Kupanga kwa semiconductor kumadalira mitundu yosiyanasiyana ya mpweya, womwe ungathe kugawidwa m'magulu atatu akuluakulu: mpweya wambiri, mpweya wapadera, ndi kutulutsa mpweya. Mipweya imeneyi iyenera kukhala yoyera kwambiri kuti isawonongeke, zomwe zingawononge njira yopangira zinthu zovuta komanso zovuta.

Mipweya Yochuluka

Nayitrogeni (N₂):

Udindo: N₂ imagwira ntchito zingapo, kuphatikiza kuyeretsa zipinda ndikupereka mpweya wabwino panthawi zosiyanasiyana zopanga semiconductor.
Mfundo Zowonjezera: Nayitrojeni nthawi zambiri amagwiritsidwa ntchito poyendetsa ndi kusungirako zowotcha za silicon kuti achepetse okosijeni. Chikhalidwe chake cha inert chimatsimikizira kuti sichigwirizana ndi zipangizo zina, zomwe zimapangitsa kuti zikhale zoyenera kusunga malo okonzedwa bwino.

Argon (Ar):
Udindo: Kuphatikiza pakuchita nawo ntchito za plasma, argon imathandiza kwambiri m'njira zomwe zida zoyendetsedwa ndi gasi ndizofunikira.
Mfundo Zowonjezera: Chifukwa sichimakhudzidwa ndi zipangizo zambiri, argon imagwiritsidwanso ntchito popopera, zomwe zimathandiza kuyika mafilimu achitsulo kapena dielectric komwe malo ayenera kusungidwa popanda kuipitsidwa.

Helium (Iye):
Udindo: Kutentha kwa Helium kumapangitsa kuti ikhale yofunikira pakuziziritsa ndikusunga kutentha nthawi zonse.
Mfundo Zowonjezera: Nthawi zambiri amagwiritsidwa ntchito pamakina amphamvu kwambiri a laser a lithography chifukwa chosasunthika komanso kuthekera kosunga njira yakumaso kuti isaipitsidwe.

haidrojeni (H₂):
Udindo: Kupitilira kugwiritsa ntchito kwake pakuwotcha, haidrojeni imathandizanso kuyeretsa pamwamba pa zowotcha ndipo imatha kuphatikizidwa ndikusintha kwamankhwala panthawi ya epitaxy.
Mfundo zowonjezera: Kugwiritsa ntchito haidrojeni pakuyika kwa mafilimu opyapyala kumalola kuwongolera kwakukulu pazonyamulira muzinthu za semiconductor, kusintha mphamvu zawo zamagetsi kwambiri.

Magesi apadera ndi ma Dopants

Silane (SiH₄):
Udindo: Kupatula kukhala kalambulabwalo wa silicon deposition, silane akhoza polymerized kukhala filimu passivating kuti kusintha mawonekedwe amagetsi.
Mfundo Zowonjezera: Kuchitanso kwake kumafuna kuchitidwa mosamala chifukwa chachitetezo, makamaka chikasakanizidwa ndi mpweya kapena mpweya.

Ammonia (NH₃):
Udindo: Kuphatikiza pakupanga mafilimu a nitride, ammonia ndi yofunika kwambiri popanga zigawo za passivation zomwe zimakulitsa kudalirika kwa zida za semiconductor.
Mfundo Zowonjezera: Itha kukhudzidwa ndi njira zomwe zimafunikira kuphatikizika kwa nayitrogeni mu silicon, kukonza zinthu zamagetsi.

Phosphine (PH₃), Arsine (AsH₃), ndi Diborane (B₂H₆):
Udindo: Mipweya iyi sikofunikira pa doping yokha komanso ndiyofunikira pakukwaniritsa zomwe mukufuna pamagetsi pazida zapamwamba za semiconductor.
Zidziwitso Zowonjezera: Kuwopsa kwawo kumapangitsa kuti pakhale chitetezo chokhazikika komanso kuyang'anira machitidwe omwe amapangidwa kuti achepetse zoopsa.

Etching ndi Kuyeretsa Magesi

Fluorocarbons (CF₄, SF₆):
Udindo: Mipweya iyi imagwiritsidwa ntchito popangira zowuma, zomwe zimapereka kulondola kwambiri poyerekeza ndi njira zonyowa.
Mfundo Zowonjezera: CF₄ ndi SF₆ ndizofunika kwambiri chifukwa chotha kuyika bwino zinthu zopangidwa ndi silicon, zomwe zimapangitsa kuti pakhale kusintha kwapateni kofunikira kwambiri pamagetsi amakono.

Chlorine (Cl₂) ndi Hydrogen Fluoride (HF):
Udindo: Chlorine imapereka mphamvu zowotcha mwamphamvu, makamaka pazitsulo, pomwe HF ndiyofunikira pakuchotsa silicon dioxide.
Mfundo Zowonjezera: Kuphatikizika kwa mipweyayi kumathandizira kuchotsa wosanjikiza bwino pamagawo osiyanasiyana opangira, kuwonetsetsa kuti malo ali oyera pamasitepe okonzekera.

Nayitrogeni Trifluoride (NF₃):
Udindo: NF₃ ndiyofunikira pakuyeretsa zachilengedwe m'makina a CVD, kuyankha ndi zonyansa kuti zigwire bwino ntchito.
Mfundo Zowonjezera: Ngakhale pali nkhawa za kuthekera kwa mpweya wowonjezera kutentha, mphamvu ya NF₃ pakuyeretsa imapangitsa kukhala chisankho chokondedwa m'mafakitale ambiri, ngakhale kuti kagwiritsidwe ntchito kake kamayenera kuganiziridwa mosamala zachilengedwe.

Mpweya (O₂):
Ntchito: Njira zamakutidwe ndi okosijeni zomwe zimayendetsedwa ndi okosijeni zimatha kupanga zigawo zofunikira zotchingira m'magulu a semiconductor.
Mfundo Zowonjezera: Ntchito ya okosijeni pakukulitsa okosijeni wa silicon kuti apange zigawo za SiO₂ ndizofunikira kuti pakhale kudzipatula komanso kuteteza zigawo zadera.

Magesi Otuluka mu Semiconductor Manufacturing

Kuphatikiza pa mipweya yachikhalidwe yomwe yatchulidwa pamwambapa, mipweya ina ikuyang'ana kwambiri pakupanga semiconductor, kuphatikiza:

Mpweya wa Dioxide (CO₂): Amagwiritsidwa ntchito poyeretsa komanso kuyika zinthu zina, makamaka zomwe zimaphatikizapo zida zapamwamba.

Silicon Dioxide (SiO₂): Ngakhale si gasi pansi pamikhalidwe yokhazikika, mitundu ya vaporized ya silicon dioxide imagwiritsidwa ntchito munjira zina zoyika.

Kuganizira Zachilengedwe

Makampani opanga ma semiconductor akuyang'ana kwambiri kuchepetsa kuwonongeka kwa chilengedwe komwe kumakhudzana ndi kugwiritsa ntchito mpweya wosiyanasiyana, makamaka womwe ndi mpweya wowonjezera kutentha. Izi zapangitsa kuti pakhale njira zamakono zoyendetsera gasi komanso kufufuza kwa mpweya wina womwe ungapereke ubwino wofanana ndi malo otsika a chilengedwe.

Mapeto

Mipweya yomwe imagwiritsidwa ntchito popanga semiconductor imakhala ndi gawo lofunikira pakuwonetsetsa kuti njira zopangira zinthu zikuyenda bwino. Pomwe ukadaulo ukupita patsogolo, makampani opanga ma semiconductor amayesetsa mosalekeza kuwongolera kuyera kwa gasi ndi kasamalidwe, komanso kuthana ndi chitetezo ndi zovuta zachilengedwe zomwe zimakhudzidwa ndikugwiritsa ntchito kwawo.