Ammonia (nh₃), raws li kev siv tshuaj lom neeg tseem ceeb, muaj kev siv thoob plaws thoob plaws ntau yam kev lag luam, nrog nws lub luag haujlwm yog qhov tshwj xeeb tshaj plaws hauv kev tsim khoom lag luam. Ammonia plays Lub luag haujlwm tseem ceeb hauv ntau theem ntawm semiconductor ntau lawm, xws li doping thiab doping, tu, thiab etching cov txheej txheem. Kab lus no yuav delve rau hauv cov ntawv thov ntawm ammonia hauv kev ua haujlwm tsim kho, kev siv nyiaj tsis zoo, thaum tseem tab tom muaj kev nyuaj siab nws lub ntsej muag thiab yav tom ntej kev txhim kho thiab yav tom ntej.

1. Cov teeb meem yooj yim thiab tshuaj coj cwj pwm ntawm ammonia

Ammonia yog qhov sib xyaw ua ke los ntawm nitrogen thiab hydrogen, paub rau nws muaj zog alkalinity thiab feem ntau pom hauv kev lag luam nitrogen chiv. Ammonia muaj li roj av ntawm chav sov tab sis tuaj yeem ua liquefied nyob rau ntawm tsawg kub, ua rau nws muaj cov roj resactive ntau. Hauv kev lag luam semiconduct, cov tshuaj lom neeg ntawm ammonia ua rau nws tseem ceeb txheej txheem, tshwj xeeb tshaj yog hauv kev siv tshuaj lom neeg, thiab tu / etching ua haujlwm.

Ammonia molecules tuaj yeem hnov ​​mob nrog ntau yam hlau, silicon, thiab lwm yam ntaub ntawv los ua nitrides lossis kom tau dope lawv. Cov kev tawm tsam no tsis tsuas yog pab rau kev sib sau cov ntaub ntawv ua yeeb yaj kiab nyias tab sis tseem txhim kho hluav taws xob, thermal, yog li kev nrhiav khoom siv thev naus laus zis.

2. Cov ntawv thov ntawm ammonia hauv kev tsim khoom lag luam

Ammonia ua lub luag haujlwm tseem ceeb hauv kev tsim khoom, tshwj xeeb hauv cov chaw hauv qab no:

2.1 Kev tso nyiaj ntawm nitride nyias zaj duab xis

Hauv niaj hnub no semiconductor raug, xws li Silicon Nitride (Lin₃n₄), tau siv dav ua cov txheej txheem tiv thaiv hluav taws xob, lossis cov khoom siv hluav taws xob. Thaum lub sijhawm Deposition ntawm cov nitride zaj duab xis, Ammonia ua haujlwm ua tus tseem ceeb ntawm nitrogen qhov chaw.

Tshuaj lom neeg vapor deposition (CVD) yog ib txoj kev feem ntau rau Nitride zaj duab xis tso. Tshuaj asmaunias reacts nrog gases xws li breatane (sih₄) ntawm qhov kub thiab txias rau kev txiav txim siab thiab daim ntawv silicon nitride zaj duab xis. Cov tshuaj tiv thaiv yog raws li hauv qab no:

3sih4 + 4nh3 → Si3N4 + 12H2

Cov txheej txheem no ua rau muaj kev tsim ntawm cov khaub ncaws tsis zoo silicon nitride txheej ntawm silicon wafer nto. Ammonia muab cov nitrogen ruaj khov thiab ua rau muaj kev tswj hwm ruaj khov nrog lwm cov tshuaj tiv thaiv zoo, tuab thiab kev sib xyaw ntawm zaj duab xis.

Nitride cov yeeb yaj kiab muaj cov rwb thaiv tsev zoo heev, thiab oxidation tsis kam, ua rau lawv tseem ceeb heev hauv kev tsim khoom lag luam. Lawv tau siv dav hauv kev sib xyaw ua ke (ICS) ua cov khaubncaws sab nraud povtseg (ICS) ua cov khaubncaws sab nraud povtsuaj

2.2 ion implantation thiab doping

Tshuaj asmaunias Tseem ua si lub luag haujlwm tseem ceeb hauv cov txheej txheem doping ntawm cov ntaub ntawv sicishonductor. Doping yog cov txheej txheem tseem ceeb siv los tswj cov hluav taws xob ntawm cov ntaub ntawv hauv fab raws li cov khoom siv semiconductor. Ammonia, raws li cov pa hluav taws xob muaj txiaj ntsig, feem ntau siv nyob rau hauv cov khoom siv hauv Phoshine (xws li phosphine b₂₂ thiab Diborane b₂₂) los ntawm gallium arsenide (gaas) los ntawm ion immilitation.

Piv txwv li, nitrogen doping tuaj yeem kho cov khoom hluav taws xob ntawm silicon los tsim n-hom lossis p-hom semiconductors. Thaum muaj cov txheej txheem nitrogen doping, ammonia muab cov txiaj ntsig zoo ntawm nitrogen ntau, kom tswj tau meej tswj doping ntau. Qhov no yog qhov tseem ceeb rau kev miniaturization thiab kev tsim cov khoom siv high-kev ua tau zoo hauv kev sib xyaw ntau-loj-loj-ua ke (VLSI).

2.3 Ntxuav thiab etching

Kev ntxuav thiab etching cov txheej txheem yog qhov tseem ceeb los ua kom muaj cov khoom siv zoo ntawm cov khoom tsim kho cov khoom sib raug zoo. Ammonia yog dav siv nyob rau hauv cov txheej txheem no, tshwj xeeb hauv ntshav etching thiab tshuaj ntxuav tshuaj.

Hauv ntshav etching, ammonia tuaj yeem ua ke nrog lwm cov roj av (cl orge) los pab tshem cov organic paug, txheej oxide, thiab hlau impurities los ntawm wafer saum npoo. Piv txwv li, ammonia reacts nrog oxygen kom tsim cov oxygen hom (xws li ₃ thiab kom tau txais txiaj ntsig zoo nyob rau hauv cov txheej txheem tom ntej.

Ib qho ntxiv, ammonia tuaj yeem ua raws li kev daws teeb meem hauv cov txheej txheem txheej txheem, pab kom tshem tawm cov kab ke muaj vim yog cov tshuaj lom neeg ntawm cov wafer.

3. Qhov zoo ntawm ammonia hauv kev lag luam semiconduct

Ammonia muaj ob peb qhov zoo hauv semiconductor raug, tshwj xeeb hauv cov chaw hauv qab no:

3.1 Siv tau cov peev txheej nitrogen

Ammonia yog cov khoom siv nitrogen zoo thiab dawb huv uas muab cov khoom siv nyob ruaj khov thiab ua kom zoo ntawm cov yeeb yaj kiab ntawm Nitride cov yeeb yaj kiab thiab doping cov txheej txheem. Qhov no yog qhov tseem ceeb rau txoj kev sib txuas ntawm micro- thiab nano-teev cov khoom siv hauv cov khoom tsim kho cov qauv. Feem ntau, Ammonia yog ntau reactive thiab tswj tau tshaj lwm cov roj nitrogen qhov chaw (xws li nitrogen roj lossis nitrogen oxides).

3.2 cov txheej txheem tswj tau zoo heev

Cov kev ua haujlwm ntawm ammonia tso cai rau nws kom tswj tau meej meej thiab cov yeeb yaj kiab tuab nyob rau hauv ntau cov txheej txheem ua. Los ntawm kev kho tus nqi txaus ntawm ammonia, ntsuas kub, thiab muaj peev xwm tswj hwm ntawm cov yeeb yaj kiab, yog li ua kom ua tau zoo ntawm cov khoom siv.

3.3 Tus nqi them tau zoo thiab ib puag ncig ua phooj ywg

Piv rau lwm cov roj nitrogen qhov siv roj, ammonia yog tus nqi qis dua thiab muaj qhov txiaj ntsig zoo ntawm cov txiaj ntsig zoo, ua rau nws muaj txiaj ntsig zoo hauv cov khoom sib txawv ntawm cov khoom lag luam semiconductor loj. Tsis tas li ntawd, ammonia kev ua dua tshiab thiab rov siv tshuab thev naus laus zis tau ua ntau dua, ua rau nws muaj kev phooj ywg ib puag ncig.

4. Kev nyab xeeb thiab ib puag ncig cov nyom

Txawm hais tias nws tseem ceeb lub luag haujlwm hauv kev tsim khoom, ammonia nthuav tawm cov xwm txheej muaj peev xwm. Nyob rau hauv chav tsev kub, Ammonia yog roj, thiab nyob rau hauv nws cov kua, nws yog corrosive thiab lom, xav tau nruj kev ntsuas kev nyab xeeb thaum siv.

1. Cia thiab Tsheb Thauj Mus Los: Ammonia yuav tsum tau khaws cia thaum kub kub thiab siab nias, siv cov ntim tshwj xeeb thiab cov raj xa khoom kom tiv thaiv kom tsis txhob muaj cov dej xau.
2. Kev Nyab Xeeb Kev Nyab Xeeb: Cov neeg ua haujlwm nyob rau hauv cov nplej semiconduct yuav tsum tau hnav cov khoom tiv thaiv, xws li goggles, hnab looj tes, thiab kis cov ntsej muag ammonia, kom tiv thaiv ammonia kis rau tib neeg lub cev.
3. Khib Gas Kev Kho Mob: Kev siv Ammonia tej zaum yuav tsim cov pa roj teeb tsis zoo, yog li siv cov pa khib nyiab roj nra hnyav, yog li cov pa khib nyiab yuav tsum ua kom ntseeg tau tias cov qauv kev kawm ib puag ncig.

Raws li cov txheej txheem semiconductor txuas ntxiv mus ua ntej thiab qhov kev thov rau cov khoom lag luam siab dua nce ntxiv, Ammonia lub luag haujlwm hauv kev lag luam yuav txuas ntxiv zuj zus. Qhov no yog qhov tseeb tshwj xeeb tshaj yog nyob rau hauv high-precision nano-teev sib xyaw ua ke sib xyaw ua ke, Quantum suav cov chips, thiab qib siab ntim thev naus laus zis. Ib qho ntxiv, raws li ib puag ncig cov kev cai ua cov stricter, kev txhim kho greener ntau lawm thiab cov thev naus laus zis rau ammonia yuav dhau los ua qhov tseem ceeb hauv kev lag luam yav tom ntej.

Ammonia cov ntawv thov hauv cov kev lag luam semiconduct muaj kev lag luam khoom siv rau kev txhim kho ntawm cov khoom siv hluav taws xob niaj hnub no. Nws lub luag haujlwm txhim kho ntau lawm effecticiency, txo cov nqi tsim khoom, thiab tsav kev tsim tawm tshiab yog qhov tsis tseem ceeb. Tshuab thev naus laus zis, ammonia cov ntawv thov yuav txuas ntxiv mus rau kev ua haujlwm zoo dua thiab ib puag ncig kev ruaj khov.

Tshuaj asmaunias, raws li qhov tseem ceeb tshuaj reagent, plays ib tug pivotal lub luag hauj lwm hauv semiconductor raug. Nws yog qhov tseem ceeb rau kev tso nyiaj ntawm nitride zaj duab xis, doping, thiab tu / etching txheej txheem. Nrog rau txuas ntxiv kev nce qib ntawm semiconductor thev naus laus zis, Ammonia cov kev siv rau kev ua haujlwm tseem ceeb rau kev ua lag luam siciondercologonduct ua kom tiav thiab ib puag ncig phooj ywg zoo.