Hōʻike ka mea hana semiconductor ma nāʻano likeʻole o nāʻano likeʻole, hiki ke heluʻia i loko o nāʻano nuiʻekolu: ʻO nā mea kanu nui, ʻO nā mea kūʻai kūikawā, a me ka etching geries. ʻO kēia mau pahuhopu ka mea kiʻekiʻe loa e pale ai i ka paleʻana, hiki ke hoʻopau i ka hana a me ke kaʻina hana.

ʻO nā mea kanu nui

Nitron (n₂):

Role: E mālamaʻo N₂ i nā kumu he nui, me nā keʻena kaʻina hana e mālama ai i ka lewa o Semicorutor
ʻO nā leka hou: Hoʻohana pinepineʻiaʻo Nitrogen i ka halihali a mālama i nā waʻa silicon e hōʻemi i ka oxididation. ʻO konaʻano i loko o keʻano e pono aiʻaʻole ia e hana me nā mea'ē aʻe, e hana ana i ka kūpono no ka mālamaʻana i nā'ōnaehana hoʻomaʻemaʻe hoʻomaʻemaʻe.

Argon (ar):
Role: Ma kahi o kāna komoʻana i nā kaʻina hana plasma,ʻo Argon kahi mea hana ma nā kaʻina hana e pili ana i nā'ōnaehana i hoʻopaʻaʻia.
Nā leka hou: No ka mea,ʻaʻole ia e hana me ka hapa nui o nā mea waiwai, ua hoʻohanaʻiaʻo Argon no ka hoʻokaʻawaleʻana i nā mea kanu a iʻole e mālama ponoʻia.

Helium (he):
Role:ʻO nā waiwai a Heium e hana i ka maikaʻi loa no ka hoʻomaʻemaʻeʻana a mālama i nāʻano kaulike i nā kaʻina hana houʻana.
Nā leka hou: Hoʻohana pinepineʻia ia ma nā'ōnaehanaʻo Laser High-ikea no Lithography ma muli o konaʻano kūponoʻole e mālama i ke ala kūponoʻole.

Hydrogen (H₂):
Role: Ma waho o kāna noiʻana ma keʻano he mea kōkua,ʻo Hydrogen kekahi e hōʻoia i ka hoʻomaʻemaʻeʻana i kaʻili a hiki ke komo i nā hopena kaulike i ka wā epitaxy.
Nā leka hou:ʻO ka hoʻohanaʻana o ka hydrogen i ka waihoʻana o nā kiʻiʻoniʻoni e hiki ai i ka mana o nā mea kūʻai aku ma luna o nā mea kūʻai aku.

ʻO nā mea kūʻai kūikawā a me nā mea hana

Silane (Sih₄):
Hana: Ma waho o ka liloʻana i mea hou no ke kauʻana o Silicon, hiki ke hoʻohuiʻiaʻo Silane i kahi kiʻiʻoniʻoni e hoʻomaikaʻi i nāʻano uila.
Nā leka hou: pono kāna hana houʻana i ka hoʻomaikaʻiʻana ma muli o nā hopohopo palekana, e hui pū me ka ea a me ka oxygen paha.

Hihiona (Nh₃):
Role: Ma kahi o ka hanaʻana i nā kiʻi Nitride, he mea koʻikoʻiʻo Jonnia i ka hanaʻana i nā mea e hoʻonui ai i ka hōʻoia o Semiconduty.
Nā leka hou: Hiki iā ia ke komo i nā kaʻina hana e koi i nā waiwai nitrogen i loko o ka Silicon, ka hoʻomaikaʻiʻana i nā waiwai uila.

Phoephine (Ph₃), Arshine (Ashin), a diborane (b₂h₆):
Role:ʻaʻole pono kēia mau mea i nā mea e pono ai no ka doping akā he koʻikoʻi no ka hoʻokōʻana i nā waiwai uila i makemakeʻia ma nā polokalamu semicohon.
Nā leka hou:ʻO kā lākou mea e pono ai nā mea e pono ai i nā polokalamu palekana palekana a me nā'ōnaehana nānā i nā wahi kaʻahele i nā pilikia hana.

Etching a me ka hoʻomaʻemaʻe

Nā FlueroCobons (CF₄, SF₆):
Role: Hanaʻia kēia mau mea i nā kaʻina hana maloʻo, kahi e hāʻawi ai i nāʻano kiʻekiʻe e piʻi ai i nāʻano etching.
Nā leka hou: CF₄ a me SF₆ he mea nui ma muli o ko lākou hiki ke loaʻa i nā mea e pili ana i nāʻano hana likeʻole.

Chlorine (cl-) a me hydrogen fluoride (hf):
Role: Hāʻawiʻo Chlorine i nā hopena paʻakikī e piʻi ana,ʻoi aku ka nui o nā metala,ʻoiaiʻo ka hf he mea nui no ka laweʻana i ka silicon dioxide dooxide diol.
ʻO nā leka hou: Eʻae ka huiʻana o kēia mau wahi i ka weheʻana i nā wahi hana maikaʻi loa, e hōʻoia ana i nā papa hana ma hope.

Nutrgen Trifluoride (NF₃):
Role:ʻO NF₃ ka pivotal no ka hoʻomaʻemaʻeʻana o kaʻenehana i nā'ōnaehana cvd, e pane ana me nā mea haumia e mālama i ka hana maikaʻi.
Nā leka hou:ʻOiai e pili ana i nā hopohopo e pili ana i kāna Green Holdouse Gaslint

Oxygen (O₂):
Role:ʻO nā kaʻina o ka pahuhopu e hoʻomaʻamaʻaʻia e ka oxygen e hana i nā papa hana insentest
Nā leka hou:ʻo ka hana o ka oxygen ma ka hoʻonuiʻana i kaʻaeʻana i ka silicon e hana i nā'āpana sio₂ no ka hanaʻana.

Ke kū nei i nā kīwī ma Semicohonductor e hana nei

Ma kahi o nā mea i hoʻopaʻaʻia ma luna o nā mea i hoʻopaʻaʻia ma luna nei, e loaʻa ana nāʻano'ē aʻe i ka hana o ka semiconduructor, me nā:

Kānāwai huila. Ua hoʻohanaʻia ma kekahi mau hoʻomaʻemaʻe a me nā noi e like me nā noi, e pili ana i nā mea e pili ana i nā kumuwaiwai holomua.

Silicon Dioxide (siti₂): ʻOiaiʻaʻole he hau ma lalo o nā kūlana maʻamau, e hoʻohanaʻia nāʻano o Silicon Dioxide Dioxide Dioxide Dioxide Dioxide e hoʻohanaʻia i kekahi mau kaʻina hana.

Nā noʻonoʻo noʻonoʻo

Ke hoʻonui nui nei kaʻoihana Semiconductor ma ka hōʻemiʻana i ka hopena o ka kaiāulu e pili ana i ka hoʻohanaʻana i nāʻano likeʻole o nāʻano likeʻole. Ua alakaʻiʻia kēia i ka hoʻomohalaʻana o nā'ōnaehana hoʻokele waiwai a me kaʻimiʻana i nā wahi likeʻole e hiki ai ke hāʻawi i nā pōmaikaʻi likeʻole.

Hopena

Ua hoʻohanaʻia nā mea pāʻani ma Semiconductor e pāʻani ai i kahi hana koʻikoʻi ma ka hōʻoiaʻana i ka pololei a me ka maikaʻi o nā kaʻina hana. E like me ke aʻoʻana o kaʻenehana, keʻano mau kaʻenehana semiconductor no nā hoʻomaikaʻiʻana i ka mīkini a me ka hoʻokeleʻana i ka palekana a me ka mālamaʻana i ka palekana a me ka mālamaʻana i ka palekana a me ka mālamaʻana i ka palekana.