Makampani a semiconductor, monga maziko a chitukuko chamakono chamakono, amaphatikizapo mipweya yambiri yolondola kwambiri komanso yoyera kwambiri pakupanga kwake. Mipweya yapadera yama semiconductors imatanthawuza mipweya yomwe imagwira ntchito yofunika kwambiri pakupanga zinthu za semiconductor, kupanga chip, kuyika mafilimu opyapyala, etching, ndi njira zina. Mipweya iyi iyenera kukwaniritsa zofunikira za chiyero, kukhazikika, ndi kuwongolera bwino momwe zimachitikira. Nkhaniyi ifotokozanso mipweya yambiri yapadera yomwe imagwiritsidwa ntchito mu semiconductors ndikukambirana za udindo wawo popanga semiconductor.

1. haidrojeni (H₂)

haidrojeni amagwiritsidwa ntchito kwambiri popanga semiconductor, makamaka mu chemical vapor deposition (CVD) ndi kuchepetsa zochita. Mu CVD, haidrojeni nthawi zambiri amasakanizidwa ndi mpweya wina kuti akule mafilimu oonda, monga mafilimu a silicon. Hydrogen imagwiranso ntchito ngati chochepetsera pakuyika zitsulo ndi njira zochotsera oxide. Kuphatikiza apo, haidrojeni imagwiritsidwa ntchito poyeretsa ndi kuchiza zowotcha za semiconductor kuti achotse bwino zoyipitsidwa pamwamba ndikuwongolera tchipisi.

2. Nayitrogeni (N₂)

Nayitrogeni, mpweya wa inert, umagwiritsidwa ntchito makamaka popereka malo opanda mpweya pakupanga semiconductor. Amagwiritsidwa ntchito kwambiri poyeretsa zida, njira zoziziritsira, komanso ngati diluent mumlengalenga. Poyika nthunzi ndi njira zowotchera, nayitrogeni nthawi zambiri amasakanizidwa ndi mpweya wina kuti akhazikike momwe zinthu zimayendera ndikuwongolera momwe zimachitikira. Nayitrogeni imagwiritsidwanso ntchito kupondereza makutidwe ndi okosijeni, kuteteza zinthu zomwe zimakhudzidwa ndi kuwonongeka kwa okosijeni.

3. mpweya (O₂)

Oxygen imagwira ntchito yofunika kwambiri pamakampani opanga ma semiconductor, makamaka munjira zamakutidwe ndi okosijeni. Pakupangidwa kwa silicon dioxide wosanjikiza pamwamba pa zowotcha za silicon, mpweya ndi wofunikira. Poyambitsa mpweya, yunifolomu oxide wosanjikiza imapanga pamwamba pa silicon, yomwe ndi yofunikira kuti magetsi azigwira ntchito komanso kukhazikika kwa chipangizocho. Oxygen imagwiritsidwanso ntchito poyeretsa ndi kuyika njira, kuchita ndi mpweya wina wamankhwala kupanga ma oxides kapena kuchotsa mafilimu ena achitsulo.

4. Mpweya wa Tetrafluoride (CF₄)

Mpweya wa tetrafluoride umagwiritsidwa ntchito kwambiri popanga njira. Mu semiconductor etching, CF₄ imasakanizidwa ndi mpweya wina kuti muchotse bwino mafilimu oonda a silicon, silicon nitride, zitsulo, ndi zipangizo zina. CF₄ ikaphatikizana ndi fluorine, imapanga ma fluoride, omwe amakhala ndi mphamvu zogwiritsa ntchito mphamvu ndipo amatha kutulutsa zomwe mukufuna. Mpweya umenewu ndi wofunikira kwambiri pakupanga mawonekedwe olondola kwambiri pakupanga madera ophatikizika.

5. Hydrogen Chloride (HCl)

Mpweya wa hydrogen chloride umagwiritsidwa ntchito makamaka ngati mpweya wowotchera, makamaka pomangira zitsulo. Imachita ndi mafilimu achitsulo kupanga ma chloride, kulola kuti zigawo zazitsulo zichotsedwe. Njirayi imagwiritsidwa ntchito kwambiri popanga mafilimu achitsulo opyapyala, kuwonetsetsa kulondola kwa mapangidwe a chip.

6. Nitrogen Trifluoride (NF₃)

Nayitrogeni trifluoride imagwiritsidwa ntchito makamaka kuyeretsa zotsalira zotsalira mu plasma etching zida. M'machitidwe a plasma etching, NF₃ imachita ndi zinthu zoyikidwa (monga silicon fluorides) kupanga ma fluoride ochotsedwa mosavuta. Mpweya umenewu umagwira ntchito bwino poyeretsa, umathandizira kukhala aukhondo pazida zomangira ndikuwongolera kulondola komanso kuchita bwino kwa njira zopangira.

7. Silane (SiH₄)

Silane ndi mpweya womwe umagwiritsidwa ntchito kwambiri mu chemical vapor deposition (CVD), makamaka poyika mafilimu opyapyala a silicon. Silane amawola pa kutentha kwambiri kuti apange mafilimu a silicon pamtunda wapansi, zomwe ndizofunikira kwambiri popanga semiconductor. Posintha mayendedwe a silane ndi momwe amachitira, kuchuluka kwa mawonekedwe ndi mtundu wa kanema zitha kuwongoleredwa bwino.

8. Boron Trifluoride (BF₃)

Boron trifluoride ndi mpweya wofunikira wa doping, womwe umagwiritsidwa ntchito popanga boron doping popanga semiconductor. Amagwiritsidwa ntchito kusintha mphamvu zamagetsi za kristalo pochita ndi gawo lapansi la silicon kuti apange wosanjikiza wofunikira wa doping. Njira ya boron doping ndiyofunikira popanga zida zamtundu wa P-semiconductor, ndipo mpweya wa BF₃ umagwira ntchito yofunika kwambiri pakuchita izi.

9. Sulfur Hexafluoride (SF₆)

Sulfure hexafluoride Amagwiritsidwa ntchito makamaka mumayendedwe a semiconductor etching, makamaka pamakina olondola kwambiri. Chifukwa cha mphamvu zake zotetezera magetsi komanso kukhazikika kwa mankhwala, SF₆ ikhoza kuphatikizidwa ndi mpweya wina kuti muchotse bwino mafilimu azinthu ndikuwonetsetsa kuti pali ndondomeko yeniyeni. Amagwiritsidwanso ntchito kwambiri mu etching ion, kuchotsa bwino mafilimu osafunika achitsulo.

Mapeto

Mipweya yapadera yama semiconductors imagwira ntchito yosasinthika popanga mabwalo ophatikizika. Pamene ukadaulo ukupitilirabe patsogolo, kufunikira kwa chiyero chapamwamba komanso magwiridwe antchito amipweyayi kumawonjezeka, zomwe zimapangitsa ogulitsa kuti azingowonjezera mtundu ndi mitundu ya mpweya. M'tsogolomu, makampani opangira semiconductor apitiliza kudalira mpweya wapaderawu kuti uthandizire kupanga tchipisi ta m'badwo wotsatira komanso luso laukadaulo. Chifukwa chake, kumvetsetsa ndikugwiritsa ntchito mpweya wapadera wa semiconductor kudzakhala kofunikira pakupititsa patsogolo chitukuko chamakampani a semiconductor.