Dziko lamakono likuyenda pa tchipisi. Kuchokera pa foni yam'manja yomwe ili m'thumba mwanu kupita kumayendedwe owongolera muzamlengalenga, yaying'ono chipangizo cha semiconductor ndiye ngwazi yosadziwika yazaka za digito. Komana yuma yinateli kutukwasha ñahi? Ndi dziko losaoneka, lomwe nthawi zambiri limasinthasintha la mpweya wapadera. Makamaka, fluorine chemistry amatenga gawo lofunikira kwambiri mu kupanga semiconductor ndondomeko yomwe sichingasinthidwe.

Ngati mukuyang'anira chain chain kapena kuyang'anira mtundu wazinthu mu a semiconductor foundry, mukudziwa kuti malire a zolakwika ndi ziro. Kukwera kamodzi kokha mu chinyezi kapena tinthu tating'onoting'ono kumatha kuwononga ndalama zopanga madola mamiliyoni ambiri. Nkhaniyi ikulowera kwambiri pa udindo wa wokhala ndi fluorine mpweya - chifukwa chiyani timawagwiritsa ntchito, chemistry yomwe imapangitsa kuti ikhale yogwira mtima, komanso kufunikira kofunikira kwa kukhazikika kwaukhondo ndi chiyero. Tidzaphunzira momwe izi mpweya wabwino kwambiri amagwiritsidwa ntchito mu etch ndi masitepe oyika, ndipo chifukwa chiyani kuwapeza kuchokera kwa bwenzi lodalirika ndiye chisankho chofunikira kwambiri chomwe mungapange chaka chino.

Chifukwa chiyani makampani a semiconductor amadalira mpweya wokhala ndi fluorine?

Kuti mumvetse makampani a semiconductor, muyenera kuyang'ana pa tebulo la periodic. Silicon ndi chinsalu, koma fluorine ndi burashi. The kupanga semiconductor Njirayi imaphatikizapo kumanga zigawo zazinthu ndikuzichotsa mwakufuna kupanga mabwalo. Kuchotsa kumeneku kumatchedwa etching.

Fluorine ndiye chinthu chamagetsi kwambiri. Mwachidule, ndi njala yodabwitsa ya ma elekitironi. Pamene ife tikuyambitsa mpweya wa fluorine kapena fluorinated mankhwala m'chipinda cha plasma, maatomu a fluorine amachitira mwamphamvu ndi silicon ndi silicon dioxide. Izi zimasintha silicon yolimba kukhala mipweya yosasunthika (monga silicon tetrafluoride) yomwe imatha kupopa mosavuta. Popanda kusinthika kwamankhwala kumeneku, sitinathe kupanga machulukidwe ang'onoang'ono ndi mabowo olumikizana omwe amafunikira masiku ano zipangizo zamagetsi.

Mu kupanga kwakukulu, liwiro ndi kulondola ndi chilichonse. Magesi okhala ndi fluorine perekani mitengo yayikulu yofunikira kuti mupitilize kupitilira, ndikupatseni mwayi wodula chinthu chimodzi popanda kuwononga wosanjikiza pansi pake. Ndiwosavuta kusanja mchitidwe wa chemistry ndi physics.

Nchiyani chimapangitsa kuti chemistry ya fluorine ikhale yosiyana kwambiri ndi etching yapamwamba kwambiri?

Mungafunse, bwanji osagwiritsa ntchito chlorine kapena bromine? Timatero, kwa zigawo zina. Komabe, fluorine chemistry amapereka mwayi wapadera pamene etching zipangizo silicon ofotokoza. Mgwirizano pakati pa silicon ndi fluorine ndi wamphamvu kwambiri. Pamene wokhala ndi fluorine madzi a m'magazi amagunda chophwanyika, zomwe zimachitika zimakhala zovuta komanso zimangochitika zokha.

Matsenga amachitika mu plasma. Mu a ndondomeko ya semiconductor chipinda, timagwiritsa ntchito mphamvu zambiri ku gasi wokhazikika ngati Carbon Tetrafluoride (CF4) kapena Sulfur Hexafluoride (SF6). Izi zimaphwanya gasi padera, ndikutulutsa mphamvu fluorine zosokoneza maganizo. Ma radicals awa amaukira pamwamba pa mtanda.

"Kulondola kwa etch imatanthauzira magwiridwe antchito a chip. Ngati kuyera kwa gasi kumasinthasintha, mtengo wanu umasinthasintha, ndipo zokolola zanu zimawonongeka. "

Izi zimatsogolera ku lingaliro la anisotropic etching - kudula molunjika popanda kudya cham'mbali. Posakaniza fluorine ndi ena ndondomeko mipweya, mainjiniya amatha kuwongolera mbiri ya ngalandeyo mwangwiro. Kutha kumeneku ndikofunikira tikamasamukira ku ma node ang'onoang'ono (7nm, 5nm, ndi pansi), pomwe ngakhale nanometer yopatuka ndiyolephera.

Kodi mipweya yopangidwa ndi semiconductor imayendetsa bwanji njira zapamwamba?

Etch process ndi ziboliboli zida za nsalu. Pali mitundu iwiri ikuluikulu: chonyowa chonyowa (pogwiritsa ntchito mankhwala amadzimadzi monga hydrogen fluoride) ndi zouma zouma (pogwiritsa ntchito plasma). Zamakono semiconductor yapamwamba ma node amadalira pafupifupi pa plasma yowuma chifukwa ndi yolondola kwambiri.

Mu wamba kutulutsa plasma kutsata, a mpweya wa fluorinated imayambitsidwa. Tiyeni tiwone zosiyanasiyana zomwe zimagwiritsidwa ntchito:

• Mpweya wa Tetrafluoride (CF4): Ntchito yopangira oxide etching.
• Octafluorocyclobutane (C4F8): Amagwiritsidwa ntchito kuyika polima wosanjikiza m'mbali mwa ngalandeyo, kuwateteza pomwe pansi kumakhazikika mozama.
• Sulfur Hexafluoride (SF6): Amadziwika ndi mitengo yothamanga kwambiri ya silicon etching.

Mgwirizano wapakati pa plasma ndi gawo lapansi ndizovuta. Zimaphatikizapo kuphulitsidwa kwakuthupi ndi ma ions komanso kukhudzidwa kwamankhwala ndi ma radicals. The zida zopangira semiconductor ayenera kulamulira mosamalitsa kuyenda, kuthamanga, ndi kusakanizika kwa mpweya umenewu. Ngati ndi gasi wapadera imakhala ndi zonyansa monga chinyezi, imatha kupanga hydrofluoric acid mkati mwa mizere yobweretsera kapena chipinda, zomwe zimayambitsa dzimbiri ndi kuwonongeka kwa tinthu.

Chifukwa chiyani Nitrogen Trifluoride ndi mfumu yoyeretsa chipinda?

Pamene etching ndi kuyeretsa gwirizanani, kuyeretsa zida zopangira ndi kofunika kwambiri monga kukonza mkate. Nthawi Chemical Vapor Deposition (CVD), zinthu monga silicon kapena tungsten zimayikidwa pamtanda. Komabe, zipangizozi zimaphimbanso makoma a chipindacho. Ngati chotsalira ichi chikuwonjezeka, chimatuluka ndikugwera pazitsulo zophatikizika, zomwe zimayambitsa zolakwika.

Lowani Nitrogen Trifluoride (NF3).

Zaka zapitazo, mafakitale ankagwiritsa ntchito fluorinated wowonjezera kutentha mpweya monga C2F6 woyeretsa chipinda. Komabe, NF3 yakhala muyezo wa njira zoyeretsera chipinda chifukwa chakuchita bwino kwambiri. Ikasweka mu gwero lakutali la plasma, NF3 imapanga kuchuluka kwa maatomu a fluorine. Ma atomu amenewa amatsuka makoma a chipindacho kukhala oyera, n’kusandutsa zotsalira zolimba kukhala mpweya wotulutsidwa.

Nayitrogeni Trifluoride imakondedwa chifukwa imakhala ndi kuchuluka kwa momwe amagwiritsidwira ntchito (gasi wochulukirapo amagwiritsidwa ntchito) komanso mpweya wochepa poyerekeza ndi wakale. zoyeretsa. Kwa woyang'anira malo, izi zikutanthauza kuti nthawi yocheperako yokonza ndi kutulutsa mwachangu.

Ndi mankhwala ati a fluorinated omwe ali ofunikira pakupanga kwamphamvu kwambiri?

The gawo la semiconductor amadalira dengu lachindunji mpweya wokhala ndi fluorine. Iliyonse ili ndi "maphikidwe" kapena kugwiritsa ntchito kwake. Pa Jiangsu Huazhong Gasi, tikuwona kufunikira kwakukulu kwa izi:

Izi fluorinated mankhwala ndi magazi a moyo wa kupanga kwakukulu. Popanda mtsinje wokhazikika wa izi mpweya mu semiconductor kupanga, mizere imayima. Ndizosavuta. Ichi ndichifukwa chake oyang'anira ogula ngati Eric Miller amayang'anira nthawi zonse magulidwe akatundu za zosokoneza.

Chifukwa chiyani mpweya woyeretsedwa kwambiri ndi msana wa zokolola za semiconductor?

Sindingathe kutsindika izi mokwanira: Ungwiro ndi chilichonse.

Tikamakamba za mpweya wabwino kwambiri, sitikunena za "industrial grade" yomwe imagwiritsidwa ntchito powotcherera. Tikukamba za 5N (99.999%) kapena 6N (99.9999%) chiyero.

Chifukwa chiyani? Chifukwa a chipangizo cha semiconductor ali ndi mbali zoyezedwa mu nanometers. Molekyu imodzi yokha yachitsulo chodetsedwa kapena kuchuluka kwa chinyezi (H2O) imatha kuyambitsa dera lalifupi kapena kuletsa wosanjikiza kuti asamamatire.

• Chinyezi: Amachita ndi fluorine kupanga HF, yomwe imawononga njira yoperekera gasi.
• Mpweya: Imawonjezera oxidize silicon mosalamulirika.
• Zitsulo Zolemera: Kuwononga mphamvu zamagetsi za transistor.

Monga othandizira, ntchito yathu ndikuwonetsetsa kuti Xenon wapamwamba kwambiri kapena Electronic Grade Nitrous oxide mumalandira amakumana okhwima miyezo yamakampani. Timagwiritsa ntchito chromatography ya gasi kuti tizindikire fufuzani zonyansa mpaka magawo biliyoni imodzi (ppb). Kwa wogula, kuwona Satifiketi Yowunika (COA) sikungolemba chabe; ndi chitsimikizo kuti awo kupanga semiconductor sichidzakumana ndi kuwonongeka kwakukulu kwa zokolola.

Kodi makampaniwa akuyendetsa bwanji kutulutsa mpweya wowonjezera kutentha ndi GWP?

M'chipindamo muli njovu: chilengedwe. Ambiri mpweya wa fluorinated ndi mkulu Global Warming Potential (GWP). Mwachitsanzo, Sulfur Hexafluoride (SF6) ndi imodzi mwazambiri mpweya wowonjezera kutentha odziwika kwa munthu, wokhala ndi GWP nthawi masauzande kuposa CO2.

The makampani opanga semiconductor ali pampanipani kwambiri kuti achepetse kuchuluka kwa mpweya wake. Izi zapangitsa kuti pakhale masinthidwe akulu awiri:

1. Kuchepetsa: Zovala akuyika "mabokosi oyaka" kapena zopaka pamizere yawo yotulutsa mpweya. Machitidwewa amaphwanya zomwe sizinachitike mpweya wowonjezera kutentha asanatulukire mumlengalenga.
2. Kusintha: Ofufuza akufunafuna njira ina etch mpweya wokhala ndi GWP yotsika. Komabe, kupeza molekyulu yomwe imagwira ntchito bwino ndi C4F8 kapena SF6 popanda kukhudzidwa kwa chilengedwe ndizovuta.

Nayitrogeni Trifluoride inali sitepe yolondola yoyeretsa chifukwa imawonongeka mosavuta kuposa ma PFC akale, zomwe zimapangitsa kuti pakhale zochepa kutulutsa ngati ndondomeko zochepetsera zikuyenda bwino. Kuchepetsa mpweya wowonjezera kutentha sikulinso kusuntha kwa PR; ndi chofunikira chowongolera ku EU ndi US.

Kodi ma semiconductor supply chain ali pachiwopsezo chakusowa kwapadera kwa gasi?

Ngati zaka zingapo zapitazi zatiphunzitsa kalikonse, ndiye kuti magulidwe akatundu ndi chofooka. Opanga semiconductor akumana ndi kusowa kwa chilichonse kuyambira neon mpaka fluoropolymers.

Kupereka kwa mpweya wa fluorine ndipo zotuluka zake zimatengera kukumba kwa fluorspar (calcium fluoride). China ndiye gwero lalikulu padziko lonse lapansi lazinthu zopangira izi. Pamene mikangano ya geopolitical ikukwera kapena njira zoyendetsera zinthu zitsekeka, kupezeka kwa izi ndikofunikira ndondomeko mipweya kutsika, ndipo mitengo ikukwera kwambiri.

Kwa wogula ngati Eric, mantha a "Force Majeure" ndi enieni. Kuti achepetse izi, makampani anzeru akuphatikiza othandizira awo. Akuyang'ana abwenzi omwe ali ndi awo iso tanks ndipo akhazikitsa maukonde a Logistics. Kudalirika mu mayendedwe Ndiwofunikanso mofanana ndi chiyero cha gasi. Inu mukhoza kukhala nacho choyera C4F8 mpweya m'dziko lapansi, koma ngati ili padoko, palibe ntchito Fab.

Ndi njira zotani zotetezera pogwiritsira ntchito Hydrogen Fluoride ndi zinthu zina zapoizoni?

Chitetezo ndiye maziko amakampani athu. Ambiri wokhala ndi fluorine Mipweya imakhala yapoizoni, asphyxiants, kapena imakhala yotakasuka kwambiri. Hydrogen Fluoride (HF), yomwe nthawi zambiri imagwiritsidwa ntchito ponyowa kapena kupangidwa ngati chinthu, ndiyowopsa kwambiri. Imalowa pakhungu ndikuukira kapangidwe ka mafupa.

Kugwira zinthuzi kumafuna kuphunzitsidwa mwamphamvu komanso zida zapadera.

• Masilinda: Iyenera kukhala yovomerezeka ya DOT/ISO ndikuwunikiridwa pafupipafupi kuti iwononge mkati.
• Mavavu: Ma valve a diaphragm amagwiritsidwa ntchito kuti asatayike.
• Zomverera: Nsalu za Semiconductor ali ndi zida zowunikira mpweya zomwe zimatulutsa ma alarm pakutha pang'ono.

Tikadzaza silinda ndi Electronic Grade Nitrous oxide kapena mawu oopsa, timachitenga ngati chida chodzaza. Timaonetsetsa kuti silinda imapukutidwa mkati kuti zisawonongeke komanso kuti valavu imatsekedwa ndi kusindikizidwa. Kwa makasitomala athu, podziwa kuti mpweya wonyamulira kapena etchant ikafika motetezeka, zotengera zovomerezeka ndizothandiza kwambiri.

Ndi chiyani chomwe chili patsogolo pa zida zomwe zimagwiritsidwa ntchito popanga semiconductor?

The kupanga semiconductor roadmap ndi mwamakani. Pamene tchipisi zimasunthira kuzinthu za 3D monga ma transistors a Gate-All-Around (GAA), zovuta za etching ndi kuyeretsa kumawonjezeka. Tikuwona kufunika kowonjezera zachilendo mpweya wa fluorinated zosakaniza zomwe zimatha kuyika mabowo akuya, opapatiza ndi kulondola kwa atomiki.

Atomic Layer Etching (ALE) ndi njira yomwe ikubwera yomwe imachotsa zinthu zosanjikiza za atomiki imodzi panthawi imodzi. Izi zimafuna kuyesedwa kolondola kwambiri mpweya wokhazikika. Kuphatikiza apo, kukankhira kupanga "green" kumatha kuyambitsa kukhazikitsidwa kwatsopano fluorine chemistry zomwe zimapereka magwiridwe antchito omwewo ndi otsika GWP.

Tsogolo ndi la iwo omwe amatha kupanga zatsopano mu kaphatikizidwe ka gasi ndi kuyeretsa. Monga zida za semiconductor kusinthika, mipweya yomwe imagwiritsidwa ntchito kuwaumba iyeneranso kusinthika.

Zofunika Kwambiri

• Fluorine ndiyofunikira: Fluorine chemistry ndiye chinsinsi chothandizira etch ndi woyera amalowera kupanga semiconductor.
• Kuyera ndi Mfumu: Kuyera kwambiri (6N) sichingakambirane kuti tipewe zolakwika ndikuwonetsetsa ndondomeko bata.
• Mitundu Yamagesi: Mipweya yosiyanasiyana ngati CF4, SF6, ndi Nayitrogeni Trifluoride kutumikira maudindo apadera mu kupanga.
• Zachilengedwe: Kuwongolera mpweya wowonjezera kutentha ndi kuchepetsa ndizovuta zamakampani.
• Supply Security: A wamphamvu magulidwe akatundu ndi othandizana nawo odalirika ndi ofunikira kuti apewe kuyimitsidwa kwa kupanga.

Ku Jiangsu Huazhong Gas, timamvetsetsa zovutazi chifukwa timakhala nazo tsiku lililonse. Kaya mukufuna High Purity Xenon panjira yanu yatsopano kapena yodalirika yoperekera mpweya wokhazikika wamakampani, tili pano kuti tithandizire ukadaulo womwe umamanga tsogolo.