Ke holo nei ka honua hou ma luna o nā chips. Mai ke kelepona i loko o kāu ʻeke a hiki i nā ʻōnaehana alakaʻi i ka ʻenekinia aerospace, ka liʻiliʻi ʻO ka polokalamu Semicondutory ʻo ia ka meʻe kaulana ʻole o ke au kikohoʻe. Akā, he aha ka meʻe ma hope o ka meʻe? ʻO ia ka honua i ʻike ʻole ʻia, maʻamau pinepine o nā kinoea kūikawā. ʻOiaʻiʻo, kemika fluorine hana nui i ka ʻO ka hana semiconductor kaʻina hana hiki ʻole ke hoʻololi.

Inā ʻoe e hoʻokele nei i kahi kaulahao hoʻolako a nānā ʻana paha i ka maikaʻi o ka huahana ma a semiconduc pā foundry, ua ʻike ʻoe he zero ka palena no ka hewa. Hiki ke hoʻopōʻino i ka holo ʻana o ka hana ʻana i ka nui miliona miliona o ka spike hoʻokahi. Luʻu hohonu kēia ʻatikala i ke kuleana o i loko o ka fluorine nā kinoea—no ke aha mākou e hoʻohana ai ia mau mea, ka kemika kikoʻī e hoʻokō pono ai, a me ke koʻikoʻi koʻikoʻi o ke kūpaʻa a me ka maʻemaʻe. E ʻimi mākou pehea kēia mau mea ʻO nā mīkini kiʻekiʻe kiʻekiʻe hoʻohana ʻia ma ettch a me nā ʻanuʻu deposition, a no ke aha ke ʻimi ʻana iā lākou mai kahi hoa hilinaʻi ʻo ia ka hoʻoholo koʻikoʻi hiki iā ʻoe ke hana i kēia makahiki.

No ke aha i hilinaʻi nui ai ka ʻoihana semiconductor i nā kinoea fluorine?

E hoomaopopo i ka Nā Hana Hana Semiconductor, pono ʻoe e nānā i ka pākaukau periodic. ʻO Silicon ka canvas, akā huhu ʻo ia ka pulupulu. ʻO ka nā mea hana semiconducor ʻO ke kaʻina hana e pili ana i ke kūkulu ʻana i nā papa o nā mea a laila e wehe pono iā lākou e hana i nā kaapuni. Kapa ʻia kēia kaʻina hana hoʻoneʻe ʻana.

Huhu ʻo ia ka mea electronegative loa. Ma nā ʻōlelo maʻalahi, pōloli loa ia i nā electrons. Ke hoʻolauna mākou kinoea fluorine Oole pūhui fluorinated i loko o ke keʻena plasma, ʻo nā ʻātoma fluorine e hana ikaika me ke silikoni a silika dioxide. Hoʻololi kēia ʻano hana kemika i ke kinoea paʻa (e like me ka silicon tetrafluoride) hiki ke hoʻokuʻu ʻia. Me ka ʻole o kēia reactivity kemika, ʻaʻole hiki iā mākou ke hana i nā ʻauwaha microscopic a me nā lua pili i koi ʻia no kēia manawa Nā Kūlana uila.

I hana nui-nuiʻO ka wikiwiki a me ka pololei nā mea a pau. Nā kinoea i loko o ka Fluorine e hāʻawi i nā kiʻekiʻe kiʻekiʻe etch e pono ai e hoʻomau i ka hoʻonui ʻana, me ka hāʻawi pū ʻana i ke koho e ʻoki i hoʻokahi mea me ka ʻole e hōʻino i ka papa ma lalo. He hana kaulike ia o kemika a me ka physics.

He aha ka mea e ʻokoʻa ai ka kemika fluorine no ka etching kiʻekiʻe?

E nīnau paha ʻoe, no ke aha e hoʻohana ʻole ai i ka chlorine a i ʻole bromine? Hana mākou, no kekahi mau papa. Eia naʻe, kemika fluorine hāʻawi i kahi pōmaikaʻi kūʻokoʻa i ka wā e hoʻopaʻa ai i nā mea pilikika. He ikaika loa ka pilina ma waena o ke silikoni a me ka fluorine. I ka manawa i loko o ka fluorine Paʻi ka plasma i ka wafer, he exothermic ka hopena a me ka manawa.

Hiki ke kilokilo i ka plasma. Ma kahi Ke kaʻina semicoronnu. keena, hoʻohana mākou i ka ikehu kiʻekiʻe i ke kinoea paʻa e like me Carbon Tetrafluoride (CF4) a i ʻole Sulfur Hexafluoride (SF6). Hoʻokaʻawale kēia i ke kinoea, hoʻokuʻu i ka reactive huhu radicals. Hoʻouka kēia mau radical i ka ʻili o ka Word.

"ʻO ka pololei o ka ettch wehewehe i ka hana o ka chip. Inā loli kou maʻemaʻe kinoea, e loli ana kāu etch rate, a hāʻule kāu hua."

Ke alakaʻi nei kēia i ka manaʻo o anisotropic ʻokiʻoki—ʻoki pololei i lalo me ka ʻai ʻole i ka ʻaoʻao. Ma ka hui ʻana huhu me nā mea ʻē aʻe Hoʻololi i nā hau, hiki i nā ʻenekinia ke hoʻomalu pono i ka ʻaoʻao o ka auwaha. Pono kēia mana i ko mākou neʻe ʻana i nā node liʻiliʻi (7nm, 5nm, a ma lalo), kahi i hāʻule ʻole ai kahi nanometer o ka deviation.

Pehea e holo ai nā kinoea i loko o ka hana semiconductor i nā kaʻina hana etch holomua?

Nā hana etch he mau mea paahana o ka mea hana. ʻElua ʻano nui: wet etch (hoʻohana i nā kemika wai like hydrogen fluoride) a me ka etch maloʻo (hoʻohana i ka plasma). Hou Advance Semiconcudal ʻaneʻane hilinaʻi wale nā nodes i ka etching plasma maloʻo no ka mea ʻoi aku ka pololei.

Ma kahi maʻamau kiʻi plasma kaʻina, a kinoea fluorinated hookomoia. E nānā kākou i nā ʻano like ʻole i hoʻohana ʻia:

• Carbon Tetrafluoride (CF4): ʻO ka mea hana no ka oxide etching.
• Octafluorocyclobutane (C4F8): Hoʻohana ʻia e waiho i kahi papa polymer ma nā ʻaoʻao ʻaoʻao o ka auwaha, e pale ana iā lākou i ka wā e kālai ʻia ai ka lalo.
• Sulfur Hexafluoride (SF6): ʻIke ʻia no ka wikiwiki ʻana o ke kalakala silika.

ʻO ka pilina ma waena o nā plasma A me ka pani he paʻakikī. Hoʻopili ia i ka pōʻino kino e nā ion a me ka hopena kemika e nā radical. ʻO ka mea hana semiconductor pono e hoʻomalu pono i ke kahe, kaomi, a me ka hui ʻana o kēia mau kinoea. Ina ka ʻO nā wahi kūikawā loaʻa i nā haumia e like me ka makū, hiki iā ia ke hana i ka waika hydrofluoric i loko o nā laina hāʻawi a i ʻole ke keʻena, e hana ai i ka corrosion a me nā pōʻino.

No ke aha ʻo Nitrogen Trifluoride ke aliʻi o nā noi hoʻomaʻemaʻe keʻena?

Oiai ke kalai a me ka hoomaemae ana e hele pū me ka lima, ʻo ka hoʻomaʻemaʻe ʻana i nā mea hana e like me ka mea nui e like me ka hana ʻana i ka wafer. I ka wā Kalepa Vipor Vapor (CVD), waiho ʻia nā mea e like me ke silikona a i ʻole tungsten ma luna o ka wafer. Eia naʻe, ua uhi kēia mau mea i nā paia o ke keʻena. Inā hoʻokumu ʻia kēia koena, ʻāwīwī a hāʻule i luna o nā wafers, me nā hemahema.

Komo Nitrogen Trifluoride (NF3).

I nā makahiki i hala aku nei, ua hoʻohana ʻia ka ʻoihana hale ʻōmaʻomaʻo fluorinated kinoea like C2F6 no ka hoʻomaʻemaʻe keʻena. Eia naʻe, ua lilo ʻo NF3 i mea maʻamau no nā hana hoʻomaʻemaʻe keʻena ma muli o kona kūlana kiʻekiʻe. Ke wāwahi ʻia i kahi kumu plasma mamao, hoʻopuka ʻo NF3 i ka nui o nā ʻātoma fluorine. Holoi kēia mau ʻātoma i nā paia o ke keʻena maʻemaʻe, e hoʻohuli i nā koena paʻa i ke kinoea i puhi ʻia i waho.

Nitrogen trifluoride ʻoi aku ka maikaʻi no ka mea ʻoi aku ka nui o ka hoʻohana ʻana (ʻoi aku ka nui o ke kinoea i hoʻohana maoli ʻia) a me nā hoʻokuʻu haʻahaʻa i hoʻohālikelike ʻia me nā mea kahiko. mea hoomaemae. No ka luna hoʻonohonoho, ʻo ia hoʻi ka liʻiliʻi o ka manawa haʻahaʻa no ka mālama ʻana a me ka wikiwiki wikiwiki.

ʻO wai nā pūhui fluorinated pono no ka hana nui?

'Ōlelo kaulahao lako semiconductor hilinaʻi ma kahi hīnaʻi kikoʻī nā kinoea fluorine. Loaʻa i kēlā me kēia me kahi "recipe" a i ʻole noi. Ma ka ʻO Jiangsu Huazhong Gas, ʻike mākou i kahi koi nui no kēia:

HE MEA pūhui fluorinated ke koko ola o hana nui-nui. Me ke kahe mau ʻole o kēia mau mea kinoea ma semiconductor hana, pau na laina. He maʻalahi kēlā. ʻO kēia ke kumu e nānā mau nei nā mea kūʻai aku e like me Eric Miller kahi hoʻokumu no ka hoopilikia ana.

No ke aha ke kinoea maʻemaʻe kiʻekiʻe ka iwi kuamoʻo o ka hua semiconductor?

ʻAʻole hiki iaʻu ke hoʻoikaika nui i kēia: ʻO ka maʻemaʻe nā mea āpau.

Ke kamaʻilio nei mākou ʻO nā mīkini kiʻekiʻe kiʻekiʻe, ʻaʻole mākou e kamaʻilio e pili ana i ka "papa hana" i hoʻohana ʻia no ka wili. Ke kamaʻilio nei mākou e pili ana i 5N (99.999%) a i ʻole 6N (99.9999%) maʻemaʻe.

No ke aha? No ka mea a ʻO ka polokalamu Semicondutory loaʻa nā hiʻohiʻona i ana ʻia i nā nanometer. Hiki i kekahi mole o ka haumia metala a i ʻole ka nui o ka makū (H2O) ke hoʻopōkole a pale paha i ka pili ʻana o kahi papa.

• Mākū: Pane me huhu e hoʻokumu i ka HF, kahi e hoʻopau ai i ka ʻōnaehana lawe kinoea.
• Oxygen: Hoʻokahe ʻole ʻia ke silika me ka ʻole.
• Nā metala kaumaha: E hoʻopau i nā waiwai uila o ka transistor.

Ma ke ʻano he mea hoʻolako, ʻo kā mākou hana e hōʻoia i ka kiʻekiʻe-maʻemaʻe Xenon Oole ʻEleke Papa Nitrous Oxide loaʻa iā ʻoe nā hālāwai koʻikoʻi nā hoʻomaʻemaʻeʻoihana. Hoʻohana mākou i ka chromatography kinoea holomua e ʻike trace incurities iho i nā ʻāpana o ka piliona (ppb). No ka mea kūʻai aku, ʻo ka ʻike ʻana i ka Certificate of Analysis (COA) ʻaʻole ia he pepa wale nō; ʻo ia ka hōʻoiaʻiʻo o kā lākou nā mea hana semiconducor ʻaʻole ia e kū i kahi pōʻino hua.

Pehea ka mālama ʻana o ka ʻoihana i nā hoʻokuʻu kinoea hoʻomehana honua a me GWP?

Aia kekahi ʻelepani i loko o ka lumi: ke kaiapuni. Nui nā kinoea fluorinated he kiʻekiʻe Hiki ke hoʻomehana honua (GWP). No ka laʻana, Sulfura HexfLhideIo (SF6) kekahi o ka nui loa kinoea hoʻomaʻemaʻe ikaika ʻike ʻia e ke kanaka, me ka GWP mau kaukani manawa kiʻekiʻe ma mua o CO2.

'Ōlelo ʻoihana hana semiconductor aia ma lalo o ke kaomi nui e hōʻemi i kona kapuaʻi kalapona. Ua alakaʻi kēia i ʻelua mau hoʻololi nui:

1. Hoʻemi: Fabs ke hoʻokomo nei i nā "pahu puhi" nui a i ʻole nā ​​mea holoi ma luna o ko lākou mau laina pau. Hoʻopau kēia mau ʻōnaehana i ka mea i hoʻokō ʻole ʻia Green Bear ma mua o ka hoʻokuʻu ʻia ʻana i ka lewa.
2. Pani: Ke ʻimi nei nā mea noiʻi i nā mea ʻē aʻe ettch nā kinoea me ka GWP haʻahaʻa. Eia nō naʻe, paʻakikī paʻakikī ka loaʻa ʻana o kahi mole e like me C4F8 a i ʻole SF6 me ka ʻole o ka hopena o ke kaiapuni.

Nitrogen trifluoride he ʻanuʻu i ka ʻaoʻao kūpono no ka hoʻomaʻemaʻe ʻana no ka mea ʻoi aku ka maʻalahi o ka haki ʻana ma mua o nā PFC kahiko. hoʻokuʻu inā e hana pono ana nā ʻōnaehana hoʻomaha. Hoemi ana ʻO nā Emission Gro Gas ʻaʻole ia he hana PR wale nō; he koi hoʻoponopono i ka EU a me US.

Pilikia anei ke kaulahao lako semiconductor i ka hemahema kinoea kūikawā?

Inā ua aʻo mai nā makahiki i hala iā mākou i kekahi mea, ʻo ia ka kahi hoʻokumu he palupalu. Nā mea hana semiconductor ua pilikia nā mea a pau mai neon a hiki i nā fluoropolymers.

Ka lako o kinoea fluorine a ʻo kāna mau mea i loaʻa ma muli o ka ʻeli ʻana o ka fluorspar (calcium fluoride). ʻO Kina kahi kumu honua nui o kēia mea maka. Ke piʻi aʻe nā ʻāʻī geopolitical a i ʻole nā ​​ala logistic e pili ana, hiki ke loaʻa kēia mau mea koʻikoʻi Hoʻololi i nā hau hāʻule, a piʻi nui nā kumukūʻai.

No ka mea kūʻai aku e like me Eric, ʻoiaʻiʻo ka makaʻu o "Force Majeure". No ka hoʻohaʻahaʻa ʻana i kēia, hoʻololi nā ʻoihana savvy i kā lākou mea hoʻolako. Ke ʻimi nei lākou i mau hoa pili i kā lākou iho pahu pahu iso a ua hoʻokumu i nā pūnaewele logistic. Pono i loko logistics he mea nui e like me ka maemae o ke kinoea. Hiki iā ʻoe ke loaʻa ka maʻemaʻe C4F8 kinoea ma ke ao nei, aka, ina ua paa ia ma ke awa, he mea ole ia i ka fab.

He aha nā kaʻina palekana no ka mālama ʻana i ka Hydrogen Fluoride a me nā mea ʻawaʻawa ʻē aʻe?

ʻO ka palekana ke kumu kumu o kā mākou ʻoihana. Nui i loko o ka fluorine ʻO nā kinoea he mea ʻawaʻawa, asphyxiants, a i ʻole ka hoʻoikaika nui ʻana. ʻO ka Hydrogen Fluoride (HF), hoʻohana pinepine ʻia i loko o ka wai etch a i hana ʻia ma ke ʻano he huahana, he mea weliweli loa. Komo ia i loko o ka ʻili a hoʻouka i ke ʻano iwi.

Pono ka hoʻomaʻamaʻa ikaika a me nā mea hana kūikawā no ka mālama ʻana i kēia mau mea.

• Nā Cylinders: Pono e hōʻoia ʻia ʻo DOT/ISO a nānā mau ʻia no ka ʻino o loko.
• Nā pāpaʻi: Hoʻohana ʻia nā kiwi diaphragm e pale i ka leakage.
• Nā mea nānā: Nā mea hana semiconductor uhi ʻia i nā mea ʻike kinoea e hoʻāla ai i nā ʻōuli ma kahi liʻiliʻi liʻiliʻi.

Ke hoʻopiha mākou i kahi cylinder me ʻEleke Papa Nitrous Oxide a i ʻole he etchant ʻawaʻawa, mālama mākou iā ia me he mea kaua i hoʻouka ʻia. Hoʻomaʻamaʻa mākou i ka cylinder i loko o loko e pale i nā ʻāpana a ua hoʻopaʻa ʻia ka valve a hoʻopaʻa ʻia. No kā mākou mea kūʻai, ʻike i ka ʻO nā kaʻa kaʻa a i ʻole hiki mai ka etchant i kahi palekana, ʻo ka hoʻopaʻa ʻana i hoʻopaʻa ʻia he mea hōʻoluʻolu nui.

He aha ka mea e hiki mai ana no nā mea i hoʻohana ʻia i ke kaʻina hana semiconductor?

'Ōlelo Palapala SemiconducTction ʻano ʻino ka palapala alanui. I ka neʻe ʻana o nā pahu i nā hale 3D e like me nā transistors Gate-All-Around (GAA), ka paʻakikī o ke kalai a me ka hoomaemae ana mahuahua. Ke ʻike nei mākou i kahi koi no nā mea ʻē aʻe kinoea fluorinated hui pū ʻia e hiki ke kālai i nā puka hohonu me ka pololei atomika.

ʻO ka Layer Layer Etching (ALE) He ʻenehana hou e hoʻoneʻe ana i hoʻokahi papa atomika i ka manawa. Pono kēia i ka dosing pololei loa o nā mea hoʻonaninani. Eia kekahi, ʻo ka pana ʻana no ka hana "'ōmaʻomaʻo" e alakaʻi i ka lawe ʻana i nā mea hou kemika fluorine e hāʻawi ana i ka hana like me ka haʻahaʻa GWP.

ʻO ka wā e hiki mai ana no ka poʻe hiki ke hana hou i ka synthesis kinoea a me ka hoʻomaʻemaʻe. E like me nā mea semiconductor evolve, pono e evolve nā kinoea i hoʻohana ʻia e hana ai.

Nā Kūleʻa Kil

• He mea nui ka Fluorine: Kemika fluorine ʻo ia ke kī e hiki ai ettch a maʻemaʻe ʻanuʻu i loko ʻO ka hana semiconductor.
• He Moi ka maemae: Maʻemaʻe kiʻekiʻe (6N) ʻaʻole hiki ke kūkākūkā e pale i nā hemahema a hōʻoia paʻa kaʻina hana.
• Nā ʻano kinoea: ʻO nā kinoea like ʻole e like me CF4, SF6, a me Nitrogen trifluoride lawelawe i nā kuleana kūikawā ma huahuai.
• Ka hopena o ke kaiapuni: Hooponopono ʻO nā Emission Gro Gas a hoemi ana he pilikia ʻoihana koʻikoʻi.
• Hoʻolako palekana: ʻO kahi paʻa kahi hoʻokumu a pono nā hoa hilinaʻi e pale aku i ka pau ʻana o ka hana.

Ma Jiangsu Huazhong Gas, maopopo iā mākou kēia mau pilikia no ka mea ke ola nei mākou i kēlā me kēia lā. Inā makemake ʻoe Xenon maʻemaʻe kiʻekiʻe no kāu kaʻina hana etch hou a i ʻole ka hāʻawi ʻana i nā kinoea ʻenehana maʻamau, eia mākou e kākoʻo i ka ʻenehana e kūkulu nei i ka wā e hiki mai ana.