Lub semiconductor kev lag luam, raws li cov tseem ceeb ntawm kev txhim kho tshiab thev naus laus zis, koom nrog ntau cov roj av siab thiab qib siab hauv nws cov txheej txheem kev tsim khoom. Cov roj txheem tshwj xeeb rau cov roj semiconductors xa mus rau cov roj uas ua lub luag haujlwm tseem ceeb hauv cov khoom siv semiconductor ntau lawm, cov yeeb yaj kiab nyias, etching, thiab lwm yam txheej txheem. Cov roj av no yuav tsum tau ua tiav cov cai kom huv, kev ruaj khov, thiab kev tswj hwm cov kev tswj cov tshuaj tiv thaiv. Kab lus no yuav qhia ntau cov roj txheem tshwj xeeb siv nyob rau hauv cov semiconductors thiab sib tham txog lawv lub luag haujlwm hauv cov txheej txheem kev tsim khoom.

1. Hydrogen (H₂)

Pab kas nees yog dav siv nyob rau hauv semiconductor raug, tshwj xeeb tshaj yog hauv cov tshuaj vapor deposition (CVD) thiab txo cov kev cuam tshuam. Hauv CVD, hydrogen feem ntau yog sib xyaw nrog lwm cov roj av kom cov naam puab nyias, xws li cov yeeb yaj kiab silicon. Hydrogen kuj ua raws li tus neeg sawv cev txo tus neeg sawv cev hauv cov txheej txheem tso tawm thiab cov txheej txheem oxide. Tsis tas li ntawd, Hydrogen siv hauv kev ntxuav thiab kho semiconductor wafers kom tau txais kev paug paug kom zoo thiab txhim kho qhov zoo ntawm cov chips.

2. Nitrogen (n₂)

Nitrogen, yog cov roj nyob hauv, feem ntau yog siv los muab cov pa oxygen-dawb nyob hauv kev tsim khoom. Nws yog feem ntau siv nyob rau hauv cov cuab yeej tu, ua cov txheej txheem txias, thiab raws li kev ua kom huv hauv cov tshuaj tiv thaiv atgraspheres. Hauv Vapor Deposition thiab etching cov txheej txheem, nitrogen feem ntau sib xyaw nrog lwm cov roj av kom tswj tau cov tshuaj tiv thaiv kev cuam tshuam. Nitrogen tseem siv los txhawb oxidation, tiv thaiv cov ntaub ntawv rhiab los ntawm oxidation kev puas tsuaj.

3. Cov pa (O₂)

Pa Ua si lub luag haujlwm tseem ceeb hauv kev lag luam semiconductor, tshwj xeeb tshaj yog nyob rau hauv cov txheej txheem oxidation. Nyob rau hauv kev tsim ntawm silicon dioxide txheej rau saum npoo ntawm silicon wafers, oxygen yog qhov tseem ceeb. Los ntawm kev qhia oxygen, ib tug ntxhiab oxide txheej ntawm cov saum npoo si saum npoo av, uas yog qhov tseem ceeb rau kev ua tau hluav taws xob thiab ntaus ntawv ruaj khov. Cov pa oxygen tseem siv tau hauv kev ntxuav thiab etching txheej txheem, reacting nrog lwm cov roj av roj los tsim oxides lossis tshem tawm cov yeeb yaj kiab hlau.

4. Carbon tetrafruoride (cf₄)

Cov pa roj carbon Tetraflluoride yog dav siv hauv kev ua haujlwm etching. Nyob rau hauv semiconductor etching, CF₄ tau sib xyaw nrog lwm cov roj av kom zoo tshem cov yeeb yaj kiab ntawm silicon, silicon nitride, hlau, thiab lwm yam khoom siv. Thaum CF11 sib txuas nrog cov tshuaj fluorine, nws cov tshuaj fluorides, uas muaj cov ua kom muaj zog thiab tuaj yeem ua kom muaj txiaj ntsig etch cov khoom siv phiaj. Cov roj no yog qhov tseem ceeb rau cov qauv siab-precision tus qauv etching hauv kev sib xyaw Circuit Court ntau lawm.

5. Hydrogen Chloride (HCl)

Hydrogen chloride roj yog feem ntau siv los ua cov roj etching, tshwj xeeb hauv kev etching cov ntaub ntawv hlau. Nws reacts nrog cov yeeb yaj kiab hlau los ua chlorides, tso cai rau cov txheej hlau kom raug muab tshem tawm. Tus txheej txheem no tau siv dav hauv kev saib xyuas ntawm nyias cov yeeb yaj kiab nyias nyias, kom ntseeg tau qhov ua kom zoo ntawm lub nti.

6. Nitrogen trifluoride (nf₃)

Nitrogen trifluoride tsuas yog siv los ua kom huv si cov chaw nyob hauv ntshav tawm cov khoom siv. Nyob rau hauv ntshav etching cov txheej txheem, NF₃ sweetcts nrog cov ntaub ntawv tso nyiaj (xws li cov tshuaj fluoron fluoride yooj yim) los ua cov tshuaj fluoride yooj yim. Cov roj no yog qhov ua tau zoo heev hauv cov txheej txheem ntxuav, pab kom muaj kev huv ntawm cov khoom siv thiab txhim kho qhov raug thiab ua haujlwm ntawm kev tsim cov txheej txheem.

7. Silane (Sih₄)

Silane yog cov roj siv feem ntau siv nyob rau hauv cov tshuaj vapor deposition (CVD), tshwj xeeb rau kev tso cov yeeb yaj kiab cov duab plaub. Silane decomposes ntawm qhov kub siab los ua cov duab silicon ntawm cov sab nrauv, uas yog qhov tseem ceeb hauv kev tsim khoom. Los ntawm kho qhov khiav ntawm kev ua si ua kom zoo nkauj thiab cov tshuaj tiv thaiv, tus nqi tso nyiaj thiab zaj duab xis zoo tuaj yeem tswj tau preacisely.

8. Boron trifluoride (bf₃)

Boron Trifluoride yog ib qho tseem ceeb doping roj, feem ntau siv nyob rau hauv lub boron doping cov txheej txheem hauv semiconductor raug. Nws yog siv los kho cov hluav taws xob hluav taws xob ntawm cov siv hluav taws xob ntawm cov siv lead ua los ntawm reacting nrog silicon subtomate los ua cov txheej doping. Cov txheej txheem doping yog qhov tseem ceeb rau kev tsim P-si cov ntaub ntawv P-siiconductor, thiab bf₃ roj ua lub luag haujlwm tseem ceeb hauv cov txheej txheem no.

9. Sulphur hexafluoride (sf₆)

Sulphur Hexafluoride Feem ntau yog siv nyob rau hauv semiconductor etching cov txheej txheem, tshwj xeeb tshaj yog nyob rau hauv high-precision etching. Vim tias nws cov hluav taws xob siab hluav taws xob cov khoom siv thiab tshuaj lom neeg ruaj khov, sf₆ tuaj yeem ua ke nrog lwm cov roj av kom raug dua cov khoom ua yeeb yaj kiab thiab xyuas kom meej cov qauv. Nws tseem dav siv hauv ion ov ion ovching, ua tau zoo tshem tawm cov yeeb yaj kiab hlau.

Tag

Cov roj tshwj xeeb ua roj rau cov semiconductors ua si ib qho kev tsim tawm irreplacleable hauv kev tsim khoom ntawm kev sib xyaw ua ke. Raws li thev naus laus zis txuas ntxiv mus ua ntej, qhov kev thov kev coj dawb huv thiab kev ua tau zoo ntawm cov roj av nce ntxiv, cov khoom siv kom ua kom zoo dua qub thiab cov roj av. Yav tom ntej, cov kev lag luam semiconduct yuav txuas mus ntxiv rau cov roj txheem tshwj xeeb los txhawb nqa cov chips thiab thev naus laus zis tshiab. Yog li, kev nkag siab thiab kev nkag siab semiconduct cov roj txheem tshwj xeeb yuav tseem ceeb hauv kev tsav tsheb txuas kev lag luam txuas ntxiv ntawm kev lag luam semiconduct.