Huazhong Gas tadzipereka tokha kuphunzira luso ndi sayansi yamafakitale ndi gasi wapadera kupanga. M'dziko lamakono lamakono apamwamba, makamaka mkati mwa semiconductor mafakitale, kufunika kwa chiyero chapamwamba kwambiri mpweya sikungokonda; ndichofunikira mtheradi. Nkhaniyi ikufotokoza za dziko lovuta la kusanthula zodetsa za magetsi apadera amagetsi. Tifufuza chifukwa chake ngakhale zazing'ono kwambiri chidetso Zitha kukhala ndi zotulukapo zazikulu, momwe timadziwira zomwe sizili bwino fufuzani zonyansa, ndi zomwe zikutanthauza kwa mabizinesi. Kumvetsetsa gasi zonyansa ndi njira zawo kuyeretsedwa ndi kuzindikira, monga ICP-MS, ndizofunikira pakuwonetsetsa kudalirika ndi ntchito zamakono zamagetsi. Chidutswa ichi ndi choyenera nthawi yanu chifukwa chimapereka malingaliro a fakitale-insider pa kusunga zolimba. chiyero chamagetsi apadera amagetsi, mwala wapangodya wa semiconductor ndi zamagetsi magawo.

Kodi Magesi Apadera Amagetsi Ndi Chiyani Kwenikweni Ndipo Chifukwa Chiyani Kuyera Kwawo Ndikofunikira Kwambiri Pakupanga Ma Semiconductor?

Mpweya wapadera wamagetsi, nthawi zambiri amatchedwa mpweya wamagetsi kapena mpweya wa semiconductor, ndi gulu lapadera la mpweya wabwino kwambiri ndi zosakaniza gasi zopangidwira makamaka m'njira zovuta kupanga zida zamagetsi. Ganizirani za iwo ngati omanga osawoneka azaka za digito. Izi mpweya wogwiritsidwa ntchito mu semiconductor kupanga kumaphatikizapo mitundu yosiyanasiyana, monga silane (SiH₄) yoyika zigawo za silicon, nitrogen trifluoride (NF₃) yoyeretsa chipinda, argon (Ar) ngati chishango cha inert, ndi zosiyanasiyana mpweya wa doping monga phosphine (PH₃) kapena arsine (AsH₃) kuti asinthe mphamvu zamagetsi semiconductor zipangizo. Teremuyo "zamagetsi zapadera" palokha ikuwonetsa momwe amagwiritsidwira ntchito komanso kulondola kwambiri kofunikira pakujambula kwake. Izi si zanu zatsiku ndi tsiku mpweya wa mafakitale; mafotokozedwe awo ndi okhwima kwambiri.

Chofunikira chachikulu cha iwo chiyero sizinganenedwe mopambanitsa, makamaka mu kupanga semiconductor. Mabwalo amakono ophatikizika (ICs) amakhala ndi ma transistors ndi ma conductive njira omwe ndi ang'onoang'ono kwambiri, omwe nthawi zambiri amayezedwa mu nanometers (mabiliyoni a mita). Pamlingo wowoneka bwino kwambiri uwu, ngakhale atomu imodzi yosafunikira—an chidetso-amatha kukhala ngati mwala mumtsinje waung'ono, kusokoneza kayendedwe ka magetsi kapena kuyambitsa kuwonongeka kwa kapangidwe kake. Izi zitha kubweretsa chip cholakwika, komanso m'makampani omwe mamiliyoni a tchipisi amapangidwa pamtanda umodzi, kuwonongeka kwachuma ndi mbiri kuchokera pofala. kuipitsidwa akhoza kukhala aakulu. Chifukwa chake, a chiyero chamagetsi apadera amagetsi ndi mzati woyambira pomwe zonse zamagetsi ndi semiconductor mafakitale oyimirira. Aliyense chidetso imatha kusokoneza magwiridwe antchito a chipangizocho, kutulutsa, ndi kudalirika, kupanga mwamphamvu chiyero cha gasi Kuwongolera ndikofunikira.

Pa Huazhong Gas, tikumvetsa kuti makasitomala athu mu mafakitale a semiconductor tidalira ife kuti tipereke mpweya womwe umakumana kapena kupitirira "miyezo isanu ndi inayi" (99.999%) kapena "miyezo isanu ndi umodzi" (99.9999%). Izi zikutanthauza kuti aliyense chidetso ziyenera kukhala zotsika kuposa magawo miliyoni (ppm) kapena magawo pa biliyoni (ppb). Kukwaniritsa ndi kutsimikizira izi chiyero chapamwamba ma level amafuna apamwamba kuyeretsedwa njira ndi, crucily, patsogolo kusanthula zodetsa njira. Kukhalapo kwa zosayembekezereka chidetso ikhoza kuwonetsanso zovuta ndi ma masilinda gasi kapena chain chain, kupangitsa macheke osasinthika kukhala ofunika. Timatsimikizira zathu Nayitrogeni yamphamvu zopereka, mwachitsanzo, zimakwaniritsa miyezo yoyenerayi, popeza nayitrogeni ndi mpweya wochuluka kwambiri pamasitepe ambiri opanga semiconductor.

Kodi Ngakhale Microscopic Trace Impurities Derail Semiconductor Production Lines ingatani?

Nthawi zina zimakhala zovuta kulingalira momwe chinthu chaching'ono, a fufuzani chidetso kuyezedwa m'zigawo mabiliyoni aliwonse (ppb) kapena magawo thililiyoni (ppt), angayambitse mavuto akulu oterowo. Koma mu dziko la semiconductor kupanga, izi zazing'ono zoipitsa ndi oyipa kwambiri. Tiyeni tilingalire njira yopangira zida za semiconductor: imaphatikizapo masitepe angapo, nthawi zina mazana, osalimba monga kuyika (kuyika mafilimu opyapyala), etching (kuchotsa zinthu), ndi kuyika ayoni (kuyika maatomu enieni). Gawo lirilonse limadalira malo omwe amayendetsedwa bwino ndi mankhwala, omwe nthawi zambiri amapangidwa kapena kusamalidwa magetsi apadera amagetsi. Ngati a gasi wogwiritsidwa ntchito mu imodzi mwa masitepewa amanyamula zosafunika chidetso, kuti chidetso akhoza kuphatikizidwa mu zigawo zosakhwima za semiconductor chipangizo.

Mwachitsanzo, zitsulo zonyansa monga sodium, chitsulo, kapena mkuwa, ngakhale pazigawo zotsika kwambiri, zimatha kusintha kwambiri mphamvu zamagetsi za silicon. Atha kupanga njira zosafunikira, zomwe zimatsogolera kumayendedwe amfupi, kapena kukhala ngati "misampha" yomwe imalepheretsa kuyenda kwa ma elekitironi, kuchepetsa chipangizocho kapena kuchipangitsa kulephera kwathunthu. An chidetso Zingathenso kusokoneza zochitika za mankhwala zomwe zimapangidwira mu sitepe ya ndondomeko. Mwachitsanzo, a choipitsa mu mpweya wowotchera ukhoza kuyambitsa kuyanika pang'ono kapena kuwotcha mopitilira muyeso, kuwononga mawonekedwe ake enieniwo pawafa. Chikokacho sichimangokhala pa tchipisi tayekha; wosazindikirika chidetso Kutulutsa kumatha kupangitsa kuti magulu onse amipando atayike, zomwe zimapangitsa kuti madola mamiliyoni ambiri awonongeke, kuchedwetsa kupanga, komanso mutu kwa oyang'anira zogula zinthu ngati a Mark Shen, omwe akuyenera kuwonetsetsa kuti zinthu zili bwino. Izi zikuwonetsa kufunikira kofunikira kwamphamvu fufuzani muyeso wa zonyansa.

Chovuta ndichakuti mulingo "wovomerezeka" kwa aliyense chidetso akupitiriza kuchepa ngati semiconductor mawonekedwe a chipangizo amakhala ochepa. Zomwe zinkaonedwa kuti ndi zovomerezeka chidetso zaka khumi zapitazo zikhoza kukhala zoopsa kwambiri kuipitsidwa lero. Kuyendetsa kosasunthika kumeneku kwa miniaturization kumayika chiwopsezo chachikulu kwa opanga gasi ndi ma labu owunikira kuti asinthe. malire ozindikira kuthekera. Ngakhale kufotokoza zonyansa, tinthu tating'onoting'ono ta fumbi tosaoneka ndi maso, timatha kutsekereza kuwala mu masitepe a photolithography kapena kupanga zofooka zakuthupi pamtunda. Chifukwa chake, kuwongolera kuthekera kulikonse chidetso - kaya mpweya, zitsulo, kapena kufotokoza - ndi zofunika. The zosiyanasiyana zosafunika zomwe zingayambitse nkhani ndi zazikulu, kutsindika kufunika kokwanira kusanthula gasi.

Kodi Zomwe Zimayambitsa Mavuto Ambiri Ndi Chiyani? Kuzindikiritsa Zodetsedwa mu Gasi pa Zamagetsi.

Tikamakamba za zonyansa mu mpweya cholinga cha zamagetsi ndi semiconductor gawo, tikuyang'ana anthu osiyanasiyana, omwe angathe kuvulaza kwambiri. Izi zonyansa zidziwike akhoza kugawidwa m'magulu a gaseous, zitsulo, ndi ma particulate. Kumvetsetsa anthu omwe amayambitsa mavutowa ndi gawo loyamba lothandizira kusanthula zodetsa ndi kulamulira. Zachindunji zonyansa zomwe zilipo zingasiyane malinga ndi gasi wokha, njira yake yopangira, kusungirako, ndi kusamalira.

Zamafuta zonyansa pali mipweya ina yaikulu gasi wapadera. Mwachitsanzo, mu chiyero chapamwamba nayitrogeni, wamba wa gasi zonyansa zingaphatikizepo mpweya (O₂), chinyezi (H₂O), carbon dioxide (CO₂), carbon monoxide (CO), ndi ma hydrocarbon (CHₓ). Oxygen ndi chinyezi zimakhala zovuta kwambiri chifukwa zimakhala zotakasuka kwambiri ndipo zimatha kubweretsa oxidation yosafunikira. semiconductor zipangizo kapena njira zipangizo. Ngakhale mu gasi wopanda monga argon, izi zikhoza kukhalapo pa milingo ya kufufuza. Monga kampani, nthawi zambiri timawona zopempha zowunikira a zonyansa zambiri, kuphatikizapo mitundu yochita zinthu imeneyi. Mwachitsanzo, luso lathu limaphatikizapo kupanga zovuta Kusakaniza gasi mankhwala, kumene kulamulira chigawo chilichonse, kuphatikizapo angathe mpweya zonyansa, ndichofunika kwambiri.

Zitsulo zonyansa ndi nkhawa ina yaikulu. Awa ndi maatomu azitsulo monga sodium (Na), potaziyamu (K), calcium (Ca), iron (Fe), mkuwa (Cu), faifi tambala (Ni), chromium (Cr), ndi aluminiyamu (Al). Zitha kuchokera ku zipangizo, zipangizo zopangira (monga mapaipi ndi ma reactors), kapena ngakhale masilinda gasi okha ngati sanachizidwe bwino. Monga tanena, izi zitsulo zonyansa zitha kusokoneza kwambiri magwiridwe antchito amagetsi a semiconductor zipangizo. Kuzindikira izi pamlingo wa ppb kapena ppt kumafuna njira zowunikira kwambiri monga Inductively Coupled Plasma Mass Spectrometry (ICP-MS). Tiyeneranso kuganizira kufotokoza nkhani. Izi ndi ting'onoting'ono olimba kapena madzi particles kuyimitsidwa mu kuyenda kwa gasi. Zitha kuyambitsa zolakwika pazakudya zowotcha, zotchingira ma nozzles mu zida, kapena kuyambitsa zina zoipitsa. Kusefera ndikofunikira pakuchotsa tinthu tating'onoting'ono, koma kuyang'anira milingo yawo ndi gawo limodzi lazinthu zambiri khalidwe la gasi pulogalamu. Ena magetsi apadera amagetsi nawonso mpweya wowononga kapena mpweya wapoizoni, zomwe zimawonjezera zovuta zina pakuwongolera ndi kusanthula kwawo, kuwonetsetsa kuti chidetso mbiri simachulukitsa zoopsazi.

ICP-MS: Muyezo Wagolide Wozindikira Zoyipa Zachitsulo mu Mipweya ya Semiconductor?

Zikafika ku kusanthula zonyansa zazitsulo mu ultra-high chiyero mipweya, Inductively Coupled Plasma Mass Spectrometry, kapena ICP-MS, imadziwika kuti ndiukadaulo wotsogola. Ndi njira yamphamvu yowunikira yomwe imatha kuzindikira ndikuwerengera mitundu yambiri zonyansa zoyambirira, nthawi zambiri mpaka kutsika modabwitsa - ganizirani magawo-per-trilioni (ppt) kapena magawo-per-quadrillion (ppq) pazinthu zina. Kutengeka uku ndi chifukwa chake ICP-MS yakhala yofunika kwambiri kwa ife semiconductor makampani, kumene, monga takambirana, ngakhale miniti kuda zitsulo zonyansa zitha kukhala zowononga khalidwe la mankhwala.

Zikuyenda bwanji ICP-MS kuchita matsenga ake? M'mawu osavuta, a chitsanzo gasi (kapena yankho lochokera ku gasi) limalowetsedwa mu plasma yotentha kwambiri, yomwe nthawi zambiri imapangidwa argon. Madzi a m'magazi, omwe amafika kutentha kwa 6,000 mpaka 10,000 ° C, ali ndi mphamvu zokwanira kuti athyole mamolekyu a gasi ndikuyatsa maatomu omwe alipo, kuphatikizapo zitsulo zonyansa. Ma ion amenewa amachotsedwa mu madzi a m'magazi n'kuwatsogolera kukhala ma spectrometer. Misa spectrometer imagwira ntchito ngati fyuluta yolondola kwambiri, kulekanitsa ma ion kutengera kuchuluka kwa kuchuluka kwacharge. A chodziwira kenako amawerengera ma ion pa misa yeniyeni iliyonse, kutilola kuzindikira kuti ndi zinthu ziti zomwe zilipo komanso kuchuluka kwake. Luso la ICP-MS kusanthula kwa sipekitiramu yotakata zitsulo zonyansa mu mpweya wapadera nthawi imodzi imapangitsa kuti ikhale yothandiza kwambiri.

Pamene ICP-MS ndi wamphamvu kwambiri, si wopanda mavuto ake, makamaka polimbana ndi mpweya wogwiritsidwa ntchito mu semiconductor kupanga. Njira imodzi yodziwika bwino ndiyo kutchera msampha zonyansa kuchokera pagasi wochuluka kupita ku sing'anga yosonkhanitsira kapena kukhala madzi, omwe amawunikidwa ndi ICP-MS. Komabe, mwachindunji jekeseni wa gasi mwachindunji ku ICP-MS system ikuchulukirachulukira pamapulogalamu ena, ngakhale imafunikira mawonekedwe apadera. Kusankha njira kumadalira yeniyeni gasi zonyansa cha chidwi, mpweya wa matrix, ndi zofunikira malire ozindikira. Ku Huazhong Gas, timagulitsa kwambiri zida zamakono zowunikira, kuphatikiza ICP-MS luso, chifukwa tikudziwa kuti kupereka odalirika kusanthula zodetsa deta ndiyofunikira pa chidaliro chomwe makasitomala athu amaika mwathu mkulu chiyero zamagetsi mpweya. Kulondola kwa ICP-MS zimathandizira kutsimikizira kuti chiyero cha mpweya amakwaniritsa zofuna zokhwima kalasi yamagetsi zipangizo.

Chifukwa chiyani Unwavering Gas Purity Ndiwopanda Kukambitsirana kwa Electronics and Semiconductor Industries?

Kufunika kosagwedezeka chiyero cha gasi mu mafakitale zamagetsi ndi semiconductor sikungofuna; ndichinthu chofunikira kwambiri choyendetsedwa ndi fizikisi ndi zachuma popanga zida zamakono. Monga semiconductor Zida za chipangizocho zimacheperachepera ku sikelo ya nanometer, kukhudzika kwawo kumtundu uliwonse wa kuipitsidwa mlengalenga. An chidetso zomwe zikadakhala zosafunikira mu zida zakale, zazikuluzikulu tsopano zitha kuyambitsa kulephera koopsa kwa tchipisi tambiri. Izi zimakhudza mwachindunji zokolola - kuchuluka kwa tchipisi tabwino pa mkate uliwonse - ndipo ngakhale kutsika pang'ono kwa zokolola kumatha kumasulira ku mamiliyoni a madola pakutayika kwa ndalama zomwe zatayika. semiconductor wopanga.

Ganizirani za zomangamanga zovuta za microprocessor yamakono kapena memory chip. Lili ndi ma transistors mabiliyoni ambiri, ndipo iliyonse imakhala yodabwitsa mwaukadaulo waung'ono. Kuchita kwa ma transistors awa kumadalira momwe magetsi amagwirira ntchito semiconductor zinthu zomwe zimagwiritsidwa ntchito, zomwe zimakhudzidwa kwambiri zonyansa. Mwachitsanzo, ndithu zitsulo zonyansa imatha kuyambitsa milingo yosafunikira yamphamvu mkati mwa kusiyana kwa band ya silicon, zomwe zimatsogolera pakuchulukira kwaposachedwa kapena kutsika kwa chonyamulira. Izi zikutanthauza kuti zida zocheperako, zosagwira ntchito, kapena zosagwira ntchito. Zamafuta zonyansa monga mpweya kapena chinyezi kungayambitse kupanga zigawo zosayembekezereka za okusayidi, kusintha makulidwe a filimu kapena mawonekedwe ofunikira kwambiri pakugwiritsa ntchito chipangizo. Zonse khalidwe la gasi mwachindunji amamasulira ku khalidwe la mankhwala ndi kudalirika.

Komanso, a mafakitale zamagetsi ndi semiconductor amadziwika ndi njira zopangira zovuta kwambiri komanso zodula. Mmodzi semiconductor fakitole ("nsalu") ingawononge mabiliyoni a madola kuti amange ndi kukonzekeretsa. The mipweya yogwiritsidwa ntchito ndizofunika kwambiri panjira zambiri zodula izi. Ngati a gasi wapadera yaipitsidwa ndi chidetso, sizimangokhudza zowotcha zomwe zikukonzedwa; imathanso kuipitsa zida zopangira zokwera mtengo zokha. Izi zitha kupangitsa kuti pakhale nthawi yotalikirapo yoyeretsa ndi kuyeneretsedwa, ndikuwonjezera ndalama ndikusokoneza nthawi yopanga - zomwe zimawawa kwambiri munthu ngati Mark Shen, yemwe amadalira kutumiza munthawi yake kuti akwaniritse zofuna za makasitomala ake. Chifukwa chake, kukonzekeretsa chiyero chamagetsi apadera amagetsi kudzera molimbika kusanthula zodetsa ndi njira yofunika kwambiri yochepetsera chiwopsezo chapadziko lonse lapansi. Kuganizira kwambiri mkulu chiyero mpweya kusowa tulo chifukwa champhamvu kwambiri.

Ndi Mavuto Otani Amene Timakumana Nawo Pakuwunika Zodetsa Zachitsulo mu Gasi Wapadera?

Kusanthula zitsulo zonyansa mu mpweya wapadera, makamaka omwe amagwiritsidwa ntchito mu semiconductor mafakitale, imabweretsa zovuta zapadera. Chovuta chachikulu chimachokera kuzinthu zotsika kwambiri zomwe izi zonyansa zitha kukhala zovuta - nthawi zambiri pagawo la biliyoni (ppb) kapena magawo a trilioni iliyonse (ppt). Kuzindikira ndi kuwerengera molondola kuchuluka kwa miniti yotere kumafunikira osati zida zowunikira kwambiri ngati ICP-MS komanso kuyeretsa mwapadera madera a_alytical ndi machitidwe osamalitsa atsankho kuti mupewe kuyambitsa kunja kuipitsidwa.

Vuto limodzi lalikulu ndi chitsanzo choyambirira. Ambiri mipweya yapadera yogwiritsidwa ntchito mu zamagetsi zimakhala zotakasuka kwambiri, zowononga, kapenanso pyrophoric (zimayaka zokha mumlengalenga). Kusamutsa izi mosamala komanso moyenera mpweya mu chida chowunikira ngati ICP-MS popanda kusintha chitsanzo gasi kapena kuipitsa chidacho kumafuna malo apadera ndi njira zogwirira ntchito. Mwachitsanzo, kubaya mwachindunji a gasi wowononga monga hydrogen chloride (HCl) kukhala muyezo ICP-MS dongosolo likhoza kuwononga kwambiri. Chifukwa chake, njira zosalunjika, monga kutsekera kwa impinger (kutulutsa mpweya kudzera mumadzi kuti mugwire zonyansa) kapena cryogenic trapping, nthawi zambiri amagwiritsidwa ntchito. Komabe, njirazi zimatha kuyambitsa magwero awo omwe angathe kuipitsidwa kapena kusanthula kutayika ngati sikunachitike mwangwiro. Kusankha kwa mpweya wonyamulira chifukwa dilution, ngati pakufunika, iyeneranso kukhala yabwino chiyero.

Vuto lina ndi "matrix effect." Zambiri gasi yokha (mwachitsanzo, argon, nayitrogeni, haidrojeni) amatha kusokoneza kuzindikira kwa fufuzani zonyansa. Mwachitsanzo, mu ICP-MS, madzi a m’magazi amapangidwa kuchokera ku zochuluka gasi akhoza kupanga ma ion a polyatomic omwe ali ndi chiŵerengero chofanana cha misa-to-charge monga chandamale china zitsulo zonyansa, zomwe zimatsogolera kuzinthu zabodza kapena kuwerengera kolakwika. Owunika ayenera kugwiritsa ntchito njira monga kugundana / ma cell reaction mu ICP-MS kapena high-resolution mass spectrometry kuti athetse kusokoneza kotereku. Kuphatikiza apo, milingo ya calibration yomwe imagwiritsidwa ntchito powerengera zitsulo zonyansa ziyenera kukhala zolondola kwambiri komanso zotsatirika, ndipo njira yonse yowunikira iyenera kutsimikiziridwa kuti zitsimikizire kudalirika kwa kusanthula zodetsa zotsatira. Ife, monga ogulitsa, timadandaulanso za kukhulupirika kwa masilinda gasi ndi kuthekera kwawo kothandizira zitsulo zonyansa m'kupita kwa nthawi, zomwe zimafunika kuwongolera khalidwe nthawi zonse.

Kodi Kugwiritsa Ntchito Chida Chosinthitsa Gasi Kungawongolere Kulondola kwa Kuyeza Zonyansa?

Inde, pogwiritsa ntchito chipangizo chosinthira gasi akhoza kukhala ndi gawo lalikulu pakuwonjezera kulondola kwa fufuzani muyeso wa zonyansa, makamaka pamene mukulimbana ndi zovuta gasi matrices kapena pofuna kutsika kwambiri malire ozindikira. A chipangizo chosinthira gasi, yomwe nthawi zina imatchedwa matrix kuchotsa dongosolo, imagwira ntchito mwa kusankha kuchotsa zambiri gasi (chigawo chachikulu cha chitsanzo gasi) poganizira kwambiri fufuzani zonyansa za chidwi. Izi pre-concentration sitepe ingathandize kwambiri kukhudzidwa kwa njira zowunikira zotsatila monga ICP-MS kapena chromatograph ya gasi machitidwe.

Mfundo yolimbikitsa ambiri zida zosinthira gasi imakhudza nembanemba yolowera pang'onopang'ono kapena njira yosankha ya adsorption/desorption. Mwachitsanzo, palladium nembanemba angagwiritsidwe ntchito kusankha kuchotsa haidrojeni ku kusakaniza gasi, kulola zina zonyansa mu mpweya kukhazikika ndikuperekedwa ku a chodziwira. Mofananamo, zinthu zina za adsorbent zimatha kugwira zina zonyansa kuchokera kukuyenda gasi mtsinje, womwe ukhoza kutenthedwa ndi kutentha pang'ono poyera mpweya wonyamulira za kusanthula. Pochepetsa kuchuluka kwa zinthu zambiri gasi kufika ku chodziwira, zida izi zimachepetsa kusokoneza kwa matrix, kuchepetsa phokoso lakumbuyo, ndikuwonjezera bwino chiŵerengero cha ma signal-to-noise pa chandamale. fufuzani zonyansa. Izi zingayambitse kuchepa malire a kuzindikira.

Ubwino wa pogwiritsa ntchito chipangizo chosinthira gasi zimawonekera makamaka pofufuza zonyansa mumagetsi mpweya wovuta kuugwira mwachindunji kapena womwe umayambitsa kusokoneza kwakukulu kwa zida zowunikira. Mwachitsanzo, poyesera kuyeza kufufuza mpweya kapena chinyezi mu zotakasika kwambiri gasi wapadera,a chipangizo chosinthira gasi akhoza kulekanitsa izi zonyansa m'malo abwino kwambiri mpweya wonyamulira monga argon kapena helium asanafike chodziwira. Izi sizimangowonjezera kulondola komanso zimatha kuteteza zida zowunikira. Monga wopanga 99.999% Purity 50L Cylinder Xenon Gasi, timamvetsetsa kufunika kwa njira zapamwamba zoterezi potsimikizira zapadera chiyero za osowa ndi mpweya wapadera. Tekinoloje iyi imathandizira pazovuta kuyeretsa gasi ndi magawo otsimikizira.

Ulalo Wovuta: Kusanthula Zosayera mu Magesi Ogwiritsidwa Ntchito Mwachindunji mu Semiconductor Manufacture.

The mpweya wogwiritsidwa ntchito mwachindunji popanga semiconductor ndiwo maziko a ntchito yopanga. Izi zikuphatikiza osati chabe mpweya wambiri monga nayitrogeni ndi argon, komanso gulu lalikulu la magetsi apadera amagetsi monga mpweya wa epitaxial (mwachitsanzo, silane, germane pokulitsa magawo a kristalo), kutulutsa mpweya (mwachitsanzo, NF₃, SF₆, Cl₂ ya kupanga), ion implantation mpweya (mwachitsanzo, arsine, phosphine, boron trifluoride ya doping), ndi mpweya woyika. Kwa chilichonse mwa izi mpweya wofunikira, mlingo ndi mtundu wa zovomerezeka chidetso amatanthauzidwa mwamphamvu chifukwa kupatuka kulikonse kumatha kumasulira mwachindunji kukhala zolakwika pa semiconductor mtanda. Izi zimapangitsa kusanthula zodetsa za izi ndondomeko mipweya chinthu chofunika kwambiri chowongolera khalidwe.

Ganizirani za kuyika kwa kachitsulo kakang'ono ka silicon dioxide, chotetezera wamba mu transistors. Ngati mpweya gasi amagwiritsidwa ntchito chifukwa ndondomeko ili ndi hydrocarbon zonyansa, mpweya ukhoza kuphatikizidwa mu oxide wosanjikiza, kuwononga mphamvu zake zotetezera ndipo zomwe zingayambitse kulephera kwa chipangizo. Mofananamo, ngati chotupa gasi lili ndi zosayembekezereka chidetso, ikhoza kusintha kuchuluka kwa ma etch kapena kusankha, kubweretsa kuzinthu zazikulu kwambiri, zazing'ono kwambiri, kapena mawonekedwe olakwika. Ngakhale a chidetso mu a gasi wopanda monga Silinda ya gasi ya Argon zogwiritsidwa ntchito sputtering akhoza kusamutsidwa pamwamba yopyapyala pamwamba, kukhudza filimu khalidwe. Zotsatira za an chidetso nthawi zambiri imakhala yokhazikika, kutanthauza kuti chidetso kulolera mu sitepe imodzi kungakhale kovuta choipitsa mu china.

Ulalo wofunikirawu umafunikira njira yokwanira kusanthula zodetsa. Sizongoyang'ana chomaliza; kumakhudzanso kuyang'anira zopangira, zomwe zikugwiritsidwa ntchito, komanso zomaliza gasi magawo oyeretsedwa. Za luso la semiconductor mpweya, specifications kuti zonyansa mu semiconductor mapulogalamu nthawi zambiri amakhala olimba kwambiri, akukankhira malire a kuzindikira kowunikira. Timagwira ntchito limodzi ndi makasitomala athu mu semiconductor ndi zamagetsi kumunda kuti mumvetsetse awo enieni chidetso sensitivity kwa zosiyanasiyana mpweya ndi gasi osakaniza. Njira yolumikizirana iyi imathandizira kuwonetsetsa kuti ukhondo wapadera mpweya timapereka mosasinthasintha zomwe zimafunikira pazopanga zawo zapamwamba. Vuto lagona pakuzindikira a zonyansa zambiri pamilingo yocheperachepera.

Kupitilira Labu: Njira Zabwino Kwambiri Zogwiritsira Ntchito Mipweya Yapamwamba-Purity Semiconductor Kuti Mupewe Kuipitsidwa.

Kuonetsetsa kuti chiyero chamagetsi apadera amagetsi sikutha pamene gasi imasiya malo athu opangira. Kusunga zimenezo chiyero njira yonse mpaka kugwiritsidwa ntchito mu a semiconductor Nsalu zimafuna chisamaliro chambiri pakusamalira, kusunga, ndi kugawa. Ngakhale apamwamba kwambiri gasi woyera zitha kuipitsidwa ngati sizikuyendetsedwa bwino. Ku Huazhong Gas, sitimangoganizira za kupanga mpweya wabwino kwambiri komanso amalangiza makasitomala athu njira zabwino zopewera kutsika kuipitsidwa.

Zochita zabwino kwambiri ndizo:

• Kusankha Kwagawo: Zigawo zonse mu dongosolo la gasi - kuphatikizapo masilinda gasi, zowongolera, mavavu, machubu, ndi zoyikira - ziyenera kupangidwa kuchokera kuzinthu zoyenera (mwachitsanzo, chitsulo chosapanga dzimbiri chopangidwa ndi electropolished) ndikutsukidwa ndikutsimikiziridwa chiyero chapamwamba kwambiri (UHP) utumiki. Kugwiritsa ntchito zinthu zolakwika kungayambitse kutulutsa mpweya zonyansa kapena a zitsulo zosayera kutuluka mu kuyenda kwa gasi.
• Kukhulupirika Kwadongosolo: Dongosolo loperekera gasi liyenera kukhala lotayirira. Ngakhale kudontha kwakung'ono kumatha kuloleza mumlengalenga zoipitsa monga mpweya, chinyezi, ndi kufotokoza nkhani kulowa dongosolo, kunyengerera chiyero cha gasi. Kuyang'ana kutayikira pafupipafupi ndikofunikira.
• Njira zoyeretsera: Njira zoyenera zoyeretsera ndizofunikira nthawi iliyonse pamene kulumikiza kupangidwa kapena silinda ikasinthidwa. Izi zimaphatikizapo kutsitsa mizere ndi a mkulu chiyero inert gasi (monga argon kapena nayitrogeni) kuchotsa mpweya uliwonse wotsekeka kapena zonyansa. Kusakwanira kuyeretsa ndi gwero wamba kuipitsidwa. Nthawi zambiri timalimbikitsa mapanelo odzitchinjiriza kuti atsimikizire kusasinthika.
• Zida Zodzipereka: Kugwiritsa ntchito owongolera odzipereka ndi mizere mwachindunji mpweya kapena mabanja a mpweya zingalepheretse kuipitsidwa. Izi ndi zofunika makamaka pamene kusintha pakati pa gasi wopanda ndi zotakataka kapena gasi wowononga.
• Kusamalira Cylinder: Masilinda a gasi ziyenera kugwiridwa mosamala kuti zisawonongeke. Zisungidwe m'malo osankhidwa, mpweya wabwino, ndipo kasamalidwe kazinthu "zoyamba, zoyambira" ziyenera kuchitidwa. Kugwiritsa odzipereka chinyezi ndi mpweya osanthula pazigawo zovuta angathandizenso kuyang'anira kulowerera kulikonse kwa izi zonyansa.

Kwa makasitomala monga Mark Shen, omwe akugula gasi kuti agulitsenso kapena kuti agwiritse ntchito popanga, kumvetsetsa njira zogwirira ntchitozi ndikofunikira kuti musunge khalidwe la mankhwala amalonjeza makasitomala awo. Ndi udindo wogawana. Timatsimikizira zathu Silinda ya haidrojeni zinthu, mwachitsanzo, zimadzazidwa ndikusungidwa kuti zipewe chidetso ingress, koma dongosolo la wogwiritsa ntchito kumapeto limagwiranso ntchito yofunika kwambiri. Kulimbana ndi chidetso ndi kuyesetsa kosalekeza kuchokera pakupanga kupita ku ntchito.

Kuyang'ana mu Mpira wa Crystal: Ndi Zam'tsogolo Zotani Zomwe Tingayembekezere Pakuzindikira Chidetso cha Magesi Amagetsi Amagetsi?

Kufufuza kwapamwamba kwambiri chiyero mu magetsi amagetsi komanso tcheru kwambiri kuzindikira zonyansa njira ndi ulendo mosalekeza, motsogozedwa ndi liwiro mosalekeza wa nzeru zatsopano mu semiconductor makampani. Pamene mawonekedwe a chipangizochi akucheperachepera mu gawo la sub-10 nanometer ndipo zida zatsopano ndi zomanga zimatuluka (monga 3D NAND ndi Gate-All-Around transistors), kukhudzika kwa ngakhale pang'ono. fufuzani zonyansa zidzamveka bwino. Izi zidzafuna kupita patsogolo kwina kulikonse kuyeretsa gasi matekinoloje ndi kusanthula zodetsa kuthekera.

Titha kuyembekezera zochitika zingapo:

• Zochepera Zozindikira: Analytical njira ngati ICP-MS, Gas Chromatography-Mass Spectrometry (GC-MS), ndi Cavity Ring-Down Spectroscopy (CRDS) idzapitiriza kusinthika, kukankhira malire ozindikira kwa okulirapo zosiyanasiyana zosafunika kutsika mpaka pamilingo ya nambala imodzi ya ppt kapena ngakhale mu ppq domain. Izi zidzafuna zatsopano m'magwero a ion, ma analyzer ambiri, ndi chodziwira luso.
• Kuwunika mu-Situ ndi Nthawi Yeniyeni: Pakuchulukirachulukira kwa makina owunikira omwe amatha kuyang'anira chiyero cha gasi mu nthawi yeniyeni, mwachindunji pamalo ogwiritsidwa ntchito mkati mwa semiconductor Fab. Izi zimathandiza kuti azindikire mwamsanga chilichonse kuipitsidwa zochitika kapena kulowererapo chidetso milingo, zomwe zimathandizira kukonza mwachangu ndikuchepetsa kutayika kwazinthu. Masensa a miniaturized ndi ma algorithms apamwamba a chemometric atenga gawo lalikulu pano.
• Kuwunika kwa Complex Gas Mixtures: Tsogolo semiconductor njira zitha kukhala zovuta kwambiri zosakaniza gasi ndi zigawo zingapo zotakataka. Kusanthula zonyansa mu matrices ovuta oterowo adzafunika njira zatsopano zowunikira ndi zida zomasulira deta. Kukhoza kuyeza ndi chidetso m'chigawo chimodzi popanda kusokonezedwa ndi ena adzakhala ofunikira.
• Yang'anani pa Zonyansa za "Killer": Kafukufuku apitiliza kuzindikira zenizeni zonyansa mu semiconductor kukonza komwe kumakhudza kwambiri magwiridwe antchito kapena kutulutsa kwa chipangizocho, ngakhale pamiyezo yotsika kwambiri. Njira zowunikira zidzalunjika kwambiri kwa "wakupha" awa. zonyansa.
• Data Analytics ndi AI: Kuchuluka kwa data kumapangidwa ndi zapamwamba kusanthula zodetsa machitidwe adzagwiritsidwa ntchito pogwiritsa ntchito AI ndi kuphunzira makina kuti azindikire zomwe zikuchitika, kulosera zomwe zingatheke kuipitsidwa mavuto, ndi kukhathamiritsa kuyeretsa gasi njira. Izi zitha kuthandiza pakuwongolera bwino kwabwino m'malo mothana ndi mavuto.

Ku Huazhong Gas, tadzipereka kukhala patsogolo pazitukukozi. Timayika ndalama mosalekeza mu kafukufuku ndi chitukuko, kugwirizanitsa ndi ogwira nawo ntchito m'makampani ndi mabungwe ophunzira kuti apititse patsogolo sayansi mkulu chiyero gasi kupanga ndi kusanthula zodetsa. Kwa makasitomala athu, kuphatikiza omwe amasamala kwambiri ngati Mark Shen, izi zikutanthauza kuperekedwa kodalirika kwa magetsi apadera amagetsi zomwe zimakwaniritsa zosowa zomwe zikukula mafakitale zamagetsi ndi semiconductor. Mtundu wathu wa Helium, yomwe imadziwika chifukwa cha kusakhazikika kwake komanso kugwiritsidwa ntchito m'mapulogalamu apadera, imapindulanso ndi kusanthula kwapamwamba kumeneku kuti kuwonetsetse kuti ndizochepa. chidetso milingo.

Mfundo zofunika kuzikumbukira:

• Mpweya wapadera wamagetsi ndi zofunika kuti kupanga semiconductor,ndi awo chiyero sizingakambirane.
• Ngakhale fufuzani zonyansa, yoyezedwa mu ppb kapena ppt, imatha kuyambitsa zolakwika zazikulu ndikutaya zokolola semiconductor zipangizo.
• Wamba zonyansa mu mpweya kuphatikiza mpweya wina (monga O₂, H₂O), zitsulo zonyansa,ndi kufotokoza nkhani.
• ICP-MS ndi mwala wapangodya teknoloji yodziwira a zonyansa zambiri, makamaka zitsulo zonyansa, pamiyezo yotsika kwambiri.
• Kusamalira chiyero cha gasi imafunikira kusamalitsa mosamala komanso kusakhulupirika kwadongosolo kuchokera ku silinda ya gasi mpaka kugwiritsidwa ntchito popewa kuipitsidwa.
• Tsogolo lidzakhala lotsika kwambiri malire ozindikira, kuyang'anira nthawi yeniyeni, ndi AI yoyendetsedwa kusanthula zodetsa za kalasi yamagetsi mpweya.
• Kulamulira kuthekera kulikonse chidetso ndikofunikira kuonetsetsa kuti khalidwe la mankhwala ndi kudalirika kwamakono zamagetsi.