Ib qho kev qhia dav rau nitrogen trifluoride (NFO) roj hauv cov khoom tsim kho

2025-11-12

Lub smartphone hauv koj lub hnab tshos, lub khoos phis tawm ntawm koj lub rooj, cov qib siab hauv koj lub tsheb-tsis muaj ib qho yuav yog tsis muaj qhov muag uas ntsiag to, tsis tuaj yeem ua haujlwm ntawm cov roj tshwj xeeb. Raws li tus tswv ntawm cov roj av roj av, i, Allen, tau pom ntawm cov khoom siv tseem ceeb ntawm lub txaj niaj hnub no. Rau cov thawj coj ua lag luam zoo li Mark Shen, uas yog kev nkag siab cov roj av nyuaj no yog qhov tseem ceeb los qhib cov sijhawm tshiab. Kab lus no yog koj cov lus qhia thoob plaws rau ib qho ntawm cov players tseem ceeb tshaj plaws hauv daim teb no: Nitrogen trifluoride (nf₃)Cov. Peb yuav dirystify no haib paus, tshawb nws lub luag haujlwm tseem ceeb hauv samiconductor cov txheej txheem tsim khoom, thiab piav qhia yog vim li cas nws qhov zoo thiab muab tau yog qhov tseem ceeb rau tag nrho Cov Khoom Siv Hluav Taws Xob Hluav Taws Xob kev lag luam.

Dab tsi tiag yog nitrogen trifluoride (NFO) roj?

Thaum xub thawj siab ib muag, Nitrogen trifluoride, feem ntau hu los ntawm nws cov mis nyuj Nf₃, tej zaum zoo li yog lwm yam kev lag luam pausCov. Nws yog ib qho tsis muaj kob, tsis muaj nplaim taws, thiab me ntsis yuav tsum hnov ​​tsw sib xyawCov. Txawm li cas los xij, nyob hauv lub ntiaj teb ntawm Ua Ntej Raug, qhov no paus yog cov cuab yeej siv siab. Nws yog synthetically tsim sib xyaw ua los ntawm ib nitrogen atom thiab peb cov tshuaj fluorine atoms. Tus yuam sij rau nws lub zog nyob hauv cov qauv no. Nyob rau hauv chav tsev kub, Nf₃ yog tus tsis ruaj khov thiab inert, ua rau nws thauj khoom zoo thiab sib txuas piv rau cov gases ntau dua.

Cov khawv koob tshwm sim thaum lub zog siv. Nyob rau hauv lub siab-zog xwm txheej hauv a Semiconductor Cov cuab yeej tsim, xws li a ntshav Chamber, tus Nf₃ molecules kev txiav tximCov. Lawv sib nrug thiab tso tawm heev kev pauj cov tshuaj fluorine radicals. Xav txog nws zoo li kev tswj tau tawg ntawm lub microscopic nplai. Cov dawb no cov tshuaj fluorine atoms yog qhov zoo kawg nkaus ntawm kev rov ua haujlwm nrog thiab tshem cov ntaub ntawv tsis xav tau, tshwj xeeb silicon thiab nws cov lus sib xyaw. Qhov peev xwm no yuav tsum ruaj khov thaum koj xav tau nws thiab heev kev pauj Thaum koj xav tau nws ua Nitrogen trifluoride roj lub cuab tam invaluable nyob rau hauv lub ntiaj teb meej ntawm CHIPPT RAUG.

Qhov tshwj xeeb no tshwj xeeb yog vim li cas Nf₃ tau dhau los ua pob zeb ntawm niaj hnub Semiconductor FabricationCov. Nws cov kev ruaj ntseg kom muaj kev nyab xeeb thiab kev ntseeg tau nyob rau hauv cov khoom siv sib txuas, thaum nws cov kev ua tau zoo ua rau kev ua tau zoo thiab etching lub peev xwm uas cov tuam ntxhab xav tau. Raws li peb delve ntxaum, koj yuav pom li cas qhov no yooj yim lub suab paus Ua rau cov kev tsim cov khoom siv ntau tshaj plaws hauv lub ntiaj teb.

Vim li cas thiaj muaj cov roj tshwj xeeb tshaj plaws rau kev lag luam semiconductor?

Kom nkag siab qhov tseem ceeb ntawm Nf₃, peb ua ntej yuav tsum txaus siab rau lub luag haujlwm dav dav uas Gases yog qhov tseem ceeb rau hauv Kev Lag Luam SemiconductCov. Raug ib ncig lub vojrcuital yog zoo li lub tsev ib tug skyscraper ntawm ib qho loj me ntawm koj tus thumbnail. Nws yog tus txheej txheem ntawm kev ntxiv thiab tshem tawm cov dozens ntawm ultra-nyias txheej ntawm cov khoom sib txawv ntawm a silicon waferCov. Txhua txhua kauj ruam, los ntawm kev tsim ib lub liab qab wafer mus rau qhov kawg chip, tso siab rau cov huab cua ua tib zoo saib xyuas tshwj xeeb Cov roj txheem hluav taws xob.

Cov roj av no ua ntau txoj haujlwm tseem ceeb. Ib txhia, nyiam tus sib cav thiab helium, yog siv los ua inert cab gases los tsim ib puag ncig ruaj khov, tsis muaj kev xav thiab kom dilute ntau reactive gases. Lwm tus siv rau tso chaw, qhov twg a paus yog siv rau tso nyiaj ib zaj duab xis nyias ntawm cov khoom siv rau hauv waferCov. Piv txwv li, hauv tshuaj Pa ncho Tso chaw (CVD), gases hnov ​​mob los ua ib zaj duab xis ruaj khov uas dhau los ua ib feem ntawm lub nti lub voj voog. Tom qab ntawd muaj etching gases, zoo li Nf₃, uas yog siv los ua kom meej carve tawm cov qauv hauv cov khaubncaws sab nraud povtseg, tsim cov kab zoo nkauj rau hluav taws xob ntws.

Tsis muaj ib qho tas mus li, ultra-siab-purity muab cov roj ntau ntxiv, tag nrho Cov txheej txheem tsim khoom yuav zom rau ib lub halt. Txawm tias ib tug minuscule lam ua nyob rau hauv a paus Yuav tuaj yeem rhuav tshem tag nrho cov pob tawb ntawm wafers, raug nqi lub tuam txhab lab nyiaj daus las. Vim li no Saciconductor Cov Chaw Tsim Tshuaj yog incredibly rhiab rau qhov zoo thiab kev ntseeg tau ntawm lawv cov neeg muag khoom roj. Purity ntawm lub paus ncaj qha txhais kom zoo thiab Ntau Lawm Tawm los ntawm cov khoom kawg.

Yuav ua li cas nf₃ roj siv nyob rau hauv semiconductor cov txheej txheem raug?

Nitrogen trifluoride muaj ob lub Koom Haum Me Nyuam Yaus, cov ntawv thov tseem ceeb hauv Kev Tsim Kho Cov Txheej Txheem: Plasma etching thiab chamber tu. Ob qho tib si yog qhov tseem ceeb rau kev tsim cov kev ua haujlwm siab microchips, los ntawm cov processors mus Nand flash nco.

Ua ntej, cia peb tham txog etching. Tom qab txheej txheej ntawm cov khoom li silicon dosxide yog muab tso rau ib wafer, tus qauv yog npaj rau nws siv lub teeb. Tus tus lwm yam Txheej txheem ces tshem cov khoom los ntawm cov chaw tsis muaj kev tiv thaiv. Nf₃ yog qhia rau hauv chav tsev thiab energized los tsim a ntshav-A huab ntawm kev them nqi ion Hais thiab reasrive cov tshuaj fluorine radicals. Cov radicals prepperable precisely bombard lub wafer nto, reacting nrog lub silicon thiab hloov nws mus rau hauv a gASOUSE sib xyaw (silicon TetraTruoride) uas tuaj yeem yooj yim tso tawm ntawm lub chav. Qhov tseeb ntawm cov txheej txheem no yog lub siab-boggling, cia cov engiaers rau cov khoom siv tau ntau txhiab lub sij hawm thinner dua li tib neeg cov plaub hau.

Qhov thib ob, thiab ntau dua, Kev Siv Nitrogen trifluoride yog ib Tu RojCov. Thaum lub sijhawm Kev Siv Tshuaj Vauv Deposition (CVD) cov txheej txheem, qhov twg nyias cov yeeb yaj kiab yog loj hlob ntawm lub wafer, cov khoom tsis muaj nqis kuj ua rau sab hauv phab ntsa ntawm cov txheej txheem chamber. No nyob, feem ntau ua los ntawm silicon lossis silicon nitride, yuav tsum tau muab tshem tawm tag nrho ntawm kev ua txhua yam wafer lossis batch ntawm wafers. Yog tias tsis yog, cov tuam txhab no tuaj yeem nplawm thiab tsaws rau tom ntej wafer, ua rau muaj kev tsis taus. Ntawm no, Nf₃ yog tso rau hauv lub chamber khoob thiab a ntshav yog ignited. Tus muaj hwjchim cov tshuaj fluorine radicals txhuam txhuam cov chamber phab ntsa huv si, hloov cov khoom nyob rau hauv a gASOUSE tus yeeb yaj kiab uas tau yooj yim tshem tawm. Lub voj voog ntxuav tu no yog tseem ceeb rau kev tswj hwm lub purity ntawm kev tsim khoom lag luam thiab ua kom muaj txiaj ntsig siab Ntau Lawm Tawm los.

Dab tsi ua rau NF₃ ua kom muaj roj zoo dua piv rau kev xaiv?

Rau ntau xyoo, tus Kev Lag Luam Semiconduct cia siab rau perfluorocarbons (PFCS) xws li carbon tetrafruoride (cf₄) thiab Hexafluoroethane (C₂F₆) rau kev ntxuav thiab etching. Thaum ua tau zoo, cov tebchaw no tuaj nrog qhov loj drawback: lawv yog cov roj av uas muaj zog heev tshaj plaws nrog cov kev ua neej nyob ntev heev. Piv txwv li, c₂f₆ muaj a Kev ua kom thoob ntiaj teb ua kom sov sov (GWP) thiab tuaj yeem mob siab rau hauv cov cua rau 10,000 xyoo. Raws li cov kev cai ib puag ncig nruj, kev lag luam xav tau txoj kev daws teeb meem zoo dua.

Qhov no yog qhov twg Nf₃ tshwm sim raws li tus yeej ntshiab. Thaum Nitrogen trifluoride kuj yog a haib heev tsev cog khoom roj, Nws muaj lub neej luv luv ntawm lub neej (nyob ib ncig ntawm 500 xyoo). Tseem ceeb tshaj, nws yog qhov ua tau zoo dua hauv cov txheej txheem ntxuav. Sab hauv lub ntshav Chamber, feem pua ​​ntau dua ntawm Nf₃ molecules tawg cia kom tso lawv cov reasrive cov tshuaj fluorine piv rau pfcs. Qhov no txhais tau tias tsawg dua tsis txawj paus yog sab sab ntawm lub chamber. Niaj hnub CaCiconductor Fab kuj nruab kev txawv txawv system (cov roj hmab) uas ua kom puas yuav luag txhua tus tsis txawj Nf₃ thiab teeb meem tus yeeb yaj kiab gases ua ntej lawv tau tawm.

Kev sib xyaw ua ke ntawm cov ua ke siab dua thiab ua tau zoo dua qub txhais tau tias qhov tseeb Tsev cog khoom roj emissions Los ntawm kev siv Nf₃ yog tsawg dua li cov neeg los ntawm PFC cov roj laus laus. Qhov kev ua tau zoo tshaj plaws yog qhov tseem ceeb rau nws qhov dav dav.

Yam zoo Nitrogen trifluoride (nf₃) Perfluorocarbons (piv txwv li, c₂f₆)
Tu tau txiaj ntsig Siab heev Tswj kav
Plasma cais tawm > 95% 10-40%
Kev Siv Hluav Taws Xob Txo cov nqi yuav tsum tau ua Ntau dua cov nqi yuav tsum tau ua
Txheej Txheem Sijhawm Lub voj voog ntxuav sai dua Qeeb qeeb tu cycles
Cuam tshuam ib puag ncig Qis dua cov pa hluav taws xob nrog kev tso tawm Siab heev, ntev cua nyob rau lub neej
Nqi zog-ua hauj lwm Siab dua Ntau Lawm Tawm los, tsawg dua poob qis Tsawg dua, muaj pov tseg ntau ntxiv

Yuav ua li cas yog high-purity nitrogen trifluoride tsim?

Ua cov chaw tsim khoom lag luam, Kuv tuaj yeem qhia koj tias kev tsim khoom Nf₃ yog ib txoj kev nyuaj thiab muaj kev tswj hwm Cov txheej txheem ntau lawmCov. The goal is to create a final product that is incredibly pure—often 99.999% purity or higher—because even the slightest lam ua tuaj yeem ua kev puas tsuaj rau Semiconductor Ntau LawmCov. Cov txheej txheem xav tau kev txawj ntse hauv kev tuav cov tshuaj kho cov tshuaj lom neeg, tshwj xeeb cov tshuaj fluorine.

Tus NFUN Ntau Lawm feem ntau yuav cuam tshuam tshuaj asmaunias (a sib xyaw Muaj Nitrogen) lossis ammonium roj fluoride compound nrog theem cov tshuaj fluorine roj hauv reactor ntawm Kev Kub SiabCov. Qhov tshuaj tiv thaiv no ua rau muaj cov roj, suav nrog Nf₃, unleacted cov ntaub ntawv, thiab ntau yam los ntawm kev cuam tshuam. Qhov kev sib tw tiag tiag, thiab qhov twg ib tus neeg xa khoom cov kev txawj ntse uas pom tseeb, yog nyob hauv huv theem uas ua raws.

Tus nyoos gASOUSE Sib tov mus dhau ob peb huv cov kauj ruam kom tshem tawm cov kev tsis xav tau. Qhov no feem ntau cuam tshuam nrog kev txhuam hniav, adsorption, thiab cryogenic distillation cov txheej txheem. Tus Cov txheej txheem distillation, tshwj xeeb, siv tsis tshua muaj cua sov kom cais cov roj sib txawv raws li lawv cov ntsiab lus npau npau, cais cov Nf₃ los ntawm ib qho ntxiv impurities. Txhua kauj ruam yog soj ntsuam nrog cov khoom siv txheeb xyuas siab los xyuas cov khoom kawg kom ntseeg tau cov hlua ntawm cov hlua khi ntawm cov Semiconductor kev lag luam. Qhov kev cog lus no rau kev tswj hwm zoo yog dab tsi cais cov khoom siv txhim khu kev qha los ntawm tus so.


Kev Loj Siab Ua Purity Nf3 Roj Lub Tog Raj Kheej

Dab tsi yog qhov kev nyab xeeb thiab kev sib cav sib haum rau NFO roj?

Kev nyab xeeb yog qhov tseem ceeb tshaj plaws hauv kev lag luam paus ua lag ua luam. Thaum Nf₃ Yog tsis muaj nplaim taws thiab txhais tau nyob rau hauv chav tsev kub, nws yog qhov muaj zog oxidizing tus neeg sawv cev, tshwj xeeb tshaj yog thaum muaj qhov kub siab dua. Qhov no txhais tau tias nws tuaj yeem ua kom muaj kev kub ntxhov nrog cov khoom siv hluav taws xob thiab yuav tsum tau ceev faj tuav. Tus thawj qhov kev pheej hmoo yog nws cov tshuaj lom; nqus tau paus tuaj yeem tsim kev puas tsuaj, yog li qhov chaw tiv thaiv zoo thiab cov khoom tiv thaiv tus kheej yog qhov tseem ceeb ntawm ib qho twg Chaw Tsim Tshuaj.

Tag nrho cov khoom siv muab, los ntawm peb lub Hoobkas rau cov qhua tuaj noj mov Semiconductor fab, yog tsim nyob ib puag ncig kev nyab xeeb. Nf₃ Tau thauj hauv tshwj xeeb tsim hlau steel thooj kheej kheej nyob rau hauv kev kub siab. Cov thooj voos thooj voos thooj thooj kom haum rau kev kuaj nruj thiab cov ntawv pov thawj los xyuas kom lawv muaj peev xwm muaj kev nyab xeeb pausCov. Raws li tus xa khoom, peb muab cov ntawv qhia txog kev nyab xeeb cov ntaub ntawv (SDS) thiab kev cob qhia rau peb cov neeg siv khoom lag luam ntawm kev cia, kev sib txuas, thiab cov txheej txheem sib txuas. Qhov no suav nrog cov lus qhia ntawm Txaus tus nqi Tswj thiab XEAK Nrhiav Kom Tau Lub Tshuab.

Rau cov tswv ua lag luam zoo li Mark, uas nws lub ntsiab txhawj xeeb yog txoj kev du thiab txhim khu kev qha, koom tes nrog tus neeg xa khoom uas muaj cov pov thawj kev nyab xeeb cov ntaub ntawv yog qhov tseem ceeb. Kev sib txuas lus tsis zoo lossis tsis muaj kev nyab xeeb rau kev nyab xeeb los ntawm cov xa khoom yog tus chij liab loj. Peb muaj peb tus kheej thaum muab cov khoom lag luam tsis yog xwb, tab sis ib qho kev pabcuam ua tiav uas suav nrog cov kev txhawb nqa logistical thiab kev nyab xeeb, ua kom muaj kev nyab xeeb paus Tuaj txog thiab yog muab kev nyab xeeb txhua kauj ruam ntawm txoj kev.

Puas yog nitrogen trifluoride ib lub tsev cog khoom roj? Nkag siab txog cov kev cuam tshuam ib puag ncig.

Nws yog qhov tseem ceeb heev los ua pob tshab txog ib puag ncig ntawm ib puag ncig ntawm Nf₃Cov. Yog lawm, Nitrogen trifluoride yog muaj zog Tsev Cog Khoom RojCov. Lub Vaj Huam Sib Pab Cuam Tshuam ntawm Huab Cua Hloov Chaw (IPCC) tau suav tias nws muaj lub peev xwm thoob ntiaj teb (GWP) ntau zaus ntau dua cov pa roj carbon ntau dua dosxide dhau lub sijhawm 100 xyoo. Qhov no yog qhov tseeb tias kev lag luam yuav siv tiag tiag.

Txawm li cas los xij, zaj dab neeg tsis xaus rau ntawd. Tus cuam ​​tshuam rau ib puag ncig Nyob ntawm tsis yog nyob rau ntawm cov roj muaj peev xwm, tab sis nyob rau ntau npaum li cas ntawm nws tau raug tso rau hauv cov cua. Raws li tau hais ua ntej, Nf₃ yog heev zog. Hauv ib qho niaj hnub Semiconductor qhov chaw, feem ntau ntawm cov Roj Siv yog noj lossis rhuav tshem thaum lub sijhawm tsim kev tsim khoom. Tus ntshav rhuav nws, thiab ib yam twg tsis txawj paus uas yog sab sab uas tau xa mus rau ib qho kev ua pov thawj. Cov kab ke no yog qhov zoo tshaj plaws, feem ntau ua rau muaj 99% ntawm seem Nf₃.

Kev lag luam hloov pauv los ntawm PFCS rau Nf₃, ua ke nrog kev siv dav hlau siv ntawm kev cog qoob loo ntawm kev ua phem, tau coj mus rau qhov kev txo qis hauv Tsev cog khoom roj emissions ib chav ntawm kev tsim khoom. Lav Saciconductor Cov Chaw Tsim Tshuaj thiab roj tus neeg xa khoom ua ke kom ntseeg tau tias kev npaj pa tawm yog tsawg. Qhov no suav nrog ua kom ua tiav cov txheej txheem kev ntxuav kom siv qhov tsawg tshaj plaws ntawm paus tsim nyog thiab tswj cov khoom pov tseg rau kev ua tau zoo tshaj plaws. Yog li, thaum Nf₃ yog muaj zog Tsev Cog Khoom Roj nyob rau hauv ib chav kuaj sim, nws lub ntiaj teb ib puag ncig hneev taw hauv Kev Tsim Txaj Semiconductor yog ua tib zoo tswj hwm thiab qis dua qhov kev xaiv nws hloov.

Dab tsi yog lub luag haujlwm ntawm cov roj roj rau loj soob sab semiconductor fab?

Nplai ntawm niaj hnub Kev Tsim Txaj Semiconductor yog kev ua tsis taus pa. Qhov loj tshaj plaws cov chaw, hu ua Mega-Fine, haus cov roj ntau ntawm cov roj. Rau qee qhov roj av, zoo li nitrogen, nws yog qhov ua tau zoo dua los ua lawv ncaj qha rau ntawm lub chaw tsis tshua muaj kev thauj khoom hauv ntau txhiab tus kheej. Qhov no yog hu ua ntawm lub xaib tiam neeg. Rau cov tshwj xeeb tshwj xeeb thiab reactive paus nyiam Nf₃, tus qauv txawv me ntsis yog tshwm sim: ntawm lub xaib kev ntxuav thiab tsom xam.

Thaum tag nrho NFUN Ntau Lawm Ntawm ib qho yog tsis tshua tsis tshua muaj vim nws cov nyom, cov neeg siv loj-cov neeg siv loj feem ntau muaj kev sib tw ntawm lub xaib Cov tshuab tswj cov roj. Ib qho khoom lag luam ntawm Nf₃ yog xa mus rau Fab, thiab tom qab ntawd cov kab ke no ua tiav qib kawg nkaus huv thiab kev txheeb xyuas zoo ua ntej ua ntej lub paus nkag mus rau cov cuab yeej kim. Qhov no muab cov txheej kawg ntawm kev tswj kom zoo, kom ntseeg tau tias qee qhov kev paug paug los ntawm cov kab xa khoom raug ntes. Qhov kev mus ze no sib txuas kev khwv nyiaj txiag ntawm kev yuav khoom ntawm kev yuav khoom zoo ntawm ntawm lub xaib tswj hwm.

Nkag siab txog cov qauv hloov zuj zus no yog qhov tseem ceeb. Ua ib tus neeg xa khoom, peb tau nthuav qhia peb cov kev pabcuam dhau ntawm kev siv cov thooj hniav thooj voos kheej kheej xwb. Tam sim no peb ua haujlwm nrog Ntiaj teb Saciconductor Cov Chaw Tsim Tshuaj Txhawm rau tsim qauv thiab siv cov roj hloov roj thiab cov kev daws teeb meem. Qhov no yuav suav nrog kev mob siab chaw tsim khoom muaj peev xwm rau ib tus neeg siv khoom loj, cov logistics tshwj xeeb, lossis kev koom ua ke nrog lawv ntawm lub xaib . Nws yog hais txog muab kev hloov pauv thiab txhim khu kev qha cov khoom siv uas tau raws li cov kev xav tau ntawm 21st-caug raug tsimCov. Nov yog ib feem tseem ceeb ntawm peb lub tswv yim, tshwj xeeb tshaj yog thaum cov neeg siv khoom nrog qhov tseem ceeb Ntau Lawm Peev Peev.


Rau ntawm cov khoom siv roj siv rau cov khoom lag luam soob

NFO PURIL tsis zoo li cas cuam tshuam ntau ntau yam nyob rau hauv chip manufacturing?

Nyob rau hauv Semiconductor ntiaj teb, "tawm los" yog txhua yam. Nws yog qhov feem pua ​​ntawm qhov zoo, ua haujlwm chips ua los ntawm ib qho silicon waferCov. Lub siab muaj txiaj ntsig zoo txhais tau tias muaj txiaj ntsig zoo; Ib qho tsawg tawm tuaj yeem ua kev kub siab. Lub purity ntawm txheej txheem gases, tshwj xeeb yog reasive paus nyiam Nf₃, muaj kev cuam tshuam ncaj qha thiab muaj kev cuam tshuam rau Ntau Lawm Tawm los.

Xav txog ib lam ua zoo li me me particle ntawm noo noo (h₂o) lossis lwm yam gASOUSE sib xyaw sib xyaw nrog cov Nf₃Cov. Thaum lub sij hawm rhiab thiab cov txheej txheem ntawd lam ua tuaj yeem cuam tshuam nrog cov tshuaj tiv thaiv tshuaj lom neeg, ua rau muaj qhov tsis xws luag nyob hauv qhov nti ntawm lub voj voog. Nws yuav thaiv cov tus lwm yam, tawm cov khoom uas nws tsis yog, lossis ua rau overching, tshem tawm cov khoom siv ntau dhau. Ua li cas, lub txiaj ntsig ncig lub vojrcuital yuav swb nws qhov kawg xeem. Thaum koj ua ntau lab tus neeg transistors ntawm ib nti, txawm tias ib qho "tua neeg tsis xws luag" tshwm sim los ntawm ib qho lam ua tuaj yeem muab tag nrho cov nti tsis muaj txiaj ntsig.

Qhov no yog vim li cas peb thiaj txais kev nqis peev ntau hauv kev tswj hwm zoo. Los ntawm muab ntawv pov thawj, ultra-siab-purity Nf₃, peb muab peb cov neeg siv kev ntseeg siab tias tus paus yuav tsis yog ib qho ntawm qhov tsis xws luag. Tswjhwm lub siab ntawm txhua txhua tivthaiv nqes mus rau cov ntu-ib-billion qib kom ntseeg tau tias cov Cov txheej txheem tsim khoom yog ruaj khov thiab rov ua dua. Cov txheej txheem ruaj khov ua rau muaj kev paub tseeb thiab siab Ntau Lawm Tawm los, uas yog lub hom phiaj kawg rau txhua tus Semiconductor Chaw tsim tshuaj paus. Peb lub luag haujlwm ua tus xa khoom ntawm Cov Khoom Siv Purity High yog kom tshem tawm cov variables thiab muab ib qho khoom ntawm uncompromising zoo.

Dab tsi yuav tsum tau saib rau hauv nitrogen trifluoride tus neeg xa khoom?

Rau tus tub ceev xwm ua tiav zoo li Mark, xaiv cov xa khoom rau cov khoom tseem ceeb li Nf₃ Mus deb dhau ntawm kev sib piv cov nqi. Cov kev pheej hmoo ntawm kev koom tes tsis zoo-xa khoom qeeb, cov teeb meem zoo, kev sib txuas lus tsis zoo-tsuas yog siab dua. Raws li kuv kev paub dhau los, ntawm no yog qhov tseem ceeb yam los xav txog:

Ua ntej, txheeb xyuas cov txiaj ntsig zoo thiab cov ntawv pov thawj. Tus neeg xa khoom cia siab yuav muab ib daim ntawv pov thawj kev tsom xam (COA) nrog txhua cov zaub mov xa tuaj, nthuav qhia cov qib purity thiab teev txhua yam impurities. Lawv yuav tsum ua raws li cov qauv thoob ntiaj teb zoo li ISO 9001. Nug txog lawv lub peev xwm txheeb xyuas qhov muaj peev xwm. Lawv puas muaj cov khoom siv los kuaj cov impurities ntawm qib yuav tsum tau rau Semiconductor Cov ntawv thov?

Thib ob, muab cov kev ntseeg tau cov kev ntseeg tau thiab pob tshab. Tus xa khoom tuaj yeem ua rau pom kev ruaj khov logistics kom tiv thaiv qeeb? Lawv puas muaj redundant Ntau Lawm Peev Peev Txhawm rau kom muaj cov khoom siv khov kho? Kev sib txuas lus yog qhov tseem ceeb ntawm no. Koj cov khoom lag luam yuav tsum ua kom tau proactive, muab cov kev hloov kho tshiab ntawm cov zaub mov xa tuaj thiab tau npaj txhij muaj los teb cov lus nug. Qhov chaw ncaj qha no qhov mob ntawm qhov mob ntawm qhov tsis muaj peev xwm sib txuas lus.

Thaum kawg, nrhiav kev txawj ntse kev txawj ntse. Tus neeg xa khoom zoo tsis yog muag ib yam khoom; Lawv muab kev daws teeb meem. Lawv yuav tsum nkag siab koj cov ntawv thov thiab muaj peev xwm muab kev txhawb nqa kev. Lawv yuav tsum paub txog kev nyab xeeb, tuav, thiab txawm tias ib puag ncig ntawm ib puag ncig puag ncig Cov ntawv thov rojCov. Tus neeg xa khoom uas tuaj yeem ua tus khub paub yog qhov tseem ceeb tshaj ib tus neeg muag khoom. Qhov kev tshaj lij no yog lub hauv paus ntawm lub sijhawm ntev, muaj txiaj ntsig kev sib raug zoo. Peb siv zog ua tus khub rau tag nrho peb cov neeg siv khoom, muab cov ntaub ntawv tsis yog paus Tab sis kev thaj yeeb ntawm lub siab uas los nrog nws.


Tseem Ceeb Takaways

  • Cov cuab yeej tseem ceeb: Nitrogen trifluoride (nf₃) yog ib qho tshwj xeeb tseem ceeb paus siv rau ntshav etching thiab chamber tu nyob rau hauv lub samiconductor cov txheej txheem tsim khoom.
  • Kev ua haujlwm zoo dua: Nf₃ Muaj peev xwm ntau dua thiab muaj qhov qis dua ib puag ncig cov kev cuam tshuam ib puag ncig zoo dua li cov khoom siv PFC laus dua tshiab nws hloov, ua tsaug rau kev siv cov khoom loj niaj hnub.
  • Purity yog cov peev txheej: Lub ultra-siab huv ntawm Nf₃ yog tsis muaj kev sib ceg. Txawm tias cov impurities tuaj yeem ua rau tsis xws luag silicon wafer, drastically txo lub Ntau Lawm Tawm los thiab cov txiaj ntsig ntawm CHIPPT RAUG.
  • Kev nyab xeeb thiab tuav yog tus yuam sij: Thaum ruaj khov, Nf₃ yog cov tshuaj lom thiab oxidizing paus uas yuav tsum tau tuav tshwj xeeb, ntawv pov thawj thooj voos kheej, thiab sib sib zog nqus ntawm kev nyab xeeb raws kev nyab xeeb.
  • Kev xaiv cov khoom lag luam yog qhov tseem ceeb: Thaum xaiv ib Nf₃ Tus neeg xa khoom, ua ntej tshaj tawm tau zoo, muab cov tshuaj sib txuas lus, pob tshab sib txuas lus, thiab kev txawj ntse sib sib zog nqus ib leeg.