa waxay u baahan tahay heerka ppt-qayb (qayb trillion)
Q2: Markaad dooranayso alaab-qeybiye argon ah, sidee looga hortagi karaa wasakheynta labaad inta lagu jiro gaadiidka iyo wareejinta?
Jawaab: Furaha ka-hortagga wasakhda labaad waxay ku jirtaa alaab-qeybiyaha alaab-qeybiyaha iyo qeexitaannada hawlgalka. Inta lagu jiro wax soo iibsiga, xaqiiji haddii alaab-qeybiyuhu uu isticmaalo booyadaha nadaafadda sare leh ee cryogenic ee loogu talagalay semiconductors (xadhka gudaha wuxuu u baahan yahay dhalaalid gaar ah iyo dareen). Dhanka kale, dib u eeg SOP-dooda dejinta dareeraha goobta, iyadoo la hubinayo nadiifin iyo beddelaad ku filan gaas saafi ah oo sarreeya ka hor inta aan la isku xirin dhuumaha, iyo in raadraaca onlaynka ah ee ogsijiinta/qalabka ilaalinta qoyaanka la qalabeeyay.
Q3: Waa maxay waxyeellada gaarka ah ee ay u keeni doonto waferka haddii argon dareeraha ah ee semiconductors uusan buuxin heerarka daahirsanaanta?
Jawaab: Haddii ay nadiifnimadu tahay mid aan heer sare ahayn (sida isku darka oksijiinta raadraaca ama qoyaanka), waxay keeni doontaa fal-celin oksaydh ah oogada aan la filayn oo ku saabsan maraqyada silikoon inta lagu jiro hababka soo jiidashada heerkulka sare. Tuugada PVD, wasakhdu waxay isku darsami doontaa filimka birta ah ee la shubay, taas oo beddeleysa iska caabbinta filimka iyo astaamaha jireed. Kuwani waxay si toos ah u keeni doonaan cillado dilaa ah sida wareegyada gaaban iyo wareegyada furan ee waferka, si aad ah u yareynaya wax-soo-saarka chips.
