Peb tau khiav lub Hoobkas hauv Suav teb uas tshwj xeeb hauv kev tsim cov roj av. Los ntawm kuv vantage point, Kuv tau pom txog qhov tsis txaus ntseeg ntawm thev naus laus zis, tag nrho cov neeg feem coob tsis pom: ultra-siab purity gases. Cov microchips me me hauv koj lub xov tooj, khoos phis tawm ntawm kev tsim kho niaj hnub, tab sis lawv cov kev tsim no tsis yooj yim sua yam tsis muaj ib qho khoom tsis muaj tseeb thiab cov pa roj ua paug.

Koj nkag siab qhov tseem ceeb ntawm kev ua tau zoo thiab cov khoom siv txhim khu kev qha, tab sis koj yuav xav tsis thoob ua li cas Cov qauv rau cov roj semiconductor yog li ntawd astronomically siab. Vim li cas cov zaub mov xa tuaj ntawm Argon yuav tsum tau 99.999% ntshiab? Cov lus qhia no yuav rub rov qab daim ntaub thaiv ntawm lub ntiaj teb ntawm Semiconductor fabrice. Peb yuav tshawb xyuas cov roj txheem tshwj xeeb siv, lawv ua li cas, thiab vim li cas lawv txoj kev coj dawb huv yog ib leeg tseem ceeb tshaj plaws. Txog thaum kawg, koj yuav muaj kev nkag siab meej meej ntxiv ntawm cov khoom koj tau txais thiab ua tau zoo dua nruab nrab los txuas lus lawv tus nqi rau koj cov neeg siv khoom.

Vim li cas thiaj muaj cov roj tshwj xeeb tshaj yog li tseem ceeb rau siciconductor fabrication?

Xav txog lub tsev ib tug skyscraper qhov twg ib qho tsis siv cov xuab zeb tuaj yeem ua rau tag nrho cov qauv los tsoo. Uas yog theem ntawm qhov ntsuas qhov xav tau hauv Kev Tsim Txaj Semiconductor kev lag luam. Cov "lub tsev tsim tsa" ntawm qhov kev lag luam no tsis yog cib thiab cug, tab sis atoms, thiab "cov cuab yeej" feem ntau yog feem ntau gases. Tag nrho kev yuav ntawm ib ncig lub vojrcuital tshwm sim ntawm lub microscopic, qhov twg txheej txheej, feem ntau tsuas yog ob peb cov atoms tuab, yog tso rau hauv lossis etched deb ntawm a silicon wafer.

Tej no Cov txheej txheem semiconductor yog incredibly rhiab heev. Ib qho kev tsis tsim nyog lossis tshuaj lom neeg lam ua Muaj peev xwm cuam tshuam cov arch kiag li architecture ntawm microchip, rendering nws tsis muaj. Qhov no yog qhov twg gases yog sivCov. Lawv tsim cov khoom siv ultra-huv, muab cov ntaub ntawv huv rau cov khaubncaws sab nraud povtseg, thiab ua raws li cov tshuaj lom neeg "uas tau hlais cov hluav taws xob. Tus samiconductor cov txheej txheem tsim khoom yog ib qho kev ua las voos ntawm Tshuaj lom neeg, thiab gases yog cov ua las voos. Yog tsis muaj tas mus li, txhim khu kev qha, thiab cov khoom siv ntshiab kom huv ntawm cov roj av, hluav taws xob niaj hnub tsuas yog tsis muaj nyob.

Tus Gases siv nyob rau hauv semiconductor raug tsis yog koj cov khoom lag luam tsim. Lawv tau tsim los ua kom tau raws li qib siab uas nyuaj rau kev nkag siab, feem ntau ntsuas hauv feem ib lab lossis qee qhov chaw nyob rau ib qho trillion. Qhov no yog vim kev ua haujlwm ntawm Saciconductor Devices yog ncaj qha khi rau qhov zoo tag nrho ntawm lawv cov qauv atomic. Ib tug reactive molecule ntawm oxygen lossis dej vapor hauv dab tsi yuav tsum yog inert paus tuaj yeem ua rau oxidation, hloov lub Cov Khoom Siv Hluav Taws Xob ntawm Circuit Court thiab ua rau tsis xws luag. Qhov no yog vim li cas Kev Lag Luam Tshwj Xeeb Kev Lag Luam yog ib qho tseem ceeb heev rau lub ntiaj teb ntawm thev naus laus zis.

Dab tsi yog cov pawg tseem ceeb ntawm cov roj av siv hauv semiconductor raug?

Thaum peb tham txog Gases nyob rau hauv kev raug, Lawv feem ntau poob rau ob peb pawg tseem ceeb raws li lawv txoj haujlwm. Kev nkag siab cov pab pawg no pab qhia meej txog txhua tus paus Ua si hauv cov nyom Cov txheej txheem ntau lawmCov. Nws tsis yog ib lossis ob lub roj; Ib tug niaj hnub Semiconductor Fab yuav tsum tau tshaj 30 sib txawv gases thiab gixtures rau kev ua haujlwm.

Ua ntej yog tus rojCov. Cov no yog cov haujlwm ua haujlwm, siv nyob rau hauv cov muaj ntau ntau thoob plaws hauv qhov chaw. Xav txog lawv raws li lub hauv paus huab cua ntawm txoj kev. Feem ntau yog:

• Nitrogen (n₂): Siv rau kev ntxuav cov ntaub ntawv thiab cov khoom siv kom tshem tawm cov khoom tsis huv thiab tsim cov ensert ib puag ncig.
• Cov pa (O₂): Siv los cog cov khoom zoo si silicon dioxide (sitio₂) txheej, uas ua los ntawm insulators.
• Hydrogen (H₂): Siv rau kev ntxuav cov chaw thiab qhov tshwj xeeb tso chaw cov txheej txheem.
• Argon (ar): Ib inert gas Siv los tsim ib puag ncig ruaj khov rau cov txheej txheem xws li sputtering.

Tom ntej no yog cov Cov Khoom Siv Tshwj Xeeb, tseem hu ua Hluav Taws Xob Cov Khoom Siv Tshwj XeebCov. Cov no yog cov tshwj xeeb heev, feem ntau kev pauj lossis kev phom sij, roj av uas ua cov haujlwm tseem ceeb ntawm kev etching thiab tso tawm. Lawv siv nyob rau hauv cov khoom me me tab sis muaj tus nqi ntau dua thiab yuav tsum tau ceev faj kom ceev faj. Cov no tuaj yeem muab faib txuas ntxiv ua cov pab pawg zoo li:

• Cov roj av tso nyiaj: Cov roj av no, zoo li SILANE (SiH₄), yog lub hauv paus ntawm cov khoom siv los tsim cov khaubncaws sab nraud povtseg. Lawv decompose thiab tso nyiaj a nyias zaj duab xis ntawm cov khoom siv rau hauv silicon wafer.
• Etchant gases: Cov no yog reactive gases siv los xaiv cov khoom siv. Piv txwv suav nrog fluorine compounds zoo li cov pa roj carbon tetrafruoride (CFL) thiab Hydrogen Chloride (HCl). Lawv siv nyob rau hauv etching txheej txheem rau carve tus qauv Circuit Court.
• Dopant Gases: Cov roj av no tau siv rau "dope" tus silicon, uas txhais tau tias txhob txwm qhia ib qho tshwj xeeb lam ua (a dopant) los hloov nws Cov Khoom Siv Hluav Taws XobCov. Qhov no yog qhov tseem ceeb rau kev tsim cov transist. Sib xws Dopant Gases suav nrog arsine (ash ₃) thiab phosphine (Ph 11).

Yuav ua li cas Nitrogen Gas ua raws li cov haujlwm ua haujlwm hauv cov khoom sib dhos?

Yog tias koj tau taug kev hla a Semiconductor Fabrication qhov chaw nyob, feem ntau ubiquitous paus koj yuav ntsib yog NitrogenCov. Thaum nws tsis ib txwm koom nrog hauv lub ntsiab Tshuaj lom neeg Qhov uas tsim lub nti, nws lub luag haujlwm yog kiag li qhov tseem ceeb rau kev tsim cov xwm txheej rau cov kev tawm tsam ntawd ua tiav. Nitrogen yog siv feem ntau rau nws inertness; Nws tsis tau yooj yim hnov ​​nrog lwm cov ntsiab lus, ua rau nws zoo meej "muab tub rog" paus.

Thawj qhov kev siv rau Nitrogen yog nyob rau hauv purging thiab tsim kom muaj qhov chaw inert. Ua ntej muaj kev nkag siab Txheej txheem Semiconductor Yuav pib, lub chav yuav tsum pub dawb ntawm cov paug tsis muaj pa xws li oxygen, dej vapor, thiab hmoov av. Siab-purity Nitrogen yog yaug los ntawm chav ua haujlwm kom thawb tawm cov ntsiab lus tsis txaus siab no. Qhov no txwv tsis pub muaj oxidation lossis lwm yam kev tawm tsam uas yuav liam lub waferCov. Qhov tib cai no yog siv rau cov cuab yeej thiab thauj cov pods (hu ua cov zaub mov) uas nqa Silicon Wafers nruab nrab ntawm cov theem sib txawv ntawm cov Cov txheej txheem tsim khoom.

Tsis tas li ntawd, Nitrogen plays lub luag haujlwm tseem ceeb hauv photolithography, cov txheej txheem ntawm kev luam ntawv tus qauv tsim hluav taws xob tsim rau cov wafer. Hauv kev sib sib zog nqus tshiab tshiab (duv) raws li plaub, qhov chaw nruab nrab ntawm lub lens thiab cov wafer yog puv nrog ultra-ntshiab Nitrogen (lossis Tus sib cav) kom tso cai rau lub luv luv-wavelength teeb kom dhau los ntawm yam tsis tau nqus los ntawm huab cua. Yog tsis muaj qhov chaw nyob hauv inert, cov txheej txheem yuav tsis yooj yim sua. Hauv kuv qhov kev paub ua rau cov fab, qhov kev thov rau ib nriv mus ntxiv, muaj ntau-ntim, thiab kev ua kom siab purity Nitrogen muab tsis tau yog tsis muaj kev sib ceg.

Lub luag haujlwm Argon ua si hauv kev tsim lub chaw zoo nkauj zoo tshaj plaws?

Zoo li nitrogen, Tus sib cav yog noble paus, lub ntsiab lus nws yog tshuaj inertCov. Txawm li cas los xij, Argon yog siv Rau cov ntawv thov tshwj xeeb uas nws hnyav dua atomic hnyav muab qhov kom zoo dua. Ib qho tseem ceeb tshaj plaws ntawm cov ntawv thov no yog sputter tso nyiaj, lossis sputtering. Nov yog lub cev nqaij daim tawv Cov txheej txheem tso nyiaj siv los tso cia cov yeeb yaj kiab hlau hlau, uas ua cov hlau ntawm cov ncig lub vojrcuital.

Nyob rau hauv sputtering, ib feem hluav voltage yog thov hauv lub nqus tsev uas muaj Argon rojCov. Qhov no tsim cov ntshav ntshav ntawm qhov raug them Tus sib cav ions. Cov ions tau nrawm thiab tsoo rau hauv "lub hom phiaj" ua los ntawm cov hlau uas peb xav tso (zoo li tooj liab lossis txhuas). Lub zog ntawm kev sib tsoo knocks hlau atoms tawm ntawm lub hom phiaj, uas ces ya thoob plaws lub chav thiab lub tsho tiv no silicon wafer nyob rau hauv ib tug nyias, uniform txheej. Tus sib cav Yog zoo meej rau qhov no vim tias nws hnyav txaus kom zoo dlodge lub hom phiaj atoms tab sis tshuaj tsis txaus uas nws yuav tsis hnov ​​nrog cov yeeb yaj kiab hlau nws tau pab tsim. Nws muab lub zoo meej Ib puag ncig rau Sputter Deposition ntawm cov hlau.

Lwm qhov tseem ceeb siv rau Tus sib cav yog nyob rau hauv plasma etching. Hauv qhov no etching txheej txheem, Tus sib cav feem ntau sib xyaw nrog a kev pauj tus loj leeb pausCov. Tus Tus sib cav Pab tswj lub Plasma thiab lub cev bombard saum npoo, pab rau cov tshuaj etch thiab tsim ntau yam txiav hauv cov khoom. Ib tug ntseeg tau muab ntawm Arrinders Argon yog qhov tseem ceeb rau txhua qhov chaw ua haujlwm ntawm metallization lossis siab dua etching.

Koj puas tuaj yeem piav qhia tias Hydrogen yog siv rau kev xa khoom thiab kev tu?

Thaum nitrogen thiab argon yog muaj nuj nqis rau kev tsis raug, Pab kas nees muaj nuj nqis rau kev ua siab heev kev pauj, tab sis nyob rau hauv ib tug heev huv thiab tswj txoj kev. Hydrogen yog siv dav nyob rau hauv Kev Tsim Txaj Semiconductor rau kev ntxuav cov chaw thiab hauv ib hom kev tso chaw hu ua kev loj hlob tuaj. Nws me me atomic loj tso cai rau nws kom nkag mus thiab ua rau lwm txoj hauv kev lwm cov pa roj tsis tuaj yeem.

Ua ntej txheej txheej tshiab tuaj yeem cog rau ntawm a wafer, lub nplaim yuav tsum muaj txig huv, cia rau theem atomic. Hydrogen Gas yog siv nyob rau hauv cov txheej txheem hnyav hu ua "hydrogen ci" kom tshem tawm ib txwm muaj oxide (ib tug nyias muaj oxide (ib tug nyias, ib txwm muaj tshwm sim ntawm silicon dioxide) uas tau tsim rau ntawm silicon Nto. Tus pab kas nees reacygs nrog cov pa, sib sau cov pa dej (h₂o) uas yog tom qab ntawd muab tso tawm ntawm lub chav, tawm hauv pristine silicon Nthuav npaj rau kauj ruam tom ntej.

Pab kas nees kuj tseem yog ib qho tseem ceeb hauv kev xaiv tsa kev loj hlob (lossis "EPI"), tus txheej txheem uas hlob ib-crystal txheej ntawm silicon nyob rau sab saum toj ntawm silicon waferCov. Cov txheej txheej tshiab no muaj cov qauv zoo nkauj ua kom zoo nkauj thiab tswj tau zoo dopant qib. Pab kas nees ua raws li tus cab kuj paus Rau silicon lub hauv paus paus (zoo li kev ua si kom ua haujlwm lossis trichlorosilane). Nws kuj tseem ua kom muaj kev loj hlob huv ib puag ncig los ntawm kev ua phem rau cov pa Axygen Affs. Qhov zoo tshaj ntawm cov txheej txheej tshiab no yog qhov tseem ceeb rau kev ua tau zoo ntawm cov txheej txheem kawg siab, ua kom lub HYDROGEN KHEEJ KHEEJ muab lus yooj yim kiag li.

Dab tsi yog etchant gases thiab lawv yuav ua li cas lawv carve tsom iav loj?

Yog tias tso tawm yog hais txog kev tsim cov khaubncaws sab nraud povtseg, etching yog hais txog xaiv carving lawv mus rau tsim cov qauv Circuit Court. Xav txog nws raws li microschopic sculpting. Tom qab tus qauv txhais tau siv photolithography, etchant gases yog siv los muab tshuaj lom neeg txhais tau tias kom tshem cov khoom los ntawm cov chaw tsis muaj kev tiv thaiv ntawm waferCov. Qhov no yog ib qho ntawm cov kev nyuaj tshaj plaws thiab cov theem tseem ceeb hauv CHIPPT RAUG.

Tus Gases siv nyob rau hauv lub etching Cov txheej txheem yog feem ntau fluorine, chlorine, lossis bromine-raws li cov lus sib txuas. Qhov kev xaiv ntawm paus Nyob ntawm cov khoom siv etched.

• Cov roj fluorine-based (piv txwv li, cf₄, sf₆, nf₃) tau zoo heev rau kev etching silicon thiab silicon dioxide.
• Tshuaj Chlorine-Raws Li Roj (Piv txwv, Cl₂, BCL₃, HCl) feem ntau siv rau kev siv hlau thiab hlau zoo li txhuas.

Tej no reactive gases yog qhia rau hauv cov ntshav qafeb. Lub ntshav tawg paus molecules sib nrug rau hauv heev kev pauj ions thiab radicals. Cov radicals no ces hnov ​​qab nrog saum npoo ntawm wafer, kev sib sau ib qho tshiab nthuav dav uas tuaj yeem yooj yim plhaw deb, yog li "etching" cov khoom. Qhov precision yuav tsum yog loj heev; Lub hom phiaj yog tus lwm yam Ncaj nraim (anisotropically) tsis muaj undercutting cov qauv txheej. Niaj hnub CaCiconductor Fab Siv cov complex Roj Sib xyaw Thiab ua tib zoo tswj cov ntshav ntshav ntshav kom ua tiav qhov no.

Cov tshuaj lom neeg vapor deposition (CVD) thiab cov pa roj twg koom nrog?

Tshuaj lom neeg vapor deposition (CVD) yog lub hauv paus Cov txheej txheem tso nyiaj hauv Kev Tsim Txaj SemiconductorCov. Nws yog thawj txoj kev siv los tsim cov insulating thiab txhais cov yeeb yaj kiab nyias uas ua rau a Ntaus Ntawv SemiconductorCov. Cov tswv yim yooj yim yog ntws a paus (los yog muaj kev sib xyaw ntawm cov roj av) dhau ntawm cov cua sov waferCov. Cov cua sov ua rau lub paus Txhawm rau hnov ​​qab lossis decompose ntawm Wafefer nto, tawm tom qab ib qho khoom plig zoo ntawm cov khoom xav tau.

Txhua ntawm cov kev tawm tsam no yuav tsum muaj cov xwm txheej ruaj khov thiab tsis tshua muaj neeg High-Purity GasesCov. Piv txwv li, thaum tso nyiaj polysilicon siv cov zaub mov, txhua cov pa oxygen lam ua nyob rau hauv paus Stream yuav ua rau silicon dioxide rau daim ntawv hloov chaw, puas ntsoog cov khoom ua haujlwm ntawm txheej ntawm txheej. Qhov no yog vim li cas peb, raws li tus xa khoom, tsom dav dav rau huv thiab tsom kwm ntawm cov no Deposition rojCov. Tag nrho cov tsev qiv ntawv ntawm Kev pham siab Purity Heev Peb muab tau yog npaj rau kev ua kom tau raws li cov hlua khi rau cov hlua.

Vim li cas thiaj muaj cov txiaj ntsig ultra siab tshaj plaws rau cov khoom tseem ceeb tshaj plaws rau cov roj semiconductor?

Kuv tsis tuaj yeem dhau qhov no: hauv Kev Lag Luam Semiconduct, kev coj dawb huv yog txhua yam. Lub sij hawm siab-purity Tsis txhais tau tias 99% lossis txawm tias 99.9%. Rau Cov Khoom Siv Hluav Taws Xob, peb tab tom tham txog Ultra-siab huv (UHP), uas yog feem ntau 99.999% (feem ntau hu ua "tsib leeg") lossis siab dua. Rau qee qhov tseem ceeb Kev Gases, qhov yuav tsum tau ua tau 99.999% ("rau nines") lossis siab dua. Qhov laj thawj yog yooj yim: paug tua kev ua tau zoo.

Cov yam ntxwv ntawm cov microchip niaj hnub tau ntsuas hauv Nanometers (Billionths ntawm lub meter). Ntawm cov nplai no, ib qho txawv teb chaws particle lossis tsis xav tau molecule zoo li lub pob zeb hauv nruab nrab ntawm superhighway. Ib lam ua Tau:

• Kev hloov cov khoom hluav taws xob: Ib qho sodium stray ion tuaj yeem hloov qhov pib voltage ntawm ib qho transistor, ua rau nws hloov ntawm lossis tawm ntawm lub sijhawm tsis raug.
• Tsim cov qauv tsis xws luag: Ib tug oxygen molecule tuaj yeem cuam tshuam lub ntsej muag zoo nkauj crystal lattice thaum lub sij hawm rov qab loj heev, tsim kom muaj qhov "tsis cuam tshuam hluav taws xob.
• Ua rau cov voj voog luv luv: Cov xim hlau particle particle tuaj yeem choj ob txoj kab uas nyob ib sab, tsim kom muaj qhov tuag luv.
• Txo cov txiaj ntsig: Cov kev paug ntxiv nyob rau tam sim no, ntau dua tus naj npawb ntawm cov tawv nqaij uas tsis zoo rau txhua tus wafer, uas ncaj qha cuam tshuam ncaj qha cuam tshuam.

Qhov no yog vim li cas, raws li cov chaw tsim khoom lag luam, peb qhov peev loj tshaj plaws yog nyob rau hauv cov khoom siv huv thiab tshuaj xyuas cov khoom siv. Txhua txhua lub pob ntawm pa yuav tsum Kuaj kom nws ua tau raws seem-ib-lab (ppb) lossis ntu-ib-trillion yuav tsum los ntawm peb cov neeg siv khoom. Tus Thov kom muaj siab siab purity gases yog dab tsi tsav tag nrho Kev lag luam roj tshwj xeeb Rau cov khoom siv hluav taws xob.

Peb yuav ua li cas thiaj paub tseeb tias qhov zoo thiab txhim khu kev qha roj ntau?

Rau tus tub ceev xwm tshaj tawm zoo li Mark, qhov no yog cov lus nug tseem ceeb tshaj plaws. Tus nqi zoo yog tsis muaj qab hau yog tias tus paus Qhov zoo yog qhov tsis sib xws lossis cov zaub mov xa tuaj lig. Kuv tau hnov ​​cov dab neeg txaus ntshai heev: Cov neeg muag khoom muab cov pov thawj dag kev tsom xam, lossis cov zaub mov xa tuaj ntawm Cov Khoom Siv Tshwj Xeeb Raug tuav hauv kev lis kev cai rau lub lis piam, ua rau ib txoj kab ntau lawm los nres. Hais txog cov ntsiab lus mob no yog nyob ntawm qhov tseem ceeb ntawm peb lub tswv yim kev lag luam.

Ensuring zoo pib nrog lub huv txheej txheem. Peb siv cov ntsiab lus siab zoo li cryogenic distillation thiab cov khoom tshwj xeeb adsorbent kom tshem tawm cov kab imurities. Tab sis tus txheej txheem tsis xaus rau ntawd. Cov kauj ruam tseem ceeb tshaj plaws yog kev txheeb xyuas. Peb siv cov cuab yeej siv ntawm lub xeev-ntawm-kos duab ntsuas zoo li cov roj Chromatograph-huab hwm coj (GC-MS) los ntsuas txhua tus kheej ua ntej nws xa khoom. Peb muab peb cov neeg siv nrog cov ntawv pov thawj ncauj lus kom ntxaws thiab qhabnias ntawm kev tsom xam (COA) rau txhua pob, lav cov Roj Purity.

A Txhim khu kev qha ntawv Saw yog lwm ib nrab ntawm kab zauv. Qhov no cuam tshuam:

• Lub tog raj kws muaj zog npaj: Thooj voos kheej kheej rau Ultra-siab Purity Gases yauv ua ib qho kev ntxuav tu tshwj xeeb thiab cov txheej txheem passivation kom ntseeg tau tias lub taub ntim nws tus kheej tsis paug lub paus.
• Cov Khoom Txawj Ntse: Peb ua haujlwm nrog cov koom tes logistics uas nkag siab cov kev cai rau kev thauj khoom siab thiab qee zaum cov khoom muaj kev phom sij thoob ntiaj teb. Peb muab tag nrho cov ntaub ntawv tsim nyog los xyuas kom meej cov kev ua kom pom tseeb.
• Ntshiab Kev Sib Tham: Peb cov kev muag khoom thiab cov pab pawg txhawb tau raug cob qhia kom muab cov kev hloov tshiab tsis tu ncua. Koj yuav paub txog cov xwm txheej ntawm koj daim ntawv xaj, los ntawm kev tsim khoom rau kev xa khoom zaum kawg. Peb nkag siab tias kev paub tseeb Kev muab cov roj siab heev yog qhov tseem ceeb rau peb cov neeg siv khoom los tswj lawv tus kheej cov caij nyoog tsim khoom. Peb txawm muab ntau yam Roj sib xyaw Cov kev xaiv kom tau raws li cov kev xav tau tshwj xeeb.

Dab tsi tom ntej no tuav tau gases hauv kev lag luam semiconductor?

Tus Kev Lag Luam Semiconduct yeej tsis sawv twj ywm. Raws li tau kwv yees los ntawm Moore txoj cai, chipmakers yog constanting los tsim me me, sai dua, thiab cov khoom muaj zog heev. Qhov kev hloov pauv tsis muaj kev cuam tshuam ncaj qha rau cov Gases thiab Gixtures siv nyob rau hauv lawv cov ntaub thaiv. Raws li peb tsiv mus rau Lwm Tiam Ntawm Cov Semiconductor Cov thev naus laus zis, nrog qhov ntau thiab tsawg yam shrinking rau ob peb nanometers, cov kev cai yuav tsum muaj rau huab.

Peb tab tom pom ib qho qauv ntawm cov khoom tshiab dhau silicon, xws li gallium nitride (gan) thiab silicon carbide (sic), uas xav tau tshiab thiab txawv Kev Gases rau etching thiab tso tawm. Kuj tseem muaj kev txav mus rau ntau qhov kev ua lag luam 3D, zoo li Finfet thiab GATE-txhua-ncig (GAA) cov transistors, uas thov txawm tias tseem ceeb tshaj plaws hauv lub tso chaw thiab tus lwm yam Cov kauj ruam. Qhov no txhais tau tias yog Cov roj txheem tshwj xeeb Kev lag luam yuav tsum yog ua kom muaj tswv yim tshiab los tsim cov lwg me me thiab ua tiav qib siab dua huv.

Los ntawm kuv qhov kev pom raws li tus xa khoom, lub neej tom ntej yog hais txog kev sib koom tes. Nws tsis yog txaus los ntawm muag lub tog raj kheej ntawm pausCov. Peb yuav tsum ua haujlwm ze nrog peb cov neeg siv khoom hauv Cov Khoom Siv Hluav Taws Xob Hluav Taws Xob Sector kom nkag siab txog lawv txoj kev thev naus laus zis yav tom ntej. Qhov no tso cai rau peb kom cia siab tias yuav xav tau qhov tshiab High-Purity Gases thiab nqis peev hauv kev tsim khoom thiab analytical lub peev xwm los muab lawv. Cov lus pom tsis pom ntawm tus Semiconductor Ntiaj teb-cov roj cua-yuav txuas ntxiv mus rau qhov ua ntej ntawm kev ua tiav thev naus laus zis.

Tseem Ceeb Takaways

Raws li koj tau txais cov roj av kev lag luam rau cov kev xav tau cov kev ua lag luam semiconductor, ntawm no yog qhov tseem ceeb tshaj plaws uas yuav tsum nco ntsoov:

• Purity yog tus qauv: Ib leeg tseem ceeb tshaj plaws yog Ultra-siab huvCov. Cov khoom tsis huv, txawm tias qib-lab-lab-billion, tuaj yeem ua rau cov khoom siv kev puas tsuaj tsis ua haujlwm thiab txo cov qoob loo ntau lawm thiab tsis muaj ntau lawm.
• Gases muaj cov haujlwm tshwj xeeb: Gases tsis sib pauv tau. Lawv tau siv cov cuab yeej tshwj xeeb zoo li tsim cov inert incospheres (nitrogen, argon), tsev txheej txheem (Deposition roj zoo li kev ua si), thiab carving ncig (Etchant gases Zoo li CF₄).
• Cov khoom siv tes yog qhov tseem ceeb: Tus neeg xa khoom kom ntseeg tau ntau dua li muag cov khoom. Lawv paub zoo los ntawm kev sim nruj, muab cov ntawv pov thawj tseeb, tswj cov kev thauj ntau, thiab tswj cov kev sib txuas lus nyuaj los tiv thaiv kev siv roj ntau lawm.
• Kev Paub Txog Kev Ntxiv: Kev to taub ua li cas ib qho paus yog siv thiab ua li cas Nws txoj kev coj dawb huv yog li tseem ceeb heev rau koj ua tus khub zoo rau koj tus kheej cov neeg siv khoom, qhia kom zoo thiab tsim lub sijhawm ntev kev ntseeg siab.
• Kev lag luam yog evolving: Lub laub rau me thiab ntau cov chips muaj zog txhais tau tias qhov kev thov rau tshiab, txawm Purer Cov Khoom Siv Tshwj Xeeb tsuas yog txuas ntxiv mus ntxiv. Kev sib koom ua ke nrog rau pem hauv ntej-saib tus xa khoom yog qhov tseem ceeb kom nyob nraum ntej.